CN102888651A - Crucible cap and crucible system - Google Patents
Crucible cap and crucible system Download PDFInfo
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- CN102888651A CN102888651A CN2011102062988A CN201110206298A CN102888651A CN 102888651 A CN102888651 A CN 102888651A CN 2011102062988 A CN2011102062988 A CN 2011102062988A CN 201110206298 A CN201110206298 A CN 201110206298A CN 102888651 A CN102888651 A CN 102888651A
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- Prior art keywords
- crucible
- cover
- wall
- positioning convex
- cover wall
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- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 6
- 239000010453 quartz Substances 0.000 abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 7
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract description 3
- 230000008018 melting Effects 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 230000035939 shock Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 6
- 238000005266 casting Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000003245 working effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 2
- 235000006708 antioxidants Nutrition 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Abstract
The embodiment of the invention discloses a crucible cap which comprises a cap wall and a positioning bump, wherein the cap wall is circumferentially closed, and the positioning bump is arranged in the middle of the cap wall. In the process of producing polycrystalline silicon, the crucible cap is arranged on a quartz crucible, so that the height of the crucible is increased, therefore, the feed volume of the crucible is increased. In addition, the crucible cap and the crucible are arranged in a separate design mode, the crucible cap is made of silicon nitride, and the silicon nitride is an important structural ceramic material which has lubricity and is wear resistant, strong in corrosion resistance and oxidation resistant at a high temperature; meanwhile, the ceramic material also can resist cold and heat shocks, and is not fragmented after being heated to over 1000 DEG C in the air and then rapidly cooled and rapidly heated; and the silicon nitride ceramic also has metal melting resistance, can resist a high temperature of 1800 DEG C in a protecting atmosphere, and can achieve an effect of reutilization. The embodiment of the invention also discloses a crucible system with the crucible cap.
Description
Technical field
The present invention relates to the polysilicon equipment field, more particularly, relate to a kind of crucible cover and crucible system.
Background technology
Must experience in the polycrystalline furnace ingot casting process vacuumize, fusing, crystallization, annealing, cooling double teacher.Wherein, the fusion stage mainly is melted into liquid state with scattered solid silicon material, and crystallisation stage then makes polysilicon realize oriented growth (also weighed to solidifying) by certain mode.Just scattered silicon material need be packed into before carrying out casting ingot process sprays in the good quartz crucible, and fixes with the graphite backplate, drops into and carries out ingot casting in the polycrystalline furnace.At present, the quartz crucible height that uses is 420mm, charging capacity is about 440kg, the silicon ingot height that casts out is 270mm-290mm, and the liquid state when the melt stage, the silicon material melted fully highly is 250mm-270mm, with respect to the height of crucible, at least still there is the space of 130mm height not to be utilized, if can improve charge amount on the basis of existing quartz crucible, can increase the output of separate unit polycrystalline furnace, and reduce the energy consumption of silicon ingot unit weight.The method that improves charge amount is that the crucible height is increased, and for example changes the size of quartz crucible, particularly increases the height of himself, then can promote its charge amount.
Although charging capacity increased after the quartz crucible height increased, but the silicon ingot height still is lower than the height of former quartz crucible, and the height part that causes quartz crucible to increase only works when feeding intake, and the use of common quartz crucible once afterwards namely can be damaged, can't reuse, cause the waste of resource.
In addition, because crucible process for making camber is higher, the more difficult making of casting mold has increased the manufacture difficulty of quartz crucible.And after the increase of quartz crucible height, be to prevent that the quartz crucible distortion from need increase the height of crucible guard boards simultaneously.
Summary of the invention
In view of this, the invention provides a kind of crucible cover and crucible system, occur to realize the phenomenon that reduces the wasting of resources on the charge amount basis of improving crucible.
For achieving the above object, the invention provides following technical scheme:
A kind of crucible cover comprises the cover wall of circumferential sealing and is arranged on the positioning convex at the middle part of described cover wall that the material of described cover wall and described positioning convex is silicon nitride.
Preferably, in above-mentioned crucible cover, described positioning convex is arranged on the outside of described cover wall, and one of them distance along the limit of the described cover wall of distance is 30mm-40mm, and another distance along the limit of the described cover wall of distance is 50mm-70mm.
Preferably, in above-mentioned crucible cover, described positioning convex is closed and is distributed on the described cover wall.
Preferably, in above-mentioned crucible cover, described positioning convex is intermittently that shape is distributed on the described cover wall.
Preferably, in above-mentioned crucible cover, described cover wall is rectangular configuration.
A kind of crucible system, comprise crucible, also comprise the crucible cover, described crucible cover comprises the cover wall of circumferential sealing and is arranged on the positioning convex at the middle part of described cover wall, the crucible wall of described cover wall and described crucible fits, and described crucible is inconsistent along limit and described positioning convex, and the material of described cover wall and described positioning convex is silicon nitride.
Preferably, in above-mentioned crucible system, described positioning convex is arranged on the outside of described cover wall, and one of them distance along the limit of the described cover wall of distance is 30mm-40mm, and another distance along the limit of the described cover wall of distance is 50mm-70mm.
Preferably, in above-mentioned crucible system, described positioning convex is closed and is distributed on the described cover wall.
Preferably, in above-mentioned crucible system, described positioning convex is intermittently that shape is distributed on the described cover wall.
Preferably, in above-mentioned crucible system, described cover wall is rectangular configuration.
Crucible cover among the present invention comprises the cover wall of circumferential sealing and is arranged on the positioning convex at the middle part of described cover wall.When use producing polysilicon, above-mentioned crucible cover is arranged on the quartz crucible, thereby has increased the height of crucible, therefore can increase the charging capacity of crucible.
In addition, above-mentioned crucible cover and crucible are separation design, the material selection silicon nitride of crucible cover, and silicon nitride is a kind of important structural ceramic material, and itself has oilness, and wear-resistant, and resistance to corrosion is strong, and is anti-oxidant during high temperature.And it can also resist thermal shock, is heated in air more than 1000 ℃, and sharply more sharply heating of cooling can be not cracked yet.Silicon nitride ceramics also has anti-metal melting, and in protective atmosphere 1800 ℃ of high temperature of ability, can realize the recycling.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The crucible cover master TV structure schematic diagram that Fig. 1 provides for the embodiment of the invention one;
The crucible cover plan structure schematic diagram that Fig. 2 provides for the embodiment of the invention one;
The crucible cover perspective view that Fig. 3 provides for the embodiment of the invention one;
The crucible system perspective view that Fig. 4 provides for the embodiment of the invention one;
The crucible cover master TV structure schematic diagram that Fig. 5 provides for the embodiment of the invention two;
The crucible cover plan structure schematic diagram that Fig. 6 provides for the embodiment of the invention two;
The crucible cover perspective view that Fig. 7 provides for the embodiment of the invention two;
The crucible system perspective view that Fig. 8 provides for the embodiment of the invention two;
The crucible cover perspective view that Fig. 9 and Figure 10 provide for the embodiment of the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
The invention discloses a kind of crucible cover and the crucible system with above-mentioned crucible cover, occur to realize the phenomenon that reduces the wasting of resources on the charge amount basis of improving crucible.
Wherein, above-mentioned crucible cover comprises the cover wall of circumferential sealing and the positioning convex at the middle part that is arranged on the cover wall, and the material of cover wall and positioning convex is silicon nitride.
When use producing polysilicon, above-mentioned crucible cover is arranged on the quartz crucible, thereby has increased the height of crucible, therefore can increase the charging capacity of crucible.In addition, above-mentioned crucible cover and crucible are separation design, the material selection silicon nitride of crucible cover, and silicon nitride is a kind of important structural ceramic material, and itself has oilness, and wear-resistant, and resistance to corrosion is strong, and is anti-oxidant during high temperature.And it can also resist thermal shock, is heated in air more than 1000 ℃, and sharply more sharply heating of cooling can be not cracked yet.Silicon nitride ceramics also has anti-metal melting, and in protective atmosphere 1800 ℃ of high temperature of ability, can realize the recycling.
Embodiment one
As shown in Figure 1 to Figure 3, the disclosed crucible cover 1 of the embodiment of the invention comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumferentially seals, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part in the outside of cover wall 11, is installed in smoothly on the crucible 2 to make things convenient for this crucible cover 1; And improving the repeating utilization factor of crucible cover 1 for the work-ing life that prolongs crucible cover 1, the cover wall 11 in the crucible cover 1 and the material of positioning convex 12 are silicon nitride.
Crucible 2 for different size, in order to improve its charging capacity, the concrete size of the size of corresponding crucible cover 1 is not identical so with it, in embodiments of the present invention, one of them distance along the limit of positioning convex 12 distance cover walls 11 is 30mm-40mm, and another distance along the limit of distance cover wall 11 is 50mm-70mm.In use, cover one of wall 11 stretches in the crucible 2 along the limit, realizes the radial location of crucible cover 1; The axial location of the inconsistent realization crucible of the crucible wall cover 1 of positioning convex 12 and crucible 2.
In order to cooperate the use of existing crucible 2, namely when producing polysilicon, crucible 2 mostly is greatly rectangular configuration, in order to cooperate the use of crucible 2, preferentially selects in the embodiment of the invention cover wall 11 is set to rectangular configuration.
And above-mentioned positioning convex 12 can be the outside that closed is distributed in cover wall 11 when reality is used, as shown in Figure 1 to Figure 3; Can also be the outside that shape intermittently is distributed in cover wall 11, as shown in Figure 9.
The embodiment of the invention also discloses a kind of crucible system, as shown in Figure 4, this crucible system comprises crucible 2 and crucible cover 1, and crucible cover 1 comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumferentially seals, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part in the outside of cover wall 11, is installed in smoothly on the crucible 2 to make things convenient for this crucible cover 1; And improving the repeating utilization factor of crucible cover 1 for the work-ing life that prolongs crucible cover 1, the cover wall 11 in the crucible cover 1 and the material of positioning convex 12 are silicon nitride; Cover wall 11 fits with the crucible wall of crucible 2, and crucible 2 is inconsistent along limit and positioning convex 12.
Crucible 2 rectangular configuration preferably in embodiments of the present invention, corresponding crucible cover 1 preferably also is rectangular configuration with it.
For fixing crucible cover 1, in the embodiment of the invention, one of them distance along the limit of positioning convex 12 distance cover walls 11 is 30mm-40mm, and another distance along the limit of distance cover wall 11 is 50mm-70mm.In use, cover one of wall 11 stretches in the crucible 2 along the limit, realizes the radial location of crucible cover 1; Positioning convex 12 is inconsistent with the crucible wall of crucible 2, realizes the axial location of crucible cover 1, because crucible cover 1 axially and radially all have location, crucible cover 1 can realize stable being arranged on the crucible 2.
Embodiment two
To shown in Figure 7, the disclosed crucible cover 1 of the embodiment of the invention comprises cover wall 11 and positioning convex 12 such as Fig. 5, and wherein, this cover wall 11 circumferentially seals, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part of the inboard of cover wall 11, is installed in smoothly on the crucible 2 to make things convenient for this crucible cover 1; And improving the repeating utilization factor of crucible cover 1 for the work-ing life that prolongs crucible cover 1, the cover wall 11 in the crucible cover 1 and the material of positioning convex 12 are silicon nitride.
Crucible 2 for different size, in order to improve its charging capacity, the concrete size of the size of corresponding crucible cover 1 is not identical so with it, in embodiments of the present invention, one of them distance along the limit of positioning convex 12 distance cover walls 11 is 30mm-40mm, and another distance along the limit of distance cover wall 11 is 50mm-70mm.In use, the crucible wall of crucible 2 stretches in the cover wall 11, realizes the radial location of crucible cover 1; The axial location of the inconsistent realization crucible of the crucible wall cover 1 of positioning convex 12 and crucible 2.
In order to cooperate the use of existing crucible 2, namely when producing polysilicon, crucible 2 mostly is greatly rectangular configuration, in order to cooperate the use of crucible 2, preferentially selects in the embodiment of the invention cover wall 11 is set to rectangular configuration.
And above-mentioned positioning convex 12 can be the inboard that closed is distributed in cover wall 11 when reality is used, and is extremely shown in Figure 7 such as Fig. 5; Can also be the inboard that shape intermittently is distributed in cover wall 11, as shown in figure 10.
The embodiment of the invention also discloses a kind of crucible system, as shown in Figure 8, this crucible system comprises crucible 2 and crucible cover 1, and crucible cover 1 comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumferentially seals, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part of the inboard of cover wall 11, is installed in smoothly on the crucible 2 to make things convenient for this crucible cover 1; And improving the repeating utilization factor of crucible cover 1 for the work-ing life that prolongs crucible cover 1, the cover wall 11 in the crucible cover 1 and the material of positioning convex 12 are silicon nitride; Cover wall 11 fits with the crucible wall of crucible 2, and crucible 2 is inconsistent along limit and positioning convex 12.
Crucible 2 rectangular configuration preferably in embodiments of the present invention, corresponding crucible cover 1 preferably also is rectangular configuration with it.
For fixing crucible cover 1, in the embodiment of the invention, one of them distance along the limit of positioning convex 12 distance cover walls 11 is 30mm-40mm, and another distance along the limit of distance cover wall 11 is 50mm-70mm.In use, the crucible wall of crucible 2 stretch to cover wall 11 in, realize the radial location of crucible cover 1; Positioning convex 12 is inconsistent with the crucible wall of crucible 2, realizes the axial location of crucible cover 1, because crucible cover 1 axially and radially all have location, crucible cover 1 can realize stable being arranged on the crucible 2.
In addition, need to prove that embodiment one and embodiment two differences are the setting of the position of positioning convex 12, the inboard that positioning convex 12 can be arranged on cover wall 11 can also be arranged on the outside of covering wall 11, for the structure that is arranged on cover wall 11 outsides owing to will cover of wall 11 and stretch in the crucible along the limit, therefore the dimensional requirement for cover wall 11 is less, waste that therefore can saving resource.And positioning convex 12 is arranged on inboard structure, because crucible is deeply to covering in the wall 11, its dimensional requirement is larger, can realize.Therefore, the present invention preferentially selects the related art scheme of embodiment one.
And the design of the intermittent type of positioning convex 12 also can further reduce the wasting of resources.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from the spirit or scope of the present invention, in other embodiments realization.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. crucible cover, it is characterized in that, comprise the cover wall (11) of circumferential sealing and be arranged on the positioning convex (12) at the middle part of described cover wall (11), described cover wall (11) is silicon nitride with the material of described positioning convex (12).
2. crucible cover as claimed in claim 1, it is characterized in that, described positioning convex (12) is arranged on the outside of described cover wall (11), one of them distance along the limit of the described cover wall of distance (11) is 30mm-40mm, and another distance along the limit of the described cover wall of distance (11) is 50mm-70mm.
3. crucible cover as claimed in claim 1 or 2 is characterized in that, described positioning convex (12) is closed and is distributed on the described cover wall (11).
4. crucible cover as claimed in claim 1 or 2 is characterized in that, described positioning convex (12) is intermittently that shape is distributed on the described cover wall (11).
5. crucible cover as claimed in claim 1 or 2 is characterized in that, described cover wall (11) is rectangular configuration.
6. crucible system, comprise crucible (2), it is characterized in that, also comprise crucible cover (1), described crucible cover (1) comprises the cover wall (11) of circumferential sealing and is arranged on the positioning convex (12) at the middle part of described cover wall (11), described cover wall (11) fits with the crucible wall of described crucible, and described crucible is inconsistent along limit and described positioning convex (12), and described cover wall (11) is silicon nitride with the material of described positioning convex (12).
7. crucible system as claimed in claim 6, it is characterized in that, described positioning convex (12) is arranged on the outside of described cover wall (11), one of them distance along the limit of the described cover wall of distance (11) is 30mm-40mm, and another distance along the limit of the described cover wall of distance (11) is 50mm-70mm.
8. such as claim 6 or 7 described crucible systems, it is characterized in that, described positioning convex (12) is closed and is distributed on the described cover wall (11).
9. such as claim 6 or 7 described crucible systems, it is characterized in that, described positioning convex (12) is intermittently that shape is distributed on the described cover wall (11).
10. such as claim 6 or 7 described crucible systems, it is characterized in that, described cover wall (11) is rectangular configuration.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110206298.8A CN102888651B (en) | 2011-07-22 | 2011-07-22 | A kind of crucible cover and crucible system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110206298.8A CN102888651B (en) | 2011-07-22 | 2011-07-22 | A kind of crucible cover and crucible system |
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| CN102888651A true CN102888651A (en) | 2013-01-23 |
| CN102888651B CN102888651B (en) | 2015-09-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104109903A (en) * | 2014-07-28 | 2014-10-22 | 常熟华融太阳能新型材料有限公司 | Recyclable quartz ceramic crucible for polycrystalline silicon ingot and preparation method of quartz ceramic crucible |
| CN104515391A (en) * | 2014-04-09 | 2015-04-15 | 赣州鑫磊稀土新材料有限公司 | Fence type smelting crucible |
| CN106087054A (en) * | 2016-08-26 | 2016-11-09 | 常熟华融太阳能新型材料有限公司 | A kind of Novel polycrystalline silicon quartz crucible for ingot casting card article |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104515391A (en) * | 2014-04-09 | 2015-04-15 | 赣州鑫磊稀土新材料有限公司 | Fence type smelting crucible |
| CN104515391B (en) * | 2014-04-09 | 2018-03-27 | 赣州鑫磊稀土新材料股份有限公司 | A kind of fence type melting kettle |
| CN104109903A (en) * | 2014-07-28 | 2014-10-22 | 常熟华融太阳能新型材料有限公司 | Recyclable quartz ceramic crucible for polycrystalline silicon ingot and preparation method of quartz ceramic crucible |
| CN106087054A (en) * | 2016-08-26 | 2016-11-09 | 常熟华融太阳能新型材料有限公司 | A kind of Novel polycrystalline silicon quartz crucible for ingot casting card article |
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Denomination of invention: Crucible cap and crucible system Effective date of registration: 20170710 Granted publication date: 20150923 Pledgee: China Co. truction Bank Corp Jiashan branch Pledgor: RENESOLA ZHEJIANG Ltd. Registration number: 2017330000062 |
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Date of cancellation: 20200730 Granted publication date: 20150923 Pledgee: China Co. truction Bank Corp Jiashan branch Pledgor: RENESOLA ZHEJIANG Ltd. Registration number: 2017330000062 |
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