CN102879103B - Method for correcting error of polarization detection device - Google Patents

Abstract

The invention discloses a method for correcting an error of a polarization detection device. The polarization detection device comprises a phase retarder, an analyzer and a photoelectric detector which are sequentially arranged along an optical axis of the device system, wherein the output of the photoelectric detector is connected with a signal processing system; and the linearly polarized light with the Stokes parameter of (1, 1, 0, 0) enters the polarization detection device. The method comprises the following steps of: setting the angle of a transparent shaft of the analyzer to be 0 and performing measurement for the first time to obtain a first measurement error of the normalized Stokes parameter; setting the angle of the transparent shaft of the analyzer to be 45 degrees and performing measurement for the second time to obtain a second measurement error of the normalized Stokes parameter; and solving the phase retardation error of the phase retarder, the fast axis angle error and the transparent shaft angle error of the analyzer in the polarization detection device so as to realize error correction. According to the method, the device error in the polarization detection device can be measured under the condition that the polarization detection device does not need to be detached, so that the device error is corrected.

Description

The bearing calibration of device for testing polarization device error

Technical field

The present invention relates to device for testing polarization, particularly a kind of bearing calibration of device for testing polarization device error.

Background technology

The progress of semiconductor fabrication is always with the power that is reduced to of the increase of the reducing of exposure wavelength, numerical aperture of projection objective and photoetching process factor k1.Recent years, immersion lithography is developed rapidly.In immersion lithography, adopt between the photoresist of certain liquid filling on the last a slice eyeglass of object lens and silicon chip, the numerical aperture of projection objective is significantly improved.When the numerical aperture of projection objective approaches 0.8 or when larger, the polarization state of illumination light is very important on the impact of optical patterning.Adopting suitable polarized illumination is a kind of strong method that improves image contrast in large-numerical aperture situation.For different lighting systems, polarization illumination requires to form different linear polarization, as x direction polarized light, y direction polarized light, radial polarisation light, tangential polarization light etc.

When using polarized illumination, there is many factors polarisation of light state in the illuminator of projection aligner.Most importantly the intrinsic birefringence of optical material and stress birefrin reduce polarisation of light degree.In addition, the polarization characteristic of optical thin film, light also can affect polarisation of light state in reflection and the refraction at interface.Therefore, in polarized-light lighting system, due to the needs of Polarization Control, should detect in real time the polarization state of illumination light, and the rotating wave plate in FEEDBACK CONTROL illuminator, the linearly polarized light output of high-polarization guaranteed.In addition, also need to carry out dress school and the maintenance of polarization illumination detection for litho machine.Formerly technology 1(Jap.P.: Te Open 2005-005521) a kind of polarization parameter pick-up unit that utilizes rotatable phase delayer proposed.Fig. 3 is the schematic diagram of illumination iris polarization parameter pick-up unit in the projection aligner that formerly technology 1 proposes.As shown in Figure 3, this polarization parameter pick-up unit comprises pinhole mask 10, transform lens group 20, phase delay device 2 and driver 6 thereof, analyzer 3, photodetector 4 and signal processing system 5.Illuminating bundle passes through, after the pin hole 101 in pinhole mask 10, through transform lens group 20, to become parallel beam.This parallel beam is as incident beam 1, successively by being surveyed by photodetector 4 after phase delay device 2 and analyzer 3.

Described pinhole mask 10 be placed in projection aligner mask face or near, or with the plane of mask face conjugation or neighbouring (silicon chip face or near, or with the plane of silicon chip face conjugation or near).

While utilizing device in technology 1 formerly to measure, the systematic optical axis rotation of phase delay device 2 winding apparatus, utilize formerly technology 1 and formerly technology 2(Jap.P.: Te Open 2006-179660) in data processing method the electric signal of photodetector output is processed, can obtain the Stokes' parameter of incident beam.But the phase delay device of this device and analyzer are all operated in deep ultraviolet wave band, at this wave band, be difficult to manufacture desirable device according to design objective, therefore can produce Stokes' parameter measuring error.

For this reason, formerly technology 2 has proposed not to be subject to the impact of phase delay device and analyzer correlated error, the method for high-precision measurement polarization parameter.The method is before forming device for testing polarization with wave plate and analyzer, to measure the polarization characteristic of each device, comprises that light transmission shaft direction, the extinction ratio of the interior distribution of face, quick shaft direction and the analyzer of retardation of wave plate distributes.But the method still can not be measured the positioning error of the quick shaft direction of the phase delay device that is arranged on device for testing polarization and the direction of analyzer light transmission shaft, cannot eliminate the angle orientation error of the device that forms device for testing polarization to the impact of measuring.Formerly technology 3(Chinese patent: the measuring method that 201010268324.5) has proposed a kind of apparatus error in polarization detection device, but the method need to obtain theoretical curved surface by emulation, and then on theoretical curved surface, find corresponding error point to determine device error according to the polarization azimuth error of twice measurement and degree of polarization error, be similar to the method for enquiry form, determine that the process of error is more loaded down with trivial details.

Summary of the invention

The object of the invention is to supplement above-mentioned the deficiencies in the prior art, a kind of bearing calibration of device for testing polarization device error is provided.By measuring the light transmission shaft angular error of the phase-delay quantity error of the phase delay device occurring in manufacture process and while forming device for testing polarization, fast axle angular error and analyzer, it according to the result recording, is the device error of recoverable device for testing polarization.

Technical solution of the present invention is as follows:

A kind of bearing calibration of device for testing polarization device error, the formation of described device for testing polarization comprises the phase delay device setting gradually along apparatus system optical axis, analyzer and photodetector, the output of this photodetector connects signal processing system, described phase delay device can rotate by winding apparatus systematic optical axis under the driving of driver, incident beam is parallel to systematic optical axis and is incident to described phase delay device and analyzer, and surveyed by described photodetector, the electric signal of this photodetector output is sent into described signal processing system and is carried out data processing, it is characterized in that:

While utilizing described device for testing polarization to carry out Polarization Detection, the light transmission shaft angle of the phase-delay quantity of phase delay device, fast axle initial angle and analyzer is known, as initial parameter;

Described incident beam is horizontal direction linearly polarized light, and its Stokes' parameter is (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0);

Original state while measuring is for the first time that the light transmission shaft angle of described analyzer is 0 degree, measures for the first time the measuring error for the first time of normalization Stokes' parameter;

Original state while measuring is for the second time that the light transmission shaft angle of described analyzer is 45 degree, measures for the second time the measuring error for the second time of normalization Stokes' parameter;

Described signal processing system is processed the normalization Stokes' parameter measuring error obtaining for twice, obtain afterwards as calculated the light transmission shaft angular error of the phase-delay quantity error of phase delay device in device for testing polarization, fast axle angular error and analyzer, can correcting device error according to the result recording.

Its concrete aligning step of bearing calibration of described device for testing polarization device error is as follows:

1. the original state of measuring is for the first time set: establishing systematic optical axis is the z axle of Cartesian coordinates, the forward of z axle is light beam working direction, the plane vertical with z axle is xy plane, take the polarization direction of the horizontal direction linearly polarized light of incident as x direction of principal axis, angle between the fast axle of x axle positive dirction and phase delay device is fast shaft angle degree θ, angle between x axle positive dirction and analyzer light transmission shaft is light transmission shaft angle [alpha], the phase-delay quantity of phase delay device is δ, take the design parameter of described phase delay device and analyzer as benchmark, adjust the initial fast shaft angle degree θ of described phase delay device ₀, described analyzer light transmission shaft angle be 0 degree, and to set this state be the original state of measuring for the first time,

2. measure for the first time: utilize the phase delay device rotation described in driver drives, described photodetector is surveyed light signal output electrical signals, described electric signal, after described signal processing system data processing, obtains normalization Stokes' parameter (1, the S of incident beam ₁₁, S ₁₂, S ₁₃), with known incident beam Stokes' parameter (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0) compare, obtain the S of normalization Stokes' parameter ₁₁and S ₁₂measuring error is for the first time:

ΔS ₁₁=S ₁₁-S ₀₁=S ₁₁-1，ΔS ₁₂=S ₁₂-S ₀₂=S ₁₂-0=S ₁₂；

3. the original state of measuring is for the second time set: the light transmission shaft angle of identical, the described analyzer of the initial angle of the fast shaft angle degree of adjusting described phase delay device when measuring is for the first time 45 degree, and to set this state be the original state of measuring for the second time;

4. measure for the second time: the phase delay device rotation described in described driver drives, described photodetector is surveyed light signal output electrical signals, described electric signal carries out data processing through described signal processing system to described electric signal, obtain normalization Stokes' parameter (1, the S of incident beam ₂₁, S ₂₂, S ₂₃), compare with known incident beam Stokes' parameter (1,1,0,0), obtain normalization Stokes' parameter S ₂₁measuring error be for the second time:

ΔS ₂₁=S ₂₁-S ₀₁=S ₂₁-1；

5. acquisition device error: the phase-delay quantity error delta δ of phase delay device, fast shaft angle degree error delta θ in device for testing polarization ₀and the light transmission shaft angular error Δ α of analyzer and normalization Stokes' parameter between measuring error, there is for the first time, for the second time following relation: 2 Δ δ=Δ S ₁₁=S ₁₁-1,2 Δ α-4 Δ θ ₀=Δ S ₁₂=S ₁₂, 2 Δ α-2 Δ θ ₀+ Δ δ=Δ S ₂₁=S ₂₁-1, try to achieve Δ δ, Δ θ ₀with Δ α;

6. device error correction: while using described device for testing polarization to carry out Polarization Detection, for initial parameter δ, θ ₀with the value of α, utilize respectively Δ δ+δ, Δ θ ₀+ θ ₀replace with the value of Δ α+α, realize the correction of the light transmission shaft angular error of the phase-delay quantity error of phase delay device, fast axle initial angle error and analyzer.

Phase delay device system for winding optical axis described in described driver drives at the uniform velocity rotates, or by driving phase delay device rotation that the position of at least four different angles between the fast axle of phase delay device and described analyzer light transmission shaft can be set.

The present invention is owing to having adopted technique scheme, compared with technology formerly, has the following advantages and good effect:

Compared with technology 2 formerly, the present invention is without dismounting device for testing polarization device in the situation that, by the normalization Stokes' parameter of twice measurement incident beam, can measure the manufacture of phase delay device and analyzer and the error that location forms, complete the device error correction of device for testing polarization.Compared with technology 3 formerly, the present invention is simple, the link such as avoided loaded down with trivial details emulation and table look-up.

Accompanying drawing explanation

Fig. 1 is the related device for testing polarization schematic diagram of the bearing calibration of device for testing polarization device error of the present invention.

Fig. 2 is the process flow diagram of correcting device error.

Fig. 3 is the schematic diagram of illumination iris polarization parameter pick-up unit in existing projection aligner.

Embodiment

Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.

First refer to Fig. 1, Fig. 1 is the related device for testing polarization schematic diagram of the bearing calibration of device for testing polarization device error of the present invention.As seen from Figure 1, the formation of the device for testing polarization the present invention relates to comprises the phase delay device 2 setting gradually along apparatus system optical axis, analyzer 3 and photodetector 4, the output of this photodetector 4 connects signal processing system 5, described phase delay device 2 can rotate by winding apparatus systematic optical axis under the driving of driver 6, light beam is parallel to systematic optical axis and is incident to described phase delay device 2 and analyzer 3, and surveyed by described photodetector 4, the electric signal that this photodetector 4 is exported is sent into described signal processing system 5 and is carried out data processing, obtain the Stokes' parameter of incident beam 1.

The feature of the bearing calibration of device for testing polarization device error of the present invention is:

While utilizing described device for testing polarization to carry out Polarization Detection, the light transmission shaft angle of the phase-delay quantity of phase delay device, fast axle initial angle and analyzer is known, as initial parameter;

Described incident beam is horizontal direction linearly polarized light, and its Stokes' parameter is (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0);

Original state while measuring is for the first time that the fast shaft angle degree of described phase delay device 2 is that the light transmission shaft angle of unspecified angle, described analyzer 3 is 0 degree;

Original state while measuring is for the second time to measure for the first time on the basis of original state, rotates the light transmission shaft angle 45 of described analyzer 3 and spends;

Twice measurement carried out to data processing, obtain device error, can realize the device error correction of device for testing polarization.

For the ease of the understanding of the present invention, about key concept of the present invention with according to being explained as follows:

The device error of described device for testing polarization comprises: when the foozle between phase delay device 2 quick shaft directions and design parameter and formation device for testing polarization, the positioning error of quick shaft direction can be summed up as fast axle angular error; Foozle between phase-delay quantity and the design parameter of phase delay device 2, the external environment such as quick shaft direction and the caused phase-delay quantity error of systematic optical axis off plumb positioning error and temperature changes the phase-delay quantity error causing and can be summed up as phase-delay quantity error while forming device for testing polarization; When the foozle between light transmission shaft direction and the design parameter of analyzer 3 and formation device for testing polarization, the axial positioning error of printing opacity can be summed up as light transmission shaft angular error.

Original state during described measurement is before rotatable phase delayer 2 is measured, the residing position of light transmission shaft of the fast axle of phase delay device 2 and analyzer 3.

Described phase delay device 2 is for producing quarter-wave plate, electrooptic modulator or the light ball modulator of 90 degree phase delays.Phase delay device 2 is quarter-wave plate in the present embodiment.

Described driver 6 drives the described phase delay device 2 angle multiple rotary that system for winding optical axis at the uniform velocity rotates or interval is fixing, or by driving phase delay device 2 rotations that at least four different angle positions between the fast axle of phase delay device 2 and described analyzer 3 light transmission shafts can be set.In the present embodiment, driver 6 can drive phase delay device 2 system for winding optical axises at the uniform velocity to rotate.

Analyzer 3 in described device for testing polarization is 100% for the transmitance of the polarization direction linearly polarized light parallel with light transmission shaft in the ideal case; And the transmitance of the linearly polarized light vertical with this light transmission shaft direction is 0.Definition is parallel to light transmission shaft direction and is extinction coefficient p perpendicular to the ratio of the axial linear polarization light intensity of printing opacity transmitance, and ideally p is infinitely great.Analyzer 3 is polarizing prism in the present embodiment.

Described photodetector 4 is two-dimensional array detector or point probe.In the present embodiment, photodetector 4 is point probe.

Described signal processing system 5 utilizes technology 1 formerly and electric signal that formerly data processing method in technology 2 is exported photodetector 4 to process, the Stokes' parameter of the incident beam 1 that output records.

Xyz coordinate system shown in definition Fig. 1, wherein z axle is systematic optical axis, and the positive dirction of z axle is light beam working direction, and xy plane is the plane vertical with systematic optical axis.If the Stokes' parameter of incident beam is S=[S ₀, S ₁, S ₂, S ₃] ^t(upper right corner " T " representing matrix transposition).

Angle between definition x axle positive dirction and quarter-wave plate fast axis is fast shaft angle degree θ, and its scope is-90 °≤θ≤90 °; Angle between definition x axle positive dirction and polarizing prism light transmission shaft is light transmission shaft angle [alpha], and its scope is-90 °≤α≤90 °.

The Muller matrix of the quarter-wave plate of the described rotation of the systematic optical axis around device for testing polarization is:

$M\left(\mathrm{\&theta;}\right)=\left[\begin{array}{cccc}1,& 0,& 0,& 0\\ 0,& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&theta;}+{\sin }^{2}2\mathrm{\&theta;}\cos \mathrm{\&delta;},& \sin 2\mathrm{\&theta;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&theta;}-\sin 2\mathrm{\&theta;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&theta;}\cos \mathrm{\&delta;},& -\sin 2\mathrm{\&theta;}\sin \mathrm{\&delta;}\\ 0,& \sin 2\mathrm{\&theta;}\cos 2\mathrm{\&theta;}-\sin 2\mathrm{\&theta;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&theta;}\cos \mathrm{\&delta;},& {\sin }^{2}2\mathrm{\&theta;}+{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&theta;}\cos \mathrm{\&delta;},& \cos 2\mathrm{\&theta;}\sin \mathrm{\&delta;}\\ 0,& \sin 2\mathrm{\&theta;}\sin \mathrm{\&delta;},& -\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&theta;}\sin \mathrm{\&delta;},& \cos \mathrm{\&delta;}\end{array}\right],---\left(1\right)$

Wherein, the phase-delay quantity that δ is quarter wave plate.

Extinction ratio is that the Muller matrix of p, the light transmission shaft angle analyzer that is α is:

$P\left(\mathrm{\&alpha;}\right)=\left[\begin{array}{cccc}1,& \frac{p-1}{p+1}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;},& \frac{p-1}{p+1}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;},& 0\\ \frac{p-1}{p+1}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&alpha;}+\frac{2\sqrt{p}}{p+1}{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&alpha;},& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}-\frac{2\sqrt{p}}{p+1}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& 0\\ \frac{p-1}{p+1}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}-\frac{2\sqrt{p}}{p+1}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;},& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&alpha;}+\frac{2\sqrt{p}}{p+1}{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&alpha;},& 0\\ 0,& 0,& 0,& \frac{2\sqrt{p}}{p+1}\end{array}\right].---\left(2\right)$

Light beam to be measured is after quarter wave plate and analyzer, and Stokes vector is S'=P (α) M (θ) S.Because the first row of Stokes vector represents the total intensity of light wave, the i.e. intensity level for this reason of the light intensity that photodetector can detect, so be only concerned about the first row numerical value of Stokes vector herein.

Measure about S ₀, S ₁, S ₂, S ₃quaternary linear function be:

$\begin{array}{c}{S_0}^{\&prime;}\left(\mathrm{\&theta;}\right)=S_0+S_1\frac{p-1}{p+1}\{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}+[{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)\cos \mathrm{\&delta;}]+\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\sin 2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)\cos 2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)(1-\cos )\}\\ +S_2\frac{p-1}{p+1}\{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}\sin 2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)\cos 2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)(1-\cos \mathrm{\&delta;})+\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}[{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)\cos \mathrm{\&delta;}\left]\right\}\\ +S_3\frac{p-1}{p+2}[\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\cos 2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)-\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}\sin 2(\mathrm{\&theta;}+{\mathrm{\&theta;}}_0)]\sin \mathrm{\&delta;}\end{array},---\left(3\right)$

Wherein θ ₀for initial (being the original state of quarter wave plate while not rotating) fast shaft angle degree of quarter wave plate.

During measurement, rotate quarter wave plate and change θ.By S ₀' as the function of θ, and by its fourier expansion:

${S_0}^{\&prime;}\left(\mathrm{\&theta;}\right)=\frac{a_0}{2}+\underset{n}{\mathrm{\&Sigma;}}(a_n\cos \mathrm{n\&theta;}+b_n\sin \mathrm{n\&theta;}),---\left(4\right)$

Obtain respectively a ₀, a ₂, b ₂, a ₄and b ₄:

$\frac{a_0}{2}=S_0+\frac{p-1}{p+1}({\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}+{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}){\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}---\left(5\right)$

$a_2=\frac{p-1}{p+1}{\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_3\sin 2(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)\sin \mathrm{\&delta;},---\left(6\right)$

${\mathrm{<figure-callout\; id="2"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_2=-\frac{p-1}{p+1}{\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_3\cos 2(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)\sin \mathrm{\&delta;},---\left(7\right)$

$a_4=\frac{p-1}{p+1}[{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)-{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)]{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2},---\left(8\right)$

${\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4=\frac{p-1}{p+1}[{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)]{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}.---\left(9\right)$

The a that utilization obtains ₀, a ₂, b ₂, a ₄and b ₄, 4 the Stokes' parameter Ss corresponding with polarization state light beam to be measured that obtain by Amplitude Comparison ₀, S ₁, S ₂, S ₃for:

$S_0=\frac{a_0}{2}-{\mathrm{<figure-callout\; id="2"\; label="ctg"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">ctg</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}[a_4\cos 4(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4\sin 4(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)],---\left(10\right)$

${\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1=\frac{p+1}{(p-1){\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}}[a_4\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)],---\left(11\right)$

${\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2=\frac{p+1}{(p-1){\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}}[a_4\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)-{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)],---\left(12\right)$

${\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_3=\frac{-(p+1)b_2}{(p-1)\sin \mathrm{\&delta;}\cos 2(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)}=\frac{(p+1)a_2}{(p-1)\sin \mathrm{\&delta;}\sin 2(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)}.---\left(13\right)$

Can obtain normalization Stokes' parameter is:

S ₀₀=1， (14)

${\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}=\frac{S_1}{S_0}=\frac{\frac{p+1}{(p-1){\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}}\sin [2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)+\mathrm{\&phi;}]}{\frac{a_0}{2\sqrt{{a_4}^2+{{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4}^2}}-{\mathrm{<figure-callout\; id="2"\; label="ctg"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">ctg</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}\sin [4(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)+\mathrm{\&phi;}]},---\left(15\right)$

${\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}=\frac{S_2}{S_0}=\frac{\frac{p+1}{(p-1){\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}}\cos [2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)+\mathrm{\&phi;}]}{\frac{a_0}{2\sqrt{{a_4}^2+{{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4}^2}}-{\mathrm{<figure-callout\; id="2"\; label="ctg"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">ctg</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}\sin [4(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)+\mathrm{\&phi;}]},---\left(16\right)$

$S_{310}=\frac{S_3}{S_0}=\frac{1}{\sqrt{{a_4}^2+{{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4}^2}}\frac{\frac{-(p+1)b_2}{(p-1)\sin \mathrm{\&delta;}\cos 2(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)}}{\frac{a_0}{2\sqrt{{a_4}^2+{{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4}^2}}-{\mathrm{<figure-callout\; id="2"\; label="ctg"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">ctg</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}\sin [4(\mathrm{\&alpha;}-{\mathrm{\&theta;}}_0)+\mathrm{\&phi;}]}.---\left(17\right)$

Wherein $\tan \mathrm{\&phi;}=\frac{a_4}{b_4}=\frac{{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)-{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)}{{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)}=\tan [\mathrm{\&Phi;}-2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)],\tan \mathrm{\&Phi;}=\frac{S_1}{{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2},$

$\begin{array}{c}\sqrt{{a_4}^2+{{\mathrm{<figure-callout\; id="4"\; label="b"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">b</figure-callout>}}_4}^2}\\ =\frac{p-1}{p+1}{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}\sqrt{{[{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)-{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)]}^2+{[{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1\sin 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)+{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2\cos 2(\mathrm{\&alpha;}-2{\mathrm{\&theta;}}_0)]}^2}\\ =\frac{p-1}{p+1}{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}}^2\frac{\mathrm{\&delta;}}{2}\sqrt{{\mathrm{<figure-callout\; id="1"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_1^2+{\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_2^2}\end{array}.$

For obtaining the phase-delay quantity δ of quarter wave plate, the initial fast shaft angle degree θ of quarter wave plate ₀, analyzer light transmission shaft angle [alpha], analyzer the error introduced in normalization Stokes' parameter of extinction ratio p (>=1000) equal error, utilize the expression formula of normalization Stokes' parameter, respectively to δ, θ ₀, α and p carry out differential, can try to achieve the phase-delay quantity error delta δ of quarter wave plate, initial fast shaft angle degree error delta θ ₀, analyzer light transmission shaft angular error Δ α, analyzer extinction ratio error at Stokes' parameter S ₁₀and S ₂₀the systematic error of middle introducing, can obtain:

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;{\mathrm{\&theta;}}_0}\&ap;2\cos \mathrm{\&Phi;}[2+\sin (2\mathrm{\&alpha;}+\mathrm{\&Phi;})]-2\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;},---\left(18\right)$

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;\mathrm{\&alpha;}}\&ap;\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}-2\cos \mathrm{\&Phi;}-\sin 2(\mathrm{\&alpha;}+\mathrm{\&Phi;}),---\left(19\right)$

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;\mathrm{\&delta;}}\&ap;\sin \mathrm{\&Phi;}[1+\sin (2\mathrm{\&alpha;}+\mathrm{\&Phi;})],---\left(20\right)$

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;p}\&ap;\frac{2\sin \mathrm{\&Phi;}}{{(p-1)}^2}\&ap;0.---\left(21\right)$

To S ₂₀after differential, obtain:

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;{\mathrm{\&theta;}}_0}\&ap;2\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}-2\sin \mathrm{\&Phi;}[2+\sin (2\mathrm{\&alpha;}+\mathrm{\&Phi;})],---\left(22\right)$

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;\mathrm{\&alpha;}}\&ap;2\sin \mathrm{\&Phi;}-\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}-\cos 2(\mathrm{\&alpha;}+\mathrm{\&Phi;}),---\left(23\right)$

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;\mathrm{\&delta;}}\&ap;\cos \mathrm{\&Phi;}[1+\sin (2\mathrm{\&alpha;}+\mathrm{\&Phi;})],---\left(24\right)$

$\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;p}\&ap;\frac{2\cos \mathrm{\&Phi;}}{{(p-1)}^2}\&ap;0.---\left(25\right)$

Incident beam is horizontal direction linearly polarized light, and its Stokes' parameter is (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0), now Φ=90 degree.

When α=0 is spent, $\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;{\mathrm{\&theta;}}_0}\&ap;0,\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;\mathrm{\&alpha;}}\&ap;0,\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;\mathrm{\&delta;}}\&ap;2,\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;{\mathrm{\&theta;}}_0}\&ap;-4,\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;\mathrm{\&alpha;}}\&ap;2,\frac{\&PartialD;{\mathrm{<figure-callout\; id="20"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{20}}{\&PartialD;\mathrm{\&delta;}}\&ap;0,$ Have

ΔS ₁₀₍₀₎=S ₁₀₍₀₎-1=2Δδ， (26)

ΔS ₂₀₍₀₎=S ₂₀₍₀₎=2Δα-4Δθ ₀， (27)

When α=45 are spent, $\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;{\mathrm{\&theta;}}_0}\&ap;-2,\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;\mathrm{\&alpha;}}\&ap;2,\frac{\&PartialD;{\mathrm{<figure-callout\; id="10"\; label="S"\; filenames="HDA00002266719700021.png"\; state="\{\{state\}\}">S</figure-callout>}}_{10}}{\&PartialD;\mathrm{\&delta;}}\&ap;1,$ Therefore have

ΔS ₁₀₍₄₅₎=S ₁₀₍₄₅₎-1=2Δα-2Δθ ₀+Δδ。(28)

The ternary linear function group that solves (26), (27) and (28) formula composition can obtain Δ θ ₀, Δ α and Δ δ.

Stokes' parameter is that the horizontal direction linearly polarized light of (1,1,0,0) is incident to device for testing polarization, establishes apparatus error in polarization detection device to be: the phase-delay quantity error delta δ of quarter wave plate, initial fast shaft angle degree error delta θ ₀, analyzer light transmission shaft angular error Δ α.According to the device error of the process flow diagram recoverable device for testing polarization shown in Fig. 2, concrete steps are as follows:

1, the original state of measuring is for the first time set: establishing systematic optical axis is the z axle of Cartesian coordinates, the forward of z axle is light beam working direction, the plane vertical with z axle is xy plane, take the polarization direction of the horizontal direction linearly polarized light of incident as x direction of principal axis, angle between the fast axle of x axle positive dirction and phase delay device is fast shaft angle degree θ, angle between x axle positive dirction and analyzer light transmission shaft is light transmission shaft angle [alpha], the phase-delay quantity of phase delay device is δ, take the design parameter of described phase delay device and analyzer as benchmark, adjust the initial fast shaft angle degree θ of described phase delay device ₀, described analyzer light transmission shaft angle be 0 degree, and to set this state be the original state of measuring for the first time,

2, measure for the first time: utilize the phase delay device rotation described in driver drives, described photodetector is surveyed light signal output electrical signals, described electric signal, after described signal processing system data processing, obtains normalization Stokes' parameter (1, the S of incident beam ₁₁, S ₁₂, S ₁₃), with known incident beam Stokes' parameter (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0) compare, obtain the S of normalization Stokes' parameter ₁₁and S ₁₂measuring error is for the first time

ΔS ₁₁=S ₁₁-S ₀₁=S ₁₁-1，ΔS ₁₂=S ₁₂-S ₀₂=S ₁₂-0=S ₁₂；

3, the original state of measuring is for the second time set: the light transmission shaft angle of identical, the described analyzer of the original state of the fast shaft angle degree of adjusting described phase delay device when measuring is for the first time 45 degree, and to set this state be the original state of measuring for the second time;

4, measure for the second time: the phase delay device rotation described in described driver drives, described photodetector is surveyed light signal output electrical signals, described electric signal carries out data processing through described signal processing system to described electric signal, obtain normalization Stokes' parameter (1, the S of incident beam ₂₁, S ₂₂, S ₂₃), compare with known incident beam Stokes' parameter (1,1,0,0), obtain normalization Stokes' parameter S ₂₁measuring error be for the second time:

ΔS ₂₁=S ₂₁-S ₀₁=S ₂₁-1；

5, acquisition device error: the phase-delay quantity error delta δ of phase delay device, fast shaft angle degree error delta θ in device for testing polarization ₀and the light transmission shaft angular error Δ α of analyzer and normalization Stokes' parameter between measuring error, there is for the first time, for the second time following relation: 2 Δ δ=Δ S ₁₁=S ₁₁-1,2 Δ α-4 Δ θ ₀=Δ S ₁₂=S ₁₂, 2 Δ α-2 Δ θ ₀+ Δ δ=Δ S ₂₁=S ₂₁-1, can be in the hope of Δ δ, Δ θ ₀with Δ α;

6, device error correction: while using described device for testing polarization to carry out Polarization Detection, for initial parameter δ, θ ₀with the value of α, utilize respectively Δ δ+δ, Δ θ ₀+ θ ₀replace with the value of Δ α+α, realize the correction of the light transmission shaft angular error of the phase-delay quantity error of phase delay device, fast axle initial angle error and analyzer.

Figure 3 shows that the schematic diagram of illumination iris polarization parameter pick-up unit in the projection aligner that formerly technology 1 proposes.

The light beam of transform lens group 20 outgoing in described device for testing polarization is parallel beam, and is the lens combination of polarization irrelevant or low-birefringence.

The bearing calibration of device for testing polarization device error of the present invention is applicable to this polarization parameter pick-up unit.Determine error delta θ ₀, after Δ α, Δ δ, by adjust the light transmission shaft angle of the initial fast shaft angle degree of phase delay device and analyzer or in computation process to initiation parameter θ ₀, α, δ revise, realize the device error correction of device for testing polarization, thereby realize the high-acruracy survey of incident beam polarization state.

Claims (2)

1. the bearing calibration of a device for testing polarization device error, the formation of described device for testing polarization comprises the phase delay device setting gradually along apparatus system optical axis, analyzer and photodetector, the output of this photodetector connects signal processing system, described phase delay device can rotate by winding apparatus systematic optical axis under the driving of driver, incident beam is parallel to systematic optical axis and is incident to described phase delay device and analyzer, and surveyed by described photodetector, the electric signal of this photodetector output is sent into described signal processing system and is carried out data processing, it is characterized in that:

While utilizing described device for testing polarization to carry out Polarization Detection, the light transmission shaft angle of the phase-delay quantity of phase delay device, fast axle initial angle and analyzer is known, as initial parameter;

Described incident beam is horizontal direction linearly polarized light, and its Stokes' parameter is (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0);

Original state while measuring is for the first time that the light transmission shaft angle of described analyzer is 0 degree, measures for the first time the measuring error for the first time of normalization Stokes' parameter;

Original state while measuring is for the second time that the light transmission shaft angle of described analyzer is 45 degree, measures for the second time the measuring error for the second time of normalization Stokes' parameter;

Described signal processing system is processed the normalization Stokes' parameter measuring error obtaining for twice, obtain afterwards as calculated the light transmission shaft angular error of the phase-delay quantity error of phase delay device, fast axle angular error and analyzer, and then the device error of recoverable device for testing polarization;

Concrete aligning step is as follows:

1. the original state of measuring is for the first time set: establishing systematic optical axis is the z axle of Cartesian coordinates, the forward of z axle is light beam working direction, the plane vertical with z axle is xy plane, take the polarization direction of the horizontal direction linearly polarized light of incident as x direction of principal axis, angle between the fast axle of x axle positive dirction and phase delay device is fast shaft angle degree θ, angle between x axle positive dirction and analyzer light transmission shaft is light transmission shaft angle [alpha], and the phase-delay quantity of phase delay device is δ.Take described phase delay device and analyzer manufacture and design parameter as benchmark, adjust the initial fast shaft angle degree θ of described phase delay device ₀, described analyzer light transmission shaft angle be 0 degree, and to set this state be the original state of measuring for the first time;

2. measure for the first time: utilize the phase delay device rotation described in driver drives, described photodetector is surveyed light signal output electrical signals, described electric signal, after described signal processing system data processing, obtains normalization Stokes' parameter (1, the S of incident beam ₁₁, S ₁₂, S ₁₃), with known incident beam Stokes' parameter (S ₀₀, S ₀₁, S ₀₂, S ₀₃)=(1,1,0,0) compare, obtain the S of normalization Stokes' parameter ₁₁and S ₁₂measuring error is for the first time:

ΔS ₁₁=S ₁₁-S ₀₁=S ₁₁-1，ΔS ₁₂=S ₁₂-S ₀₂=S ₁₂-0=S ₁₂；

3. the original state of measuring is for the second time set: the light transmission shaft angle of identical, the described analyzer of the original state of the fast shaft angle degree of adjusting described phase delay device when measuring is for the first time 45 degree, and to set this state be the original state of measuring for the second time;

4. measure for the second time: the phase delay device rotation described in described driver drives, described photodetector is surveyed light signal output electrical signals, described electric signal carries out data processing through described signal processing system to described electric signal, obtain normalization Stokes' parameter (1, the S of incident beam ₂₁, S ₂₂, S ₂₃), compare with known incident beam Stokes' parameter (1,1,0,0), obtain normalization Stokes' parameter S ₂₁measuring error be for the second time:

ΔS ₂₁=S ₂₁-S ₀₁=S ₂₁-1；

5. acquisition device error: the phase-delay quantity error delta δ of phase delay device, fast shaft angle degree error delta θ in device for testing polarization ₀and the light transmission shaft angular error Δ α of analyzer and normalization Stokes' parameter between measuring error, there is for the first time, for the second time following relation:

2 Δ δ=Δ S ₁₁=S ₁₁-1,2 Δ α-4 Δ θ ₀=Δ S ₁₂=S ₁₂, 2 Δ α-2 Δ θ ₀+ Δ δ=Δ S ₂₁=S ₂₁-1, try to achieve Δ δ, Δ θ ₀with Δ α;

6. device error correction: while using described device for testing polarization to carry out Polarization Detection, for initial parameter δ, θ ₀with the value of α, utilize respectively Δ δ+δ, Δ θ ₀+ θ ₀replace with the value of Δ α+α, realize the correction of the light transmission shaft angular error of the phase-delay quantity error of phase delay device, fast axle initial angle error and analyzer.

2. the bearing calibration of device for testing polarization device error according to claim 1, it is characterized in that the phase delay device system for winding optical axis described in described driver drives at the uniform velocity rotates, or by driving phase delay device rotation that the position of at least four different angles between the fast axle of phase delay device and described analyzer light transmission shaft can be set.

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