CN102834549B - Gas generation apparatus and gas generating processes - Google Patents
Gas generation apparatus and gas generating processes Download PDFInfo
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- CN102834549B CN102834549B CN201180018767.1A CN201180018767A CN102834549B CN 102834549 B CN102834549 B CN 102834549B CN 201180018767 A CN201180018767 A CN 201180018767A CN 102834549 B CN102834549 B CN 102834549B
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/24—Halogens or compounds thereof
- C25B1/245—Fluorine; Compounds thereof
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- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
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- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
- C25B9/17—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
- C25B9/19—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms
- C25B9/23—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms comprising ion-exchange membranes in or on which electrode material is embedded
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Abstract
Output signal is provided to control device from the level sensor being arranged at anolyte compartment.This output signal represents that whether the liquid level of the electrolytic bath in anolyte compartment is higher than altitude datum.The amount of the frequency rising set value of the driving voltage of the pneumatic plant that the liquid level of the electrolytic bath of control device in anolyte compartment to produce in umformer loop higher than altitude datum season.Thus, the speed of rotation of the motor that pneumatic plant is equipped with rises, and presses liter, the pressure drop in cathode compartment from the discharge of the hydrogen of pneumatic plant discharge.Its result, the liquid level of the electrolytic bath in cathode compartment rises and the liquid level of electrolytic bath in anolyte compartment becomes lower than altitude datum.
Description
Technical field
The present invention relates to a kind of gas generation apparatus and the gas generating processes that produce gas.
Background technology
In the past, in the manufacturing process etc. of semi-conductor, in the various uses of the cleaning and surfaction etc. of material, fluorine gas was used.Now, sometimes use fluorine gas self, sometimes use the NF synthesized based on fluorine gas
3(nitrogen trifluoride) gas, NeF(fluoridize neon) gas and ArF(argon fluoride) the various fluorine type gas of gas etc.
In such building site, in order to stably supply fluorine gas, use such as by HF(hydrogen fluoride) electrolysis and produce the fluorine gas generation device of fluorine gas.
Fluorine gas generation device shown in patent documentation 1 has electrolyzer.Be cathode compartment and anolyte compartment by partition wall by zoning in electrolyzer.The electrolytic bath be made up of KF-HF class mixed melting salt is formed in electrolyzer.Negative electrode is set in cathode compartment, anode is set in anolyte compartment.By HF supply line to the electrolytic bath supply HF in electrolyzer, carry out the electrolysis of HF.Thus, from the cathode generates hydrogen gas of electrolyzer, produce fluorine gas from anode.
The outlet of hydrogen is provided with on the top of cathode compartment.The hydrogen produced in cathode compartment is discharged from outlet via the hydrogen line of cathode side.Sandwiched self-acting valve and HF adsorption tower in hydrogen line.And then, the Purge gas gangway being used for supplying non-active gas in cathode compartment is set on the top of cathode compartment.Thereby, it is possible to supply non-active gas by Purge gas gangway from non-active gas line in cathode compartment.Also self-acting valve is folded with in non-active gas line.
The outlet of fluorine gas is provided with on the top of anolyte compartment.The fluorine gas produced in anolyte compartment is discharged from outlet by fluorine gas line.Sandwiched HF adsorption tower and self-acting valve in fluorine gas line.And then, in fluorine gas line, the downstream side of HF adsorption tower and self-acting valve is provided with pneumatic plant unit.In addition, the Purge gas gangway for the indoor supply non-active gas of anode is provided with on the top of anolyte compartment.Thus, anode indoor also can supply non-active gas from non-active gas line by Purge gas gangway.Also self-acting valve is folded with in this non-active gas line.
The level sensor of the liquid level of the electrolytic bath detecting each indoor is provided with in cathode compartment and anolyte compartment.The self-acting valve being located in hydrogen line, fluorine gas line and non-active gas line and the liquid level interlock of the electrolytic bath of each indoor detected by level sensor and opening and closing.By corresponding with the liquid level detected by level sensor and make self-acting valve opening and closing, the variation of the liquid level of electrolytic bath can be suppressed.Thereby, it is possible to the variation of electrolytic condition when suppressing the electrolysis of HF.
Patent documentation 1: Japanese Unexamined Patent Publication 2004-52105 publication.
Invent problem to be solved
But, in order to suppress the variation of the liquid level of electrolytic bath, need the on-off action carrying out self-acting valve continually.Especially, when liquid level always changes, the on-off action in self-acting valve time per unit becomes many.Now, the self-acting valve lost of life, must carry out the maintenance (replacing and maintenance etc.) of self-acting valve continually.Its result, maintenance cost uprises.
Summary of the invention
The object of the present invention is to provide a kind of gas generation apparatus and gas generating processes, the variation of the liquid level of electrolytic bath can be suppressed and reduce maintenance cost.
For solving the means of problem
(1) gas generation apparatus of a scheme of the present invention is the gas generation apparatus producing the 1st and the 2nd gas by electrolysis, has: electrolyzer, is Room the 1st and Room the 2nd by zoning, and collecting comprises by the electrolytic bath of the compound of electrolysis; 1st gas exhaust path, discharges the 1st gas produced in Room the 1st; 2nd gas exhaust path, discharges the 2nd gas produced in Room the 2nd; Level detection portion, detects the liquid level of the electrolytic bath of the 2nd indoor; 1st pump, is arranged at the 1st gas exhaust path, and has motor; 1st umformer loop, produces the driving voltage applied the motor of the 1st pump; Control part, when the liquid level detected by level detection portion is than the altitude datum height preset, controls the 1st umformer loop and the virtual value of the driving voltage of the motor putting on the 1st pump and at least one party of frequency is increased.
In this gas generation apparatus, carry out the electrolysis of the compound being contained in electrolytic bath, thus produce the 1st gas in Room the 1st, in Room the 2nd, produce the 2nd gas.
The 1st gas produced in Room the 1st is discharged by the 1st gas exhaust path by the 1st pump with motor.The 2nd gas produced in Room the 2nd is discharged from the 2nd gas exhaust path.The action by the driving voltage applying to be produced by the 1st umformer loop to motor of 1st pump.
Level detection portion is utilized to detect the liquid level of the electrolytic bath of the 2nd indoor.When the liquid level detected is higher than altitude datum, controls the 1st umformer loop and the virtual value of the driving voltage of the motor putting on the 1st pump and at least one party of frequency are increased.
Now, the rotating speed of the motor of the 1st pump rises, and the discharge based on the 1st gas of the 1st pump presses liter.Thus, the pressure drop of the 1st indoor.Thus, the liquid level being adjusted to the electrolytic bath of the 1st indoor rises, and the liquid level of the electrolytic bath of the 2nd indoor becomes below altitude datum.So the variation of the liquid level of electrolytic bath can be suppressed.
In addition, in the 1st gas exhaust path, the discharge pressure of the 1st gas is regulated by making the speed of rotation of the motor of the 1st pump change, so without the need to regulating the discharge pressure of the 1st gas by the on-off action of open and close valve.Thus, without the need to the maintenance of the early stage deterioration along with open and close valve, maintenance times reduces.Its result, the maintenance cost of gas generation apparatus reduces.
(2) gas generation apparatus also and then can have the 1st pressure detecting portion of the pressure of detection the 1st indoor, and when the liquid level detected by level detection portion is below altitude datum, control part controls to make the pressure detected by the 1st pressure detecting portion close to the 1st target value by the virtual value of driving voltage of the 1st umformer loop generation and at least one party of frequency.
Now, the 1st pressure detecting portion is utilized to detect the pressure of the 1st indoor.When the liquid level detected by level detection portion is below altitude datum, controls by the virtual value of driving voltage of the 1st umformer loop generation and at least one party of frequency and make the pressure detected by the 1st pressure detecting portion close to the 1st target value.
Thus, the rotation speed change of the motor of the 1st pump, based on the discharge pressure change of the 1st gas of the 1st pump.Thus, the pressure of the 1st indoor is adjusted to close to the 1st target value.Thus, the variation of the liquid level of the 2nd indoor can be suppressed and suppress the variation of the pressure of the 1st indoor.
(3) gas generation apparatus also can and then have: the 2nd pump, is arranged at the 2nd gas exhaust path and has motor; 2nd umformer loop, produces the driving voltage putting on the motor of the 2nd pump; With the 2nd pressure detecting portion, detect the pressure of the 2nd indoor, control part controls by the virtual value of driving voltage of the 2nd umformer loop generation and at least one party of frequency and makes the pressure detected by the 2nd pressure detecting portion close to the 2nd target value.
Now, the 2nd gas produced in Room the 2nd is discharged by the 2nd gas exhaust path by the 2nd pump with motor.The action by the driving voltage applying to be produced by the 2nd umformer loop to motor of 2nd pump.
The pressure of the 2nd indoor is detected by the 2nd pressure detecting portion.Control, by the virtual value of driving voltage of the 2nd umformer loop generation and at least one party of frequency, to make the pressure detected by the 2nd pressure detecting portion close to the 2nd target value.
Thus, the rotation speed change of the motor of the 2nd pump, based on the discharge pressure change of the 2nd gas of the 2nd pump.Thus, the pressure of the 2nd indoor is adjusted to close to the 2nd target value.Thus, the variation of the liquid level of the 2nd indoor can be suppressed and suppress the variation of the pressure of the 2nd indoor.
(4) gas generation apparatus also can and then have: the 1st pressure detecting portion, detects the pressure of the 1st indoor; 2nd pump, is arranged at the 2nd gas exhaust path and has motor; 2nd umformer loop, produces the driving voltage putting on the motor of the 2nd pump; 2nd pressure detecting portion, detect the pressure of the 2nd indoor, control part is, when the liquid level detected by level detection portion is below altitude datum, control by the virtual value of driving voltage of the 1st umformer loop generation and at least one party of frequency and make the pressure detected by the 1st pressure detecting portion close to the 1st target value, and control by the virtual value of driving voltage of the 2nd umformer loop generation and at least one party of frequency and make the pressure detected by the 2nd pressure detecting portion close to 2nd target value less than the 1st target value.
Now, the pressure of the 1st indoor is detected by the 1st pressure detecting portion.When the liquid level detected by level detection portion is below altitude datum, controls by the virtual value of driving voltage of the 1st umformer loop generation and at least one party of frequency and make the pressure detected by the 1st pressure detecting portion close to the 1st target value.
Thus, the rotation speed change of the motor of the 1st pump, based on the discharge pressure change of the 1st gas of the 1st pump.Thus, the pressure of the 1st indoor is adjusted to close to the 1st target value.Thus, the variation of the liquid level of the 2nd indoor can be suppressed and suppress the variation of the pressure of the 1st indoor.
In addition, the 2nd gas produced in Room the 2nd is discharged by the 2nd gas exhaust path by the 2nd pump with motor.The action by the driving voltage produced to motor applying the 2nd umformer loop of 2nd pump.
The pressure of the 2nd indoor is detected by the 2nd pressure detecting portion.Control by the virtual value of driving voltage of the 2nd umformer loop generation and at least one party of frequency and make the pressure detected by the 2nd pressure detecting portion close to the 2nd target value.
Thus, the rotation speed change of the motor of the 2nd pump, based on the discharge pressure change of the 2nd gas of the 2nd pump.Thus, the pressure of the 2nd indoor is adjusted to close to the 2nd target value.Thus, the variation of the liquid level of the 2nd indoor can be suppressed and suppress the variation of the pressure of the 2nd indoor.
2nd target value is less than the 1st target value.Now, the pressure of the 1st indoor and the pressure of the 2nd indoor are adjusted to respectively close to the 1st and the 2nd target value, so the pressure of pressure ratio the 1st indoor of the 2nd indoor is low.Thereby, it is possible to suppress the liquid level of the electrolytic bath of the 1st indoor to rise to the situation of the liquid level of the electrolytic bath higher than the 2nd indoor.
(5) gas generation apparatus also can and then have: the 1st open and close valve, is arranged at the 1st gas exhaust path; 2nd open and close valve, is arranged at the 2nd gas exhaust path, and control part opens the 1st and the 2nd open and close valve when carrying out electrolysis in a cell, closes the 1st and the 2nd open and close valve when not carrying out electrolysis in a cell.
Now, when carrying out electrolysis in a cell, the 1st and the 2nd open and close valve is opened, and when not carrying out electrolysis in a cell, the 1st and the 2nd open and close valve is closed.
Thus, when carrying out electrolysis in a cell, the 1st gas produced can be discharged by the 1st gas exhaust path in Room the 1st.In addition, the 2nd gas produced in Room the 2nd can be discharged by the 2nd gas exhaust path.
On the other hand, when not carrying out electrolysis in a cell, can prevent the atmosphere of the outside of gas generation apparatus from being flow backwards to Room the 1st by the 1st gas exhaust path.In addition, can prevent the atmosphere of the outside of gas generation apparatus from being flow backwards to Room the 2nd by the 2nd gas exhaust path.
(6) can Room the 1st be also cathode compartment, Room the 2nd be anolyte compartment.
Now, by the liquid level of the electrolytic bath in detection anolyte compartment of level detection portion.When the liquid level detected is higher than altitude datum, controls the 1st umformer loop and the virtual value of the driving voltage of the motor putting on the 1st pump and at least one party of frequency are increased.
Thus, the rotating speed of the motor of the 1st pump rises, and the discharge based on the 1st gas of the 1st pump presses liter.Thus, the pressure drop in anolyte compartment.And the liquid level being adjusted to the electrolytic bath in anolyte compartment rises, and the liquid level of electrolytic bath in cathode compartment becomes below altitude datum.
(7) the 2nd gases also can be fluorine.In the Room the 2nd producing fluorine, when the electrolysis of compound, the liquid level of electrolytic bath easily rises.Also the variation of the liquid level of the electrolytic bath of the 2nd indoor can be suppressed under such circumstances, so stably fluorine can be supplied.
(8) other the gas generating processes of scheme of the present invention uses be the electrolyzer of Room the 1st and Room the 2nd by zoning and produce the gas generating processes of the 1st and the 2nd gas by electrolysis, have: in Room the 1st and Room the 2nd, produce the 1st and the 2nd gas respectively by applying voltage to the electrolytic bath that is contained in electrolyzer, and by step that the 1st and the 2nd gas produced in Room the 1st and Room the 2nd is discharged respectively by the 1st and the 2nd gas exhaust path; The 1st pump with motor is utilized to control the step of the discharge of the 1st gas by the 1st gas exhaust path; Detect the step of the liquid level of the electrolytic bath of the 2nd indoor; Utilize the 1st umformer loop to the step of the motor applying driving voltage of the 1st pump; When the liquid level detected is higher than the altitude datum preset, controls the 1st umformer loop and make the step that the virtual value of the driving voltage of the motor putting on the 1st pump and at least one party of frequency increase.
In this gas generating processes, by applying voltage to the electrolytic bath be contained in electrolyzer, in Room the 1st, producing the 1st gas, in Room the 2nd, producing the 2nd gas.The the 1st and the 2nd gas produced in Room the 1st and Room the 2nd is discharged respectively by the 1st and the 2nd gas exhaust path.Controlled by the 1st pump with motor by the discharge of the 1st gas of the 1st gas exhaust path.1st pump passes through by the action to motor applying driving voltage of the 1st umformer loop.
Detect the liquid level of the electrolytic bath of the 2nd indoor.When the liquid level detected is higher than altitude datum, controls the 1st umformer loop and the virtual value of the driving voltage of the motor putting on the 1st pump and at least one party of frequency are increased.
Now, the rotating speed of the motor of the 1st pump rises, and the discharge based on the 1st gas of the 1st pump presses liter.Thus, the pressure drop of the 1st indoor.Thus, the liquid level being adjusted to the electrolytic bath of the 1st indoor rises, and the liquid level of the electrolytic bath of the 2nd indoor becomes below altitude datum.So the variation of the liquid level of electrolytic bath can be suppressed.
In addition, in the 1st gas exhaust path, change by making the speed of rotation of the motor of the 1st pump and regulate the discharge pressure of the 1st gas, so regulate the discharge pressure of the 1st gas without using the on-off action of open and close valve.Thus, without the need to the maintenance of the early stage deterioration along with open and close valve, maintenance times reduces.Its result, the maintenance cost of gas generation apparatus reduces.
(9) gas generating processes also can and then have: the step detecting the pressure of the 1st indoor; When the liquid level detected is below the altitude datum that presets, controls the virtual value of driving voltage that produced by the 1st umformer loop and at least one party of frequency and make the step of pressure close to the 1st target value of the 1st indoor detected; Utilize the 2nd pump control with motor by the step of the discharge of the 2nd gas of the 2nd gas exhaust path; Utilize the 2nd umformer loop to the step of the motor applying driving voltage of the 2nd pump; Detect the step of the pressure of the 2nd indoor; Control by the virtual value of driving voltage of the 2nd umformer loop generation and at least one party of frequency and make the close step being less than the 2nd target value of the 1st target value of the pressure of the 2nd indoor detected.
Now, the pressure of the 1st indoor is detected.When the liquid level detected is below altitude datum, controls by the virtual value of driving voltage of the 1st umformer loop generation and at least one party of frequency and make the pressure detected close to the 1st target value.
Thus, the rotation speed change of the motor of the 1st pump, based on the discharge pressure change of the 1st gas of the 1st pump.Thus, the pressure of the 1st indoor is adjusted to close to the 1st target value.Thus, the variation of the liquid level of the 2nd indoor can be suppressed and suppress the variation of the pressure of the 1st indoor.
The 2nd gas produced in Room the 2nd is discharged by the 2nd gas exhaust path by the 2nd pump with motor.The action by the driving voltage produced to motor applying the 2nd umformer loop of 2nd pump.
Detect the pressure of the 2nd indoor.Control by the virtual value of driving voltage of the 2nd umformer loop generation and at least one party of frequency and make the pressure detected close to the 2nd target value.
Thus, the rotation speed change of the motor of the 2nd pump, based on the discharge pressure change of the 2nd gas of the 2nd pump.Thus, the pressure of the 2nd indoor is adjusted to close to the 2nd target value.Thus, the variation of the liquid level of the 2nd indoor can be suppressed and suppress the variation of the pressure of the 2nd indoor.
2nd target value is less than the 1st target value.Now, the pressure of the 1st indoor and the pressure of the 2nd indoor are adjusted to respectively close to the 1st and the 2nd target value, so the pressure of the 2nd indoor is lower than the pressure of the 1st indoor.Thereby, it is possible to suppress the liquid level of the electrolytic bath of the 1st indoor to rise to the situation also higher than the liquid level of the electrolytic bath of the 2nd indoor.
The effect of invention
According to the present invention, the variation of the liquid level of electrolytic bath can be suppressed and reduce maintenance cost.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the formation of the fluorine gas generation device representing one embodiment of the present invention.
Fig. 2 is the block diagram of a part for the Controlling System represented in the fluorine gas generation device of Fig. 1.
Fig. 3 is the chart for illustration of tank level control and pressure controlled concrete example.
Fig. 4 is the schema representing a series of process employing tank level control and pressure controlled electrolysis.
Fig. 5 is the schema representing a series of process employing tank level control and pressure controlled electrolysis.
Fig. 6 is the schematic diagram of the formation of the fluorine gas generation device of the embodiment representing other.
Fig. 7 is the schematic diagram of the formation of the fluorine gas generation device of the embodiment representing again other.
Embodiment
Hereinafter, with reference to the accompanying drawings of gas generation apparatus and the gas generating processes of one embodiment of the present invention.In addition, in the following embodiments, the example as gas generation apparatus illustrates the fluorine gas generation device producing fluorine gas.
(1) formation of fluorine gas generation device
Fig. 1 is the schematic diagram of the formation of the fluorine gas generation device representing one embodiment of the present invention.As shown in Figure 1, fluorine gas generation device 100 has electrolyzer 1.Electrolyzer 1 is by such as Ni(nickel), the metal of Monel metal, pure iron or stainless steel etc. or alloy formed.Be cathode compartment 3 and anolyte compartment 4 by partition wall 2 by zoning in electrolyzer 1.Partition wall 2 is made up of such as Ni or Monel metal.
The electrolytic bath 5 be made up of KF-HF class mixed melting salt is formed in electrolyzer 1.Be provided with in cathode compartment 3 such as by Ni(nickel) negative electrode 6 that forms, in anolyte compartment 4, be provided with the anode 7 be such as made up of low polarity carbon.HF(hydrogen fluoride is supplied to the electrolytic bath 5 in electrolyzer 1 by HF supply-pipe 10), carry out the electrolysis of HF.Thus, mainly produce hydrogen from the negative electrode 6 of electrolyzer 1, mainly produce fluorine gas from anode 7.
On the top of cathode compartment 3, cathode outlet 20a is set.Cathode outlet 20a is connected with one end (upstream extremity) of hydrogen discharge pipe 20.The hydrogen produced in cathode compartment 3 is discharged from cathode outlet 20a by hydrogen discharge pipe 20.Downstream is from upstream to the order sandwiched HF adsorption tower 24 of HF adsorption tower 24, control valve 21, pneumatic plant 22 and control valve 23, control valve 21, pneumatic plant 22 and control valve 23 in hydrogen discharge pipe 20.
NaF etc. is filled in HF adsorption tower 24.This HF adsorption tower 24 adsorbs the HF the mixed gas of hydrogen and the HF discharged from cathode compartment 3.Pneumatic plant 22 is connected with umformer loop 22I.The driving voltage produced by umformer loop 22I is provided to pneumatic plant 22.
The downstream end of hydrogen discharge pipe 20 is connected with the gas relief line of such as factory.Thus, the hydrogen of discharging from cathode compartment 3 is discharged by the gas relief line of factory.
The top of anolyte compartment 4 is provided with anode export 30a.Anode export 30a is connected with one end (upstream extremity) of fluorine gas vent pipe 30.The fluorine gas produced in anolyte compartment 4 is discharged from anode export 30a by fluorine gas vent pipe 30.Downstream is from upstream to order sandwiched HF adsorption tower 34, control valve 31, the pneumatic plant 32 of HF adsorption tower 34, control valve 31, pneumatic plant 32 and control valve 33 in fluorine gas vent pipe 30.
NaF etc. is filled in HF adsorption tower 34.This HF adsorption tower 34 adsorbs HF from the mixed gas of the fluorine gas of discharging from anolyte compartment 4 and HF.Pneumatic plant 32 is connected with umformer loop 32I.The driving voltage produced by umformer loop 32I is provided to pneumatic plant 32.
The downstream end of fluorine gas vent pipe 30 is connected with the manufacture line of such as factory.Thus, the fluorine gas of discharging from anolyte compartment 4 is supplied to the manufacture line etc. of factory with the flow preset.
The pressure warning unit PS1 of the pressure measured in cathode compartment 3 is provided with in cathode compartment 3.The pressure warning unit PS2 of the pressure measured in anolyte compartment 4 is provided with in anolyte compartment 4.And then, in anolyte compartment 4, be provided with the level sensor 40 of the liquid level of the electrolytic bath 5 detected in anolyte compartment 4.
Self-acting valve 11 and current regulator 12 is folded with in HF supply-pipe 10.In order to prevent sucking electrolytic bath 5 to HF supply-pipe 10, connection control valve 13 between the HF supply-pipe 10 and hydrogen discharge pipe 20 in the downstream of current regulator 12.In addition, in HF supply-pipe 10, not shown pressure warning unit is provided with.
In the present embodiment, as pneumatic plant 22,32, respectively use there is metal bellows and motor 22M, 23M(Fig. 2 described later) bellows pneumatic plant.When pneumatic plant 22,32 action, metal bellows are made to stretch by motor 22M, 23M.By regulating the stroke of bellows now and flexible cycle, the discharge pressure of the gas (hydrogen and fluorine gas) based on pneumatic plant 22,23 can be regulated.In addition, be the length of the bellows of the state of extending the most and the difference of the length of the bellows of state of shrinking the most as the stroke of bellows.
(2) Controlling System of fluorine gas generation device
Control device 90 comprises CPU(central operation treatment unit) and storer or minicomputer, control the action of each integrant of fluorine gas generation device 100.
Fig. 2 is the block diagram of a part for the Controlling System represented in the fluorine gas generation device 100 of Fig. 1.As shown in Figure 2, output signal is provided from the level sensor 40 being arranged at anolyte compartment 4 to control device 90.This output signal represents that whether the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than the liquid level preset (hereinafter referred to as altitude datum).Control device 90 controls umformer loop 22I based on the output signal from level sensor 40.
Specifically, when the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than altitude datum, control device 90 makes the amount of the frequency rising set value (such as more than 10Hz below 20Hz) of the driving voltage produced in the 22I of umformer loop.Thus, the speed of rotation of the motor 22M that pneumatic plant 22 is equipped with rises, and the flexible cycle of bellows shortens.Thus, liter is pressed, the pressure drop in cathode compartment 3 from the discharge of the hydrogen of pneumatic plant 22 discharge.Its result, the liquid level of the electrolytic bath 5 in cathode compartment 3 rises and the liquid level of electrolytic bath 5 in anolyte compartment 4 becomes lower than altitude datum.
On the other hand, when the liquid level of the electrolytic bath 5 in anolyte compartment 4 is below altitude datum, control device 90 does not make the frequency of the driving voltage of the pneumatic plant 22 produced in the 22I of umformer loop rise the amount of above-mentioned set value.
In this wise, when the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than altitude datum, control device 90 controls umformer loop 22I in the mode making this liquid level and become below altitude datum.
In the following description, the control of the umformer loop 22I based on the output signal from level sensor 40 realized by control device 90 is called tank level control.
In addition, in these cases, describe the example carrying out tank level control by making the change of frequency of the driving voltage produced in the 22I of umformer loop, but tank level control also can be undertaken by making the virtual value of the driving voltage produced in the 22I of umformer loop change.Now, the discharge pressure of the hydrogen of discharging from pneumatic plant 22 is controlled by making the stroke change of bellows, the pressure change in cathode compartment 3.Its result, the liquid level of the electrolytic bath 5 in cathode compartment 3 changes and regulates the liquid level of anolyte compartment 4.
Tank level control also all can be changed by the virtual value and frequency making the driving voltage produced in the 22I of umformer loop and is carried out.The discharge pressure of the hydrogen of discharging from pneumatic plant 22 is controlled, the pressure change in cathode compartment 3 by making the stroke of bellows and flexible mechanical periodicity.Its result, the liquid level of the electrolytic bath 5 in cathode compartment 3 changes and regulates the liquid level of anolyte compartment 4.
In addition, output signal is provided from the pressure warning unit PS1 being arranged at cathode compartment 3 to control device 90.Control device 90 controls the virtual value of driving voltage that produces in the 22I of umformer loop and at least one party of frequency based on the output signal from pressure warning unit PS1.Thus, the pressure in cathode compartment 3 is regulated.
Such as, when the value (hereinafter referred to as pressure of cathode compartment value) of the pressure in the cathode compartment 3 measured by pressure warning unit PS1 when the electrolysis of HF is inconsistent with set value (target pressure value), control device 90 controls umformer loop 22I and the difference of pressure of cathode compartment value and target pressure value is reduced.In addition, target pressure value is such as set as 100kPa at absolute draft.
And then, provide output signal from the pressure warning unit PS2 being arranged at anolyte compartment 4 to control device 90.Control device 90 controls the virtual value of driving voltage that produces in the 32I of umformer loop and at least one party of frequency based on the output signal from pressure warning unit PS2.Thus, the pressure in anolyte compartment 4 is regulated.
Such as, the value (hereinafter referred to as pressure of anode compartment value) of the pressure in the anolyte compartment 4 measured by pressure warning unit PS2 when electrolysis at HF and set value (target pressure value) inconsistent time, control device 90 controls umformer loop 32I and the difference of pressure of anode compartment value and target pressure value is reduced.In addition, target pressure value is such as set as 100kPa at absolute draft.
In the following description, the control of umformer loop 22I, 32I based on the output signal from pressure warning unit PS1, PS2 of being realized by control device 90 is called pressure-controlling.
Control device 90 is open state at the seasonal control valve 21,23,31,33 of the electrolysis carrying out HF, is the state of closing at the seasonal control valve 21,23,31,33 of the electrolysis not carrying out HF.Thereby, it is possible to prevent from, when not carrying out the electrolysis of HF, the hydrogen in the downstream side of pneumatic plant 22,32 or fluorine gas are sucked cathode compartment 3 or anolyte compartment 4.In addition, control device 90 controls the open and-shut mode of control valve 13.
As mentioned above, in this fluorine gas generation device 100, when the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than altitude datum, controls umformer loop 22I and make this liquid level become below altitude datum.Its reason is described.
When carrying out the electrolysis of HF in the electrolyzer 1 shown in Fig. 1, compared with the liquid level of the electrolytic bath 5 in cathode compartment 3, the liquid level of the electrolytic bath 5 in anolyte compartment 4 more easily rises.Therefore, in the present embodiment, by controlling umformer loop 22I based on the output signal from level sensor 40, the liquid level of electrolytic bath 5 in anolyte compartment 4 can become, higher than during altitude datum, this liquid level is adjusted to below altitude datum, suppressing the variation of liquid level.
Umformer loop 22I is controlled in tank level control.Its reason is described.
As mentioned above, in the fluorine gas generation device 100 of Fig. 1, the fluorine gas of discharging from anolyte compartment 4 is supplied to the manufacture line etc. of factory by fluorine gas vent pipe 30 with the flow preset.Therefore, be preferably retained as roughly certain from the discharge pressure of the fluorine gas of pneumatic plant 32 discharge.
At this, in the present embodiment, the discharge pressure change of the pneumatic plant 22 being located in hydrogen discharge pipe 20 is made by controlling umformer loop 22I.Thus, the flow of the fluorine gas of discharging from fluorine gas vent pipe 30 can not be made to change significantly, the liquid level of the electrolytic bath 5 in anolyte compartment 4 can be adjusted to below altitude datum.
(3) tank level control and pressure controlled concrete example
Fig. 3 is the chart for illustration of tank level control and pressure controlled concrete example.Fig. 3 (a) represents the speed of rotation of motor 22M, 32M when carrying out tank level control and pressure-controlling.In Fig. 3 (a), the longitudinal axis represents speed of rotation, horizontal axis representing time.In addition, thick solid line represents the speed of rotation of motor 22M, and single dotted broken line represents the speed of rotation of motor 32M.
In addition, Fig. 3 (b) represents pressure of cathode compartment value when carrying out tank level control and pressure-controlling and pressure of anode compartment value.In Fig. 3 (b), the longitudinal axis represents pressure, horizontal axis representing time.In addition, thick dashed line represents pressure of cathode compartment value, and solid line represents pressure of anode compartment value.
At moment t0, under the state that the liquid level of the electrolytic bath 5 in anolyte compartment 4 is below altitude datum, start the electrolysis of HF.From moment t0 to moment t1 when the liquid level of electrolytic bath 5 is maintained the state of below altitude datum, control device 90 is based on from pressure warning unit PS1, PS2(Fig. 1) output signal and carry out the control (pressure-controlling) of umformer loop 22I, 32I.
Thus, as shown in Fig. 3 (a), the liquid level of electrolytic bath 5 be below altitude datum during in PP, corresponding to pressure of cathode compartment value and pressure of anode compartment value variation and control umformer loop 22I, 32I, thus the speed of rotation of motor 22M, 32M changes lentamente.In this wise the pressure in the pressure in cathode compartment 3 and anolyte compartment 4 is adjusted to close to target pressure value U.
From moment t1 to moment t2 when the state of liquid level higher than altitude datum of continued electrolysis bath 5, in this period LP, the frequency of the driving voltage of the pneumatic plant 22 produced in the 22I of umformer loop is maintained the frequency relative to moment t1 and rises the state (tank level control) of the amount T of set value.Thus, the liquid level of electrolytic bath 5 is adjusted to below altitude datum.In addition, set value T is set as the degree of such as more than 5Hz below 15Hz.
If become below altitude datum at the liquid level of moment t2 electrolytic bath 5, then make the frequency of the driving voltage produced in the 22I of umformer loop relative to the amount of the frequency decrease set value T of this moment t2.Thus, as shown in Fig. 3 (a), the speed of rotation of motor 22M, from moment t2 decline set value amount T rapidly, becomes the speed of rotation roughly the same with the speed of rotation of the start time of period LP (moment t1).
In the example in figure 3, after moment t2, from moment t3 to moment t4, from moment t5 to moment t6, and from moment t7 to moment t8, liquid level is higher than altitude datum.During these in LP, the frequency when frequency of the driving voltage also as described above produced in the 22I of umformer loop maintains start time (moment t3, t5, the t7) relative to each period LP rises the state (tank level control) of set value amount T.Thus, the liquid level of electrolytic bath 5 is adjusted to below altitude datum.
In addition, in above-mentioned each period LP, control device 90 continues to carry out based on from pressure warning unit PS2(Fig. 1) the control (pressure-controlling) of umformer loop 32I of output signal.Thus, as shown in Fig. 3 (a), about the speed of rotation of motor 32M, in each period LP, indicate mild change.
With from moment t0 to moment t1 during PP same, the liquid level of the electrolytic bath 5 in anolyte compartment 4 be below altitude datum from moment t2 to moment t3, from moment t4 to moment t5 and from each period PP moment t6 to moment t7, also correspond to the variation of pressure of cathode compartment value and pressure of anode compartment value and control umformer loop 22I, 32I.Thus, as shown in Figure 3 (b), in each period PP, pressure of cathode compartment value is gently close to target pressure value U.In addition, pressure of anode compartment value is gently close to target pressure value U.
As mentioned above, carry out tank level control and pressure-controlling by control device 90, the variation of the liquid level of electrolytic bath 5 can be suppressed, and the variation of the pressure in cathode compartment 3 and in anolyte compartment 4 can be suppressed.
(4) control flow
Fig. 4 and Fig. 5 is the schema representing a series of process employing tank level control and pressure controlled electrolysis.In addition, in the control of following explanation based on the umformer loop 22I of control device 90.In the early stage in state, pre-Schilling pneumatic plant 22,32 is with set speed of rotation action.
First, if the beginning of the electrolysis by instruction HF such as not shown input units, then control device 90 is to applying set voltage (step S1) between negative electrode 6 and anode 7, and order is located in two control valves 21,23 of hydrogen discharge pipe 20 for open state (step S2).
Then, based on the output signal from level sensor 40, control device 90 differentiates that whether the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than altitude datum (step S3).
When liquid level is higher than altitude datum, control device 90 makes the amount (step S4) of the speed of rotation rising set value T of motor 22M by controlling umformer loop 22I.Such as, control device 90 makes the amount of the speed of rotation rising set value T of motor 22M by the current frequency rising set value amount of the frequency ratio of the driving voltage making the pneumatic plant 22 produced in the 22I of umformer loop.
Then, based on the output signal from level sensor 40, control device 90 differentiates that whether the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than altitude datum (step S5).This process was repeatedly carried out before liquid level becomes below altitude datum.Afterwards, if liquid level becomes below altitude datum, then control device 90 makes the amount (step S6) of the speed of rotation decline set value T of motor 22M by controlling umformer loop 22I, returns the process of step S3.
In step s3, when liquid level is below altitude datum, control device 90 obtains the pressure of cathode compartment value (step S7) measured by pressure warning unit PS1.
At this, in control device 90, be previously stored with the target pressure value U of cathode compartment 3.The setting of target pressure value U is undertaken by such as operator's input device etc.
Whether the pressure of cathode compartment value that control device 90 differentiation obtains is consistent with the target pressure value U preset (step S8).
When pressure of cathode compartment value is consistent with target pressure value U, the speed of rotation of motor 22M is maintained current value (step S9) by the umformer loop 22I of control chart 2 by control device 90.Such as, control device 90 is by being maintained current value by the frequency of the driving voltage produced in the 22I of umformer loop and maintaining the speed of rotation of motor 22M.
Pressure of cathode compartment value and target pressure value U inconsistent time, control device 90 controls umformer loop 22I and changes the speed of rotation of motor 22M and the difference of pressure of cathode compartment value and target pressure value U is reduced (step S10).Such as, control device 90 makes the frequency of the driving voltage produced in the 22I of umformer loop from the variation of current value thus makes the speed of rotation of motor 22M change and the difference of pressure of cathode compartment value and target pressure value U is reduced.
Such as, when pressure of cathode compartment value is lower than target pressure value U, control device 90 controls umformer loop 22I and makes to put on the driving voltage decline of motor 22M.Thus, the speed of rotation of motor 22M declines, the discharge drops of pneumatic plant 22.Its result, pressure of cathode compartment value rises and close to target pressure value U, the difference of pressure of cathode compartment value and target pressure value U reduces.
On the contrary, when pressure of cathode compartment value is higher than target pressure value U, control device 90 controls umformer loop 22I and makes to put on the driving voltage rising of motor 22M.Thus, the speed of rotation of motor 22M rises, and the discharge of pneumatic plant 22 presses liter.Its result, pressure of cathode compartment value declines and close to target pressure value U, the difference of pressure of anode compartment value and target pressure value U reduces.
After the process of any one of step S9, S10, control device 90 differentiates the end (step S11) whether being indicated the electrolysis of HF by input unit etc.At the end of not indicating electrolysis, control device 90 returns the process of step S3.On the other hand, at the end of indicating electrolysis, control device 90 terminates the applying (step S12) to the voltage between negative electrode 6 and anode 7, and order is located in two control valves 21,23 of hydrogen discharge pipe 20 for the state of closing (step S13).Thus, the electrolysis of HF terminates.
In the schema of Fig. 4 and Fig. 5, the process of step S3 ~ S6 is equivalent to above-mentioned tank level control, and the process of step S7 ~ S10 is equivalent to above-mentioned pressure-controlling.
Foregoing describe the control of the umformer loop 22I based on control device 90, control device 90 by the electrolysis of HF beginning and control umformer loop 32I in the same manner as the process of above-mentioned steps S7 ~ S10.
(5) effect
(5-a) tank level control is carried out by control device 90 in this fluorine gas generation device 100.Thus, even if when the liquid level of the electrolytic bath 5 in anolyte compartment 4 is higher than altitude datum, also this liquid level can be adjusted to below altitude datum.So the variation of the liquid level of electrolytic bath 5 can be suppressed.
In addition, tank level control is the speed of rotation change of motor 22M by making pneumatic plant 22 and regulates, and regulates the discharge pressure of the hydrogen in hydrogen discharge pipe 20 without the need to the on-off action by control valve 21,23,31,33 etc.Thus, without the need to the maintenance of the early stage deterioration along with control valve 21,23,31,33, maintenance times reduces.Its result, the maintenance cost of fluorine gas generation device 100 reduces.
(5-b) in addition, in this fluorine gas generation device 100, control device 90 also carries out pressure-controlling outside tank level control.Thereby, it is possible to suppress the variation of the liquid level of electrolytic bath 5, and the variation of the pressure in cathode compartment 3 and in anolyte compartment 4 can be suppressed.Its result, suppresses the variation of the electrolytic condition in the electrolysis of HF.
(5-c) tank level control and pressure-controlling make the speed of rotation of motor 22M change and carry out by controlling umformer loop 22I, 32I.Thus, with make control valve 21,23,31,33 opening and closing time compared with, easily and meticulously can carry out the adjustment of the discharge pressure of the fluorine gas in the adjustment of the discharge pressure of the hydrogen in hydrogen discharge pipe 20 and fluorine gas vent pipe 30.Therefore, even if also easily and meticulously can control the pressure in each room 3,4 when electrolyzer 1 miniaturization.Thus, the miniaturization of fluorine gas generation device 100 becomes possibility.
(6) other embodiment
(6-a) in the above-described embodiment, describe to carry out pressure-controlling and anticathode chamber pressure value and pressure of anode compartment value arrange the example of public target pressure value U.Be not limited to, the target pressure value (the 1st target pressure value) for the setting of pressure of cathode compartment value also can be made mutually different with the target pressure value (the 2nd target pressure value) for the setting of pressure of anode compartment value.Now, preference such as the 2nd target pressure value is set smaller than the 1st target pressure value.
Thereby, it is possible to pressure of cathode compartment value be adjusted to close to the 1st target pressure value by pressure-controlling, pressure of anode compartment value is adjusted to the 2nd target pressure value close to being less than the 1st target pressure value.Thus, the pressure in cathode compartment 3 becomes higher than the pressure in anolyte compartment 4.Its result, can suppress the liquid level of the electrolytic bath 5 in cathode compartment 3 to rise to the situation of the liquid level higher than the electrolytic bath 5 in anolyte compartment 4.
Such as the 1st target pressure value is set as that at absolute draft be 100kPa, the 2nd target pressure value is set as that at absolute draft be more than 95kPa below 99kPa.
In addition, the 1st target pressure value and the 2nd target pressure value also can set corresponding to the volume of cathode compartment 3 and the volume of anolyte compartment 4 aptly.
(6-b) described above, in the fluorine gas generation device 100 of Fig. 1, the level sensor 40 of the liquid level detecting electrolytic bath 5 is set in anolyte compartment 4.Based on the output signal from level sensor 40, control device 90 carries out tank level control.
Be not limited to this, when the flow of the fluorine gas of discharging from fluorine gas vent pipe 30 is not particularly limited, also level sensor 40 can be arranged at cathode compartment 3.In addition, control device 90 also can based on be arranged at cathode compartment 3 level sensor 40 output signal and carry out tank level control.
Fig. 6 is the schematic diagram of the formation of the fluorine gas generation device of the embodiment representing other.Below, the fluorine gas generation device 100 for Fig. 6 illustrates the difference with the fluorine gas generation device 100 of Fig. 1.
As shown in Figure 6, level sensor 40 is not set in anolyte compartment 4 in this fluorine gas generation device 100, level sensor 40 is set in cathode compartment 3.In this example, control device 90 based on level sensor 40 output signal and control the 32I(tank level control of umformer loop).
Such as, when the liquid level of the electrolytic bath 5 of cathode compartment 3 is higher than altitude datum, by control device 90, the frequency of the driving voltage produced in the 32I of umformer loop is relative to the frequency rising set value amount in this moment.Thus, the speed of rotation of the motor 32M that pneumatic plant 32 is equipped with rises, and presses liter, the pressure drop in anolyte compartment 4 from the discharge of the fluorine gas of pneumatic plant 32 discharge.Its result, the liquid level of the electrolytic bath 5 in anolyte compartment 4 rises and the liquid level of electrolytic bath 5 in cathode compartment 3 becomes lower than altitude datum.
So, even if when the liquid level of the electrolytic bath 5 in cathode compartment 3 becomes higher than altitude datum, carry out tank level control by the output signal based on level sensor 40, this liquid level can be adjusted to below altitude datum.
(6-c) be not limited to the fluorine gas generation device 100 of Fig. 1 and Fig. 6, also two level sensors 40 can be arranged at cathode compartment 3 and anolyte compartment 4 respectively.Control device 90 based on from be arranged at respectively cathode compartment 3 and anolyte compartment 4 level sensor 40 output signal and carry out tank level control.
Fig. 7 is the schematic diagram of the formation of the fluorine gas generation device of the embodiment representing again other.In the fluorine gas generation device 100 of Fig. 7, respectively level sensor 40 is set in cathode compartment 3 and anolyte compartment 4.In this example, control device 90 controls 22I, 32I(tank level control of umformer loop respectively based on the output signal from two level sensors 40).
Thus, even if when the liquid level of the electrolytic bath 5 in cathode compartment 3 becomes higher than altitude datum, also this liquid level can be adjusted to below altitude datum.In addition, even if when the liquid level of the electrolytic bath 5 in anolyte compartment 4 becomes higher than altitude datum, also this liquid level can be adjusted to below altitude datum.Thereby, it is possible to suppress the variation of the liquid level of the electrolytic bath 5 in cathode compartment 3 and in anolyte compartment 4.
(7) corresponding relation of each integrant of claim and each key element of embodiment
Below, the corresponding example of each integrant of claim and each key element of embodiment is described, but the present invention is not limited to following example.
In above-mentioned embodiment, hydrogen is the example of the 1st gas, and fluorine gas is the example of the 2nd gas, cathode compartment 3 is the example of Room the 1st, anolyte compartment 4 is the example of Room the 2nd, and hydrogen discharge pipe 20 is the example of the 1st gas exhaust path, and fluorine gas vent pipe 30 is the example of the 2nd gas exhaust path.
In addition, level sensor 40 is the example in level detection portion, and pneumatic plant 22 is the example of the 1st pump, and motor 22M is the example of the motor of the 1st pump, and umformer loop 22I is the example in the 1st umformer loop, and pressure warning unit PS1 is the example of the 1st pressure detecting portion.
And then pneumatic plant 32 is the example of the 2nd pump, motor 32M is the example of the motor of the 2nd pump, and umformer loop 32I is the example in the 2nd umformer loop, and pressure warning unit PS2 is the example of the 2nd pressure detecting portion.
In addition, control device 90 is the example of control part, and control valve 21,23 is the example of the 1st open and close valve, and control valve 31,34 is the example of the 2nd open and close valve.
And then target pressure value U is the example of the 1st and the 2nd target value, and the 1st target pressure value is the example of the 1st target value, and the 2nd target pressure value is the example of the 2nd target value.
As each integrant of claim, other the various key elements with formation described in claim or function can be used.
Industry utilizes possibility
The present invention can use to produce gas by electrolysis.
Claims (9)
1. a gas generation apparatus is the gas generation apparatus producing the 1st and the 2nd gas by electrolysis,
Have:
Electrolyzer is Room the 1st and Room the 2nd by zoning, and collecting comprises by the electrolytic bath of the compound of electrolysis;
1st gas exhaust path, discharges the 1st gas produced in above-mentioned Room 1st;
2nd gas exhaust path, discharges the 2nd gas produced in above-mentioned Room 2nd;
Level detection portion, detects the liquid level of the electrolytic bath of above-mentioned 2nd indoor;
1st pump, is arranged at above-mentioned 1st gas exhaust path, and has motor;
1st umformer loop, produces the driving voltage applied the motor of above-mentioned 1st pump;
Control part, when the liquid level detected by above-mentioned level detection portion is than the altitude datum height preset, controls above-mentioned 1st umformer loop and the virtual value of the driving voltage of the motor putting on above-mentioned 1st pump and at least one party of frequency is increased,
Make the speed of rotation of the motor of above-mentioned 1st pump change by the 1st umformer loop, thus be configured to can than the discharge pressure regulating above-mentioned 1st gas during open and close control valve more meticulously.
2. gas generation apparatus according to claim 1, is characterized in that,
And then there is the 1st pressure detecting portion of the pressure detecting above-mentioned 1st indoor,
Above-mentioned control part is,
When the liquid level detected by above-mentioned level detection portion is below said reference height, controls by the virtual value of driving voltage of above-mentioned 1st umformer loop generation and at least one party of frequency and make the pressure detected by above-mentioned 1st pressure detecting portion close to the 1st target value.
3. gas generation apparatus according to claim 1, is characterized in that,
And then have:
2nd pump, is arranged at above-mentioned 2nd gas exhaust path and has motor;
2nd umformer loop, produces the driving voltage putting on the motor of above-mentioned 2nd pump;
2nd pressure detecting portion, detects the pressure of above-mentioned 2nd indoor,
Above-mentioned control part is,
Control by the virtual value of driving voltage of above-mentioned 2nd umformer loop generation and at least one party of frequency and make the pressure detected by above-mentioned 2nd pressure detecting portion close to the 2nd target value.
4. gas generation apparatus according to claim 1, is characterized in that,
And then have:
1st pressure detecting portion, detects the pressure of above-mentioned 1st indoor;
2nd pump, is arranged at above-mentioned 2nd gas exhaust path and has motor;
2nd umformer loop, produces the driving voltage putting on the motor of above-mentioned 2nd pump;
2nd pressure detecting portion, detects the pressure of above-mentioned 2nd indoor,
Above-mentioned control part is,
When the liquid level detected by above-mentioned level detection portion is below said reference height, control by the virtual value of driving voltage of above-mentioned 1st umformer loop generation and at least one party of frequency and make the pressure detected by above-mentioned 1st pressure detecting portion close to the 1st target value, and control by the virtual value of driving voltage of above-mentioned 2nd umformer loop generation and at least one party of frequency and make the pressure detected by above-mentioned 2nd pressure detecting portion close to 2nd target value less than above-mentioned 1st target value.
5. gas generation apparatus according to claim 1, is characterized in that,
And then have:
1st open and close valve, is arranged at above-mentioned 1st gas exhaust path;
2nd open and close valve, is arranged at above-mentioned 2nd gas exhaust path,
Above-mentioned control part is, opens the above-mentioned 1st and the 2nd open and close valve when carrying out electrolysis in above-mentioned electrolyzer, closes the above-mentioned 1st and the 2nd open and close valve when not carrying out electrolysis in above-mentioned electrolyzer.
6. gas generation apparatus according to claim 1, is characterized in that,
Above-mentioned Room 1st is cathode compartment, and above-mentioned Room 2nd is anolyte compartment.
7. gas generation apparatus according to claim 1, is characterized in that,
Above-mentioned 2nd gas is fluorine.
8. a gas generating processes uses be the electrolyzer of Room the 1st and Room the 2nd by zoning and produce the gas generating processes of the 1st and the 2nd gas by electrolysis,
Have:
In above-mentioned Room 1st and above-mentioned Room 2nd, the 1st and the 2nd gas is produced respectively by applying voltage to the electrolytic bath that is contained in above-mentioned electrolyzer, and by step that the 1st and the 2nd gas produced in above-mentioned Room 1st and above-mentioned Room 2nd is discharged respectively by the 1st and the 2nd gas exhaust path;
The 1st pump with motor is utilized to control the step of the discharge of the 1st gas by above-mentioned 1st gas exhaust path;
Detect the step of the liquid level of the electrolytic bath of above-mentioned 2nd indoor;
Utilize the 1st umformer loop to the step of the motor applying driving voltage of above-mentioned 1st pump;
When the above-mentioned liquid level detected is higher than the altitude datum preset, controls above-mentioned 1st umformer loop and make the step that the virtual value of the driving voltage of the motor putting on above-mentioned 1st pump and at least one party of frequency increase,
The speed of rotation of the motor of above-mentioned 1st pump is made to change by the 1st umformer loop thus than the step of discharge pressure regulating above-mentioned 1st gas during open and close control valve more meticulously.
9. gas generating processes according to claim 8, is characterized in that,
And then have:
Detect the step of the pressure of above-mentioned 1st indoor;
When the above-mentioned liquid level detected is below the altitude datum that presets, controls the virtual value of driving voltage that produced by above-mentioned 1st umformer loop and at least one party of frequency and make the step of pressure close to the 1st target value of above-mentioned above-mentioned 1st indoor detected;
The 2nd pump with motor is utilized to control the step of the discharge of the 2nd gas by above-mentioned 2nd gas exhaust path;
Utilize the 2nd umformer loop to the step of the motor applying driving voltage of above-mentioned 2nd pump;
Detect the step of the pressure of above-mentioned 2nd indoor;
Control by the virtual value of driving voltage of above-mentioned 2nd umformer loop generation and at least one party of frequency and make the close step being less than the 2nd target value of above-mentioned 1st target value of the pressure of above-mentioned above-mentioned 2nd indoor detected.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
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| JP2010093437A JP5567375B2 (en) | 2010-04-14 | 2010-04-14 | Gas generating apparatus and gas generating method |
| JP2010-093437 | 2010-04-14 | ||
| PCT/JP2011/001709 WO2011129057A1 (en) | 2010-04-14 | 2011-03-23 | Gas generation device and gas generation method |
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| CN102834549A CN102834549A (en) | 2012-12-19 |
| CN102834549B true CN102834549B (en) | 2015-11-25 |
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| US (1) | US20130068627A1 (en) |
| EP (1) | EP2559790A1 (en) |
| JP (1) | JP5567375B2 (en) |
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| AU2016287740B2 (en) * | 2015-07-02 | 2021-01-28 | Northgate Technologies Inc. | Gas recirculation system |
| CN108286056B (en) * | 2018-02-08 | 2019-03-01 | 青岛微电新能源科技股份有限公司 | A kind of water-electrolytic hydrogen making equipment |
| JP7247150B2 (en) * | 2020-09-02 | 2023-03-28 | 株式会社東芝 | Carbon dioxide electrolysis device and carbon dioxide electrolysis method |
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| CN1028249C (en) * | 1992-07-24 | 1995-04-19 | 吴吉丰 | Improved method for electrolytic prodn. of fluorine and the special electrolytic bath |
| CN1137808A (en) * | 1994-09-14 | 1996-12-11 | 英国核燃料公共有限公司 | Fluorine cell |
| CN1350600A (en) * | 1999-05-12 | 2002-05-22 | 斯图尔特能源***公司 | Pressure control system in a water electrolytic cell |
| CN1478924A (en) * | 2002-05-29 | 2004-03-03 | ����̿����ʽ���� | Fluorination gas generating device |
| CN1668779A (en) * | 2002-07-11 | 2005-09-14 | 液体空气乔治洛德方法利用和研究的具有监督和管理委员会的有限公司 | Apparatus for the generation of fluorine gas |
| JP2004124148A (en) * | 2002-10-01 | 2004-04-22 | Mitsubishi Heavy Ind Ltd | Method for controlling pressure of generated hydrogen, and hydrogen-generating apparatus |
| JP2006249496A (en) * | 2005-03-10 | 2006-09-21 | Hitachi Zosen Corp | Apparatus for water electrolysis with solid polymer |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2559790A1 (en) | 2013-02-20 |
| US20130068627A1 (en) | 2013-03-21 |
| WO2011129057A1 (en) | 2011-10-20 |
| KR20130040817A (en) | 2013-04-24 |
| JP2011219847A (en) | 2011-11-04 |
| CN102834549A (en) | 2012-12-19 |
| JP5567375B2 (en) | 2014-08-06 |
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