CN102946054A - Plane solid high-voltage switch - Google Patents
Plane solid high-voltage switch Download PDFInfo
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- CN102946054A CN102946054A CN2012104044584A CN201210404458A CN102946054A CN 102946054 A CN102946054 A CN 102946054A CN 2012104044584 A CN2012104044584 A CN 2012104044584A CN 201210404458 A CN201210404458 A CN 201210404458A CN 102946054 A CN102946054 A CN 102946054A
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Abstract
The invention discloses a plane solid high-voltage switch for solving the unstable performance problem of the gas insulated high-voltage switch. The plane solid high-voltage switch comprises an insulating substrate, a positive electrode, a positive electrode welding plate, a negative electrode, a negative electrode welding plate, a trigger electrode, two trigger electrode welding plates and an insulating barrier, wherein the positive electrode, the positive electrode welding plate, the negative electrode, the negative electrode welding plate, the trigger electrode and the trigger electrode welding plates are positioned on the surface of the insulating substrate; the insulating barrier covers the positive electrode, the negative electrode and the trigger electrode positioned therebetween; the positive electrode welding plate and the positive electrode are connected; the negative electrode welding plate and the negative electrode are connected; and the two trigger electrode welding plates are connected with two ends of the trigger electrode. The safety and the reliability of the switch during use are improved.
Description
Technical field
The present invention relates to a kind of planar solid high-voltage switch gear.
Background technology
At present three-dimensional gas spark gap switch and vacuum switch are all take traditional machining as the basis, gas switch is compared with vacuum switch, its operating voltage range restriction is comparatively obvious, general gas flow switch voltage is not more than its Static Breakdown Voltage (SBV, Static breakdown voltage) 80%-90%, when operating voltage be lower than Static Breakdown Voltage 50% the time, switch is unreliable.Vacuum switch is complicated more a lot of than gas switch processing technology thereof, and is strict especially because vacuum switch requires vacuum degree, if there are residual gas or pollutant in inside, comparatively obvious on the impact of vacuum switch.Therefore the vacuum switch electrode material need to pass through meticulous degassed processing, and its production cost is higher.
Miniaturization, the microminiaturization of switch are the focuses that people study at present, and the miniaturization of high-voltage switch gear and microminiaturization are particularly important, and on the one hand, high-voltage switch gear miniaturization and microminiaturization can reduce system bulk, are convenient to the integrated of switch and other device.On the other hand, realize that batch production also is the direction that people make great efforts, mass production can improve the device consistency, the reliability of effect, the cost of reduction device.
Existing high-voltage switch gear is owing to adopt traditional mechanical processing technique, and volume is not easy to more greatly and the integrated use of other device, and place in circuit can produce larger inductance.Although the switch of some small volumes is arranged at present, these switches are worked under certain atmosphere, so the operating voltage range restriction is comparatively obvious, are subjected to sharp pounding and strong electromagnetic radiation environmental impact, and actual use occasion is restricted.
Summary of the invention
The invention provides a kind of planar solid high-voltage switch gear, to solve the problem of gas isolated high-voltage switch gear unstable properties.
In order to address the above problem, the invention discloses a kind of planar solid high-voltage switch gear, comprising:
Dielectric base, positive electrode, positive electrode welded plate, negative electrode, negative electrode welded plate, trigger electrode, two trigger electrode welded plates and insulating barrier;
Wherein, positive electrode, positive electrode welded plate, negative electrode, negative electrode welded plate, trigger electrode and trigger electrode welded plate are positioned at the dielectric base surface, and insulating barrier covers positive electrode, negative electrode and the trigger electrode between positive electrode and negative electrode; The positive electrode welded plate links to each other with positive electrode, and the negative electrode welded plate links to each other with negative electrode, and two trigger electrode welded plates link to each other with the two ends of trigger electrode respectively.
Preferably, described switch in use positive electrode welded plate connects capacitance cathode, and the negative electrode welded plate connects the electric capacity negative pole, and two welded plates of trigger electrode link to each other with the both positive and negative polarity that triggers power supply respectively.
Preferably, described positive electrode and negative electrode are symmetrical about trigger electrode.
Preferably, described dielectric base is silicon base, substrate of glass, quartz substrate or ceramic bases.
Preferably, described insulating barrier is solid dielectric insulation.
Preferably, described insulating barrier is polyimides, Parylene or epoxy resin.
Preferably, described positive electrode and negative electricity are very semicircle or trapezoidal;
Described positive electrode welded plate and negative electrode welded plate are square or circular;
Described trigger electrode is ribbon, and described trigger electrode welded plate is square or circular.
Preferably, the material of described positive electrode, negative electrode, trigger electrode and electrode welding plate is copper, aluminium or tungsten.
Preferably, described dielectric base is that the length of side is 1 centimetre square, and the minimum thickness of described dielectric base is 50 microns;
The minimum thickness of described insulating barrier is 30 microns;
The minimum thickness of described positive electrode welded plate, negative electrode welded plate and trigger electrode welded plate is 3 microns;
Minimum range between described positive electrode and the negative electrode is 50 microns.
Preferably, described positive electrode and negative electricity very radius be 1000 microns semicircle or to go to the bottom be 2000 microns trapezoidal;
Described positive electrode welded plate and negative electrode welded plate are that the length of side is the circle that 2000 microns square or diameter are 2000 microns;
Described trigger electrode welded plate is that the length of side is 500 microns square;
The minimum widith of described ribbon trigger electrode is 10 microns.
Compared with prior art, the present invention includes following advantage:
The present invention adopts solid dielectric insulation to be filled between the positive and negative electrode of switch, therefore shaken, the impact of the factors such as radiation and temperature is less, can be at high low temperature, reliably working under the adverse circumstances such as forceful electric power radiation, switch performance is stable, and the present invention has improved switch safety and reliability in use.
The present invention adopts micro electronmechanical process technology, so that volume of switch is less, is easy to and the integrated use of other devices, add circuit and can not produce larger inductance, and processing method is simple, and operation is less, realizes easily mass production, the production cost that reduced switch.The occasion of repid discharge when the present invention can be used for cutting off high pressure or needs switch triggering, such as: igniter, Exploding Foil are detonated etc.
Description of drawings
Fig. 1 is the schematic diagram of a kind of planar solid high-voltage switch gear of the embodiment of the invention;
Fig. 2 is the schematic diagram that a kind of dielectric base of embodiment of the invention surface forms semicircle positive and negative electrode and trigger electrode;
Fig. 3 is the schematic diagram that the another kind of dielectric base of embodiment of the invention surface forms trapezoidal positive and negative electrode and trigger electrode;
Fig. 4 is the application circuit of embodiment of the invention planar solid high-voltage switch gear.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Embodiment one:
With reference to Fig. 1, show the schematic diagram of a kind of planar solid high-voltage switch gear of the present invention, present embodiment specifically can comprise:
Dielectric base 101, positive electrode 102, negative electrode 103, positive electrode welded plate 104, negative electrode welded plate 105, trigger electrode 106, trigger electrode welded plate 107, trigger electrode welded plate 108 and insulating barrier 109;
Wherein, positive electrode 102, negative electrode 103, positive electrode welded plate 104, negative electrode welded plate 105, trigger electrode 106, trigger electrode welded plate 107 and trigger electrode welded plate 108 are positioned on the surface of dielectric base 101, and insulating barrier 109 covers positive electrode 102, negative electrode 103 and the trigger electrode 106 between positive electrode 102 and negative electrode 103; Positive electrode welded plate 104 links to each other with positive electrode 102, negative electrode welded plate 105 links to each other with negative electrode 103, two trigger electrode welded plates link to each other with the two ends of trigger electrode 106 respectively, particularly, trigger electrode welded plate 107 connects an end of trigger electrode 106, and trigger electrode welded plate 108 connects the other end of trigger electrode 106.
Need to prove, as long as insulating barrier 109 covers positive electrode 102, negative electrode 103 and the trigger electrode 106 between positive electrode 102 and negative electrode 103 in the present embodiment, but during actual fabrication, the insulating barrier part is often slightly a little bigger, also can cover a part of positive electrode welded plate 104, negative electrode welded plate 105, trigger electrode welded plate 107 and trigger electrode welded plate 108, the insulating barrier 109 shown in Fig. 1 dash area.In the Practical manufacturing, at first adopt the method for whirl coating or gas chemistry evaporation at whole dielectric base surface coverage one layer insulating, then adopt the method for micro electronmechanical processing to remove unwanted part, thus the positive and negative welding plate of exposed portions serve switch and trigger electrode welding plate part.Do not remove insulating barrier and play the effect that covers insulation.
Need to prove, insulating barrier is before the trigger electrode making alive, play the effect that cuts off high pressure, in addition, insulating barrier can also play protection against the tide, anti-pollution, the less effect of discharge temperature influence that makes switch gap, and in discharge process, owing to switch positive electrode, negative electrode surface are coated with insulating barrier, can avoid the excessive ablation of electrode.
In the present embodiment, positive electrode 102 and negative electrode 103 be about trigger electrode 106 symmetries, with trigger electrode as symmetry axis.And as can be seen from Figure 1, positive electrode, positive electrode welded plate and negative electrode, negative electrode welded plate are zhou duicheng tuxing.
Trigger electrode is between positive electrode and negative electrode in the present embodiment, and the distance of trigger electrode and positive electrode is identical with the distance of trigger electrode and negative electrode.Minimum range between positive electrode described in the present embodiment and the negative electrode is 50 microns, and the minimum widith of described ribbon trigger electrode is 10 microns.
In the present embodiment, positive electrode and negative electrode are semicircle, and positive electrode welded plate and negative electrode welded plate are square, and semicircular radius is the foursquare length of side half.Trigger electrode is ribbon in the present embodiment, and the trigger electrode welded plate is square.Need to prove that in the preferred embodiment of present embodiment, described positive electrode and negative electrode can also be for trapezoidal, described positive electrode welded plate and negative electrode welded plate can also be circle, and described trigger electrode welded plate can also be circle.For example, described positive electrode and negative electricity very radius be 1000 microns semicircle or to go to the bottom be 2000 microns trapezoidal; Described positive electrode welded plate and negative electrode welded plate are that the length of side is the circle that 2000 microns square or diameter are 2000 microns; Described trigger electrode welded plate is that the length of side is 500 microns square.Certainly described positive electrode and negative electrode can also be other special shapes in actual applications, such as: triangle, rhombus etc.
Particularly, for example shown in Figure 2, wherein positive electrode 202 and negative electrode 203 are semicircle, and described positive electrode welded plate 204 and described negative electrode welded plate 205 are circular, described semicircular radius equates that with the radius of described circle described trigger electrode welded plate is circular.
And for example shown in Figure 3, wherein positive electrode 302 and negative electrode 303 are trapezoidal, and described positive electrode welded plate 304 and described negative electrode welded plate 305 are square, and described trapezoidal going to the bottom equates that with the described foursquare length of side described trigger electrode welded plate is square.
Certainly positive electrode and negative electrode also can be for trapezoidal, and positive electrode welded plate and negative electrode welded plate also can be circle, and trapezoidal equal diameters of going to the bottom with described circle, and present embodiment does not limit this.
Need to prove that dielectric base can be silicon base, substrate of glass, quartz substrate or ceramic bases in the present embodiment.Insulating barrier is solid dielectric insulation in the present embodiment, for example polyimides, Parylene or epoxy resin.The material of positive electrode, negative electrode, trigger electrode and electrode welding plate can be copper, aluminium or tungsten in the present embodiment.In the present embodiment, positive and negative electrode, positive and negative electrode welding plate, trigger electrode, trigger electrode welded plate consist of by metallic diaphragm, and metallic diaphragm adopts the micro fabrication preparation, for example adopts magnetron sputtering, the method for plating or chemical vapor deposition.
Above-mentioned dielectric base is that the length of side is 1 centimetre square in the present embodiment, and the minimum thickness of dielectric base is 50 microns, and the minimum thickness of insulating barrier is 30 microns, and the thickness of insulating barrier is generally between 30 microns to 50 microns during Practical manufacturing.The minimum thickness of above-mentioned positive electrode welded plate, negative electrode welded plate and trigger electrode welded plate is 3 microns in the present embodiment.
Present embodiment adopts solid dielectric insulation to be filled between the positive and negative electrode of switch, therefore shaken, the impact of the factors such as radiation and temperature is less, can be at high low temperature, reliably working under the adverse circumstances such as forceful electric power radiation, switch performance is stable, and present embodiment has improved switch safety and reliability in use.
Embodiment two:
With reference to Fig. 4, show the application circuit of planar solid high-voltage switch gear of the present invention, present embodiment specifically can comprise:
The electric capacity 410 that connects when dielectric base 401, positive electrode 402, negative electrode 403, positive electrode welded plate 404, negative electrode welded plate 405, trigger electrode 406, trigger electrode welded plate 407, trigger electrode welded plate 408, insulating barrier 409 and switch use, triggering power supply 411 and electronic switch 412.
Wherein, positive electrode 402, negative electrode 403, positive electrode welded plate 404, negative electrode welded plate 405, trigger electrode 406, trigger electrode welded plate 407 and trigger electrode welded plate 408 are positioned on the surface of dielectric base 401, and insulating barrier 409 covers positive electrode 402, negative electrode 403 and the trigger electrode 406 between positive electrode 402 and negative electrode 403; Positive electrode welded plate 404 links to each other with positive electrode 402, negative electrode welded plate 405 links to each other with negative electrode 403, two trigger electrode welded plates link to each other with the two ends of trigger electrode 106 respectively, particularly, trigger electrode welded plate 407 connects an end of trigger electrode 406, and trigger electrode welded plate 408 connects the other end of trigger electrode 406.
The structure of present embodiment midplane solid high-voltage switch gear can be referring to the associated description of a kind of solid high-voltage switch gear shown in Figure 1 of embodiment, and present embodiment does not repeat them here.
Above-mentioned positive electrode welded plate 404 connects the positive pole of electric capacity 410, the negative electrode welded plate connects the negative pole of electric capacity 410, two welded plates of trigger electrode link to each other with the both positive and negative polarity that triggers power supply 411 respectively, particularly, trigger electrode welded plate 407 links to each other with the negative pole that triggers power supply 411, and trigger electrode welded plate 408 links to each other with the positive pole that triggers power supply 411.Before switch used, the electronic switch 412 that triggers power supply was in off-state.
When switch uses, positive electrode welded plate 404 connects the positive pole of electric capacity 410, the negative electrode welded plate connects the negative pole of electric capacity 410, in the gap, form highfield, before trigger electrode 406 making alives, this highfield is not enough to puncture the gap between positive electrode 402, the negative electrode 403, and electronic switch 412 is in off-state.Then add one with respect to the negative high voltage of negative electrode 403 to trigger electrode 406, under the effect of negative high voltage, can so that the gap between the gap between positive electrode 402 and the trigger electrode 406 and negative electrode 403 and the trigger electrode 406 puncture simultaneously, perhaps one of them gap at first punctures, thereby forms discharge channel between positive electrode 402, negative electrode 403.
In the present embodiment, above-mentioned electric capacity 410 is 0.22 microfarad, and capacitor charging voltage is 2500 volts, and in given discharge loop, peak current can reach 2500 amperes in the discharge loop, and be 30 nanoseconds discharge time, and the first current peak time was 250 nanoseconds.In same loop, the discharge performance of the performance of this planar solid switch and three-dimensional three-electrode spark crack switch is suitable, but the planar solid switch has larger volume advantage and is convenient to integrated characteristics.
Each embodiment in this specification all adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
More than to a kind of planar solid high-voltage switch gear provided by the present invention, be described in detail, used specific case herein principle of the present invention and execution mode are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (10)
1. a planar solid high-voltage switch gear is characterized in that, comprising:
Dielectric base, positive electrode, positive electrode welded plate, negative electrode, negative electrode welded plate, trigger electrode, two trigger electrode welded plates and insulating barrier;
Wherein, positive electrode, positive electrode welded plate, negative electrode, negative electrode welded plate, trigger electrode and trigger electrode welded plate are positioned at the dielectric base surface, and insulating barrier covers positive electrode, negative electrode and the trigger electrode between positive electrode and negative electrode; The positive electrode welded plate links to each other with positive electrode, and the negative electrode welded plate links to each other with negative electrode, and two trigger electrode welded plates link to each other with the two ends of trigger electrode respectively.
2. switch according to claim 1 is characterized in that:
The positive electrode welded plate connects capacitance cathode during use, and the negative electrode welded plate connects the electric capacity negative pole, and two welded plates of trigger electrode link to each other with the both positive and negative polarity that triggers power supply respectively.
3. switch according to claim 1 is characterized in that:
Described positive electrode and negative electrode are symmetrical about trigger electrode.
4. switch according to claim 1 is characterized in that:
Described dielectric base is silicon base, substrate of glass, quartz substrate or ceramic bases.
5. switch according to claim 1 is characterized in that:
Described insulating barrier is solid dielectric insulation.
6. switch according to claim 5 is characterized in that:
Described insulating barrier is polyimides, Parylene or epoxy resin.
7. switch according to claim 1 is characterized in that:
Described positive electrode and negative electricity are very semicircle or trapezoidal;
Described positive electrode welded plate and negative electrode welded plate are square or circular;
Described trigger electrode is ribbon, and described trigger electrode welded plate is square or circular.
8. switch according to claim 1, its characteristic is:
The material of described positive electrode, negative electrode, trigger electrode and electrode welding plate is copper, aluminium or tungsten.
9. switch according to claim 1 is characterized in that:
Described dielectric base is that the length of side is 1 centimetre square, and the minimum thickness of described dielectric base is 50 microns;
The minimum thickness of described insulating barrier is 30 microns;
The minimum thickness of described positive electrode welded plate, negative electrode welded plate and trigger electrode welded plate is 3 microns;
Minimum range between described positive electrode and the negative electrode is 50 microns.
10. switch according to claim 7 is characterized in that:
Described positive electrode and negative electricity very radius are 1000 microns semicircle or to go to the bottom be 2000 microns trapezoidal;
Described positive electrode welded plate and negative electrode welded plate are that the length of side is the circle that 2000 microns square or diameter are 2000 microns;
Described trigger electrode welded plate is that the length of side is 500 microns square;
The minimum widith of described ribbon trigger electrode is 10 microns.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104044584A CN102946054A (en) | 2012-10-22 | 2012-10-22 | Plane solid high-voltage switch |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012104044584A CN102946054A (en) | 2012-10-22 | 2012-10-22 | Plane solid high-voltage switch |
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| CN102946054A true CN102946054A (en) | 2013-02-27 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104659653A (en) * | 2015-02-10 | 2015-05-27 | 中国工程物理研究院化工材料研究所 | Micro energy-containing switch |
| CN106783391A (en) * | 2016-12-26 | 2017-05-31 | 中国工程物理研究院化工材料研究所 | High voltage planar construction of switch based on flexible manufacturing technique and preparation method thereof |
| CN107091599A (en) * | 2017-06-29 | 2017-08-25 | 中国工程物理研究院电子工程研究所 | A kind of integrated impact piece priming device |
| CN109449014A (en) * | 2018-10-19 | 2019-03-08 | 南京理工大学 | A kind of three electrode high-voltage switch gear of resistance to ablation plane and preparation method thereof |
| CN109802302A (en) * | 2019-01-15 | 2019-05-24 | 南京理工大学 | Three electrode switch chip of closed plane based on LTCC technique |
| CN113224645A (en) * | 2021-04-13 | 2021-08-06 | 南京理工大学 | Sealed parallel plane trigger spark gap switch based on PCB (printed Circuit Board) process and manufacturing method thereof |
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| US6977468B1 (en) * | 2003-02-03 | 2005-12-20 | Auburn University | Integrated spark gap device |
| US20070261584A1 (en) * | 2006-05-09 | 2007-11-15 | Nance Christopher J | Full function initiator with integrated planar switch |
| US7714240B1 (en) * | 2005-09-21 | 2010-05-11 | Sandia Corporation | Microfabricated triggered vacuum switch |
| CN101814701A (en) * | 2010-05-28 | 2010-08-25 | 上海交通大学 | Micro plane-type gas spark gap switch |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6977468B1 (en) * | 2003-02-03 | 2005-12-20 | Auburn University | Integrated spark gap device |
| US7714240B1 (en) * | 2005-09-21 | 2010-05-11 | Sandia Corporation | Microfabricated triggered vacuum switch |
| US20070261584A1 (en) * | 2006-05-09 | 2007-11-15 | Nance Christopher J | Full function initiator with integrated planar switch |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104659653A (en) * | 2015-02-10 | 2015-05-27 | 中国工程物理研究院化工材料研究所 | Micro energy-containing switch |
| CN106783391A (en) * | 2016-12-26 | 2017-05-31 | 中国工程物理研究院化工材料研究所 | High voltage planar construction of switch based on flexible manufacturing technique and preparation method thereof |
| CN106783391B (en) * | 2016-12-26 | 2019-04-23 | 中国工程物理研究院化工材料研究所 | High voltage planar construction of switch and preparation method thereof based on flexible manufacturing technique |
| CN107091599A (en) * | 2017-06-29 | 2017-08-25 | 中国工程物理研究院电子工程研究所 | A kind of integrated impact piece priming device |
| CN109449014A (en) * | 2018-10-19 | 2019-03-08 | 南京理工大学 | A kind of three electrode high-voltage switch gear of resistance to ablation plane and preparation method thereof |
| CN109802302A (en) * | 2019-01-15 | 2019-05-24 | 南京理工大学 | Three electrode switch chip of closed plane based on LTCC technique |
| CN113224645A (en) * | 2021-04-13 | 2021-08-06 | 南京理工大学 | Sealed parallel plane trigger spark gap switch based on PCB (printed Circuit Board) process and manufacturing method thereof |
| CN113224645B (en) * | 2021-04-13 | 2022-07-22 | 南京理工大学 | Sealed parallel plane trigger spark gap switch and manufacturing method thereof |
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Application publication date: 20130227 |