CN102879464A - Making method of polythiophene-zirconia composite sensitive membrane - Google Patents

Making method of polythiophene-zirconia composite sensitive membrane Download PDF

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Publication number
CN102879464A
CN102879464A CN201110197741XA CN201110197741A CN102879464A CN 102879464 A CN102879464 A CN 102879464A CN 201110197741X A CN201110197741X A CN 201110197741XA CN 201110197741 A CN201110197741 A CN 201110197741A CN 102879464 A CN102879464 A CN 102879464A
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China
Prior art keywords
polythiophene
mixed solution
zirconia
zirconia composite
composite sensitive
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Pending
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CN201110197741XA
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Chinese (zh)
Inventor
李冬梅
周文
刘明
谢常青
侯成诚
汪幸
闫学锋
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Priority to CN201110197741XA priority Critical patent/CN102879464A/en
Publication of CN102879464A publication Critical patent/CN102879464A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a making method of a polythiophene-zirconia composite sensitive membrane so as to be used for detection of an SO2 gas. The method includes: mixing polythiophene with zirconia and dissolving the mixture in ethanol to obtain a mixed solution of polythiophene and zirconia; conducting ultrasonic oscillation on the mixed solution of polythiophene and zirconia; applying the mixed solution dropwisely in a sensitive region of one delay line of a double-delay line oscillator; and carrying out vacuum drying to form the polythiophene-zirconia composite sensitive membrane. The making method of the polythiophene-zirconia composite sensitive membrane provided in the invention employs dripping application as a film forming technology, which has the characteristics of simpler dripping application, easy operation, and low cost compared with other film forming technologies such as magnetron sputtering, CVD, and sol-gel method, etc., thus being suitable for mass production.

Description

The method for making of a kind of polythiophene and zirconia composite sensitive film
Technical field
The present invention relates to the surface acoustic wave gas sensor technology field, particularly a kind of polythiophene and zirconia (ZrO 2) method for making of composite sensitive film.
Background technology
Surface acoustic wave (SAW) gas sensor is compared with the sensor of other types a lot of good characteristics, has that volume is little, lightweight, precision is high, resolution is high, antijamming capability is strong, numerous characteristics such as highly sensitive, valid analysing range good linearity.
The basic functional principle of SAW gas sensor is to treat the absorption of side gas by the sensitive membrane that the SAW device surface covers, cause SAW sensor electrical conductance and qualitative change, thereby cause the change of the oscillation frequency of SAW oscillator, realize monitoring and measurement to gas with this, therefore to produce sound surperficial propagation wave sensor component, the wherein making of the sensitive membrane key especially of high sensitivity and quality.
Along with the fast development of sociometric technique and industry, the volume fraction of the atmosphere pollution of real time monitoring often is low to moderate 10 -6Even 10 -9Level, this sensor that just requires to monitor dusty gas will have enough sensitivity and selectivity.Sensitive membrane is a very important step in the sensor component manufacturing process, a transducer sensitivity, and the quality that detects quality is determined by the quality of film quality to a great extent.
Since the sixties in last century, the metal-oxide semiconductor (MOS) gas sensor just occupies the half of the country of gas sensor with higher sensitivity, the response advantage such as rapid.But these sensor overwhelming majority need at high temperature to detect just to reach a good sensitivity, selectivity characteristic and high temperature not only affect the stablizing effect of sensor measurement, and can bring the extra problems such as power attenuation, seem important especially so can produce at normal temperatures the gas sensor of quick, sensitive detection low concentration, this has higher requirement also for the making of film.Researched and developed again in recent years some new materials, the focus of exploitation mainly concentrates on the compound substance of metal oxide and polymkeric substance.
Summary of the invention
The technical matters that (one) will solve
In view of this, fundamental purpose of the present invention provides a kind of for detection of SO 2The polythiophene of gas and ZrO 2The method for making of composite sensitive film.
(2) technical scheme
For achieving the above object, the invention provides the method for making of a kind of polythiophene and zirconia composite sensitive film, for detection of SO 2Gas, the method comprises:
Polythiophene mixed with zirconia be dissolved in the ethanol, make polythiophene and zirconic mixed solution;
This polythiophene and zirconic mixed solution are carried out sonic oscillation;
Drip in the sensitizing range of a lag line of delay line type oscillator and to be coated with this mixed solution;
Vacuum drying forms polythiophene and zirconia composite sensitive film.
In the such scheme, described polythiophene is mixed with zirconia is dissolved in the ethanol, making the step of polythiophene and zirconic mixed solution, is to be that 1: 1 polythiophene evenly mixes in the ethanol that is dissolved in 3 times with zirconia with mass ratio, makes polythiophene and zirconic mixed solution.
In the such scheme, described step of this polythiophene and zirconic mixed solution being carried out sonic oscillation is this polythiophene and zirconic mixed solution fully to be stirred be placed in the ultrasonic machine vibration 2 hours, and it is fully disperseed.
In the such scheme, the step that is coated with this mixed solution is dripped in the sensitizing range of a described lag line at delay line type oscillator, be to divide polythiophene and zirconic mixed solution with the pipettor drawing section, and this polythiophene and zirconic mixed solution dripped the sensitizing range of a lag line that is coated in delay line type oscillator.
In the such scheme, described vacuum drying step is to be put into moisture and the organism of removing wherein in dry 4 hours in the vacuum drying chamber with dripping the device that scribbles mixed solution, forms polythiophene and zirconia composite sensitive film.
(3) beneficial effect
1, the method for making of polythiophene provided by the invention and zirconia composite sensitive film, its film technique are to drip to be coated with, and compare the film techniques such as other magnetron sputterings, CVD, sol-gal process, drip to be coated with simplyr, easy to operate, low-cost, are fit to produce in enormous quantities.
2, the method for making of polythiophene provided by the invention and zirconia composite sensitive film, making be polythiophene and zirconia composite sensitive film, need high temperature to detect compared to some metal oxides, this polythiophene and zirconia composite sensitive film can at room temperature detect SO 2Gas, compared to the response of some polymkeric substance with need dozens of minutes release time, the response of this polythiophene and zirconia composite sensitive film and need only about tens seconds release time.
3, the method for making of polythiophene provided by the invention and zirconia composite sensitive film, making be polythiophene and zirconia composite sensitive film, this polythiophene and zirconia composite sensitive film selectivity are very good, to SO 2Gas adsorbability is good, to NO 2And CO 2Gas also has faint absorption, but this faint Adsorption Phase is for SO 2The absorption of gas can be ignored fully.
Description of drawings
Fig. 1 is the schematic diagram of substrate.
Fig. 2 is with polythiophene and ZrO 2Be made into the schematic diagram of polythiophene and zirconia composite sensitive film, wherein circle represents moisture, and triangle represents organism.
Fig. 3 is with the schematic diagram behind the polythiophene shown in Fig. 2 and zirconia composite sensitive film removal moisture and the organism.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Provided by the invention for detection of SO 2The polythiophene of gas and ZrO 2The method for making of composite sensitive film, the method by dissolving, sonic oscillation, drip to be coated with the step such as vacuum drying and realize, its concrete steps are as follows: polythiophene is mixed with zirconia be dissolved in the ethanol, make polythiophene and zirconic mixed solution; This polythiophene and zirconic mixed solution are carried out sonic oscillation; Drip in the sensitizing range of a lag line of delay line type oscillator and to be coated with this mixed solution; Vacuum drying forms polythiophene and zirconia composite sensitive film.
Embodiment
The present embodiment provide for detection of SO 2The polythiophene of gas and ZrO 2The method for making of composite sensitive film is at first got a certain amount of polythiophene and ZrO 2According to even mixing of certain ratio being dissolved in a certain amount of ethanol; Then above-mentioned mixed solution is fully stirred to be placed in the ultrasonic machine and vibrated 2 hours, it is fully disperseed; Draw the part mixed solution with pipettor and drip the sensitive membrane district (as shown in Figure 1) that is coated in sensor component, form and contain moisture and organic laminated film; Then as shown in Figure 3, be put into moisture and the organism of removing wherein in dry 4 hours in the vacuum drying chamber with dripping the device that scribbles mixed solution, form polythiophene and ZrO 2Composite sensitive film.
Polythiophene and ZrO according to the present invention's making 2Composite sensitive film needs high temperature to detect compared to some metal oxides, and this composite membrane can at room temperature detect SO 2Gas; Compared to the response of some polymkeric substance with need dozens of minutes release time, need only the response of this composite membrane and release time about tens seconds.Described composite membrane selectivity is very good, to SO 2The excellent adsorption of gas is although this composite membrane is to NO 2And CO 2Gas also has faint absorption, but with respect to SO 2The absorption of gas can be ignored fully.In addition, described film technique is to drip to be coated with, and compares the film techniques such as other magnetron sputterings, CVD, sol-gal process, drips to be coated with simplyr, easy to operate, low-cost, is fit to produce in enormous quantities.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1. the method for making of a polythiophene and zirconia composite sensitive film is for detection of SO 2Gas is characterized in that, the method comprises:
Polythiophene mixed with zirconia be dissolved in the ethanol, make polythiophene and zirconic mixed solution;
This polythiophene and zirconic mixed solution are carried out sonic oscillation;
Drip in the sensitizing range of a lag line of delay line type oscillator and to be coated with this mixed solution;
Vacuum drying forms polythiophene and zirconia composite sensitive film.
2. the method for making of polythiophene according to claim 1 and zirconia composite sensitive film, it is characterized in that, described polythiophene is mixed with zirconia is dissolved in the ethanol, make the step of polythiophene and zirconic mixed solution, be to be that 1: 1 polythiophene evenly mixes in the ethanol that is dissolved in 3 times with zirconia with mass ratio, make polythiophene and zirconic mixed solution.
3. the method for making of polythiophene according to claim 1 and zirconia composite sensitive film, it is characterized in that, described step of this polythiophene and zirconic mixed solution being carried out sonic oscillation, be this polythiophene and zirconic mixed solution fully to be stirred be placed in the ultrasonic machine vibration 2 hours, it is fully disperseed.
4. the method for making of polythiophene according to claim 1 and zirconia composite sensitive film, it is characterized in that, the step that is coated with this mixed solution is dripped in the sensitizing range of a described lag line at delay line type oscillator, be to divide polythiophene and zirconic mixed solution with the pipettor drawing section, and this polythiophene and zirconic mixed solution dripped the sensitizing range of a lag line that is coated in delay line type oscillator.
5. the method for making of polythiophene according to claim 1 and zirconia composite sensitive film, it is characterized in that, described vacuum drying step, be to drip the device that scribbles mixed solution to be put into moisture and the organism of removing wherein in dry 4 hours in the vacuum drying chamber, form polythiophene and zirconia composite sensitive film.
CN201110197741XA 2011-07-15 2011-07-15 Making method of polythiophene-zirconia composite sensitive membrane Pending CN102879464A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101042363A (en) * 2007-04-27 2007-09-26 电子科技大学 polyaniline nanometer oxidate compound film micro-gas sensors array and method for making same
CN101644695A (en) * 2009-04-23 2010-02-10 中国科学院声学研究所 Bulk acoustic wave sensor with high stability

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101042363A (en) * 2007-04-27 2007-09-26 电子科技大学 polyaniline nanometer oxidate compound film micro-gas sensors array and method for making same
CN101644695A (en) * 2009-04-23 2010-02-10 中国科学院声学研究所 Bulk acoustic wave sensor with high stability

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
F. LOFFREDO ET AL.: "Gas sensor devices obtained by ink-jet printing of polyaniline suspensions", 《MACROMOL. SYMP.》 *
HUA BAI ET AL.: "Gas sensors based on conducting polymers", 《SENSORS》 *

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Application publication date: 20130116