CN102944193B - Device and method for measuring phase and luminous intensity of splitting grating sub light beam array - Google Patents
Device and method for measuring phase and luminous intensity of splitting grating sub light beam array Download PDFInfo
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- CN102944193B CN102944193B CN201210444533.XA CN201210444533A CN102944193B CN 102944193 B CN102944193 B CN 102944193B CN 201210444533 A CN201210444533 A CN 201210444533A CN 102944193 B CN102944193 B CN 102944193B
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Abstract
The invention discloses a device and a method for measuring the phase and luminous intensity of a beam-splitting grating sub light beam array. The method is characterized in that incident laser which is sent out by a laser is split into two paths through a first beam splitter; one path of transmission light is collimated and expanded into a plane wave through a first collimation and expansion device, vertically irradiates onto a beam-splitting grating which is positioned on a front focal surface of a Fourier lens, is reflected by a first reflecting mirror, is then reflected by a second light splitter, and finally enters a charge coupled device (CCD) camera; and the other path of reflected light is reflected by a second reflecting mirror, passes through an optical switch firstly, then passes through an optical phase delayer, is changed into planer reference light after passing a second collimation and expansion device, transmits through a second beam splitter and vertically irradiates into the CCD camera. The CCD camera collects the intensity distribution of a light field and transmits the data to a computer to be processed. When the optical switch is switched on, the phase of the beam-splitting grating sub light beam array can be obtained through a phase shifting interferometry; and when the optical switch is switched off, the distribution of the splitting grating sub light beam array can be directly obtained.
Description
Technical field
The present invention relates to position phase and light intensity measurement system, a kind of particularly position phase of beam-splitting optical grating beamlet array and measuring device of light intensity and method, it can measure the phase relation between each order of diffraction of beam-splitting optical grating beamlet array time, also can obtain the light distribution of each order of diffraction time simultaneously.
Background technology
In numerous technical fields such as optical fiber communication, optical oomputing, image procossing and optical disc storage, often require the output input of single light signal being transformed into multi signal, optical beam splitting device can realize above-mentioned requirements.The method realizing optical beam-splitter is a lot, based on the beam-splitting optical grating of Fraunhofer diffraction principle design (see H.Dammann, K.
high-efficiency in-line multiple imaging by means of multiple phaseholograms [J] .Opt.Commun., 1971,3 (5): 312-315 and L.A.Romero, and F.M.Dickey, " Theory of optimal beam splitting by phase gratings.I.One-dimensional gratings; " J.Opt.Soc.Am.A 24,2280-2295 (2007) .) because efficiency is high, beam distribution homogeneity does not become one of the most effective beam splitting device at present by advantages such as incident intensity distribution influence.
Traditional beam-splitting optical grating, incident field can be divided into isocandela or have certain light intensity distribution beamlet array (see S.X.Li, G.Yu, C.Y.Zheng, and Q.F.Tan, " Quasi-Dammann grating withproportional intensity array spots; " Opt.Lett.33,2023-2025 (2008)), discussion for beam splitting effect is only limitted to the light intensity (light intensity uniformity or the consistance distributed with required certain light intensity) of beamlet array, and is worth not discussion mutually for the position of beamlet array.The development of technology is worth mutually for the position of beam-splitting optical grating beamlet array and it is also proposed requirement, such as based in the coherently combined of diffraction grating (see Yan Aimin, Liu Li people, Dai Enwen, Sun Jianfeng. coherent array laser inverse Dammann [Z] .CN101592783, 2009.), the processing of phase compensator be based on beam-splitting optical grating beamlet position phase array between phase relation (see A.Yan, L.Liu, E.Dai etal..Simultaneous beam combination and aperture filling of coherent laser arrays byconjugate Dammann gratings [J] .Opt.Lett., 2010, 35 (8): 1251-1253 and D.Paboeuf, F.Emaury, S.de Rossi, R.Mercier, G.Lucas-Leclin, and P.Georges, " Coherent beamsuperposition of ten diode lasers with a Dammann grating, " Opt.Lett.35, 1515-1517 (2010)).Need measurement beam-splitting optical grating beamlet array being carried out to position phase and light distribution at present.
Summary of the invention
The object of the present invention is to provide a kind of position phase of beam-splitting optical grating beamlet array and the measurement mechanism of light intensity and method, this device can be measured the position phase of beam-splitting optical grating beamlet array and light intensity, can evaluate beam-splitting optical grating from position phase and light intensity two aspect simultaneously.
Technical solution of the present invention is as follows:
A kind of position phase of beam-splitting optical grating beamlet array and the measurement mechanism of light intensity, its feature is that its formation comprises: the incident laser that laser instrument sends is divided into transmitted light and reflected light through the first beam splitter: described transmitted light carries out after collimator and extender becomes plane wave through the first collimator and extender device, vertical irradiation is positioned at the beam-splitting optical grating to be measured of fourier lense front focal plane, after the first catoptron reflection, again through the second dichroic mirror, finally enter CCD camera, described CCD camera is positioned at the back focal plane of described fourier lense, and this CCD camera is connected with computing machine; Described reflected light, after the second catoptron reflection, first by photoswitch, then passes through optical phase delay device, then by becoming Plane reference light after the second collimator and extender device, transmitted through the CCD camera described in the second spectroscope vertical incidence.
Utilize the measurement mechanism of above-mentioned beam-splitting optical grating beamlet array position phase and light intensity to carry out the measuring method of position phase and light intensity, its feature is that the method comprises the following steps:
1. beam-splitting optical grating to be measured is placed in described fourier lense front focal plane;
2. open photoswitch, two-way light is interfered at described CCD camera receiving plane, the optical phase delay device travel(l)ing phase described in adjustment
wherein i=1,2,3,4, CCD camera collection four interference image data are also transferred in computing machine and save as I respectively
1, I
2, I
3, I
4;
3. computing machine is according to following formula
calculate the position phase of corresponding beam-splitting optical grating beamlet array
4., when measuring beam-splitting optical grating beamlet array light intensity, close photoswitch, the light intensity data of described CCD camera collection is the distribution of the light intensity of beam-splitting optical grating beamlet array to be measured.
Technique effect of the present invention:
The present invention proposes to measure mutually beam-splitting optical grating beamlet array position first, give measurement mechanism and the method for a kind of beam-splitting optical grating beamlet array position phase and light intensity, it can measure the phase relation between each order of diffraction of beam-splitting optical grating beamlet array time, also can obtain the relative light intensity of each order of diffraction time simultaneously.
Accompanying drawing explanation
Fig. 1 is the block diagram of beam-splitting optical grating beamlet array position phase of the present invention and measuring device of light intensity;
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
First consult Fig. 1, Fig. 1 is beam-splitting optical grating beamlet array position phase of the present invention and measuring device of light intensity block diagram.The incident laser that laser instrument 1 sends is divided into transmitted light and reflected light two-way through the first beam splitter 2: road transmitted light vertical irradiation after the first collimator and extender device 3 is positioned at the beam-splitting optical grating 4 of fourier lense 5 front focal plane, after fourier lense 5 converts, described beam-splitting optical grating 4 and CCD camera 8 are placed on the front and back focal plane of fourier lense 5 respectively.Reflect through the first catoptron 6, then through reflexing to the second beam splitter 7 of the first mirror parallel the CCD camera 8 being arranged in fourier lense back focal plane, this road light can obtain the optical field distribution of each order of diffraction time of beam-splitting optical grating 4 at fourier lense 5 back focal plane;
When measurement beam-splitting optical grating 4 beamlet array position phase time, an other road reflected light of the first beam splitter 2 is after second catoptron 9 parallel with the first beam splitter reflects, now opened by photoswitch 10(), then by optical phase delay device 11, then by after the second collimator and extender device 12 as Plane reference light, transmitted through the second beam splitter 7, finally impinge perpendicularly on CCD camera 8 and the light field of each order of diffraction of beam-splitting optical grating 4 obtained with first via light time is interferenceed; Optical phase delay device 11 moves four phase places
cCD camera 8 gathers the interference optical field of four two-way light, and to be transferred in computing machine 13 and to save as I respectively
1, I
2, I
3, I
4, and according to formula
calculate the position phase of beam-splitting optical grating 4 at the beamlet array of fourier lense 5 back focal plane
When measuring beam-splitting optical grating 4 beamlet light distribution, the photoswitch 10 in the second tunnel light path is closed, and does not now have reference light, and the light distribution that CCD camera 8 collects is the light distribution of beam-splitting optical grating 4 beamlet array.
Described laser instrument 1 is necessary for the laser instrument that can produce beam-splitting optical grating 4 operation wavelength.
The related description of described beam-splitting optical grating to be measured 4 is as follows:
Beam-splitting optical grating 4 to be measured be a kind of a branch of incident light can be divided into concrete certain light distribution beam array and there is the diffraction optical element of periodic amplitude transmittance function.Its amplitude transmittance can be written as:
Wherein, T
gfor the transmittance function of whole grating, t
gfor the amplitude transmittance function in single cycle, Tx
,t
yfor the cycle of grating on x, y direction.Its (m, n) level Fourier spectrum is
c
mnfor plural number, its value is determined by the transmittance function of beam-splitting optical grating, the light intensity square being beam-splitting optical grating (m, the n) order of diffraction time of its absolute value, and the position that its argument value is beam-splitting optical grating (m, the n) order of diffraction time is worth mutually.
The present invention proposes to be worth mutually its position to measure first, and gives a kind of measuring method, and the position that the method can measure array of light spots is simultaneously worth and light intensity value mutually.The detailed derivation of the present invention's formula used is as follows:
Assuming that beam-splitting optical grating 4 in the field distribution of the spectrum of fourier lense 5 back focal plane (CCD camera 8 face) is
wherein a
g,
be respectively amplitude and the position phase of beam-splitting optical grating 4 beamlet array.Reference light in the optical field distribution of CCD camera 8 is
wherein
for the phase shift that optical phase delay device 10 produces, a
r,
be respectively amplitude and the position phase of reference light.Optical field distribution after two light are concerned with is U
all=U
g+ U
r, light distribution is:
because adopting parallel reference light herein, so above-mentioned formula can be reduced to:
wherein I
a=a
g 2+ a
r 2, I
b=2a
ga
r.
Optical phase delay device 10 is mobile four position phases respectively:
i=1,2,3,4.CCD camera 8 gathers four images and preserves I respectively
1, I
2, I
3, I
4.
According to trigonometric function relation,
Through simple operation
Finally can obtain:
Thus, we obtain the computing formula of beam-splitting optical grating 4 beamlet array phase mehtod.
Now be worth with light intensity value for specific embodiment mutually to measure the position being applicable to 5 × 5 beam splitting Darman raster beamlet arrays of 632.8nm wavelength, further describe the present invention, but should not limit the scope of the invention with this.
The beam of laser of incident 632.8nm can be divided into aplanatic 5 × 5 dot matrix by 5 × 5 beam splitting Darman rasters, and the order of diffraction time of its correspondence is (m, n), and wherein m, n are respectively m=-2, and-1,0,1,2; N=-2 ,-1,0,1,2; These 25 orders of diffraction time have identical light distribution, and table 1 be the secondary notional phase values of these 25 orders of diffraction.
The wavelength of laser instrument is the helium-neon laser of 632.8nm.Its light sent is divided into two-way through the first beam splitter: transmitted light path is after collimator and extender mirror collimator and extender becomes directional light, vertical irradiation is placed on 5 × 5 beam splitting Darman rasters of fourier lense front focal plane, after fourier lense conversion, through the first mirror reflection to the second beam splitter, and by the second beam splitter reflection in CCD camera, and optical field distribution is the Fourier spectrum Ug of 5 × 5 beam splitting Darman rasters
;when the position of measurement 5 × 5 beam splitting Darman raster beamlet array is worth mutually, open photoswitch, through the light of the first beam splitter reflection, the second catoptron reflection through being parallel to each other with it, after photoswitch, cross optical phase delay device, then after the second collimator and extender mirror collimator and extender as Plane reference light U
r, through the second beam splitter, the spectrum of the beam-splitting optical grating obtained with first via light is interfered mutually at CCD camera receiving plane (back focal plane of fourier lense).
Optical phase delay device 10 is mobile four position phases respectively:
i=1,2,3,4.CCD camera 8 gathers four images and preserves I respectively
1, I
2, I
3, I
4.Last according to formula
obtain the phase mehtod of 5*5 beam-splitting optical grating beamlet array.
When measuring beam-splitting optical grating beamlet array light distribution, photoswitch in the second tunnel light path is closed, and does not now have reference light, can directly obtain in CCD face beam-splitting optical grating beamlet array light distribution I
g.
Table 15 × 5 beam splitting Darman raster position phase value distribution theory value
| The order of diffraction time | -2 | -1 | 0 | 1 | 2 |
| -2 | -1.8206π | -0.8624π | -0.9103π | -0.9582π | 0 |
| -1 | -0.8624π | 0.0957π | 0.0479π | 0 | 0.9582π |
| 0 | -0.9103π | 0.0479π | 0 | -0.0479π | 0.9103π |
| 1 | -0.9582π | 0 | -0.0479π | -0.0957π | 0.8624π |
| 2 | 0 | 0.9582π | 0.9103π | 0.8624π | 1.8206π |
Claims (2)
1. the position phase of a beam-splitting optical grating beamlet array and the measurement mechanism of light intensity, it is characterized in that its formation comprises: the incident laser that laser instrument (1) sends is divided into transmitted light and reflected light through the first beam splitter (2): described transmitted light carries out after collimator and extender becomes directional light through the first collimator and extender device (3), vertical irradiation is positioned at the beam-splitting optical grating (4) to be measured of fourier lense (5) front focal plane, after the first catoptron (6) reflection, reflect through the second spectroscope (7) again, finally enter CCD camera (8), described CCD camera (8) is positioned at the back focal plane of described fourier lense (5), this CCD camera (8) is connected with computing machine (13), described reflected light is after the second catoptron (9) reflection, first by photoswitch (10), then by optical phase delay device (11), then Plane reference light is become, transmitted through the CCD camera (8) described in the second spectroscope (7) vertical incidence by after the second collimator and extender device (12).
2. utilize the measurement mechanism of the beam-splitting optical grating beamlet array position phase described in claim 1 and light intensity to carry out the measuring method of position phase and light intensity, it is characterized in that the method comprises the following steps:
1. beam-splitting optical grating to be measured (4) is placed in described fourier lense (5) front focal plane;
2. open photoswitch (10), two-way light is interfered at described CCD camera (8) receiving plane, and optical phase delay device (11) travel(l)ing phase described in adjustment is respectively
wherein i=1,2,3,4, described CCD camera (8) gathers interference image data totally four times and be transferred in computing machine (13) and save as I respectively respectively
1, I
2, I
3, I
4;
3. computing machine (13) utilizes following formulae discovery to go out the position phase of corresponding beam-splitting optical grating (4) beamlet array
4. when measuring beam-splitting optical grating (4) beamlet array light intensity, close photoswitch (10), the light intensity data that described CCD camera (8) gathers is the distribution of the light intensity of beam-splitting optical grating to be measured (4) beamlet array.
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| CN102087503A (en) * | 2011-01-11 | 2011-06-08 | 浙江师范大学 | Double-random-phase optical color image encryption device and method |
| CN201945812U (en) * | 2011-01-11 | 2011-08-24 | 浙江师范大学 | Double-random-phase encryption device for optical color image |
| CN102360091A (en) * | 2011-09-28 | 2012-02-22 | 中国科学院上海光学精密机械研究所 | Equipotential equal light intensity beam splitting Dammam optical grating and manufacturing method thereof |
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| CN101634594A (en) * | 2009-09-01 | 2010-01-27 | 中国科学院上海光学精密机械研究所 | Phase measurement device of beam splitter |
| CN102087503A (en) * | 2011-01-11 | 2011-06-08 | 浙江师范大学 | Double-random-phase optical color image encryption device and method |
| CN201945812U (en) * | 2011-01-11 | 2011-08-24 | 浙江师范大学 | Double-random-phase encryption device for optical color image |
| CN102360091A (en) * | 2011-09-28 | 2012-02-22 | 中国科学院上海光学精密机械研究所 | Equipotential equal light intensity beam splitting Dammam optical grating and manufacturing method thereof |
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