CN102867716A - Diamond-metal compound type clamping rod for travelling wave tube and manufacture method of diamond-metal compound type clamping rod - Google Patents
Diamond-metal compound type clamping rod for travelling wave tube and manufacture method of diamond-metal compound type clamping rod Download PDFInfo
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- CN102867716A CN102867716A CN2012103325913A CN201210332591A CN102867716A CN 102867716 A CN102867716 A CN 102867716A CN 2012103325913 A CN2012103325913 A CN 2012103325913A CN 201210332591 A CN201210332591 A CN 201210332591A CN 102867716 A CN102867716 A CN 102867716A
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Abstract
The invention discloses a diamond-metal compound type clamping rod for a travelling wave tube and a manufacture method of the diamond-metal compound type clamping rod, belonging to the technical field of vacuum electronics. The diamond-metal compound type clamping rod is used as one part in a travelling wave tube and high-frequency structure and comprises an artificially synthesized diamond and a metal substrate. The manufacture method of the diamond-metal compound type clamping rod comprises the following steps of: firstly forming a diamond crystal nucleus on the surface of the metal substrate, then artificially synthesizing a diamond layer by using a chemical vapor deposition method, then grinding and polishing the surface of the diamond, and cutting and processing into the diamond-metal compound type clamping rod by using laser. The diamond-metal compound type clamping rod has the advantages of greatly shortening the growing time of diamond, reducing the cost, improving the strength of the clamping rod, and remarkably improving the output power of the travelling wave tube compared with that when a beryllium oxide clamping rod is used.
Description
Technical field
The invention belongs to the vacuum electronic technical field, be specifically related to a kind of diamond for travelling wave tube-metal composite formula supporting rod parts and manufacture method thereof.
Background technology
Travelling wave tube has in fields such as satellite communication, navigator fix, radar detections widely to be used.And the clamping supporting rod is indispensable parts in the helix TWT, and is the critical component that affects the device performance index always.For many travelling wave tube, particularly broad-band TWT, the main factor that limits its power output capacity is the heat-sinking capability of high frequency slow wave system, i.e. the heat-sinking capability of helix supporting rod.The working temperature of deferent segment helix has determined the service behaviour of travelling wave tube, life and reliability.Along with the raising of frequency, particularly enter millimere-wave band, the power capacity of CW TWT sharply descends.This is that electron beam passage and the high-frequency structure of travelling wave tube are less because frequency is higher, and high-frequency loss is the increase of exponential form with frequency.In general, the power capacity of CW TWT with frequency square ratio descend.So the research of helix supporting construction heat-sinking capability is the main direction that improves travelling wave tube power output capacity always.And the performance that plays the medium supporting rod of support and insulating effect is a key factor.
The microwave current vacuum electron device can with dielectric material mainly contain vitreous silica, aluminium oxide, boron nitride, aluminium nitride and beryllium oxide etc.But all there is different shortcomings in above-mentioned material.At present, the most frequently used material of helix supporting rod is beryllium oxide, and it has relatively high thermal conductivity and lower dielectric constant.But beryllium oxide has been difficult to satisfy the requirement of millimeter wave traveling wave tube, says nothing of short millimeter wave traveling wave tube.In addition, beryllium oxide has severe toxicity under pulverulence, and its use is eliminated.Can find out up to the present also do not have a kind of material to satisfy fully, ideally millimeter wave traveling wave tube to the requirement of medium supporting rod.
Artificially synthesizing diamond not only has the highest thermal conductivity and minimum microwave-medium loss in known material, and relative dielectric constant only has 5.5.It is reported that as adopting Buddha's warrior attendant masonry supporting rod, the maximum power capabilities of the millimeter wave traveling wave tube helix structure of expectation is more than the high twice of maximum power capabilities of the helix that adopts the beryllium oxide supporting rod.So diamond will have many-sided advantage as dielectric material, it is desirable travelling wave tube supporting rod material.Yet, use artificially synthesizing diamond to make supporting rod and have following problem.At first, the adamantine cost compare that can be used as supporting rod of high-quality is high.Secondly, the intensity of very thin diamond supporting rod is relatively relatively poor, and assembly difficulty is larger, and is all the more so for short millimeter wave.These factor explanations, single artificially synthesizing diamond that adopts is made supporting rod, also has many weak points.The present invention is directed to above problems, designed a kind of diamond for travelling wave tube-metal composite formula supporting rod.Because diamond is to be grown on the certain thickness metal substrate, shortens dramatically so reach the time of the diamond film of cumulative thickness, has reduced cost; Meanwhile, diamond dependence toughness preferably metal is relied on, and the intensity of the elongated supporting rod after the processing obviously increases.
Summary of the invention
The technical issues that need to address of the present invention are, to there be the weak points such as cost is high, supporting rod intensity is low, assembling difficulty for the supporting rod that adopts artificially synthesizing diamond to make helix TWT, in order to overcome these deficiencies, just need a kind of diamond for travelling wave tube of Design and manufacture-metal material combined type supporting rod, can the Effective Raise travelling wave tube, the radiating efficiency of the helix of millimeter wave and short millimeter wave traveling wave tube particularly, thus power output and the efficient of travelling wave tube improved.
The purpose of this invention is to provide a kind of diamond for travelling wave tube-metal composite formula supporting rod and manufacture method thereof, in order to realize this purpose, the technical scheme that adopts is as follows, a kind of diamond for travelling wave tube-metal composite formula supporting rod, it is characterized in that this supporting rod is shaped as a square-section elongate posts material, along the axially parallel of bar arranged side by side two aspects, an one aspect is metallic substrates, and another aspect is for tightly being attached to the diamond on the metallic substrates.The manufacture method of above-mentioned diamond-metal composite formula supporting rod operates as follows, and a. determines the size of diamond-metal composite formula supporting rod by analog computation; B. choose thermal conductivity height, metal base material that thermal coefficient of expansion is low; C. metal substrate surface processing; D. carry out forming core; E. carry out diamond film with chemical deposition; F. diamond surface grinds; G. diamond surface polishing; H. laser cutting.
Described metal substrate is can grown junction make a concerted effort strong diamond and thermal conductivity is relatively high and thermal coefficient of expansion is less metal material; Described forming core technique comprises bortz powder mechanical polishing method, bortz powder ultrasonic wave facture and back bias voltage original position forming core method; The method of described chemical vapour deposition (CVD) comprises microwave plasma CVD method, hot filament CVD and plasma spraying process; Described grinding and polishing have two purposes, and one is to make coarse diamond surface form bright and clean surface, and another is to make diamond get thickness to reach designing requirement; Described Laser cutting becomes diamond-metal composite formula supporting rod, is to process according to design size.
The invention has the beneficial effects as follows that the time of growing diamond shortens dramatically, reduce cost, the strength increase of supporting rod, the power output of travelling wave tube is than using the beryllium oxide supporting rod obviously to improve.
Description of drawings
Fig. 1 is the combined type supporting rod schematic diagram of a square-section diamond-metal;
Fig. 2 is the adamantine metal substrate schematic diagram of growth;
Fig. 3 is the manufacturing process flow diagram of the combined type supporting rod of diamond-metal.
Embodiment
With reference to Fig. 1, represent the schematic diagram of a square-section diamond-metal composite formula supporting rod.Among the figure, 1 is the diamond of surface finish, and its surface is adjacent to the helix that is held, and 2 is the molybdenum substrate.As the practical application example that is used for a kind of travelling wave tube, the length of the combined type supporting rod of diamond-metal is 52mm, high 0.7mm, and wide 0.2mm, adamantine thickness are 0.2mm; Adopt Mo to do metallic substrates.
With reference to Fig. 2, the metallic substrates schematic diagram of expression growing diamond.Among the figure, 1 is diamond, and 2 is the molybdenum substrate of thickness 0.5mm, diameter 60mm.The molybdenum substrate surface carries out the mechanical polishing forming core with bortz powder first, then adopt microwave plasma CVD method growing diamond, adamantine thickness is about 0.3mm, then grind and polishing diamond, become diamond shown in Figure 1-metal composite formula supporting rod with Laser cutting at last.
With reference to Fig. 3, the manufacturing flow chart of the combined type supporting rod of expression diamond-metal, expression operates according to following steps among the figure:
A. determine the size of diamond-metal composite formula supporting rod by analog computation;
B. choose thermal conductivity height, metal base material molybdenum that thermal coefficient of expansion is low, Mo is processed into thickness 0.5mm, the substrate of diameter 60mm is as metallic substrates;
C. the face of metallic substrates carry out machining (
Polishing);
D. surperficial forming core, density is 1x10
8～1x10
9Cm
-2
E. insert microwave plasma chemical gas phase equipment, carry out diamond film, growthing process parameter is: microwave power 2600W, CH4/H2 mass flow ratio 1/300sccm, air pressure 110 holders, 900 ℃ of substrate temperatures;
F. diamond surface grinds and attenuate;
G. diamond surface polishes, and makes its thickness reach 0.2mm;
H. utilize laser cutting device, the diamond after the polishing-Mo sheet is processed into supporting rod by designing requirement.
Supporting rod is a vitals between tube shell of traveling wave tube and the helix, normally is processed into by the dielectric material that thermal conductivity is high, lossy microwave is little.The heat that high-frequency loss produces in helix mainly is transmitted on the shell by supporting rod and distributes, to reduce the working temperature of helix.As mentioned above, diamond is a kind of desirable supporting rod material, but manufacturing cost is high, and the insufficient strength of the very thin diamond supporting rod after the processing is high.The present invention is intended to for above problem, has designed a kind of supporting rod of the diamond-metal composite for travelling wave tube, and diamond is grown directly upon on the metal substrate.
Claims (2)
1. the diamond that is used for travelling wave tube-metal composite formula supporting rod, it is characterized in that this supporting rod is shaped as a square-section elongate posts material, along the axially parallel of bar arranged side by side two aspects, an one aspect is metallic substrates, and another aspect is for tightly being attached to the diamond on the metallic substrates.
2. the manufacture method by diamond claimed in claim 1-metal composite formula supporting rod operates as follows, and a. determines the size of diamond-metal composite formula supporting rod by analog computation; B. choose thermal conductivity height, metal base material that thermal coefficient of expansion is low; C. metal substrate surface processing; D. carry out forming core; E. carry out diamond film with chemical deposition; F. diamond surface grinds; G. diamond surface polishing; H. laser cutting.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012103325913A CN102867716A (en) | 2012-09-10 | 2012-09-10 | Diamond-metal compound type clamping rod for travelling wave tube and manufacture method of diamond-metal compound type clamping rod |
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| CN2012103325913A CN102867716A (en) | 2012-09-10 | 2012-09-10 | Diamond-metal compound type clamping rod for travelling wave tube and manufacture method of diamond-metal compound type clamping rod |
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| CN102867716A true CN102867716A (en) | 2013-01-09 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103325645A (en) * | 2013-06-19 | 2013-09-25 | 中国电子科技集团公司第十二研究所 | Diamond-electrocoppering composite clamping rod for travelling-wave tube and manufacturing method thereof |
| CN103594306A (en) * | 2013-11-13 | 2014-02-19 | 太原理工大学 | Diamond / metal composite material clamping rod and manufacturing method thereof |
| CN103659566A (en) * | 2013-12-06 | 2014-03-26 | 南京三乐电子信息产业集团有限公司 | Method for machining thin and long small-angle clamping rod used for conical helix assembling |
| CN103779154A (en) * | 2014-01-10 | 2014-05-07 | 中国电子科技集团公司第十二研究所 | Diamond energy transmission window sheet for terahertz-band vacuum device and manufacturing method thereof |
| CN114864360A (en) * | 2022-05-17 | 2022-08-05 | 电子科技大学 | Ultra-wideband helix traveling wave tube and helix slow wave structure thereof |
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| US4278914A (en) * | 1979-10-18 | 1981-07-14 | The United States Of America As Represented By The Secretary Of The Navy | Diamond supported helix assembly and method |
| CN1373492A (en) * | 2002-04-16 | 2002-10-09 | 北京工业大学 | Process for preparing diamond rod of travelling-wave tube |
| US20030151366A1 (en) * | 2002-02-13 | 2003-08-14 | Dayton James A. | Traveling wave tube |
| CN101271803A (en) * | 2007-03-21 | 2008-09-24 | 中国科学院电子学研究所 | Helix TWT slow wave component and production method |
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| US4278914A (en) * | 1979-10-18 | 1981-07-14 | The United States Of America As Represented By The Secretary Of The Navy | Diamond supported helix assembly and method |
| US20030151366A1 (en) * | 2002-02-13 | 2003-08-14 | Dayton James A. | Traveling wave tube |
| CN1373492A (en) * | 2002-04-16 | 2002-10-09 | 北京工业大学 | Process for preparing diamond rod of travelling-wave tube |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103325645A (en) * | 2013-06-19 | 2013-09-25 | 中国电子科技集团公司第十二研究所 | Diamond-electrocoppering composite clamping rod for travelling-wave tube and manufacturing method thereof |
| CN103325645B (en) * | 2013-06-19 | 2016-12-28 | 中国电子科技集团公司第十二研究所 | A kind of diamond for travelling-wave tube-electro-coppering combined type supporting rod and manufacture method thereof |
| CN103594306A (en) * | 2013-11-13 | 2014-02-19 | 太原理工大学 | Diamond / metal composite material clamping rod and manufacturing method thereof |
| CN103659566A (en) * | 2013-12-06 | 2014-03-26 | 南京三乐电子信息产业集团有限公司 | Method for machining thin and long small-angle clamping rod used for conical helix assembling |
| CN103659566B (en) * | 2013-12-06 | 2015-10-28 | 南京三乐电子信息产业集团有限公司 | A kind of conical helix assembling processing method of elongated low-angle supporting rod |
| CN103779154A (en) * | 2014-01-10 | 2014-05-07 | 中国电子科技集团公司第十二研究所 | Diamond energy transmission window sheet for terahertz-band vacuum device and manufacturing method thereof |
| CN103779154B (en) * | 2014-01-10 | 2016-03-30 | 中国电子科技集团公司第十二研究所 | A kind of diamond delivery of energy window of terahertz wave band vacuum device and manufacture method thereof |
| CN114864360A (en) * | 2022-05-17 | 2022-08-05 | 电子科技大学 | Ultra-wideband helix traveling wave tube and helix slow wave structure thereof |
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Application publication date: 20130109 |