CN102937418A - Scanning type object surface three-dimensional shape measurement method and device - Google Patents
Scanning type object surface three-dimensional shape measurement method and device Download PDFInfo
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Abstract
The invention relates to a scanning type object surface three-dimensional shape measurement device which is composed of a measurement head, a displacement table and a computer, wherein the computer is respectively connected with the measurement head and the displacement table by data lines; the measurement head is composed of a laser, a scanning device and an imaging device; a predetermined included angle is kept between the laser and an optical axis of the imaging device; the laser and the imaging device are placed at the same side of the scanning device; the scanning device comprises a motor, a multi-faceted rotating mirror and an angle encoder; the multi-faceted rotating mirror and the angle encoder are driven by the motor to rotate at high speed; and the imaging device comprises an imaging lens and a camera. The invention relates to a scanning type object surface three-dimensional shape measurement method comprising three steps. The measurement method is high in speed, large in measurement scope, high in precision and the like, and can be used for three-dimensional shape measurement of the surface of general objects.
Description
Technical field
The present invention relates to a kind of scan-type body surface three-dimensional topography measurement method and device, the ultimate principle of this device is to utilize laser triangulation, can realize noncontact optical measurement, can be used for the measuring three-dimensional morphology of general body surface.The invention belongs to the optical three-dimensional measurement technical field.
Background technology
Laser triangulation is widely used in the numerous areas such as measuring three-dimensional morphology, reverse-engineering and quality testing as typical non-contact optical active method for three-dimensional measurement.Laser triangulation can only be measured a point at every turn, therefore need to take some measures the topography measurement of realizing whole object.Common measure comprises: beam flying, ohject displacement and beam flying such as are combined at the method with ohject displacement.Common beam flying mode comprises: vibration mirror scanning method, AOD acousto-optical device scanning method, multiple surface rotating mirror scanning method etc.Vibration mirror scanning method sweep velocity is restricted, and the sweep limit of AOD acousto-optical device scanning method is less, all can't realize simultaneously high-velocity scanning on a large scale.
The present invention uses multiple surface rotating mirror to beam flying, and the simultaneously motion of binding object has realized the measurement of high-velocity scanning on a large scale.
Summary of the invention
The object of the present invention is to provide a kind of body surface three-dimensional topography measurement device that combines with movement of objects based on the beam flying of laser triangulation, this measurement mechanism can realize at a high speed, on a large scale, high precision body surface three-dimensional topography measurement.
1) a kind of scan-type body surface three-dimensional of the present invention topography measurement device, it is comprised of measuring head, computing machine and displacement platform, and the position annexation between them is that computing machine is connected with displacement platform with measuring head respectively by data line.
Described measuring head is comprised of laser instrument, scanister and imaging device, and the position annexation between them is to keep predetermined angle between the optical axis of laser instrument and imaging device, is positioned over the homonymy of scanister.This laser instrument is visible light semiconductor laser.This scanister is comprised of motor, multiple surface rotating mirror, angular encoder; Relation is therebetween: driven by motor multiple surface rotating mirror and angular encoder High Rotation Speed; Utilize the characteristic of multiple surface rotating mirror, realized that the direction of scanning is vertical with movement direction of object to the high speed in moving object cross section periodic scan on a large scale; Utilize angular encoder, can read in real time the angle of laser beam deflection.This motor is high-speed servo motor; This multiple surface rotating mirror is the high precision multiple surface rotating mirror of customization; This angular encoder is the high precision incremental optical-electricity encoder; This imaging device is comprised of lens and camera, and relation is therebetween: for assurance device has the larger depth of field, the angle between laser beam, camera imaging plane and the optical axis satisfies certain condition (referring to Fig. 1).Specifically describe as follows: establishing the focal length of lens is f, and laser spot A is m to lens distance, and the picture point A ' of A is n to lens distance; Laser beam, imaging plane and optical axis included angle are respectively α, β; The imaging device light path meets the following conditions:
m·tanα=n·tanβ
These lens are high-quality optical glass lens; This camera is the industrial digital camera.
Described computing machine is the high-performance digital machine; Computing machine receives view data from camera, from the anglec of rotation data of angular encoder and from the angular movement speed data of displacement platform; Computing machine is processed view data, extracts the position of picture point, calculates the three-dimensional appearance of object under test according to image point position, the anglec of rotation, movement velocity again.
Described displacement platform is the high-precision electric displacement platform.
As a kind of noncontact optical measurement method, the measurement mechanism light channel structure of invention is as described below: the light that laser instrument sends projects on the object under test through the reflection of multiple surface rotating mirror, diffuse reflection occurs at object in laser spot, and reflected light enters the imaging device imaging through the multiple surface rotating mirror reflection.This light channel structure can be realized synchronous scanning, and the visual field of camera can be with laser beam synchronous scanning when namely multiple surface rotating mirror rotated.The advantage of synchronous scanning is and can improves measuring accuracy by the instantaneous field of view that reduces camera, and do not affect the whole measurement range of device.The ultimate principle of the measurement mechanism of invention is laser triangulation (referring to Fig. 2).Laser triangulation is by the depth information of tested point with respect to the angle change calculations tested point of optical reference line skew generation, that is: imaging device according to the position of picture point, calculates the depth information of tested point to the laser spot imaging on the object under test.By the segmentation to picpointed coordinate, can obtain high accuracy depth information again.Owing to can obtain the depth information of a point at every turn, the method that the present invention combines with object of which movement by beam flying realizes the scanning to object.From the translational speed of the anglec of rotation of multiple surface rotating mirror and displacement platform, can obtain the azimuth information of tested point, the three-dimensional appearance that calculates body surface according to depth information and the azimuth information of each tested point.
2) a kind of scan-type body surface three-dimensional of the present invention topography measurement method, the method concrete steps are as follows:
Step 1: measuring head is installed in the displacement platform top, and testee is positioned on the displacement platform; Adjust the attitude of measuring head, so that vertical with the direction of motion of displacement platform from the direction of scanning of measuring head outgoing beam.The height of measuring head can be regulated according to the size of object under test and the requirement of measuring accuracy.
Step 2: computer control displacement platform setting in motion; To the measuring head energising, make laser instrument, scanister and imaging device in the measuring head in running order.That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder is measured the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after the multiple surface rotating mirror reflection; The camera real-time image acquisition.
Step 3: computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; Receive the speed data of displacement platform from displacement platform; The data real-time resolving that the computing machine basis receives goes out the three-dimensional appearance data of object under test, finishes measurement.
The measuring process of device is: displacement platform drives the object under test rectilinear motion, and multiple surface rotating mirror is high-speed rotation under the drive of motor; To the object periodic scan, the direction of scanning is vertical with movement direction of object after the multiple surface rotating mirror reflection for the light that laser instrument sends; The light of laser spot reflection enters the imaging device imaging through the multiple surface rotating mirror reflection; View data, the angle-data of angular encoder, the displacement platform that computing machine the receives camera fast data of moving calculate the three-dimensional appearance data of object automatically.
Measure coordinate system as shown in Figure 3, true origin O is based upon on the measuring head, and Z axis is parallel with displacement platform direction of motion, and X-axis and displacement platform plane parallel are set up right-handed coordinate system.Measured point P is designated as d to O point distance, and three-dimensional coordinate is designated as (x, y, z).Specific formula for calculation is:
z=vt
Wherein, p is the picpointed coordinate that is incident upon the laser spot imaging that P orders, a, b, θ
1, θ
2The structural parameters of measuring head,
Be the deflection angle of multiple surface rotating mirror, v is the displacement platform translational speed, and t measures the time interval that P is ordered from beginning to measure.
Advantage and effect: the major advantage of measurement mechanism of the present invention is that sweep velocity is fast, scope is large, has the larger depth of field, and measuring accuracy is high.The advantage of this method is simple to operate, needs hardly manual intervention.
Description of drawings
Fig. 1 is the position relationship between plane, lens place, camera imaging plane and the emitting laser light beam.
Fig. 2 is the laser triangulation schematic diagram.
Fig. 3 is for measuring coordinate system.
Fig. 4 is the apparatus structure block diagram.Wherein, solid line boxes represents measuring head, and black line represents that machinery or electrical equipment connect, and dotted arrow represents the light of measuring head outgoing, and dash-dot arrows represents the light of measuring head incident.
Symbol description is as follows among the figure:
The A laser spot; A ' laser spot is the imaging point on camera; α laser beam and optical axis included angle; β camera imaging plane and optical axis included angle; M laser spot A is to lens distance; N picture point A ' is to lens distance;
The deflection angle of multiple surface rotating mirror; X coordinate system X-axis; Y coordinate system Y-axis; Z coordinate system Z axis; The O coordinate origin; The P measured point.
1 laser instrument; 2 multiple surface rotating mirrors; 3 imaging lens; 4 cameras; 5 motors; 6 angular encoders; 7 computing machines; 8 displacement platforms; 9 imaging devices; 10 scanister; 11 measuring heads; 12 objects under test.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of measurement mechanism is described.
1) as shown in Figure 4, a kind of scan-type body surface three-dimensional of the present invention topography measurement device, it is comprised of measuring head, computing machine and displacement platform, and the position annexation between them is that computing machine is connected with displacement platform with measuring head respectively by data line.
Described measuring head is comprised of laser instrument, scanister and imaging device, and the position annexation between them is to keep predetermined angle between laser instrument and the imaging device, and is positioned over the homonymy of scanister.
This laser instrument is visible light semiconductor laser.This scanister is comprised of motor, multiple surface rotating mirror, angular encoder; Relation is therebetween: driven by motor multiple surface rotating mirror and angular encoder High Rotation Speed; Utilize the characteristic of multiple surface rotating mirror, realized that the direction of scanning is vertical with movement direction of object to the high speed in moving object cross section periodic scan on a large scale; Utilize angular encoder, can read in real time the angle of laser beam deflection.This motor is high-speed servo motor; This multiple surface rotating mirror is the high precision multiple surface rotating mirror of customization; This angular encoder is the high precision incremental optical-electricity encoder; This imaging device is comprised of lens and camera, and relation is therebetween: for assurance device has the larger depth of field, the angle between laser beam, camera imaging plane and the optical axis satisfies certain condition (referring to Fig. 1).Specifically describe as follows: establishing the focal length of lens is f, and laser spot A is m to lens distance, and the picture point A ' of A is n to lens distance; Laser beam, imaging plane and optical axis included angle are respectively α, β; The imaging device light path meets the following conditions:
m·tanα=n·tanβ
These lens are high-quality optical glass lens; This camera is the industrial digital camera.
Described computing machine is the high-performance digital machine; Computing machine receives view data from camera, from the anglec of rotation data of angular encoder and from the angular movement speed data of displacement platform; Computing machine is processed view data, extracts the position of picture point, calculates the three-dimensional appearance of object under test according to image point position, the anglec of rotation, movement velocity again.
Described displacement platform is the high-precision electric displacement platform.
As a kind of noncontact optical measurement method, the measurement mechanism light channel structure of invention is as described below: the light that laser instrument sends projects on the object under test through the reflection of multiple surface rotating mirror, diffuse reflection occurs at object in laser spot, and reflected light enters the imaging device imaging through the multiple surface rotating mirror reflection.This light channel structure can be realized synchronous scanning, and the visual field of camera can be with laser beam synchronous scanning when namely multiple surface rotating mirror rotated.The advantage of synchronous scanning is and can improves measuring accuracy by the instantaneous field of view that reduces camera, and do not affect the whole measurement range of device.The ultimate principle of the measurement mechanism of invention is laser triangulation (referring to Fig. 2).Laser triangulation is by the depth information of tested point with respect to the angle change calculations tested point of optical reference line skew generation, that is: imaging device according to the position of picture point, calculates the depth information of tested point to the laser spot imaging on the object under test.By the segmentation to picpointed coordinate, can obtain high accuracy depth information again.Owing to can obtain the depth information of a point at every turn, the method that the present invention combines with object of which movement by beam flying realizes the scanning to object.From the translational speed of the anglec of rotation of multiple surface rotating mirror and displacement platform, can obtain the azimuth information of tested point, the three-dimensional appearance that calculates body surface according to depth information and the azimuth information of each tested point.
2) a kind of scan-type body surface three-dimensional of the present invention topography measurement method, the method concrete steps are as follows:
Step 1: measuring head is installed in the displacement platform top, and testee is positioned on the displacement platform; Adjust the attitude of measuring head, so that vertical with the direction of motion of displacement platform from the direction of scanning of measuring head outgoing beam.The height of measuring head can be regulated according to the size of object under test and the requirement of measuring accuracy.
Step 2: computer control displacement platform setting in motion; To the measuring head energising, make laser instrument, scanister and imaging device in the measuring head in running order.That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder is measured the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after the multiple surface rotating mirror reflection; The camera real-time image acquisition.
Step 3: computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; Receive the speed data of displacement platform from displacement platform; The data real-time resolving that the computing machine basis receives goes out the three-dimensional appearance data of object under test, finishes measurement.
The measuring process of device is: displacement platform drives the object under test rectilinear motion, and multiple surface rotating mirror is high-speed rotation under the drive of motor; To the object periodic scan, the direction of scanning is vertical with movement direction of object after the multiple surface rotating mirror reflection for the light that laser instrument sends; The light of laser spot reflection enters the imaging device imaging through the multiple surface rotating mirror reflection; View data, the angle-data of angular encoder, the displacement platform that computing machine the receives camera fast data of moving calculate the three-dimensional appearance data of object automatically.
Measure coordinate system as shown in Figure 3, true origin O is based upon on the measuring head, and Z axis is parallel with displacement platform direction of motion, and X-axis and displacement platform plane parallel are set up right-handed coordinate system.Measured point P is designated as d to O point distance, and three-dimensional coordinate is designated as (x, y, z).Specific formula for calculation is:
z=vt
Wherein, p is the picpointed coordinate that is incident upon the laser spot imaging that P orders, a, b, θ
1, θ
2The structural parameters of measuring head,
Be the deflection angle of multiple surface rotating mirror, v is the displacement platform translational speed, and t measures the time interval that P is ordered from beginning to measure.
Before the measurement, at first measuring head is installed in the displacement platform top, adjusts the attitude of measuring head, so that vertical with the direction of motion of displacement platform from the direction of scanning of measuring head outgoing beam.The height of measuring head can be regulated according to the size of object under test and the requirement of measuring accuracy.
To the measuring head energising, make laser instrument, scanister and imaging device in the measuring head in running order.That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder is measured the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after the multiple surface rotating mirror reflection; The camera real-time image acquisition.
Object under test is placed on the displacement platform, and displacement platform drives the object under test motion, begins to measure.
Measuring head emitting laser scanning plane carries out one-dimensional scanning to object under test, and displacement platform drives the object under test motion and formed the second dimension scanning.
Computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; Receive the speed data of displacement platform from displacement platform; The data real-time resolving that the computing machine basis receives goes out the three-dimensional appearance data of object under test, finishes measurement.
Claims (2)
1. scan-type body surface three-dimensional topography measurement device, it is characterized in that: it is comprised of measuring head, computing machine and displacement platform, and computing machine is connected with displacement platform with measuring head respectively by data line;
Described measuring head is comprised of laser instrument, scanister and imaging device, keeps predetermined angle between the optical axis of laser instrument and imaging device, is positioned over the homonymy of scanister; This laser instrument is visible light semiconductor laser, and this scanister is comprised of motor, multiple surface rotating mirror, angular encoder; Driven by motor multiple surface rotating mirror and angular encoder High Rotation Speed; Utilize the characteristic of multiple surface rotating mirror, realized that the direction of scanning is vertical with movement direction of object to the high speed in moving object cross section periodic scan on a large scale; Utilize angular encoder, read in real time the angle of laser beam deflection; This motor is high-speed servo motor; This multiple surface rotating mirror is the high precision multiple surface rotating mirror of customization; This angular encoder is the high precision incremental optical-electricity encoder; This imaging device is comprised of lens and camera, and for assurance device has the larger depth of field, the angle between laser beam, camera imaging plane and the optical axis satisfies predetermined condition; Specifically describe as follows: establishing the focal length of lens is f, and laser spot A is m to lens distance, and the picture point A ' of A is n to lens distance; Laser beam, imaging plane and optical axis included angle are respectively α, β; The imaging device light path meets the following conditions:
m·tanα=n·tanβ
These lens are high-quality optical glass lens; This camera is the industrial digital camera;
Described computing machine is the high-performance digital machine; Computing machine receives view data from camera, from the anglec of rotation data of angular encoder and from the angular movement speed data of displacement platform; Computing machine is processed view data, extracts the position of picture point, calculates the three-dimensional appearance of object under test according to image point position, the anglec of rotation, movement velocity again;
Described displacement platform is the high-precision electric displacement platform.
2. scan-type body surface three-dimensional topography measurement method, the method concrete steps are as follows:
Step 1: measuring head is installed in the displacement platform top, and testee is positioned on the displacement platform; Adjust the attitude of measuring head, so that vertical with the direction of motion of displacement platform from the direction of scanning of measuring head outgoing beam, the height of measuring head is regulated according to the size of object under test and the requirement of measuring accuracy;
Step 2: computer control displacement platform setting in motion; To the measuring head energising, make laser instrument, scanister and imaging device in the measuring head in running order; That is, driven by motor multiple surface rotating mirror high-speed rotation, angular encoder is measured the angle that polygonal mirror rotates; Laser instrument sends laser beam, and light beam forms a scanning plane after the multiple surface rotating mirror reflection; The camera real-time image acquisition;
Step 3: computing machine receives the view data of camera, the angle-data of angular encoder from measuring head; Receive the speed data of displacement platform from displacement platform; The data real-time resolving that the computing machine basis receives goes out the three-dimensional appearance data of object under test, finishes measurement.
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