CN102873459A - Atomic beam filling processing device - Google Patents
Atomic beam filling processing device Download PDFInfo
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- CN102873459A CN102873459A CN2012103627311A CN201210362731A CN102873459A CN 102873459 A CN102873459 A CN 102873459A CN 2012103627311 A CN2012103627311 A CN 2012103627311A CN 201210362731 A CN201210362731 A CN 201210362731A CN 102873459 A CN102873459 A CN 102873459A
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- atomic beam
- axis loading
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- circular disk
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Abstract
The invention discloses an atomic beam filling processing device, and relates to a workpiece surface processing method. The device comprises a base, a linear motor, an X-axis bearing plate, a Y-axis bearing plate, supports, a beam, a Z-axis bearing plate, a rotating disk, a fixing seat, a servomotor, an atomic beam generator, an atomic beam energy control device and a collimating device, wherein the linear motor is fixed on the base and is fixedly connected with the X-axis bearing plate which is connected with the base; the Y-axis bearing plate is connected with the X-axis bearing plate, and the Z-axis bearing plate is connected with the beam; the supports are fixed at two ends of the base; the beam is connected with the supports; the rotating disk is fixed on the Z-axis bearing plate; the servomotor is fixed on the Z-axis bearing plate; the tail of a rotating shaft of the servomotor is provided with a gear; the atomic beam generator is arranged on the upper part of the atomic beam energy control device; the collimating device is arranged at the bottom of the atomic beam energy control device and is aligned with a workpiece surface defect; the atomic beam energy control device is fixed on the rotating disk through the fixing seat; and an atomic beam filling device is arranged on the Z-axis bearing plate.
Description
Technical field
The present invention relates to a kind of surface of the work processing method, especially relate to a kind of atomic beam and fill processing unit (plant).
Background technology
Ion beam processing is a kind of typical in fine process and the ultraprecise processing method of sample surfaces take atom and molecule as unit, in microelectronics industry, have wide practical use, in the manufacturing of micromechanics, become indispensable process means (Zhang Dongyan, Chen Techao. a kind of development [J] of Novel ion bundle etching device. the electronics industry special equipment, 2010, (01): 34-36.), this is a new and high technology that relates to the general field such as microelectronics, photoelectricity, precision optical machinery, computer, microanalysis.This technology is mainly used in the micro processing field such as etching, injection, exposure, deposit, mask correction, integrated circuit repairing; Minute folding field and the spacemarching field (Li Xiaoming of the high spatial resolutions such as scanning atomic force microscope, atom-probe, Ying Genyu, Wang Jianru. the development of focused ion beam apparatus and trend [J]. vacuum science and technology, 1992, (06): 478-488.).But ion beam generating device is usually comparatively complicated, and bulky, this has just caused and has added man-hour and inconvenience thereof, and adopts the method for removing to process, and often just there is a local point defect in workpiece, just needs large-area removal processing.Comparatively speaking, if adopt atomic beam to fill processing, so only need be filled for the part, just can save time in a large number, material and energy.
Summary of the invention
The object of the present invention is to provide a kind of efficient higher, the atomic beam that expense is lower is filled processing unit (plant).
The present invention is provided with base, linear electric motors, X-axis loading plate, Y-axis loading plate, pillar, crossbeam, Z axis loading plate, rotating circular disk, holder, servomotor, atomic beam generating means, atomic beam energy control apparatus and collimator apparatus; Described linear electric motors are fixed on the base, and are connected mutually by contiguous block and X-axis loading plate, adopt slide block to be connected with guide rail between X-axis loading plate and the base; Between Y-axis loading plate and the X-axis loading plate, link to each other with contiguous block by linear electric motors between Z axis loading plate and the crossbeam and adopt slide block to be connected with guide rail, pillar is fixed on the base two ends, be connected between crossbeam and the pillar, arc-shaped rack is housed on the rotating circular disk and is fixed on the Z axis loading plate by bearing, servomotor is fixed on the Z loading plate by motor fixing seat, the rotating shaft end of servomotor is equipped with gear, arc-shaped rack engagement on gear and the rotating circular disk, the atomic beam emitter is located at atomic beam energy control apparatus top, collimator apparatus is contained in bottom and the alignment pieces blemish of atomic beam energy control apparatus, the atomic beam energy control apparatus is fixed on the rotating circular disk by holder, and rotating circular disk is used for realizing the adjustment of atomic beam emission angle; Workpiece is fixed on the Y-axis loading plate, and the X-axis loading plate adopts linear electric motors to drive by the cooperation of slide block and guide rail, thereby realizes the movement of workpiece on X-direction; The Y-axis loading plate is adopted and is realized in the same way the movement of workpiece on Y direction.The atomic beam filling device is installed on the Z axis loading plate, and the Z axis loading plate is adopted the in the same way movement of implement device on Z-direction.The transmission of rotating circular disk by arc-shaped rack and gear cooperates, and the driven by servomotor gear rotates, and the transmission by gear and arc-shaped rack cooperates to rotate rotating circular disk.
The present invention adopts linear electric motors to realize accurate transmitting range and the emission angle of locating and can adjust atomic beam of X-axis, Y-axis and Z axis three axles, processes thereby can carry out more accurate, the comprehensive filling to the defective on free curve surface work pieces surface.
Description of drawings
Fig. 1 is that the structure of the embodiment of the invention forms schematic diagram.
Fig. 2 is the local enlarged diagram of the embodiment of the invention.
Below provide the mark of each critical piece among Fig. 1 and 2:
1-base, 2-linear electric motors, 3-X-axis loading plate, 4-Y-axis loading plate, 5-pillar, 6-crossbeam, 7-Z axis loading plate, 8-rotating circular disk, 9-holder, 10-servomotor, 11-atomic beam generating means, 12-atomic beam energy control apparatus, 13-collimator apparatus, 14-arc-shaped rack, 15-gear, 16-motor fixing seat.
The specific embodiment
Referring to Fig. 1 and 2, the embodiment of the invention is provided with base 1, linear electric motors 2, X-axis loading plate 3, Y-axis loading plate 4, pillar 5, crossbeam 6, Z axis loading plate 7, rotating circular disk 8, holder 9, servomotor 10, atomic beam generating means 11, atomic beam energy control apparatus 12 and collimator apparatus 13; Described linear electric motors 2 are fixed on the base 1, and are connected mutually by contiguous block and X-axis loading plate 3, adopt slide block to be connected with guide rail between X-axis loading plate 3 and the base 1; Between Y-axis loading plate 4 and the X-axis loading plate 3, link to each other with contiguous block by linear electric motors 2 between Z axis loading plate 7 and the crossbeam 6 and adopt slide block to be connected with guide rail, pillar 5 is fixed on base 1 two ends, be connected between crossbeam 6 and the pillar 5, arc-shaped rack 14 is housed on the rotating circular disk 8 and is fixed on the Z axis loading plate 7 by bearing, servomotor 10 is fixed on the Z loading plate 7 by motor fixing seat 16, the rotating shaft end of servomotor 10 is equipped with gear 15, arc-shaped rack 14 engagements on gear 15 and the rotating circular disk 8, atomic beam emitter 11 is located at atomic beam energy control apparatus 12 tops, collimator apparatus 13 is contained in bottom and the alignment pieces blemish of atomic beam energy control apparatus 12, atomic beam energy control apparatus 12 is fixed on the rotating circular disk 8 by holder 9, and rotating circular disk 8 is used for realizing the adjustment of atomic beam emission angle; Workpiece is fixed on the Y-axis loading plate 4, and X-axis loading plate 3 adopts linear electric motors 2 to drive by the cooperation of slide block and guide rail, thereby realizes the movement of workpiece on X-direction; Y-axis loading plate 4 is adopted and is realized in the same way the movement of workpiece on Y direction.The atomic beam filling device is installed on the Z axis loading plate 7, and the Z axis loading plate is adopted the in the same way movement of implement device on Z-direction.Rotating circular disk 8 cooperates by the transmission of arc-shaped rack 14 and gear 15, and servomotor 10 driven wheels 15 rotate, and the transmission by gear 15 and arc-shaped rack 14 cooperates to rotate rotating circular disk 8, thereby realizes the adjustment of atomic beam filling device emission angle.Like this, by X-axis loading plate 3, Y-axis loading plate 4, cooperatively interacting between Z axis loading plate 7 and the rotating circular disk 8 just can be realized the precise positioning of defective, adjusts transmitting range and the emission angle of atomic beam, defective carried out atomic beam fill processing.
Linear electric motors 2 adopt screw to be fixed on the base 1, and be connected mutually by contiguous block and X-axis loading plate 3, adopt slide block to be connected with guide rail between X-axis loading plate 3 and the base 1, between same Y-axis loading plate 4 and the X-axis loading plate 3, link to each other with contiguous block by linear electric motors between Z axis loading plate 7 and the crossbeam 6 and adopt slide block to be connected with guide rail, pillar 5 is connected by screw and is fixed on base 1 two ends, adopt screw to be connected between crossbeam 6 and the pillar 5, arc-shaped rack 14 is housed on the rotating circular disk 8 and is fixed on the Z axis loading plate 7 by bearing, servomotor 10 is fixed on the Z loading plate 7 by motor fixing seat 16, the rotating shaft end of servomotor 10 is equipped with arc-shaped rack 14 engagements on gear 15 and the rotating circular disk 8, atomic beam emitter 11 is located at atomic beam energy control apparatus 12 tops, collimator apparatus 13 is contained in bottom and the alignment pieces blemish of atomic beam energy control apparatus 12, atomic beam energy control apparatus 12 is fixed on the rotating circular disk 8 by holder 9, and rotating circular disk 8 is used for realizing the adjustment of atomic beam emission angle.
During work, workpiece is fixed on the Y-axis loading plate, particular location according to Surface Flaw, drive the linear electric motors below each loading plate, adjust the position of each loading plate, thereby make collimator apparatus aim at defective, then drive servomotor, transmission by gear and arc-shaped rack cooperates, and rotates rotating circular disk, fills processing thereby on specific direction the defective of surface of the work is carried out atomic beam.
Below provide control flow of the present invention, at first free curve surface work pieces is detected, analyze face type error, if surface of the work exists defective then to carry out fill path planning, according to path emission atomic beam filling defect, detect again afterwards; If surface of the work does not exist defective then to finish.The specific works mode is as follows: workpiece is fixed on the Y-axis loading plate, the X-axis loading plate adopts linear electric motors to drive by the cooperation of slide block and guide rail, thereby realize the movement of workpiece on X-direction, the Y-axis loading plate is adopted and is realized in the same way the movement of workpiece on Y direction.The atomic beam filling device is installed on the Z axis loading plate, and the Z axis loading plate is also adopted the in the same way movement of implement device on Z-direction.The transmission of rotating circular disk by arc-shaped rack and gear cooperates, and the driven by servomotor gear rotates, and the transmission by gear and arc-shaped rack cooperates to rotate rotating circular disk, thereby realizes the adjustment of atomic beam filling device emission angle.Like this, by the X-axis loading plate, the Y-axis loading plate, cooperatively interacting between Z axis loading plate and the rotating circular disk just can be realized the precise positioning of defective, adjusts transmitting range and the emission angle of atomic beam, defective carried out atomic beam fill processing.
Claims (1)
1. an atomic beam is filled processing unit (plant), it is characterized in that being provided with base, linear electric motors, X-axis loading plate, Y-axis loading plate, pillar, crossbeam, Z axis loading plate, rotating circular disk, holder, servomotor, atomic beam generating means, atomic beam energy control apparatus and collimator apparatus; Described linear electric motors are fixed on the base, and are connected mutually by contiguous block and X-axis loading plate, adopt slide block to be connected with guide rail between X-axis loading plate and the base; Between Y-axis loading plate and the X-axis loading plate, link to each other with contiguous block by linear electric motors between Z axis loading plate and the crossbeam and adopt slide block to be connected with guide rail, pillar is fixed on the base two ends, be connected between crossbeam and the pillar, arc-shaped rack is housed on the rotating circular disk and is fixed on the Z axis loading plate by bearing, servomotor is fixed on the Z loading plate by motor fixing seat, the rotating shaft end of servomotor is equipped with gear, arc-shaped rack engagement on gear and the rotating circular disk, the atomic beam emitter is located at atomic beam energy control apparatus top, collimator apparatus is contained in bottom and the alignment pieces blemish of atomic beam energy control apparatus, the atomic beam energy control apparatus is fixed on the rotating circular disk by holder, and rotating circular disk is used for realizing the adjustment of atomic beam emission angle; Workpiece is fixed on the Y-axis loading plate, and the X-axis loading plate adopts linear electric motors to drive by the cooperation of slide block and guide rail, and workpiece is mobile in X-direction; The Y-axis loading plate adopts linear electric motors to drive by the cooperation of slide block and guide rail, and workpiece is mobile in Y direction; The atomic beam filling device is installed on the Z axis loading plate, and the Z axis loading plate adopts linear electric motors to drive by the cooperation of slide block and guide rail, and the atomic beam filling device is mobile in Z-direction; The transmission of rotating circular disk by arc-shaped rack and gear cooperates, and the driven by servomotor gear rotates, and the transmission by gear and arc-shaped rack cooperates to rotate rotating circular disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210362731.1A CN102873459B (en) | 2012-09-24 | 2012-09-24 | Atomic beam filling processing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210362731.1A CN102873459B (en) | 2012-09-24 | 2012-09-24 | Atomic beam filling processing device |
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| CN102873459A true CN102873459A (en) | 2013-01-16 |
| CN102873459B CN102873459B (en) | 2015-04-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210362731.1A Expired - Fee Related CN102873459B (en) | 2012-09-24 | 2012-09-24 | Atomic beam filling processing device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569304A (en) * | 2014-12-17 | 2015-04-29 | 浙江工业大学 | Shot blasting treatment mechanism study experimental device |
| CN105479337A (en) * | 2015-12-29 | 2016-04-13 | 无锡中伦精密机床设备制造有限公司 | Numerical control vertical type plane forming grinding machine |
| CN105910683A (en) * | 2015-10-28 | 2016-08-31 | 安徽翼迈科技股份有限公司 | Three-axis adjustable intelligent detection device |
| CN109030967A (en) * | 2018-05-02 | 2018-12-18 | 成都安瑞芯科技有限公司 | Test the devices, systems, and methods of piezoelectric modulus |
| CN109801860A (en) * | 2018-12-29 | 2019-05-24 | 大连益盛达智能科技有限公司 | Full-automatic COG bonding machine IC turnover mechanism |
| CN113117606A (en) * | 2021-05-28 | 2021-07-16 | 中国科学技术大学 | Beam source control device for precisely adjusting direction and position of beam source in vacuum beam source cavity |
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| CN200984688Y (en) * | 2006-12-25 | 2007-12-05 | 雷振钧 | Multifunctional machinery processing auxiliary device |
| CN101222001A (en) * | 2007-01-08 | 2008-07-16 | 李毅 | Solar battery laser marking device |
| CN201645020U (en) * | 2010-04-02 | 2010-11-24 | 无锡华联科技集团有限公司 | Bidirectional swinging mechanism for bevel cutting of cutting machine |
| CN201728451U (en) * | 2009-12-29 | 2011-02-02 | 上海船舶工艺研究所 | Rotary deflection device |
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2012
- 2012-09-24 CN CN201210362731.1A patent/CN102873459B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200984688Y (en) * | 2006-12-25 | 2007-12-05 | 雷振钧 | Multifunctional machinery processing auxiliary device |
| CN101222001A (en) * | 2007-01-08 | 2008-07-16 | 李毅 | Solar battery laser marking device |
| CN201728451U (en) * | 2009-12-29 | 2011-02-02 | 上海船舶工艺研究所 | Rotary deflection device |
| CN201645020U (en) * | 2010-04-02 | 2010-11-24 | 无锡华联科技集团有限公司 | Bidirectional swinging mechanism for bevel cutting of cutting machine |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569304A (en) * | 2014-12-17 | 2015-04-29 | 浙江工业大学 | Shot blasting treatment mechanism study experimental device |
| CN104569304B (en) * | 2014-12-17 | 2016-08-24 | 浙江工业大学 | A kind of bead study mechanism experimental provision |
| CN105910683A (en) * | 2015-10-28 | 2016-08-31 | 安徽翼迈科技股份有限公司 | Three-axis adjustable intelligent detection device |
| CN105479337A (en) * | 2015-12-29 | 2016-04-13 | 无锡中伦精密机床设备制造有限公司 | Numerical control vertical type plane forming grinding machine |
| CN109030967A (en) * | 2018-05-02 | 2018-12-18 | 成都安瑞芯科技有限公司 | Test the devices, systems, and methods of piezoelectric modulus |
| CN109801860A (en) * | 2018-12-29 | 2019-05-24 | 大连益盛达智能科技有限公司 | Full-automatic COG bonding machine IC turnover mechanism |
| CN113117606A (en) * | 2021-05-28 | 2021-07-16 | 中国科学技术大学 | Beam source control device for precisely adjusting direction and position of beam source in vacuum beam source cavity |
| CN113117606B (en) * | 2021-05-28 | 2022-07-15 | 中国科学技术大学 | Beam source control device for precisely adjusting direction and position of beam source in vacuum beam source cavity |
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| CN102873459B (en) | 2015-04-01 |
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Granted publication date: 20150401 Termination date: 20210924 |