CN102879465A - Making method of Al2O3-Polyaniline composite sensitive membrane - Google Patents
Making method of Al2O3-Polyaniline composite sensitive membrane Download PDFInfo
- Publication number
- CN102879465A CN102879465A CN2011101977439A CN201110197743A CN102879465A CN 102879465 A CN102879465 A CN 102879465A CN 2011101977439 A CN2011101977439 A CN 2011101977439A CN 201110197743 A CN201110197743 A CN 201110197743A CN 102879465 A CN102879465 A CN 102879465A
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- Prior art keywords
- polyaniline
- mixed solution
- composite sensitive
- sensitive film
- al2o3
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Abstract
The invention discloses a making method of an Al2O3-Polyaniline composite sensitive membrane used for detection of the NO2 gas. The method includes: mixing Al2O3 with Polyaniline and dissolving them in ethanol so as to obtain a mixed solution of Al2O3 and Polyaniline; conducting ultrasonic oscillation on the mixed solution of Al2O3 and Polyaniline; dispensing the mixed solution in a sensitive region of one delay line of a double-delay line oscillator; and carrying out vacuum drying to form the Al2O3-Polyaniline composite sensitive membrane. The making method of the Al2O3-Polyaniline composite sensitive membrane provided by the invention employs dispensing as a film forming technology, which has the characteristics of simpler dispensing, easy operation, and low cost compared with other film forming technologies such as magnetron sputtering, CVD, and sol-gel method, etc., thus being suitable for mass production.
Description
Technical field
The present invention relates to the surface acoustic wave gas sensor technology field, particularly a kind of Al
2O
3Method for making with polyaniline (Polyaniline) composite sensitive film.
Background technology
Surface acoustic wave (SAW) gas sensor is compared with the sensor of other types a lot of good characteristics, has that volume is little, lightweight, precision is high, resolution is high, antijamming capability is strong, numerous characteristics such as highly sensitive, valid analysing range good linearity.
The basic functional principle of SAW gas sensor is to treat the absorption of side gas by the sensitive membrane that the SAW device surface covers, cause SAW sensor electrical conductance and qualitative change, thereby cause the change of the oscillation frequency of SAW oscillator, realize monitoring and measurement to gas with this, therefore to produce sound surperficial propagation wave sensor component, the wherein making of the sensitive membrane key especially of high sensitivity and quality.
Along with the fast development of sociometric technique and industry, the volume fraction of the atmosphere pollution of real time monitoring often is low to moderate 10
-6Even 10
-9Level, this sensor that just requires to monitor dusty gas will have enough sensitivity and selectivity.Sensitive membrane is a very important step in the sensor component manufacturing process, a transducer sensitivity, and the quality that detects quality is determined by the quality of film quality to a great extent.
Since the sixties in last century, the metal-oxide semiconductor (MOS) gas sensor just occupies the half of the country of gas sensor with higher sensitivity, the response advantage such as rapid.But these sensor overwhelming majority need at high temperature to detect just to reach a good sensitivity, selectivity characteristic and high temperature not only affect the stablizing effect of sensor measurement, and can bring the extra problems such as power attenuation, seem important especially so can produce at normal temperatures the gas sensor of quick, sensitive detection low concentration, this has higher requirement also for the making of film.Researched and developed again in recent years some new materials, the focus of exploitation mainly concentrates on the compound substance of metal oxide and polymkeric substance.
Summary of the invention
The technical matters that (one) will solve
In view of this, fundamental purpose of the present invention provides a kind of for detection of NO
2The Al of gas
2O
3Method for making with the polyaniline composite sensitive film.
(2) technical scheme
For achieving the above object, the invention provides a kind of Al
2O
3With the method for making of polyaniline composite sensitive film, for detection of NO
2Gas, the method comprises:
With Al
2O
3Mix with Polyaniline and to be dissolved in the ethanol, make Al
2O
3Mixed solution with Polyaniline;
To this Al
2O
3Carry out sonic oscillation with the mixed solution of Polyaniline;
Drip in the sensitizing range of a lag line of delay line type oscillator and to be coated with this mixed solution;
Vacuum drying forms Al
2O
3With the Polyaniline composite sensitive film.
In the such scheme, described with Al
2O
3Mix with Polyaniline and to be dissolved in the ethanol, make Al
2O
3With the step of the mixed solution of Polyaniline, be to be 1: 2 Al with mass ratio
2O
3Evenly mix with Polyaniline and to be dissolved in 3 times in the ethanol of Polyaniline, make Al
2O
3Mixed solution with Polyaniline.
In the such scheme, described to this Al
2O
3Carrying out the step of sonic oscillation with the mixed solution of Polyaniline, is with this Al
2O
3Fully stir with the mixed solution of Polyaniline and to be placed in the ultrasonic machine vibration 2 hours, it is fully disperseed.
In the such scheme, the step that is coated with this mixed solution is dripped in the sensitizing range of a described lag line at delay line type oscillator, is to draw part Al with pipettor
2O
3With the mixed solution of Polyaniline, and with this Al
2O
3Drip the sensitizing range of a lag line that is coated in delay line type oscillator with the mixed solution of Polyaniline.
In the such scheme, described vacuum drying step is to be put into moisture and the organism of removing wherein in dry 4 hours in the vacuum drying chamber with dripping the device that scribbles mixed solution, forms Al
2O
3With the Polyaniline composite sensitive film.
(3) beneficial effect
1, Al provided by the invention
2O
3With the method for making of Polyaniline composite sensitive film, its film technique is to drip to be coated with, and compares the film techniques such as other magnetron sputterings, CVD, sol-gal process, drips to be coated with simplyr, easy to operate, low-cost, is fit to produce in enormous quantities.
2, Al provided by the invention
2O
3With the method for making of Polyaniline composite sensitive film, making be Al
2O
3With the Polyaniline composite sensitive film, need high temperature to detect this Al compared to some metal oxides
2O
3Can at room temperature detect NO with the Polyaniline composite sensitive film
2Gas is compared to the response of some polymkeric substance with need dozens of minutes release time, this Al
2O
3With the response of Polyaniline composite sensitive film with need only about tens seconds release time.
3, Al provided by the invention
2O
3With the method for making of Polyaniline composite sensitive film, making be Al
2O
3With the Polyaniline composite sensitive film, this Al
2O
3Very good with Polyaniline composite sensitive film selectivity, to NO
2Gas adsorbability is good, to SO
2And CO
2Gas also has faint absorption, but this faint Adsorption Phase is for NO
2The absorption of gas can be ignored fully.
Description of drawings
Fig. 1 is the synoptic diagram of substrate.
Fig. 2 is with Al
2O
3Be made into Al with Polyaniline
2O
3With the synoptic diagram of Polyaniline composite sensitive film, wherein circle represents moisture, and triangle represents organism.
Fig. 3 is with the Al shown in Fig. 2
2O
3With the synoptic diagram behind Polyaniline composite sensitive film removal moisture and the organism.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Provided by the invention for detection of NO
2The Al of gas
2O
3With the method for making of Polyaniline composite sensitive film, the method by dissolving, sonic oscillation, drip to be coated with the step such as vacuum drying and realize that its concrete steps are as follows: with Al
2O
3Mix with Polyaniline and to be dissolved in the ethanol, make Al
2O
3Mixed solution with Polyaniline; To this Al
2O
3Carry out sonic oscillation with the mixed solution of Polyaniline; Drip in the sensitizing range of a lag line of delay line type oscillator and to be coated with this mixed solution; Vacuum drying forms Al
2O
3With the Polyaniline composite sensitive film.
Embodiment
Present embodiment provide for detection of NO
2The Al of gas
2O
3With the method for making of Polyaniline composite sensitive film, at first get a certain amount of Al
2O
3Evenly mix according to certain ratio with Polyaniline and to be dissolved in a certain amount of ethanol; Then above-mentioned mixed solution is fully stirred to be placed in the ultrasonic machine and vibrated 2 hours, it is fully disperseed; Draw the part mixed solution with pipettor and drip the sensitive membrane district (as shown in Figure 1) that is coated in sensor component, form and contain moisture and organic laminated film; Then as shown in Figure 3, be put into moisture and the organism of removing wherein in dry 4 hours in the vacuum drying chamber with dripping the device that scribbles mixed solution, form Al
2O
3With the Polyaniline composite sensitive film.
Al according to the present invention's making
2O
3With the Polyaniline composite sensitive film, need high temperature to detect compared to some metal oxides, this composite membrane can at room temperature detect NO
2Gas; Compared to the response of some polymkeric substance with need dozens of minutes release time, need only the response of this composite membrane and release time about tens seconds.Described composite membrane selectivity is very good, to NO
2The excellent adsorption of gas is although this composite membrane is to SO
2And CO
2Gas also has faint absorption, but with respect to NO
2The absorption of gas can be ignored fully.In addition, described film technique is to drip to be coated with, and compares the film techniques such as other magnetron sputterings, CVD, sol-gal process, drips to be coated with simplyr, easy to operate, low-cost, is fit to produce in enormous quantities.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. Al
2O
3With the method for making of polyaniline composite sensitive film, for detection of NO
2Gas is characterized in that, the method comprises:
With Al
2O
3Mix with polyaniline and to be dissolved in the ethanol, make Al
2O
3Mixed solution with polyaniline;
To this Al
2O
3Carry out sonic oscillation with the mixed solution of polyaniline;
Drip in the sensitizing range of a lag line of delay line type oscillator and to be coated with this mixed solution;
Vacuum drying forms Al
2O
3With the polyaniline composite sensitive film.
2. Al according to claim 1
2O
3Method for making with the polyaniline composite sensitive film is characterized in that, and is described with Al
2O
3Mix with polyaniline and to be dissolved in the ethanol, make Al
2O
3With the step of the mixed solution of polyaniline, be to be 1: 2 Al with mass ratio
2O
3Evenly mix with polyaniline and to be dissolved in 3 times in the ethanol of polyaniline, make Al
2O
3Mixed solution with polyaniline.
3. Al according to claim 1
2O
3Method for making with the polyaniline composite sensitive film is characterized in that, and is described to this Al
2O
3Carrying out the step of sonic oscillation with the mixed solution of polyaniline, is with this Al
2O
3Fully stir with the mixed solution of polyaniline and to be placed in the ultrasonic machine vibration 2 hours, it is fully disperseed.
4. Al according to claim 1
2O
3Method for making with the polyaniline composite sensitive film is characterized in that, the step that is coated with this mixed solution is dripped in the sensitizing range of a described lag line at delay line type oscillator, is to draw part Al with pipettor
2O
3With the mixed solution of polyaniline, and with this Al
2O
3Drip the sensitizing range of a lag line that is coated in delay line type oscillator with the mixed solution of polyaniline.
5. Al according to claim 1
2O
3Method for making with the polyaniline composite sensitive film is characterized in that, described vacuum drying step is to be put into moisture and the organism of removing wherein in dry 4 hours in the vacuum drying chamber with dripping the device that scribbles mixed solution, forms Al
2O
3With the polyaniline composite sensitive film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101977439A CN102879465A (en) | 2011-07-15 | 2011-07-15 | Making method of Al2O3-Polyaniline composite sensitive membrane |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101977439A CN102879465A (en) | 2011-07-15 | 2011-07-15 | Making method of Al2O3-Polyaniline composite sensitive membrane |
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| Publication Number | Publication Date |
|---|---|
| CN102879465A true CN102879465A (en) | 2013-01-16 |
Family
ID=47480869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101977439A Pending CN102879465A (en) | 2011-07-15 | 2011-07-15 | Making method of Al2O3-Polyaniline composite sensitive membrane |
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|---|---|
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101042363A (en) * | 2007-04-27 | 2007-09-26 | 电子科技大学 | polyaniline nanometer oxidate compound film micro-gas sensors array and method for making same |
| CN101644695A (en) * | 2009-04-23 | 2010-02-10 | 中国科学院声学研究所 | Bulk acoustic wave sensor with high stability |
-
2011
- 2011-07-15 CN CN2011101977439A patent/CN102879465A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101042363A (en) * | 2007-04-27 | 2007-09-26 | 电子科技大学 | polyaniline nanometer oxidate compound film micro-gas sensors array and method for making same |
| CN101644695A (en) * | 2009-04-23 | 2010-02-10 | 中国科学院声学研究所 | Bulk acoustic wave sensor with high stability |
Non-Patent Citations (2)
| Title |
|---|
| F. LOFFREDO ET AL.: "Gas sensor devices obtained by ink-jet printing of polyaniline suspensions", 《MACROMOL. SYMP.》, vol. 2007, no. 247, 31 December 2007 (2007-12-31), pages 357 - 363 * |
| HUA BAI ET AL.: "Gas sensors based on conducting polymers", 《SENSORS》, vol. 2007, no. 7, 7 March 2007 (2007-03-07), pages 267 - 307 * |
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| PB01 | Publication | ||
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Application publication date: 20130116 |