CN102896704A - Four side surface stripping and cutting device of cylinder casting ingot and method for cutting and processing into quadrangular-shaped workpieces - Google Patents
Four side surface stripping and cutting device of cylinder casting ingot and method for cutting and processing into quadrangular-shaped workpieces Download PDFInfo
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- CN102896704A CN102896704A CN2011103394618A CN201110339461A CN102896704A CN 102896704 A CN102896704 A CN 102896704A CN 2011103394618 A CN2011103394618 A CN 2011103394618A CN 201110339461 A CN201110339461 A CN 201110339461A CN 102896704 A CN102896704 A CN 102896704A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
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Abstract
The application relates to a four side surface stripping and cutting device of a cylinder casting ingot and a method for cutting and processing into quadrangular-shaped workpieces. The invention aims to reduce the production of cutting chips during the process of stripping and cutting the four side surface of the cylinder casting ingot to form the quadrangular-shaped casting ingot. The method newly sets a transverse swinging self-compensation mechanism of a periphery knife of the rotary cutting knives (91a, 91b) with relatively thin thickness which clamps a cutting device (1), and changes the cutting method of the casting ingot into the following semi-cutting method, that is, firstly pre-performing a cutting process of semi-grooving by using the rotary cutting knife (91a, 91b), making the casting ingot rotate, processing the remaining semi-groove by using the rotary cutting knife (91a, 91b), and cutting the side surface.
Description
Technical field
The present invention relates to a kind of shearing device and use described shearing device cylindric ingot casting piece to be processed into the method for quadrangular shape piece, described shearing device is that cylindric ingot casting piece is held on clamp mechanism, the cut-out that utilizes rotary cut-off knife to ream its four side is processed and is processed into quadrangular shape piece, and described clamp mechanism comprises to have makes cylindric ingot casting piece around fast headstock and the tailstock (tailstock) with encoder of the function of its rotation C axle rotation.
Background technology
The discoideus monocrystalline silicon substrate that is used for semiconductor substrate, the raw-material cylindric ingot casting piece of square shape monocrystalline silicon substrate that perhaps is used for the substrate of sun generating battery is to cut away czochralski method (the CZ method of utilizing, the C axle both ends of the surface of the monocrystalline silicon ingot casting that Czochralski method) generates, then it is held on the clamping device that comprises fast headstock with the function that makes its rotation and tailstock, grind the chapped shape of removing outer peripheral face through cylinder concavo-convex, then all cuttves cut into length 200mm in utilizing, 250mm, 400mm, 500mm, the length of 800mm etc., perhaps in addition line cutting (wire cut) is made the level and smooth cylindric monocrystalline silicon ingot casting piece of outer peripheral face and list marketing.
The level and smooth cylindric monocrystalline silicon ingot casting piece of described outer peripheral face is provided to the slice processing of utilizing multi-line cutting machine that the substrate of thinner thickness is carried out of next step.Perhaps, manufacturer offers solar cell substrate manufacturer by the ingot casting piece, four sides and four corner parts that utilize peripheral knives to ream the quadrangular shape piece that four sides process are carried out chamfer machining, and the multi-line cutting machine that utilizes that is provided to next step carries out the slice processing platform of slice processing to the substrate of thinner thickness.
Japanese Patent Laid-Open 2005-123527 communique (patent documentation 1) has proposed a kind of manufacture method of solar cell module, it is characterized in that:
When utilizing columned semiconductor monocrystal ingot casting manufacturing to consist of a plurality of semiconductor sections (semiconductor segment) of solar battery cell,
Utilize the axle orthogonal cross-section that described semiconductor monocrystal ingot casting is divided into certain thickness polylith wafer area, then on the first type surface of each wafer area, to be in about the center wafer point the first parallel parallel dividing line right of symmetric position, and similarly be in the second parallel parallel dividing line right of symmetric position about the center wafer point, set with mutually orthogonal form in the mode that the described first parallel dividing line the more described second parallel dividing line is longer, then make respectively based on the OBL first semiconductor section of the first segments area and based on second arc each polylith of semiconductor section of the second segments area, described the first segments area and described the second segments area are that the group's direction in the face of described first type surface by utilizing described parallel dividing line is divided three kinds of wafer segments area that described wafer area forms, namely, OBL the first segments area that comprises described center wafer point, arc second segments area corresponding with the long limit of this first segments area in the remaining area of described the first segments area, the segments area in the 3rd arc segments area corresponding with the minor face of this first segments area similarly
Only concentrate the first module based on described OBL the first semiconductor section, it is respectively clathrate at certain intervals along long side direction and short side direction arranges each polylith, make the first solar cell module, on the other hand,
Only concentrate the second unit based on described arc the second semiconductor section, described a plurality of the second semiconductor sections along arranging at certain intervals respectively each polylith with the first direction of string section quadrature and the second direction parallel with string section, are made the second solar cell module.
Again public table 2005/076333 communique of Japan Patent (patent documentation 2) has disclosed following method: cut away the C axle both ends of the surface of utilizing the monocrystalline silicon ingot casting that czochralski method (CZ method) generates, then described monocrystalline silicon ingot casting is held on and comprises fast headstock with the function that makes its rotation and the clamping device of tailstock, grind the chapped shape of removing outer peripheral face through cylinder concavo-convex, the crystal orientation of the C axle vertical direction of the level and smooth discoideus monocrystalline silicon ingot casting of outer peripheral face that utilizes infrared detector to read to obtain, utilize according to analyzing peak value that red symbol stroke line is specific to go out crystal orientation, utilize chip cutting machine (die saw) to cut into a plurality of along described red special symbols.
In addition, Japanese Patent Laid-Open 2009-233819 communique (patent documentation 3) has disclosed following technology: cut away the C axle both ends of the surface of utilizing the monocrystalline silicon ingot casting that czochralski method (CZ method) generates, then described monocrystalline silicon ingot casting is held on and comprises fast headstock with the function that makes its rotation and the clamping device of tailstock, grind the chapped shape of removing outer peripheral face through cylinder concavo-convex, utilize the X-ray analysis machine to read the crystal orientation of the C axle vertical direction of the level and smooth discoideus monocrystalline silicon ingot casting of the outer peripheral face that obtains, take described crystal orientation line as the attached red symbol of fiducial mark, utilize subsequently grinding stone to carry out the processing of directional plane (orientation flat) and/or recess along described red symbol line, then be provided to the slice processing of utilizing multi-line cutting machine that the substrate of thinner thickness is carried out.
The claim 1 of the application's patent applicant by Japan Patent Patent 2011-14761 specification (patent documentation 4) proposed four sides of following cylindric ingot casting piece and peeled off shearing device, as described cylindric ingot casting piece is cut off the method that is processed into quadrangular shape piece.
Shearing device is peeled off in a kind of four sides of cylindric ingot casting piece, and it is provided with:
A) work stage, it is arranged to come and go to left and right direction on the guide rail that is arranged at along left and right directions on the frame mobile;
B) clamp mechanism is equipped on a pair of fast headstock and tailstock on the described work stage discretely about it comprises;
C) driving mechanism, it makes and is loading the to left and right direction round movement of described work stage that frame props up the workpiece on described clamp mechanism; And
D) along the direction of observing described work stage from the face side of compound chamfer processing method and device, and from right direction toward left direction, be provided with:
E) load/unload station of cylindric ingot casting piece;
F) the position of readiness platform of described clamp mechanism, it is arranged on the behind of described load/unload station;
G) sheet cutting table is peeled off in the side of cylindric ingot casting piece, it clips the workpiece supporting axis (C axle) of described clamp mechanism, with a pair of peripheral knives (rotary cut-off knife), with described rotary cut-off knife diametral plane relatively to mode, and be in the more mode of the position of top so that rotary cut-off knife (instrument) axle center is positioned at the height and position of more described workpiece supporting axis, be provided with rotary cut-off knife (instrument) axle in front and back with respect to described guide rail; And
H) crystallization direction monitor station, its load port in described load/unload station (load port) position is provided with the crystallization direction detection machine of ingot casting piece.
In addition, in the claim 2 of described patent documentation 4, proposed to utilize described four sides to peel off shearing device, via following step, cylindric ingot casting piece chamfer machining has been become the method for prism-shaped ingot casting piece.
(1) utilizes the mechanism that moves into that is positioned on the load/unload station, to move into to have as the cylindric ingot casting piece of machined object (workpiece) by load port and make cylindric ingot casting piece around between the fast headstock and tailstock with encoder of the function of the rotation C axle of clamp mechanism rotation, described tailstock is advanced, cylindric ingot casting piece is held on clamp mechanism.
(2) utilize the sensor of the crystallization direction detection machine arrange away from the front side of the described cylindric ingot casting piece that is held, the crystal orientation of the cylindric ingot casting piece that the motor of mensuration by the fast headstock of clamping device rotates, utilize encoder to read the described C axle anglec of rotation on one side, the C axle is rotated a circle (360 degree), express the correlation diagram in the C axle anglec of rotation and the brilliant orientation of cylindric ingot casting agllutination of cylindric ingot casting piece.
(3) select unspecified angle (θ) in the encoder anglec of rotation of four represented expression crystal orientations, be that the mode of the positions (cutting off beginning C shaft position) of 45 degree makes the rotation of C axle so that described angle is positioned at respect to the encoder anglec of rotation of rotary cut-off knife footpath direction face, make the location, crystal orientation position of cylindric ingot casting piece.
(4) work stage of carrying described clamp mechanism is moved towards the direction of a pair of rotary cut-off knife of rotation, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife to surpass the front-back of cylindric ingot casting piece is processed.Carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid.
(5) then, utilize the servo motor (servo motor) of fast headstock, make the C axle 180 degree rotations of cylindric ingot casting piece.
(6) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric ingot casting piece, cut off the circular-arc side of the front and back of cylindric ingot casting piece.Carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid.
(7) then, utilize the servo motor of fast headstock, make the C axle 90 degree rotations of the cylindric ingot casting piece that cuts off two sides.
(8) the described work stage of carrying clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife to surpass the remaining front-back of cylindric ingot casting piece is processed.Carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid.
(9) then, utilize the servo motor of fast headstock, make the C axle 180 degree rotations of cylindric ingot casting piece.
(10) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric ingot casting piece, cut off the circular-arc side of the front and back of cylindric ingot casting piece, be processed into quadrangular shape ingot casting piece.Carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid.
On the other hand, Japan Patent special table flat 10-500194 communique (patent documentation 5) and No. 5484208 specification of United States Patent (USP) (patent documentation 6) have disclosed the self-compensation situation type hydrostatic bearing construction of main shaft (axle).
[look-ahead technique document]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2005-123527 communique
Again public table 2005/076333 communique of [patent documentation 2] Japan Patent
[patent documentation 3] Japanese Patent Laid-Open 2009-233819 communique
[patent documentation 4] Japan Patent Patent 2011-129754 specification (unexposed)
The flat 10-500194 communique of the special table of [patent documentation 5] Japan Patent
No. 5484208 specification of [patent documentation 6] United States Patent (USP)
Summary of the invention
[problem that invention institute wish solves]
The people such as present inventor are in order to reduce the generation of the cutting swarf that is caused by peripheral knives (rotary cut-off knife), expecting can be by solving with the thickness that the thickness 4～5mm of the diamond electroplating cutter of 5～8mm width setting reduces to 1.3～2.5mm in the outer peripheral edges of the discoideus base station of 500～600mm diameter, thereby after appending experiment, understood fully that peripheral knives generation yaw can not make cutting swarf reduce by half when peripheral knives is rotated.
Can the people such as present inventor have inquired into the yaw that the self-compensation situation type hydrostatic bearing construction of described patent documentation 5 and patent documentation 6 records is applied to prevent peripheral knives, find the peripheral knives yaw self-compensation situation pad structure that can be also used as the cooling fluid supply nozzle by being made as, can suppress the yaw of the peripheral knives that the rotation by described peripheral knives produces.
Secondly, the people such as present inventor are applied to the motor load power of rotary cut-off knife when cutting off for the ingot casting of the rotary cut-off knife that reduces thickness 1.3～2.5mm, abandon the way with the side of rotary cut-off knife by once cutting off ingot casting, enforcement arranges grooving with rotary cut-off knife by half place in a side of ingot casting once, after making again ingot casting 180 degree rotations, with rotary cut-off knife by the operation of grooving once is set at half place of a side of ingot casting, after cutting away the processing of a side, understood fully that the remainder branch that is cut off in the last moment of cutting away a side from the ingot casting body produces chip (chipping), the two end portions of remaining ingot casting body is found the chip about four 0.5～1mm being cut off.Described four chip points are positioned at the end of quadrangular shape ingot casting, therefore subsequent step utilize the line cutting to form tetragonal substrate the time can become waste material, the base plate product loss late is minimum.
The object of the present invention is to provide a kind ofly when utilizing described hemisect method that cylindric ingot casting is cut to quadrangular shape ingot casting, can not produce the shearing device of chip in the quadrangular shape ingot casting that obtains.In addition, provide a kind of described shearing device that utilizes, cylindric ingot casting is cut into the method for quadrangular shape ingot casting.
[technological means of dealing with problems]
A) work stage, it is arranged to come and go to left and right direction on the guide rail that is arranged at along left and right directions on the frame mobile;
B) clamp mechanism, about comprising, it is equipped on discretely a pair of fast headstock and tailstock on the described work stage, and be provided with auxiliary support mechanism, described auxiliary support mechanism be described fast headstock relative with tailstock to main shaft table top and tailstock face on more each auxiliary support of lower position can be to the left end of workpiece or right-hand member Linear-moving and the mechanism that contacts than each supporting axis (workpiece supporting axis);
C) driving mechanism, it makes and is loading the to left and right direction round movement of described work stage that frame props up the workpiece on described clamp mechanism; And
D) along the direction of observing described work stage from the face side of compound chamfer processing method and device, and from right direction toward left direction, be provided with:
E) load/unload station of cylindric ingot casting piece;
F) the position of readiness platform of described clamp mechanism, it is arranged at the behind of described load/unload station;
G) sheet cutting table is peeled off in the side of workpiece (cylindric ingot casting piece), and it clips the workpiece supporting axis of described clamp mechanism, with a pair of rotary cut-off knife, with described rotary cut-off knife diametral plane relatively to mode arrange in front and back with respect to described guide rail; And
H) rotary cut-off knife yaw self-compensation situation mechanism, it is in and is positioned at the outer peripheral edges diamond point of a knife inside that the described rotary cut-off knife of sheet cutting table is peeled off in described side, be that the beginning side position is peeled off in described cylindric ingot casting piece side, clipping described rotary cut-off knife at the upper side position of cut described cylindric silicon ingot casting piece reaches in front the back and a pair of pressurized cooling fluid is set supplies with pad, the supply pipe of the fluid under pressure that will be supplied with by pump is divided into two, makes the space for liquid accumulation of described a pair of pressurized cooling fluid being supplied with pad through each front end face of the supply pipe of branch.
The invention of technical scheme 2 provides the method that quadrangular shape workpiece is processed in a kind of cut-out, use is peeled off shearing device holding workpiece (cylindric ingot casting piece) according to technical scheme 1 described four sides, via following step, described cutting workpiece is processed into quadrangular shape workpiece.
(1) cylindric workpiece is moved between the fast headstock and tailstock of the clamp mechanism on the load/unload station, described tailstock is advanced, utilize the cylindric workpiece of clamp mechanism clamping.
(2) work stage of carrying described clamp mechanism is moved towards the direction of a pair of rotary cut-off knife of rotation, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife to surpass the front-back of cylindric workpiece is processed.Carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(3) then, utilize the servo motor of fast headstock that C axle 180 degree of cylindric workpiece are rotated.
(4) so that the mode that each auxiliary support is connected to cylindric work end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, the cylindric work end of clamping bottom.
(5) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, cut off the circular-arc side of the front and back of cylindric workpiece.Carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(6) so that each auxiliary support justify by oneself columnar workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of cylindric work end bottom, cut two sides are fallen.
(7) then, utilize the servo motor of fast headstock, make the C axle 90 degree rotations of the described workpiece that cuts off two sides.
(8) the described work stage of carrying clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife to surpass the remaining front-back of described workpiece is processed.Carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(9) then, utilize the servo motor of fast headstock, make the C axle 180 degree rotations of described workpiece.
(10) so that the mode that each auxiliary support is connected to described work end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, holding workpiece end bottom.
(11) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of described workpiece, cut off the circular-arc side of the front and back of cylindric workpiece.Carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(12) so that each auxiliary support justify by oneself columnar workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of cylindric work end bottom, cut two sides are fallen, thereby obtain quadrangular shape workpiece.
The invention of technical scheme 3 provides the method that quadrangular shape workpiece is processed in a kind of cut-out, utilizes and peels off the shearing device holding workpiece according to technical scheme 1 described four sides, via following step, described cutting workpiece is processed into quadrangular shape workpiece.
(1) cylindric workpiece is moved between the fast headstock and tailstock of the clamp mechanism on the load/unload station, then, described tailstock is advanced, utilize the cylindric workpiece of clamp mechanism clamping.
(2) work stage of carrying described clamp mechanism is moved towards the direction of a pair of rotary cut-off knife of rotation, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife to surpass the front-back of cylindric workpiece is processed.Carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(3) then, utilize the servo motor of fast headstock, make the C axle 90 degree rotations of cylindric workpiece.
(4) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife to surpass the front-back of cylindric workpiece is processed.Carry out described groove and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(5) then, utilize the servo motor of fast headstock, make the C axle 90 degree rotations of the cylindric workpiece that has formed four grooves.
(6) so that the mode that each auxiliary support is connected to the cylindrical workpiece end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, the cylindric work end of clamping bottom.
(7) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, cut off the circular-arc side of the front and back of described cylindrical workpiece.Carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(8) so that each auxiliary support justify by oneself columnar workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of described cylindric work end bottom, cut two sides are fallen.
(9) then, utilize the servo motor of fast headstock, make C axle 90 degree or-270 degree rotations of described workpiece.
(10) so that the mode that each auxiliary support is connected to work end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, the described work end of clamping bottom.
(11) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of described workpiece, cut off the circular-arc side of the front and back of described workpiece.Carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism.
(12) so that each auxiliary support from described workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of described work end bottom, cut two sides are fallen, thereby obtain quadrangular shape workpiece.
[effect of invention]
When utilizing rotary cut-off knife to cut off the two sides of cylindric workpiece, cut off under the state of by the auxiliary support mechanism clamping with the bottom surfaces at the cylindric workpiece two ends of groove (slit) the top slit is connected with the bottom slit and cuts off being provided with of cylindric workpiece, therefore the loading of the cut-out both sides dough sheet of institute's load is dispersed on the connectivity points of two slits, can not produce chip at the cut-out maximal end point of cylindric workpiece.
Reach 1.2～2.5mm even the width of the diamond point of a knife of rotary cut-off knife is narrower, (h/2+1～5mm) is so approximately 1/2 when the contacted area of slot portion of the diamond point of a knife of rotary cut-off knife and cylindric ingot casting piece becomes the diamond point of a knife cut-out ingot casting side of usefulness rotary cut-off knife owing to the penetraction depth of the cylindric ingot casting piece of diamond point of a knife is limited in the degree of depth that surpasses 1/2 of desired cutting groove depth (h) and surpass 1～5mm.Therefore, the load that is applied to electro-motor can not increase so yet.And, being made as 1.2～2.5mm by the width with the diamond point of a knife of rotary cut-off knife, the generation that ingot casting cuts off bits also can reduce.And, can be 450～550mm with the reduced of rotary cut-off knife.
In the rotary cut-off knife yaw self-compensation situation mechanism, the rotary cut-off knife that is rotating can produce yaw, if supply with the space for liquid accumulation mouth side of pad near the pressurized cooling fluid that is arranged at the front side, the pressure of the space for liquid accumulation of so described mat can increase, and the pressure that the pressurized cooling fluid that is arranged on the contrary rear side is supplied with the space for liquid accumulation of pad then descends.Therefore, supply with the pressure of the space for liquid accumulation of pad and reach certain more than the pressure if be arranged at the pressurized cooling fluid of front side, direction from the space for liquid accumulation mouth of pad to the rotary cut-off knife of front side yaw that so can have been supplied with to the pressurized cooling fluid that is arranged at rear side push back.Along with pushing back of described rotary cut-off knife, the pressurized cooling fluid that is arranged at the front side is supplied with the pressure drop of the space for liquid accumulation of pad, and the pressurized cooling fluid that is arranged at rear side is supplied with the pressure increase of the space for liquid accumulation of pad.Supply with the pressure of the space for liquid accumulation of pad and reach certain more than the pressure if be arranged at the pressurized cooling fluid of rear side, direction from the space for liquid accumulation mouth of pad to the rotary cut-off knife of rear side yaw that so can have been supplied with to the pressurized cooling fluid that is arranged at the front side push back.Therefore, the yaw amplitude of the big or small restricting rotation cutoff tool of pressurized cooling fluid supply pressure can be passed through, thereby the generation of the cutting swarf of ingot casting piece can be reduced.
Description of drawings
Fig. 1 is the plane that shearing device is peeled off in four sides.
Fig. 2 is the front view that shearing device is peeled off in four sides.
Fig. 3 is the figure of fast headstock of expression clamp mechanism, and Fig. 3 a is the figure that the workpiece of observing fast headstock is supported side, Fig. 3 b be from the top view of fast headstock to the front view of auxiliary support mechanism.
Fig. 4 is the partial plan layout of amplifying the clamp mechanism of the auxiliary support mechanism that represents clamp mechanism.
Fig. 5 is the front cross-sectional view of rotary cut-off knife yaw self-compensation situation mechanism.
Fig. 6 is that expression is by the front view of the clamping device of the state of the workpiece of clamp mechanism and auxiliary support mechanism clamping.
Fig. 7 is that expression utilizes rotary cut-off knife cylindric ingot casting piece incision otch to be made into the flow chart of the block-shaped step of quadrangular shape monocrystalline ingot casting, is the figure that observes the ingot casting piece from the side of clamping device.
Fig. 8 is that expression utilizes rotary cut-off knife cylindric ingot casting piece incision otch to be made the flow chart of another aspect of the block-shaped step of quadrangular shape ingot casting, is the figure that observes the ingot casting piece from the side of clamping device.
[explanation of symbol]
1 shearing device
C C axle (the workpiece rotating axle of clamping device)
W workpiece (cylindric ingot casting piece)
3 guide rails
4 work stage
7 clamp mechanism
The 7a fast headstock
7 ' a
1Auxiliary support mechanism
7 ' a
11Auxiliary support
The 7b tailstock
7 ' b
1Auxiliary support mechanism
7 ' b
11Auxiliary support
The 8R load/unload station
13 ingot casting piece transport mechanisms
14 accumulators
70 clamp mechanism position of readiness platforms
90 sheet cutting tables
91a, 91b rotary cut-off knife
92a, 92b tool spindle
96 rotary cut-off knife yaw self-compensation situation mechanisms
96a, 96b mat
The specific embodiment
The side of the cylindric ingot casting piece of Figure 1 and Figure 2 is peeled off shearing device 1 and is comprised following a) to h) member of formation.
A) work stage 4, and it is to arrange coming and going to left and right direction mobile mode on the guide rail 3,3 that is arranged at along left and right directions on the frame 2;
C) driving mechanism 7am, it makes and is loading the to left and right direction round movement of described work stage 4 that frame props up the workpiece w on described clamp mechanism 7;
D) along the direction of observing described work stage 4 from the face side of shearing device 1, and from right direction toward left direction,
E) the load/unload station 8R of workpiece;
F) the position of readiness platform 70 of described clamp mechanism 7, it is arranged at the behind of described load/unload station 8R;
G) sheet cutting table 90 is peeled off in the side of cylindric silicon ingot casting piece (workpiece), and it clips the workpiece supporting axis 7a of described clamp mechanism
1, 7b
1, with a pair of rotary cut-off knife 91a, 91b, with described rotary cut-off knife diametral plane relatively to mode arrange in front and back with respect to described guide rail 3,3; And
H) rotary cut-off knife yaw self-compensation situation mechanism 96, it is in and is positioned at outer peripheral edges diamond point of a knife 91ag, the position, 91bg inside that the described rotary cut-off knife on the sheet cutting table 90 is peeled off in described side, be that the beginning side position is peeled off in described cylindric silicon ingot casting piece side, clip described rotary cut-off knife in the position of the upside of cut described workpiece and reach in front the back and a pair of pressurized cooling fluid is set supplies with pad 96a, 96b, the supply pipe 96k of the fluid under pressure that will be supplied with by pump 96p is divided into two 96k
1, 96k
2, make the space for liquid accumulation 96v that described a pair of pressurized cooling fluid is supplied with pad 96a, 96b through each front end face of the supply pipe of branch.(with reference to Fig. 5 and Fig. 6).
Moreover, at described bifurcated pipe 96k
1, 96k
2On pressure be set regulate choke valve 96z, 96z.And, to supply pipe 96k, supply with cooling fluid in the cooling fluid storage tank tank 96t by the driving of pump 96p.Can also be as shown in Figure 4, sending side at the ingot casting piece of peripheral knives 91a, 91b also appends a pair of poly-(tetrafluoroethene), nylon 6 is set, 10, PEEK (polyetherether ketone, polyether-ether-ketone), the heat-resistant resin pressurized cooling fluid processed of glass fiber reinforced epoxy resin etc. supplies with pad 96a, 96b, to improve cooling effectiveness, the yaw self-compensation situation ability of peripheral knives.Distance between the space for liquid accumulation mouth flange of peripheral knives 91a, 91b diametral plane and described pressurized cooling fluid supply pad 96a, 96b is 0.01～0.05mm preferably.The shape that described pressurized cooling fluid is supplied with pad 96a, 96b can be the bowl type, also can be square shape.The flange 96f, the 96f that support described pressurized cooling fluid to supply with pad 96a, 96b are fixed on the rotary cut-off knife over cap 91c inwall.Supply to the pressure 20～35Kgf/cm preferably of the pressurized cooling fluid of supply pipe 96k by pump 96p
2, preferably 2～20 liter/mins of cooling liquid measures.
Turn back to Fig. 1 and Fig. 2, the ingot casting piece conveyance 13 that consists of in the lump load/unload station 8R with described clamp mechanism 7 is the front sides that are set up in parallel in described work stage 4 with ingot casting accumulator 14.The structure of ingot casting piece transport mechanism 13 and ingot casting accumulator 14 is disclosed in Fig. 1 to Fig. 5 of Japanese Patent Laid-Open 2011-136382 communique of the application's patent applicant in detail.Described ingot casting piece transport mechanism 13 can be buied from market with ingot casting accumulator 14.
Described ingot casting piece transport mechanism 13 utilizes the ingot casting piece of a pair of claw clamping keeping on the V of Workpiece stocker 14 word laminate, two pawls are risen, mention whereby workpiece, it is retreated, towards right-hand movement, and descend and be located at load port 8 the place aheads, it is retreated, whereby workpiece is moved between the fast headstock 7a and tailstock 7b of clamping device 7 from described load port 8.Make an end of workpiece be connected to the center supporting axis 7a of fast headstock 7a
1Afterwards, utilize cylinder 7e to make tailstock 7b towards right-hand movement, make the other end be connected to center supporting axis 7b
1And prop up workpiece with the suspended state frame.Then, described two pawls are separated and discharge grasping of workpiece, subsequently, the fixed station of supporting two pawls is risen and move towards left, it is retreated towards the place ahead, make two pawls revert to the position of readiness of ingot casting piece transport mechanism 13.
The side is peeled off sheet cutting table 90 and is comprised: clamping device 7; Carry the move left and right guide rail 3,3 of work stage 4 usefulness of described clamping device 7; And section 9, it will clip the fast headstock 7a of described clamp mechanism and the workpiece supporting axis 7a of tailstock 7b
1, 7b
1Institute's axle props up on one center roller 92a, the 92b that can move forward and backward a pair of rotary cut-off knife 91a, 91b, with its diametral plane relatively to mode, clip work stage and be arranged at before and after the work stage.
Moving forward and backward of rotary cut-off knife 91a, 91b is by utilizing motor 94m, 94m, and the not shown motor of tool stand 94t, 94t that rotary actuation is carrying servo motor 93m, the 93m of axle 92a, the 92b rotation that makes axle prop up rotary cut-off knife 91a, 91b drives ball screw to carry out.The moving direction that advances or retreat of described tool stand 94t depends on that the rotating shaft of servo motor 94m is clockwise direction or counter clockwise direction.
A pair of rotary cut-off knife 91a, 91b are axle Zhi Yuyi center roller 92a, 92b, and these axles are to drive rotation by servo motor 93m, 93m, whereby rotary cut-off knife 91a, 91b with respect to workpiece towards same clockwise direction with 50～7,500min
-1Rotary speed rotation (direction of rotation of two axles becomes direction opposite each other).Described axle 92a, 92b can by move forward and backward tool stand 94t, 94t, peel off the processing starting position to the face of ingot casting piece and move.About described axle 92a, 92b, be the workpiece supporting axis 7a that clips described clamp mechanism
1, 7b
1With a pair of rotary cut-off knife 91a, 91b, with described rotary cut-off knife diametral plane relatively to mode, and so that rotary cut-off knife axle center 92a, 92b are positioned at the height and position mode of position of top more that is in more described workpiece supporting axis (C axle), with respect to described guide rail 3,3 rotary cut-off knife axle center 92a, 92b are set in front and back, thereby sheet cutting table 90 is peeled off in the side that consists of cylindric ingot casting piece.
As described rotary cut-off knife 91a, 91b, be to use diamond particle is plated on diameter as 450～600mm take width 5～10mm, thickness 1.2～2.5mm, thickness is outer peripheral edges (the diamond cutting knife that thickness 1.0～2.0mm) forms of the steel plate sheet material of 1～2mm.
By the work stage 4 of carrying along the clamp mechanism 7 of the C axle of horizontal direction holding workpiece is moved towards left, so that the front and back of workpiece end face are connected to a pair of rotary cut-off knife 91a, 91b, utilize these rotary cut-off knives to carry out that cylindric workpiece front and back are the circular-arc face that reams and peel off and cut off processing.Carry out described face and peel off to cut off and add man-hour, supply with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism 96 to rotary cut-off knife 91a, 91b.After the face of workpiece front-back is peeled off the cut-out process finishing, make the supporting axis 90 degree rotations of the fast headstock 7a of clamp mechanism 7, make the arc surface of peeling off the workpiece that cuts off processing without face occupy (being positioned) front and back position, work stage 4 is moved, utilize servo motor 93m, the described a pair of rotary cut-off knife 91a of 93m rotary actuation, 91b, the face that is left is peeled off and is cut off processing.Peel off about the face of four sides of cylindric ingot casting piece and to cut off process time, be 200mm to diameter, height is 200mm for the cylindric monocrystalline silicon ingot casting piece of 250mm can carry out 10～20 minutes to diameter, and height can carry out 22～27 minutes for the cylindric monocrystalline silicon ingot casting piece of 500mm.
It is to implement via following step that the method for cutting off processing and being processed into quadrangular shape ingot casting piece is peeled off in four sides that utilize described shearing device 1 to carry out workpiece (cylindric monocrystalline silicon ingot casting piece).
(1) utilizes the transport mechanism 13 that is positioned at the workpiece w on the loading bench 8R, grasp a workpiece that loads on accumulator 14 with two pawls, the fixed station 13f that supports two pawls is risen and move towards left, then order is rotatably connected in by the planing surface 13s of the described fixed station 13f of the ball screw of servo motor rotary actuation the back side to slide and enter into load port 8 sides at the guide rail 13g that is arranged at column side face, then, driving by cylinder 13p workpiece is descended move into have the function that makes its rotation C axle rotation that centers on clamp mechanism 7 with after between the fast headstock 7a of encoder and the tailstock 7b, make described tailstock front and then workpiece w is held on clamp mechanism 7.
(2) irradiation of the C axle from the displacement transducer that arranges away from the front side of the described workpiece w that is held to workpiece laser, on one side read the C axle anglec of rotation that the motor by the fast headstock of clamping device produces by encoder, the C axle is rotated a circle (360 degree), thereby express the correlation diagram of the anglec of rotation and peak value of pulse.
(3) select unspecified angle (θ) in the encoder anglec of rotation of four represented expression peak value of pulses, be that the mode of the positions (cutting off beginning C shaft position) of 45 degree makes the rotation of C axle so that described angle is positioned at respect to the encoder anglec of rotation of rotary cut-off knife footpath direction face, make the location, crystal orientation position that cuts off workpiece.
(4) work stage 4 of carrying described clamp mechanism 7 is moved towards a pair of rotary cut-off knife 91a, the residing direction of 91b of rotation, utilize described a pair of rotary cut-off knife 91a, 91b peripheral knives surpass workpiece w front-back height h h/2 and the groove that surpasses the length of 1～3mm is processed.Carry out described groove and add man-hour, front-back at rotary cut-off knife, by rotary cut-off knife yaw self-compensation situation mechanism 96, the space for liquid accumulation 96v that uses pump 96p with 2～20 liter/mins ratio described a pair of pressurized cooling fluid to be supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the I of Fig. 7)
(5) utilize the servo motor of fast headstock 7a, make the C axle 180 degree rotations of cylindric ingot casting piece.(with reference to the II of Fig. 7)
(6) so that each auxiliary support 7 ' a
11, 7 ' b
11The mode that is connected to cylindric work end makes auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Linear-moving, clamping cylindrical workpiece end bottom.(with reference to Fig. 6)
(7) work stage 4 of carrying described clamp mechanism 7 is moved towards the described a pair of rotary cut-off knife 91a of rotation, the direction of 91b, utilize described a pair of rotary cut-off knife 91a, 91b to surpass the groove processing of 1/2 length of height of the front-back of cylindric ingot casting piece, cut off the circular-arc side of the front and back of cylindric ingot casting piece.Carry out described cut-out and add man-hour, front-back at described rotary cut-off knife 91a, 91b, by rotary cut-off knife yaw self-compensation situation mechanism 96, the space for liquid accumulation 96v that uses pump 96v with 2～20 liter/mins ratio described a pair of pressurized cooling fluid to be supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.
(8) so that each auxiliary support 7 ' a
11, 7 ' b
11Justify by oneself columnar workpiece distolateral away from mode make auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Retreat movement, discharge the clamping of cylindric work end bottom, cut two sides are fallen.(with reference to the III of Fig. 7)
(9) utilize the servo motor of fast headstock 7a, make the C axle 90 degree rotations of the cylindric ingot casting piece that cuts off two sides.(with reference to the IV of Fig. 7)
(10) the described work stage of carrying clamp mechanism 7 is moved towards the described a pair of rotary cut-off knife 91a of rotation, the direction of 91b, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife 91a, 91b to surpass the remaining front-back of cylindric ingot casting piece is processed.Carry out described groove and add man-hour, front-back at rotary cut-off knife 91a, 91b, by rotary cut-off knife yaw self-compensation situation mechanism 96, use pump 96p with 2～20 liter/mins ratio, the space for liquid accumulation 96v that described a pair of pressurized cooling fluid is supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the V of Fig. 7)
(11) then, utilize the servo motor of fast headstock 7a, make the C axle 180 degree rotations of described cylindric ingot casting piece.(with reference to the VI of Fig. 7)
(12) so that each auxiliary support 7 ' a
11, 7 ' b
11The mode that is connected to the work end of described cylindric ingot casting piece makes auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Linear-moving, holding workpiece end bottom.
(13) work stage 4 of carrying described clamp mechanism 7 is moved towards the described a pair of rotary cut-off knife 91a of rotation, the direction of 91b, utilize described a pair of rotary cut-off knife 91a, 91b to surpass the groove processing of 1/2 length of height of the front-back of cylindric ingot casting piece (workpiece), cut off the circular-arc side of the front and back of described ingot casting piece, be processed into quadrangular shape ingot casting piece.Carry out described cut-out and add man-hour, front-back at described rotary cut-off knife 91a, 91b, by rotary cut-off knife yaw self-compensation situation mechanism 96, the space for liquid accumulation 96v that uses pump 96p with 2～20 liter/mins ratio described a pair of pressurized cooling fluid to be supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the VII of Fig. 7)
(14) so that each auxiliary support 7 ' a
11, 7 ' b
11From described workpiece distolateral away from mode make auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Supplemental support 7 ' b with tailstock 7b
1, 7 ' b
1Retreat movement, discharge the clamping of described work end bottom, cut two sides are fallen, thereby obtain quadrangular shape workpiece.
(15) make work stage 4 treat that to clamp mechanism board 70 moves, utilize the claw of the transport mechanism 13 be positioned at the ingot casting piece w on the load/unload station 8R to grasp quadrangular shape piece, tailstock 7b is retreated and the constraint of untiing 7 pairs of quadrangular shapes of clamp mechanism piece.
(16) two pawls of the transport mechanism 13 of ingot casting piece are transferred on the accumulator 14, then decontroled two pawls quadrangular shape piece is loaded on the shelf on the accumulator 14.
Peel off the processing method of cutting off processing and being processed into another aspect of quadrangular shape ingot casting piece as four sides of using described shearing device 1 to carry out cylindric monocrystalline silicon ingot casting piece (workpiece), also can replace to following step.
(1) uses the transport mechanism 13 that is positioned at the cylindric ingot casting piece on the loading bench 8R, grasp a cylindric silicon ingot casting piece (workpiece) that loads on the accumulator 14 with two pawls, the fixed station 13f that supports two pawls is risen and move towards left, then order is rotatably connected in by the planing surface 13s of the described fixed station 13f of the ball screw of servo motor rotary actuation the back side to slide and enter into load port 8 sides being arranged at guide rail 13g on the column side face, then, driving by cylinder 13p cylindric ingot casting piece is descended move into have the function that makes its rotation C axle rotation that centers on the first clamp mechanism 7 with after between the fast headstock 7a of encoder and the tailstock 7b, make described tailstock front and then cylindric silicon ingot casting piece w is held on the first clamp mechanism 7.
(2) irradiation of the C axle from the displacement transducer that arranges away from the front side of the described cylindric monocrystalline silicon ingot casting piece that is held to cylindric monocrystalline silicon ingot casting piece laser, utilize on one side encoder to read the C axle anglec of rotation that the motor by the fast headstock of clamping device produces, the C axle is rotated a circle (360 degree), express the correlation diagram of the anglec of rotation and peak value of pulse.
(3) select unspecified angle (θ) in the encoder anglec of rotation of four represented expression peak value of pulses, be that the mode of the positions (cutting off beginning C shaft position) of 45 degree makes the rotation of C axle so that described angle is positioned at respect to the encoder anglec of rotation of rotary cut-off knife footpath direction face, make the location, crystal orientation position of cylindric monocrystalline silicon ingot casting piece.
(4) work stage 4 of carrying described clamp mechanism 7 is moved towards a pair of rotary cut-off knife 91a, the residing direction of 91b of rotation, utilize described a pair of rotary cut-off knife 91a, 91b peripheral knives surpass cylindric silicon ingot casting piece w front-back height h h/2 and the groove that surpasses the length of 1～3mm is processed.Carry out described groove and add man-hour, front-back at rotary cut-off knife, by rotary cut-off knife yaw self-compensation situation mechanism 96, utilize pump 96p with 2～20 liter/mins ratio, the space for liquid accumulation 96v that described a pair of pressurized cooling fluid is supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the I of Fig. 8)
(5) utilize the servo motor of fast headstock 7a, make the C axle 90 degree rotations of cylindric ingot casting piece.(with reference to the II of Fig. 8)
(6) work stage 4 of carrying described clamp mechanism 7 is moved towards the described a pair of rotary cut-off knife 91a of rotation, the direction of 91b, the groove of 1/2 length of height that utilizes described a pair of rotary cut-off knife 91a, 91b to surpass the front-back of cylindric ingot casting piece is processed.Carry out described groove and add man-hour, front-back at described rotary cut-off knife 91a, 91b, by rotary cut-off knife yaw self-compensation situation mechanism 96, use pump 96p with 2～20 liter/mins ratio, the space for liquid accumulation 96v that described a pair of pressurized cooling fluid is supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the III of Fig. 8)
(7) then, use the servo motor of fast headstock 7a, make the C axle 90 degree rotations of the cylindrical workpiece that has formed four grooves.(with reference to the IV of Fig. 8)
(8) so that each auxiliary support 7 ' a
11, 7 ' b
11The mode that is connected to cylindric work end makes auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Linear-moving, the cylindric work end of clamping bottom.(with reference to Fig. 6)
(9) work stage 4 of carrying described clamp mechanism 7 is moved towards the described a pair of rotary cut-off knife 91a of rotation, the direction of 91b, utilize described a pair of rotary cut-off knife 91a, 91b to surpass the groove processing of 1/2 length of height of the front-back of cylindric ingot casting piece, cut off the circular-arc side of the front and back of cylindric ingot casting piece.Carry out described cut-out and add man-hour, front-back at described rotary cut-off knife 91a, 91b, by rotary cut-off knife yaw self-compensation situation mechanism 96, use pump 96p with 2～20 liter/mins ratio, the space for liquid accumulation 96v that described a pair of pressurized cooling fluid is supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the V of Fig. 8)
(10) so that each auxiliary support 7 ' a
11, 7 ' b
11From cylindrical workpiece distolateral away from mode make auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Retreat movement, discharge the clamping of described cylindric work end bottom, cut two sides are fallen.
(11) then, utilize the servo motor of fast headstock 7a, make C axle 90 degree or-270 degree rotations of described workpiece.(with reference to the VI of Fig. 8)
(12) so that each auxiliary support 7 ' a
11, 7 ' b
11The mode that is connected to work end makes supplemental support 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Linear-moving, the described work end of clamping bottom.
(13) work stage 4 of carrying described clamp mechanism 7 is moved towards the described a pair of rotary cut-off knife 91a of rotation, the direction of 91b, utilize described a pair of rotary cut-off knife 91a, 91b to surpass the groove processing of 1/2 length of height of the front-back of cylindric ingot casting piece, cut off the circular-arc side of the front and back of cylindric ingot casting piece.Carry out described cut-out and add man-hour, front-back at described rotary cut-off knife 91a, 91b, by rotary cut-off knife yaw self-compensation situation mechanism 96, use pump 96p with 2～20 liter/mins ratio, the space for liquid accumulation 96v that described a pair of pressurized cooling fluid is supplied with pad 96a, 96b supplies with 20～35Kgf/cm
2The cooling fluid of pressure.(with reference to the VII of Fig. 8)
(14) so that each auxiliary support 7 ' a
11, 7 ' b
11From described workpiece distolateral away from mode make auxiliary support mechanism 7 ' a of described fast headstock 7a
1, 7 ' a
1Auxiliary support mechanism 7 ' b with tailstock 7b
1, 7 ' b
1Retreat movement, discharge the clamping of described work end bottom, cut two sides are fallen and obtain quadrangular shape workpiece w.
Above, be illustrated as an example of cylindric silicon ingot casting piece example as workpiece w, but workpiece can also use circular thick wood, sapphire round-rod, ceramic pole, the epoxy resin rounding rod of having allocated copper powder, engineering plastics rounding rod etc.
[industrial utilizability]
The side of cylindric ingot casting piece of the present invention is peeled off shearing device 1 and is used its method that is processed into quadrangular shape piece to be and with rotary cut-off knife yaw self-compensation situation mechanism 96 and hemisect method, making and utilizing diamond point of a knife width (thickness of cutter) 1 is that the rotary cut-off knife of 1.2～2.5mm becomes possibility, therefore can reduce the generation of the cutting swarf of ingot casting piece.
Claims (3)
1. shearing device is peeled off in four sides of a cylindric ingot casting piece, it is characterized in that being provided with:
A) work stage, it is arranged to come and go to left and right direction on the guide rail that is arranged at along left and right directions on the frame mobile;
B) clamp mechanism, about comprising, it is equipped on discretely a pair of fast headstock and tailstock on the described work stage, and be provided with auxiliary support mechanism, described auxiliary support mechanism be described fast headstock relative with tailstock to main shaft table top and tailstock face on more each auxiliary support of lower position can be to the left end of workpiece or right-hand member Linear-moving and the mechanism that contacts than each supporting axis;
C) driving mechanism, it makes and is loading the to left and right direction round movement of described work stage that frame props up the workpiece on described clamp mechanism; And
D) along the direction of observing described work stage from the face side of compound chamfer processing method and device, and from right direction toward left direction, be provided with:
E) load/unload station of cylindric ingot casting piece;
F) the position of readiness platform of described clamp mechanism, it is arranged at the behind of described load/unload station;
G) sheet cutting table is peeled off in the side of workpiece (cylindric ingot casting piece), and it clips the workpiece supporting axis of described clamp mechanism, with a pair of rotary cut-off knife, with described rotary cut-off knife diametral plane relatively to mode arrange in front and back with respect to described guide rail; And
H) rotary cut-off knife yaw self-compensation situation mechanism, it is in and is positioned at the outer peripheral edges diamond point of a knife inside that the described rotary cut-off knife of sheet cutting table is peeled off in described side, be that the beginning side position is peeled off in described cylindric ingot casting piece side, clipping described rotary cut-off knife at the upper side position of cut described cylindric silicon ingot casting piece reaches in front the back and a pair of pressurized cooling fluid is set supplies with pad, the supply pipe of the fluid under pressure that will be supplied with by pump is divided into two, makes the space for liquid accumulation of described a pair of pressurized cooling fluid being supplied with pad through each front end face of the supply pipe of branch.
2. the method for quadrangular shape workpiece is processed in a cut-out, use four sides of cylindric ingot casting piece according to claim 1 to peel off the cylindric workpiece of shearing device clamping, via following step, described cutting workpiece is processed into quadrangular shape workpiece, described step comprises:
(1) workpiece is moved between the fast headstock and tailstock of the clamp mechanism on the load/unload station, described tailstock is advanced, utilize the clamp mechanism holding workpiece;
(2) work stage of carrying described clamp mechanism is moved towards the direction of a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid by rotary cut-off knife yaw self-compensation situation mechanism;
(3) then, utilize the servo motor of fast headstock that C axle 180 degree of cylindric workpiece are rotated;
(4) so that the mode that each auxiliary support is connected to cylindric work end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, the cylindric work end of clamping bottom;
(5) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, cut off the circular-arc side of the front and back of cylindric workpiece, carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism;
(6) so that each auxiliary support justify by oneself columnar workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of cylindric work end bottom, cut two sides are fallen;
(7) then, utilize the servo motor of fast headstock, make the C axle 90 degree rotations of the described workpiece that cuts off two sides;
(8) the described work stage of carrying clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the remaining front-back of described workpiece, carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism;
(9) then, utilize the servo motor of fast headstock that C axle 180 degree of described workpiece are rotated;
(10) so that the mode that each auxiliary support is connected to described work end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, holding workpiece end bottom;
(11) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of described workpiece, cut off the circular-arc side of the front and back of cylindric workpiece, carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism; And
(12) so that each auxiliary support justify by oneself columnar workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of cylindric work end bottom, cut two sides are fallen, thereby obtain quadrangular shape workpiece.
3. the method for quadrangular shape workpiece is processed in a cut-out, utilize four sides of cylindric ingot casting piece according to claim 1 to peel off the cylindric workpiece of shearing device clamping, via following step, described cutting workpiece is processed into quadrangular shape workpiece, described step comprises:
(1) cylindric workpiece is moved between the fast headstock and tailstock of the clamp mechanism on the load/unload station, then, described tailstock is advanced, utilize the cylindric workpiece of clamp mechanism clamping;
(2) work stage of carrying described clamp mechanism is moved towards the direction of a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, carry out described groove and add man-hour, the front-back of rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism;
(3) then, utilize the servo motor of fast headstock that C axle 90 degree of cylindric workpiece are rotated;
(4) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, carry out described groove and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism;
(5) then, utilize the servo motor of fast headstock, make the C axle 90 degree rotations of the cylindric workpiece that has formed four grooves;
(6) so that the mode that each auxiliary support is connected to the cylindrical workpiece end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, the cylindric work end of clamping bottom;
(7) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of cylindric workpiece, cut off the circular-arc side of the front and back of described cylindrical workpiece, carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism;
(8) so that each auxiliary support from workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of described work end bottom, cut two sides are fallen;
(9) then, utilize the servo motor of fast headstock, make C axle 90 degree or-270 degree rotations of described workpiece;
(10) so that the mode that each auxiliary support is connected to work end makes the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism Linear-moving of tailstock, the described work end of clamping bottom;
(11) work stage of carrying described clamp mechanism is moved towards the direction of the described a pair of rotary cut-off knife of rotation, utilize described a pair of rotary cut-off knife to surpass the groove processing of 1/2 length of height of the front-back of described workpiece, cut off the circular-arc side of the front and back of described workpiece, carry out described cut-out and add man-hour, the front-back of described rotary cut-off knife is supplied with cooling fluid from rotary cut-off knife yaw self-compensation situation mechanism; And
(12) so that each auxiliary support from described workpiece distolateral away from mode make the auxiliary support mechanism of described fast headstock and the auxiliary support mechanism of tailstock retreat movement, discharge the clamping of described work end bottom, cut two sides are fallen, thereby obtain quadrangular shape workpiece.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011162708A JP5802072B2 (en) | 2011-07-26 | 2011-07-26 | Cutting method for processing cylindrical ingot block into square columnar block |
| JP2011-162708 | 2011-07-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102896704A true CN102896704A (en) | 2013-01-30 |
| CN102896704B CN102896704B (en) | 2015-03-25 |
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| CN201110339461.8A Expired - Fee Related CN102896704B (en) | 2011-07-26 | 2011-10-28 | Four side surface stripping and cutting device of cylinder casting ingot and method for cutting and processing into quadrangular-shaped workpieces |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5802072B2 (en) |
| KR (1) | KR101342352B1 (en) |
| CN (1) | CN102896704B (en) |
| TW (1) | TWI461276B (en) |
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| CN103533107A (en) * | 2013-02-08 | 2014-01-22 | 无锡鼎晶光电科技有限公司 | Mobile phone panel and manufacturing method thereof |
| CN105904601A (en) * | 2016-04-20 | 2016-08-31 | 重庆四和晶工科技有限公司 | Single crystal silicon rod single-piece cutting system |
| CN106042203A (en) * | 2016-07-07 | 2016-10-26 | 青岛高测科技股份有限公司 | Rod clamping mechanism of monocrystal silicon horizontal single-rod squarer |
| CN111975150A (en) * | 2019-05-23 | 2020-11-24 | 菲尼克斯费博两合公司 | Method for producing a component and holding tool for holding a blank and a component |
| CN114454364A (en) * | 2021-08-19 | 2022-05-10 | 青岛高测科技股份有限公司 | Silicon rod cutting method, device and system |
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- 2011-10-28 TW TW100139461A patent/TWI461276B/en not_active IP Right Cessation
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| JPH04164322A (en) * | 1990-10-29 | 1992-06-10 | Naoetsu Denshi Kogyo Kk | Retention and cutting method for semiconductor wafer |
| JP4534077B2 (en) * | 2003-10-20 | 2010-09-01 | 信越化学工業株式会社 | Manufacturing method of solar cell module |
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| CN105904601A (en) * | 2016-04-20 | 2016-08-31 | 重庆四和晶工科技有限公司 | Single crystal silicon rod single-piece cutting system |
| CN106042203A (en) * | 2016-07-07 | 2016-10-26 | 青岛高测科技股份有限公司 | Rod clamping mechanism of monocrystal silicon horizontal single-rod squarer |
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| CN111975150A (en) * | 2019-05-23 | 2020-11-24 | 菲尼克斯费博两合公司 | Method for producing a component and holding tool for holding a blank and a component |
| CN114454364A (en) * | 2021-08-19 | 2022-05-10 | 青岛高测科技股份有限公司 | Silicon rod cutting method, device and system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013026584A (en) | 2013-02-04 |
| TWI461276B (en) | 2014-11-21 |
| KR101342352B1 (en) | 2013-12-16 |
| CN102896704B (en) | 2015-03-25 |
| KR20130012901A (en) | 2013-02-05 |
| JP5802072B2 (en) | 2015-10-28 |
| TW201304925A (en) | 2013-02-01 |
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