CN102829715A - Return-type large-bore long-working-distance auto-collimating microscopic monitor - Google Patents
Return-type large-bore long-working-distance auto-collimating microscopic monitor Download PDFInfo
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- CN102829715A CN102829715A CN2012102997805A CN201210299780A CN102829715A CN 102829715 A CN102829715 A CN 102829715A CN 2012102997805 A CN2012102997805 A CN 2012102997805A CN 201210299780 A CN201210299780 A CN 201210299780A CN 102829715 A CN102829715 A CN 102829715A
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Abstract
The invention discloses a return-type large-bore long-working-distance auto-collimating microscopic monitor and relates to a large-bore long-working-distance auto-collimating microscopic monitor. The return-type large-bore long-working-distance auto-collimating microscopic monitor solves the problems of short measurement distance of an existing microscopic monitor, low microscopic resolution ratio of a monitoring system and narrow monitoring view field. Emergent light of a light source passes through a reticle, a second beam splitter, a second reflecting mirror and a first beam splitter prior to being incident to a to-be-measured target, a light beam reflected by the to-be-measured target returns along an original light path, and transmission light is split from the position of the beam splitter by the return light path and is incident to a collimating CCD (charge coupled device). After being reflected by the to-be-measured target, the beam sequentially passes through a first reflecting mirror and a primary objective lens prior to being split to reflected light and transmission light by the first beam splitter, the transmission light is incident to a small-view-field CCD, and the reflected light sequentially passes through a first secondary objective lens, a third reflecting mirror, a second secondary objective lens and a large-view-field CCD prior to being incident to the large-view-field CCD. The return-type large-bore long-working-distance auto-collimating microscopic monitor is applicable to microscopic monitoring.
Description
Technical field
The present invention relates to the micro-monitor of a kind of heavy caliber long working distance autocollimation.
Background technology
The patent No. is: ZL200710071972X, publication number are " being used for the three-dimensional photo-electric autocollimation micrometering appearance that detects and locate of space object " of CN101033940 to disclose a kind of micrometering appearance; But the measuring distance of this micrometering appearance is shorter, and the microscopic resolution of monitoring system is lower, the monitoring visual field is narrower.
Summary of the invention
The present invention is for lower, the narrower problem in monitoring visual field of the measuring distance that solves existing micrometering appearance microscopic resolution short, monitoring system, thereby a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type is provided.
A kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type, it comprises catoptron, principal goods mirror, spectroscope, small field of view CCD, No. two catoptrons, collimator objective, No. two spectroscopes, collimation CCD, graticule, light source, number object lens, No. three catoptrons, two number object lens and big visual field CCD; " ten " word line is carved with at the center of a said catoptron, is somebody's turn to do " ten " word line regions light-transmissive;
The light that light source sends is incident to graticule, after the graticule transmission, is incident to spectroscope No. two, reflexes to collimator objective through said No. two spectroscopes; After said collimator objective transmission, be incident to No. two catoptron, through said No. two mirror reflects to catoptrons, through mirror reflects a to target to be measured; Behind target reflection to be measured, form reflected light; Said reflected light is incident to catoptron No. one, is divided into a reflected light and a transmitted light through a said catoptron, and a said reflected light is incident to catoptron No. two; Through said No. two mirror reflects to collimator objective; Be transmitted through spectroscope No. two through said collimator objective, be divided into No. two reflected light and No. two transmitted lights through said No. two spectroscopes, said No. two reflected light are incident to outgoing behind the graticule; No. two transmitted lights are incident to the light-sensitive surface of collimation CCD;
No. one transmitted light is incident to the principal goods mirror, after the transmission of said principal goods mirror, is incident to No. one spectroscope, is divided into No. three reflected light and No. three transmitted lights through a said spectroscope, and said No. three transmitted lights are incident to the light-sensitive surface of small field of view CCD;
No. three reflected light is incident to number object lens, after a said number object lens transmission, is incident to catoptron No. three, after said No. three mirror reflects, is incident to two number object lens, after said two number object lens transmissions, is incident to the light-sensitive surface of big visual field CCD.
Target to be measured is target or sensor.
The principal goods mirror is made up of No. two lens of lens of negative meniscus, negative meniscus, secondary mirror, principal reflection mirror, No. three lens of negative meniscus, No. four lens of positive falcate, No. five lens of positive falcate, No. six lens of negative meniscus, No. seven lens of negative meniscus, No. eight lens and one group of balsaming lens of positive falcate, and said balsaming lens is glued together by a biconvex lens and a biconcave lens and forms;
Lens of negative meniscus, No. two lens, secondary mirror and principal reflection mirrors of negative meniscus are pressed the coaxial successively setting of order from left to right; And the distance between lens of negative meniscus and No. two lens of negative meniscus is 15mm; The external diameter 140mm of secondary mirror, the external diameter 380mm of principal reflection mirror; Distance between secondary mirror and principal reflection mirror is 490mm;
No. eight lens of No. seven lens of No. five lens of No. four lens of No. three lens of negative meniscus, positive falcate, positive falcate, No. six lens of negative meniscus, negative meniscus, positive falcate and balsaming lens are by from left to right the coaxial successively setting of order; No. eight lens and the balsaming lens of No. seven lens of No. five lens of No. four lens of No. three lens of negative meniscus, positive falcate, positive falcate, No. six lens of negative meniscus, negative meniscus, positive falcate are all coaxial with principal reflection mirror, and just No. four lens of falcate are being mounted on the principal reflection mirror.
No. eight lens and the balsaming lens of No. seven lens of No. five lens of No. four lens of No. three lens of lens of negative meniscus, No. two lens of negative meniscus, secondary mirror, principal reflection mirror, negative meniscus, positive falcate, positive falcate, No. six lens of negative meniscus, negative meniscus, positive falcate are spherical mirror.
The material of lens of negative meniscus and No. two lens of negative meniscus is K9, and bore is 340mm; The material of secondary mirror and principal reflection mirror is K9; The material of No. three lens of negative meniscus is ZF4; The material of No. four lens of positive falcate is F1; The material of No. five lens of positive falcate is K6; The material of No. six lens of negative meniscus and No. seven lens of negative meniscus is LAF3; The material of No. eight lens of positive falcate is Z6; The biconvex lens in the balsaming lens and the material of biconcave lens are K9.
One number object lens are made up of with ten No. three lens of positive falcate ten No. two lens of negative meniscus; Ten No. three coaxial settings of lens of ten No. two lens of said negative meniscus and positive falcate, and the distance between ten No. three lens of ten No. two lens of negative meniscus and positive falcate is 14mm; The light input end of ten No. two lens of said negative meniscus is the light input end of number object lens; The light output end of ten No. three lens of positive falcate is the light output end of number object lens;
Two number object lens are by two ride on Bus No. 11 lens of ten No. nine lens, biconvex lens and the positive falcate of ten No. eight lens of ten No. six lens of ten No. five lens of negative meniscus, negative meniscus, ten No. seven lens of negative meniscus, positive falcate, negative meniscus; Two ride on Bus No. 11 lens of ten No. eight lens of ten No. seven lens of ten No. five lens of negative meniscus, ten No. six lens of negative meniscus, negative meniscus, positive falcate, ten No. nine lens of negative meniscus, biconvex lens and positive falcate are pressed the coaxial successively setting of order from right to left.
Two ride on Bus No. 11 lens of ten No. eight lens of ten No. three lens of ten No. two lens of negative meniscus, positive falcate, ten No. five lens, ten No. six lens of negative meniscus, ten No. seven lens of negative meniscus, positive falcate, ten No. nine lens, biconvex lens and the positive falcate of negative meniscus are spherical mirror.
The material of ten No. two lens of negative meniscus is BAF1; The material of ten No. three lens of positive falcate is LAF4; The material of ten No. five lens is ZK10; The material of ten No. six lens of negative meniscus is ZF6; The material of ten No. seven lens of negative meniscus is ZF6; The material of ten No. eight lens of positive falcate is ZK7; The material of ten No. nine lens of negative meniscus is LAF3; The material of biconvex lens is BAF1; Two ride on Bus No. 11 lens of positive falcate are LAF3.
Collimator objective is made up of 30 No. two lens of three lenticular ride on Bus No. 11 lens and negative meniscus; Said three lenticular ride on Bus No. 11 lens and 30 No. two coaxial settings of lens of negative meniscus, and the light input end of three lenticular ride on Bus No. 11 lens is light input ends of collimator objective; The light output end that 30 No. two lens of negative meniscus are collimator objectives.
Three lenticular ride on Bus No. 11 lens and 30 No. two lens of negative meniscus are spherical mirror; The material of said lenticular three ride on Bus No. 11 lens is ZK9; The material of 30 No. two lens of negative meniscus is ZF6.
Measuring distance of the present invention can reach 4 meters, has increased by 3 times than existing monitoring distance; The microscopic resolution of monitoring system reaches 8 μ m, and the monitoring visual field is about 40mm, and angular resolution is 1 second, and angular field is 20 minutes.And can reach following index:
1, the monitor optical system comprises autocollimation system, big visual field monitoring system, small field of view precision monitor system, and three tunnel optical systems are coaxial;
2, design wavelength is 525 ± 25nm;
3, operating distance is 4200mm;
4, small field of view precision monitor system monitoring scope is Φ 8mm, object space resolution 8 μ m;
5, big visual field search monitoring system monitoring range is Φ 40mm, object space resolution 30 μ m;
6, the microscopic system optical distortion is less than 5 ‰;
7, colimated light system specific requirement collimation resolving power 1 ", the collimation scope :～± 20 ';
Description of drawings
Fig. 1 is a structural representation of the present invention; Fig. 2 is the structural representation of principal goods mirror described in the embodiment three; Fig. 3 is the structural representation of number object lens and two number object lens in the embodiment six; Fig. 4 is the structural representation of collimator objective in the embodiment nine; Fig. 5 is that structure after the three cover systems combination described in the embodiment one is like figure; Fig. 6 is the image measurement principle schematic of monitor.
Embodiment
Embodiment one, combination Fig. 1 explain this embodiment; A kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type, it comprises catoptron 1-2, principal goods mirror 1-3, spectroscope 1-4, small field of view CCD1-5, No. two catoptron 1-6, collimator objective 1-7, No. two spectroscope 1-8, collimation CCD1-9, graticule 1-10, light source 1-11, a number object lens 1-12, No. three catoptron 1-13, two number object lens 1-14 and big visual field CCD1-15; " ten " word line is carved with at the center of a said catoptron 1-2, is somebody's turn to do " ten " word line regions light-transmissive;
The light that light source 1-11 sends is incident to graticule 1-10; After graticule 1-10 transmission, be incident to No. two spectroscope 1-8, reflex to collimator objective 1-7, after said collimator objective 1-7 transmission, be incident to No. two catoptron 1-6 through said No. two spectroscope 1-8; Reflex to catoptron 1-2 No. one through said No. two catoptron 1-6; Reflex to target 1 to be measured through a catoptron 1-2, after target 1 reflection to be measured, form reflected light, said reflected light is incident to catoptron 1-2 No. one; Be divided into a reflected light and a transmitted light through a said catoptron 1-2; A said reflected light is incident to catoptron 1-6 No. two, reflexes to collimator objective 1-7 through said No. two catoptron 1-6, is transmitted through spectroscope 1-8 No. two through said collimator objective 1-7; Be divided into No. two reflected light and No. two transmitted lights through said No. two spectroscope 1-8, said No. two reflected light are incident to outgoing behind the graticule 1-10; No. two transmitted lights are incident to the light-sensitive surface of collimation CCD;
No. one transmitted light is incident to principal goods mirror 1-3, after said principal goods mirror 1-3 transmission, is incident to spectroscope 1-4 No. one, is divided into No. three reflected light and No. three transmitted lights through a said spectroscope 1-4, and said No. three transmitted lights are incident to the light-sensitive surface of small field of view CCD1-5;
No. three reflected light is incident to a number object lens 1-12; After a said number object lens 1-12 transmission, be incident to catoptron 1-13 No. three; After said No. three catoptron 1-13 reflection, be incident to two number object lens 1-14, after said two number object lens 1-14 transmissions, be incident to the light-sensitive surface of big visual field CCD1-15.
In this embodiment, select for use AVT company F145B the CCD camera with satisfy resolution with the monitoring visual field requirement.This camera pixel is of a size of 6.45 μ m, and the image planes size is 8.3mm * 6.2mm.Consider the requirement of resolution, the enlargement ratio of optical system is about 1 times, and then the visual field size is about 8mm * 6mm, can not satisfy the requirement of resolution and monitoring visual field simultaneously.Consider the contradiction of monitoring accuracy and monitoring visual field; Optical microscope system will be with the function of quick function of search of target and accurate micro-location; So designed two cover microscopic systems; Be respectively big visual field search system 303 and small field of view monitoring system 302, wherein big visual field systemic resolution is low but the visual field is bigger, is used for the search of target.Small field of view monitoring system resolution is high, but the monitoring field range is little, and the combination of two cover systems is used, and satisfies the requirement of monitoring accuracy and monitoring range.The requirement that orthogonal coordinate system is set up in consideration also need have autocollimation system 301, three cover system light shaft coaxles, and the structure after the combination is as shown in Figure 5.
The monitor microscopic system is divided into small field of view monitoring and big visual field search system, and two shared cover principal goods mirrors of system through spectroscope with two cover systems separately, are realized the search of target and the measurement of two-dimensional position information.The colimated light system light source shines on the target through spectroscope 2 and catoptron 1 and 2; Realization is to the illumination of target; The light that the while target reflection returns is imaged onto graticule on the collimation CCD through catoptron and spectroscope, realizes measurement for angle in 2 D through the displacement of calculating the graticule picture.
Require and the requirement of the CCD device selected according to the design objective of instrument, the entrance pupil diameter that can preresearch estimates goes out instrument is about 400mm, and length is greatly about about 4000mm; The volume of instrument is huge excessively; In order to reduce the size of instrument, practice thrift cost, the present invention adopts the Zigzag type Design for optical system; Refractive and reflective optical system by catoptron and combination of lenses can combine reflective and the advantage refraction type imaging system; Adopt spherical mirror to replace aspheric mirror, come the aberration of correction of spherical catoptron simultaneously with offset lens, can obtain higher picture element.
Require the catadioptric formula of employing system according to design of Optical System of the present invention; Both can reduce the Large Aperture Lenses size, also can reduce the physical dimension of instrument, in conjunction with the advantage of transmission-type and reflective optic structure; More reasonable for its structural design of heavy-caliber optical system; And the catoptron that structure is selected for use can all select spherical mirror for use, and the optics processing cost is also lower, and the installation of instrument is easy to adjust.
The evaluation of the image quality of optical system of the present invention and test:
The purpose of optical design reduces various aberrations exactly, but aberration can not correct fully, the varying in size of residual aberration, and image quality is also different, therefore need carry out evaluation analysis to the picture element of imaging system, with whether success of checking optical design.Image quality evaluation method commonly used is verification transport function (Modulation Transfer Function), and MTF can investigate launching spot blur circle diameter simultaneously than the image quality of more comprehensive evaluation optical system.
(1) big visual field search system design result: the major function of big visual field search system is that realization of goal is searched for fast, makes target can get into the visual field monitoring range faster, thus its optical design be enlargement ratio 0.16 *.The CCD model pixel dimension of selecting is 6.45 μ m, and its nyquist frequency is 50lp/mm.Transfer function values is greater than 0.8 under the 58lp/mm situation, and picture element is good.Calculate according to the image planes size, field range is 55mm * 41.3mm.So big visual field monitoring system design result meets design requirement.
Big visual field search system object space resolving power: the diameter corresponding as square disc of confusion 80% energy is about 2.2 μ m, its enlargement factor is 0.16 * and, corresponding object space resolving power is about 13.75 μ m.
(2) small field of view Monitoring System result: in order to guarantee monitoring accuracy; The enlargement ratio of small field of view monitoring system optics elects 1 as *; Its main function is that target is accurately located, and the spatial information of measure two dimensional, but its monitoring sightsinging scope is less.The camera resolving power of selecting is 77.52lp/mm, and its its transport function under the 77.52lp/mm condition is about 0.48, has reached the diffraction limit frequency basically, can satisfy request for utilization.
The resolving power of small field of view monitoring system: the diameter corresponding as square disc of confusion 80% energy is about 3 μ m, the enlargement ratio of this system is 1 *, corresponding object space resolving power is about 3 μ m, and 80% concentration of energy meets design requirement in a pixel.
(3) design result of colimated light system: the CCD camera resolving power of selection is 77.52lp/mm, and its its transport function under the 77.52lp/mm condition is about 0.68, has reached the diffraction limit frequency basically, can satisfy request for utilization.
According to the optical design result, accomplish the structural design of instrument.The structure of instrument at first will guarantee the mutual alignment relation of optical element, will guarantee stability of instrument simultaneously, reduces the distortion of instrument, guarantees the instrument degree of precision.
The image measurement principle of monitor is as shown in Figure 6; Select for use the area array CCD conduct as sensitive detection parts, the image that CCD gathers is sent into computing machine through image card; Accomplish the analyzing and processing and focusing control of image through image processing software and Control Software, realize real-time monitoring the space measured target.For adapting to the monitoring to the different size target, monitor will have the focusing function.
According to design result, instrument has been accomplished processing, manufacturing, assembly and checkout.Adopt No. two resolution chart, actual test small field of view system optics systemic resolution is 3.85 microns, and big visual field system optics resolution is 12.5 microns, and the colimated light system optical resolution is 3.3 microns.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment two, this embodiment and embodiment one is that target to be measured is target or sensor.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment three, this embodiment and embodiment one is; Principal goods mirror 1-3 is made up of No. two lens 2 of lens 1 of negative meniscus, negative meniscus, secondary mirror 102, principal reflection mirror 101, No. three lens 3 of negative meniscus, No. four lens 4 of positive falcate, No. five lens 5 of positive falcate, No. six lens 6 of negative meniscus, No. seven lens 7 of negative meniscus, No. eight lens 8 and one group of balsaming lens of positive falcate, and said balsaming lens is glued together by a biconvex lens and a biconcave lens and forms;
The coaxial successively setting of order that lens 1 of negative meniscus, No. two lens 2 of negative meniscus, secondary mirror 102 and principal reflection mirror 101 are pressed from left to right; And the distance between lens 1 of negative meniscus and No. two lens 2 of negative meniscus is 15mm; The external diameter 140mm of secondary mirror 102, the external diameter 380mm of principal reflection mirror 101; The distance that secondary mirror 102 and principal reflection mirror are 101 is 490mm;
No. eight lens 8 of No. seven lens 7 of No. five lens 5 of No. four lens 4 of No. three lens 3 of negative meniscus, positive falcate, positive falcate, No. six lens 6 of negative meniscus, negative meniscus, positive falcate and balsaming lens are by from left to right the coaxial successively setting of order; No. eight lens 8 and the balsaming lens of No. seven lens 7 of No. five lens 5 of No. four lens 4 of No. three lens 3 of negative meniscus, positive falcate, positive falcate, No. six lens 6 of negative meniscus, negative meniscus, positive falcate are all coaxial with principal reflection mirror 101, and just No. four lens 4 of falcate are being mounted on the principal reflection mirror 101.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment four, this embodiment and embodiment three is, No. eight lens 8 and the balsaming lens of No. six lens 6 of No. four lens 4 of No. three lens 3 of lens 1 of negative meniscus, No. two lens 2 of negative meniscus, secondary mirror 102, principal reflection mirror 101, negative meniscus, positive falcate, No. five lens 5 of positive falcate, negative meniscus, No. seven lens 7 of negative meniscus, positive falcate are spherical mirror.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment five, this embodiment and embodiment four is; The material of lens 1 of negative meniscus and No. two lens 2 of negative meniscus is K9, and bore is 340mm; The material of secondary mirror 102 and principal reflection mirror 101 is K9; The material of No. three lens 3 of negative meniscus is ZF4; The material of No. four lens 4 of positive falcate is F1; The material of No. five lens 5 of positive falcate is K6; The material of No. six lens 6 of negative meniscus and No. seven lens 7 of negative meniscus is LAF3; The material of No. eight lens 8 of positive falcate is Z6; The biconvex lens in the balsaming lens and the material of biconcave lens are K9.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment six, this embodiment and embodiment one is that a number object lens 1-12 is made up of with ten No. three lens 13 of positive falcate ten No. two lens 12 of negative meniscus; Ten No. three lens, the 13 coaxial settings of ten No. two lens 12 of said negative meniscus and positive falcate, and the distance between ten No. three lens 13 of ten No. two lens 12 of negative meniscus and positive falcate is 14mm; The light input end of ten No. two lens 12 of said negative meniscus is the light input end of a number object lens 1-12; The light output end of ten No. three lens 13 of positive falcate is the light output end of a number object lens 1-12;
Two number object lens 1-14 are by two ride on Bus No. 11 lens 21 of ten No. nine lens 19, biconvex lens 20 and the positive falcate of ten No. eight lens 18 of ten No. six lens 16 of ten No. five lens 15 of negative meniscus, negative meniscus, ten No. seven lens 17 of negative meniscus, positive falcate, negative meniscus; The coaxial successively setting of order that two ride on Bus No. 11 lens 21 of ten No. eight lens 18 of ten No. seven lens 17 of ten No. five lens 15 of negative meniscus, ten No. six lens 16 of negative meniscus, negative meniscus, positive falcate, ten No. nine lens 19 of negative meniscus, biconvex lens 20 and positive falcate are pressed from right to left.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment seven, this embodiment and embodiment six is that two ride on Bus No. 11 lens 21 of ten No. eight lens 18 of 13, ten No. five lens 15 of ten No. three lens of ten No. two lens 12 of negative meniscus, positive falcate, ten No. six lens 16 of negative meniscus, ten No. seven lens 17 of negative meniscus, positive falcate, ten No. nine lens 19, biconvex lens 20 and the positive falcate of negative meniscus are spherical mirror.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment eight, this embodiment and embodiment seven is that the material of ten No. two lens 12 of negative meniscus is BAF1; The material of ten No. three lens 13 of positive falcate is LAF4; The material of ten No. five lens 15 is ZK10; The material of ten No. six lens 16 of negative meniscus is ZF6; The material of ten No. seven lens 17 of negative meniscus is ZF6; The material of ten No. eight lens 18 of positive falcate is ZK7; The material of ten No. nine lens 19 of negative meniscus is LAF3; The material of biconvex lens 20 is BAF1; Two ride on Bus No. 11 lens 21 of positive falcate are LAF3.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment nine, this embodiment and embodiment one is that collimator objective 1-7 is made up of three lenticular ride on Bus No. 11 lens 31 and 30 No. two lens 32 of negative meniscus; The said three lenticular ride on Bus No. 11 lens 31 and 30 No. two lens, the 32 coaxial settings of negative meniscus, and the light input end of three lenticular ride on Bus No. 11 lens 31 is light input ends of collimator objective 1-7; The light output end that 30 No. two lens 32 of negative meniscus are collimator objective 1-7.
The difference of the described a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type of embodiment ten, this embodiment and embodiment nine is that three lenticular ride on Bus No. 11 lens 31 and 30 No. two lens 32 of negative meniscus are spherical mirror; The material of said lenticular three ride on Bus No. 11 lens 31 is ZK9; The material of 30 No. two lens 32 of negative meniscus is ZF6.
Claims (10)
1. micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type is characterized in that: it comprises a catoptron (1-2), principal goods mirror (1-3), a spectroscope (1-4), small field of view CCD (1-5), No. two catoptrons (1-6), collimator objective (1-7), No. two spectroscopes (1-8), collimation CCD (1-9), graticule (1-10), light source (1-11), number object lens (1-12), No. three catoptrons (1-13), two number object lens (1-14) and big visual field CCD (1-15); " ten " word line is carved with at the center of a said catoptron (1-2), is somebody's turn to do " ten " word line regions light-transmissive;
The light that light source (1-11) sends is incident to graticule (1-10); After graticule (1-10) transmission, be incident to No. two spectroscopes (1-8); Reflex to collimator objective (1-7) through said No. two spectroscopes (1-8); After said collimator objective (1-7) transmission, be incident to No. two catoptrons (1-6), reflex to a catoptron (1-2), reflex to target to be measured (1) through a catoptron (1-2) through said No. two catoptrons (1-6); After target to be measured (1) reflection, form reflected light; Said reflected light is incident to a catoptron (1-2), is divided into a reflected light and a transmitted light through a said catoptron (1-2), and a said reflected light is incident to No. two catoptrons (1-6); Reflex to collimator objective (1-7) through said No. two catoptrons (1-6); Be transmitted through No. two spectroscopes (1-8) through said collimator objective (1-7), be divided into No. two reflected light and No. two transmitted lights through said No. two spectroscopes (1-8), said No. two reflected light are incident to graticule (1-10) back outgoing; No. two transmitted lights are incident to the light-sensitive surface of collimation CCD (1-9);
No. one transmitted light is incident to principal goods mirror (1-3); After said principal goods mirror (1-3) transmission, be incident to a spectroscope (1-4); Be divided into No. three reflected light and No. three transmitted lights through a said spectroscope (1-4), said No. three transmitted lights are incident to the light-sensitive surface of small field of view CCD (1-5);
No. three reflected light is incident to number object lens (1-12); After said number object lens (1-12) transmission, be incident to No. three catoptrons (1-13); After said No. three catoptrons (1-13) reflection, be incident to two number object lens (1-14), after said two number object lens (1-14) transmissions, be incident to the light-sensitive surface of big visual field CCD (1-15).
2. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 1 is characterized in that target to be measured is target or sensor.
3. a kind of micro-monitor of heavy caliber long working distance autocollimation according to claim 1 based on Zigzag type; It is characterized in that principal goods mirror (1-3) is made up of No. two lens (2) of the lens (1) of negative meniscus, negative meniscus, secondary mirror (102), principal reflection mirror (101), No. three lens (3) of negative meniscus, No. four lens (4) of positive falcate, No. five lens (5) of positive falcate, No. six lens (6) of negative meniscus, No. seven lens (7) of negative meniscus, No. eight lens (8) and one group of balsaming lens of positive falcate, said balsaming lens is glued together by a biconvex lens and a biconcave lens and forms;
Lens (1) of negative meniscus, No. two lens (2) of negative meniscus, secondary mirror (102) and principal reflection mirror (101) are pressed the coaxial successively setting of order from left to right; And the distance between lens (1) of negative meniscus and No. two lens (2) of negative meniscus is 15mm; The external diameter 140mm of secondary mirror (102), the external diameter 380mm of principal reflection mirror (101); Distance between secondary mirror (102) and principal reflection mirror (101) is 490mm;
No. seven lens (7) of No. five lens (5) of No. four lens (4) of No. three lens (3) of negative meniscus, positive falcate, positive falcate, No. six lens (6) of negative meniscus, negative meniscus, No. eight lens (8) of positive falcate and balsaming lens are pressed the coaxial successively setting of order from left to right; No. seven lens (7) of No. five lens (5) of No. four lens (4) of No. three lens (3) of negative meniscus, positive falcate, positive falcate, No. six lens (6) of negative meniscus, negative meniscus, No. eight lens (8) and the balsaming lens of positive falcate are all coaxial with principal reflection mirror (101), and just No. four lens (4) of falcate are being mounted on the principal reflection mirror (101).
4. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 3 is characterized in that No. two lens (2), secondary mirror (102), principal reflection mirror (101), No. three lens (3) of negative meniscus, No. four lens (4) of positive falcate, No. five lens (5) of positive falcate, No. six lens (6) of negative meniscus, No. seven lens (7) of negative meniscus, No. eight lens (8) and the balsaming lens of positive falcate of lens (1), the negative meniscus of negative meniscus are spherical mirror.
5. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 4 it is characterized in that the material of No. two lens (2) of lens (1) and the negative meniscus of negative meniscus is K9, and bore is 340mm; The material of secondary mirror (102) and principal reflection mirror (101) is K9; The material of No. three lens (3) of negative meniscus is ZF4; The material of No. four lens (4) of positive falcate is F1; The material of No. five lens (5) of positive falcate is K6; The material of No. six lens (6) of negative meniscus and No. seven lens (7) of negative meniscus is LAF3; The material of No. eight lens (8) of positive falcate is Z6; The biconvex lens in the balsaming lens and the material of biconcave lens are K9.
6. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 1 is characterized in that number object lens (1-12) are made up of ten No. three lens (13) of ten No. two lens (12) of negative meniscus and positive falcate; The coaxial setting of ten No. three lens (13) of ten No. two lens (12) of said negative meniscus and positive falcate, and the distance between ten No. three lens (13) of ten No. two lens (12) of negative meniscus and positive falcate is 14mm; The light input end of ten No. two lens (12) of said negative meniscus is the light input end of number object lens (1-12); The light output end of ten No. three lens (13) of positive falcate is the light output end of number object lens (1-12);
Two number object lens (1-14) are by ten No. nine lens (19) of ten No. eight lens (18) of ten No. six lens (16) of ten No. five lens (15) of negative meniscus, negative meniscus, ten No. seven lens (17) of negative meniscus, positive falcate, negative meniscus, biconvex lens (20) and two ride on Bus No. 11 lens (21) of falcate just; Two ride on Bus No. 11 lens (21) of ten No. eight lens (18) of ten No. seven lens (17) of ten No. five lens (15) of negative meniscus, ten No. six lens (16) of negative meniscus, negative meniscus, positive falcate, ten No. nine lens (19) of negative meniscus, biconvex lens (20) and positive falcate are pressed the coaxial successively setting of order from right to left.
7. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 6 is characterized in that ten No. nine lens (19), biconvex lens (20) of ten No. eight lens (18), the negative meniscus of ten No. three lens (13), ten No. five lens (15) of ten No. two lens (12) of negative meniscus, positive falcate, ten No. six lens (16) of negative meniscus, ten No. seven lens (17) of negative meniscus, positive falcate and two ride on Bus No. 11 lens (21) of falcate just are spherical mirror.
8. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 7 is characterized in that the material of ten No. two lens (12) of negative meniscus is BAF1; The material of ten No. three lens (13) of positive falcate is LAF4; The material of ten No. five lens (15) is ZK10; The material of ten No. six lens (16) of negative meniscus is ZF6; The material of ten No. seven lens (17) of negative meniscus is ZF6; The material of ten No. eight lens (18) of positive falcate is ZK7; The material of ten No. nine lens (19) of negative meniscus is LAF3; The material of biconvex lens (20) is BAF1; Two ride on Bus No. 11 lens (21) of positive falcate are LAF3.
9. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 1 is characterized in that collimator objective (1-7) is made up of three lenticular ride on Bus No. 11 lens (31) and 30 No. two lens (32) of negative meniscus; The said three lenticular ride on Bus No. 11 lens (31) and the coaxial setting of 30 No. two lens (32) of negative meniscus, and the light input end of three lenticular ride on Bus No. 11 lens (31) is the light input end of collimator objective (1-7); 30 No. two lens (32) of negative meniscus are the light output ends of collimator objective (1-7).
10. a kind of micro-monitor of heavy caliber long working distance autocollimation based on Zigzag type according to claim 9 is characterized in that three lenticular ride on Bus No. 11 lens (31) and 30 No. two lens (32) of negative meniscus are spherical mirror; The material of said lenticular three ride on Bus No. 11 lens (31) is ZK9; The material of 30 No. two lens (32) of negative meniscus is ZF6.
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