CN102778194B - Online detection method for micro electrochemical machining gap based on electric double-layer capacitor - Google Patents
Online detection method for micro electrochemical machining gap based on electric double-layer capacitor Download PDFInfo
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Abstract
The invention relates to an online detection method for a micro electrochemical machining gap based on an electric double-layer capacitor. The online detection method comprises the steps that micro-size metal parts which have side wall insulating layers and flat lower end faces and keep exposed are used as electrodes; and then a plurality of orders of magnitude metal workpieces with great surface area are gradually fixed in an electrolytic cell; the electrodes are moved above the metal workpieces; blunt electrolyte flows into the metal workpieces by a constant speed V so that the processing gap h is changed and then the total equivalent electric double-layer capacitor C2 among cylinder electrodes, the blunt electrolyte and the metal workpieces is changed; the size of the processing gap h can be detected through the variation of the total equivalent electric double-layer capacitor C2; and finally, the total equivalent electric double-layer capacitor C2 is used as a detected object through using the impedance measurement method; the value of the total equivalent electric double-layer capacitor C2 is detected in a few seconds, namely, the value of the processing gap h is obtained. The method is simple and easy to realize; and the processing gap can sized by on-line and accurate detection in a few milliseconds.
Description
Technical field
The present invention relates to the detection technique field of interelectrode gap, be specifically related to a kind of online test method of the electrochemical micromachining gap based on electric double layer capacitance.
Background technology
Electrochemical machining (Electrochemical Machining, ECM) utilizes electric current to flow through machining gap anode metal is dissolved in the electrolytic solution in the form of an ion, thus by a kind of job operation shaping for anode metal work pieces process.Electrochemical machining and traditional machining and conventional special process method (Laser Processing, electron beam process, I.B.M., Ultrasonic machining, electrosparking etc.) are Comparatively speaking, there is following advantage: applied range, every conductive material all can be processed, and not affected by the intensity of material, hardness and toughness etc.; Workpiece material is removed in the form of an ion, and theoretical machining precision is high, can reach micron even nanoscale; Surface quality is good, without heat affected layer, after processing, surface of the work is without unrelieved stress and burr; Tool-electrode is lossless.Conventional yardstick electrochemical machining has become a kind of indispensable manufacturing process in manufacture field.Since the nineties in last century, along with the continuing to bring out and growing to high precision high-quality micro three-dimensional structure part demand of metal alloy compositions of excellent performance, impel electrochemical micromachining (Micro-ECM or μ ECM) to have and developed rapidly.
In electrochemical micromachining, in order to improve processing locality, reduce dispersion corrosion and reduce workpiece surface roughness, and then improve machining precision and crudy, the method of usual employing has: one is amplitude, frequency and the electrode speed of feed by controlling high-frequency impulse electric signal, reduce machining gap, the change of machining gap will directly affect form accuracy and the dimensional accuracy of processing parts; Machining gap is excessive, working (machining) efficiency will be caused to reduce, even do not process; Under the prerequisite ensureing normal process, machining gap is less, and pulsewidth is narrower, and machining precision is higher.Two is the rim conditions reducing electrode size and change electrode, such as carries out insulation processing etc., to reduce the impact of surrounding them line of electric force to electrode part surface.In addition, low concentration passivity electrolytic solution is adopted also to be one of technological means of necessity.When processing dimension is contracted to meso-scale, tool-electrode is about several microns to hundreds of micron, and machining gap also only has several microns to some tens of pm.Machining gap is too small, and electrolytic solution upgrades and elaboration products (electrolytic slime and bubble) are discharged not smooth, and may cause sparking or short circuit, also by damage instrument and workpiece time serious, cause and process unsuccessfully, processing stability is deteriorated, and repetitive error becomes large.Several factors in workpiece anodic dissolution processes causes the change of machining gap, and machining gap affects by several respects factors such as electric field, flow field, metal/solution interface electrochemical properties, along with process time and Working position difference and change; It is one of key factor determining machining precision, and directly affecting working (machining) efficiency, surface quality and processing stability, is also the Main Basis of design tool negative electrode, Choice and process parameter, is the core process key element of electrochemical machining.
Successively there is the detection method of multiple interelectrode gap both at home and abroad at present, be mainly divided into two large classes: control method and direct Detection Method indirectly.Indirect control method is the observing and controlling by reaching the control of the machined parameters such as voltage, electric current, electrolytic conductivity, concentration of electrolyte, pH value, temperature, flow affecting machining gap gap.Indirect control method mainly comprises permanent parameter investigating method, self-adaptation measurement and control method and model prediction etc.Direct Detection Method is sampled to gap in process, or sample to the information such as electric signal in reflection gap, then revises machined parameters, make machining gap close to theoretical value.Direct Detection Method mainly comprises inductive loop probe method, supersonic sounding method, electromagnet radiation detection method, loop cycle to the skill in using a kitchen knife in cookery, primary element potentiometric method, machining voltage distorting flux method, gap resistance method etc., directly measures machining gap.
The major parameter sampling affecting gap in permanent parameter investigating method process is that the region outside gap completes, thus not instantaneous value, but the mean value of macroscopic view, can not detect machining gap by real-time online, control effects is general, is difficult to realize high precision processing.
Self-adaptation measurement and control method is by making mutually according to the change of certain rule between machined parameters, and the gap caused respectively with these parameters of cancelling out each other change, reaches the object of clearance constant.The major defect of adaptive control law to control mean gap, before equilibrium is reached, due to the error of blank profile, on finished surface, each point gap difference is large, mean gap just correctly can not reflect minimum clearance, at this moment only control a mean gap easily cause minimum clearance too small and short circuit, burn; Or minimum clearance is excessive and reduce shaping efficiency.Anocut company of the U.S., German AEG company adopt electrolytic conductivity, concentration of electrolyte, pH value to be the self-adaptation control method of control signal respectively, although combine the information of temperature, concentration, but still can not reflect gap state, effect is not ideal comprehensively.
Model prediction is the technological parameter being gone out minimum theoretical gap by model prediction, carries out linear revise to signal and gap width, makes machining gap close to minimum theoretical gap.As the scholar such as B.Wei and K.P.Rajurkar of Nebraska-Lincoln university of the U.S., the current signal of paired pulses electrochemical machining carries out stochastic modeling analysis and the spectrum analysis to current signal, proposes to adopt the features such as the variance of current signal to carry out detector gap.This method structure is simple, but does not draw the quantitative relation formula between variance signal and machining gap value, quantitatively cannot detect, and be applicable to the larger occasion in gap.For another example based on six-dimensional force and processing electric current, utilize multisensor data fusion, obtain gap and merge equation.The equation that this fusion equation obtains than six-dimensional force or the independent signal of processing electric current more accurately reflects machining gap value, this method is suitable for on-line checkingi machining gap 0.2 ~ 0.4mm, error is in the gap detection of the macro-scale workpiece of about <10%, and for electrochemical micromachining, because electrode size is very little, and it is very faint to rush the pressure that the very little electrolytic solution of hydraulic coupling acts on tool-electrode, this gap detection based on force signal is difficult to be suitable for, and sensor is installed more difficult.For another example, in the electromachining gap detection of Corpus--based Method, gap state, by using statistical information and the identification of Bayesian Smallest Risk decision-making technique of gap detection, uses this recognition result to carry out servocontrol.Model prediction can improve the reliability and stability of electromachining, but to gap itself and unrealized on-line checkingi, and error is larger.
Inductive loop probe method utilizes a kind of detection method that inductive loop is online, non-intruding detects machining gap.But current vortex sensor installs difficulty, and some special process parameters to electrochemical machining, as the conductivity of the material composition of instrument and workpiece, density, electrolytic solution, all very responsive, this makes the Reliability ratio of measurement result poor.
Supersonic sounding method is a kind of detection method utilizing ultrasound wave on-line measurement machining gap.But ultrasonic propagation is by aeration in temperature and machining gap, and this method there are certain requirements electrode size and electrolyte channel size, and precision is not high, and probe installs difficulty.
Electromagnet radiation detection method utilizes the relation between radiofrequency signal and machining state given off in gap, detects a kind of detection method of machining gap.The method can qualitative monitoring gap state, but can not accurate measurement clearance value, and complex structure, realizes difficulty higher, and measuring error is larger.
Loop cycle is a kind of detection method utilizing cycle contact detection (tool setting) to maintain machining gap to the skill in using a kitchen knife in cookery.This method maintains certain limit (having minor fluctuations) online, quasi real time by machining gap, can reduce and add spark and the generation of the abnormal conditions such as short circuit in man-hour, improve crudy, and this method realization is comparatively easy, there is certain precision, but periodic contact detection can make working (machining) efficiency decrease, and can produce spot corrosion, reduce surfaceness.
Primary element potentiometric method measures a kind of method that interpolar primary element potential value judges gap length after stopping.The method does not have Touch error, but measuring accuracy is not high, cannot realize high precision processing.
Machining voltage distorting flux method is a kind of method distortion information being realized gap detection as the foundation of control gap.Although can measure machining gap size, the sinusoidal wave pulse electric current processing that the method can only be used for sine wave or chop off, is of limited application.
Gap resistance method is a kind of method detected gap by current average and these two parameters of variance thereof.This average current detection device also has the advantages such as structure is simple, cost is low, good reliability, but accuracy of detection is lower, cannot realize high precision electrochemical machining.
Said method is in the electrochemical machining process of macro-size, achieve the detection of machining gap or the prediction of machining state, but the exact value of gap length and the Accurate Prediction of gap state are still lacked to the means of practicability and effectiveness, when being especially applied to electrochemical micromachining, how under machining precision reaches the desired prerequisite required, realize the on-line checkingi of machining gap simply, efficiently, accurately and fast, in electrochemical micromachining, still for there being key technical problem to be solved.
Summary of the invention
For solving above-mentioned problems of the prior art, order of the present invention is the online test method providing a kind of electrochemical micromachining gap based on electric double layer capacitance, the inventive method is simple, be easy to realize, in several milliseconds, accurately can detect the size of machining gap online, for realizing high precision, the stable electrochemical micromachining of high-quality workpiece provides necessary condition.
In order to achieve the above object, the technical solution adopted in the present invention is:
Based on the online test method in the electrochemical micromachining gap of electric double layer capacitance, comprise the steps:
Step 1: first adopt have side wall insulating layer 2 and lower surface smooth and keep exposed microsize metal parts as electrode 1, then with electrode 1 Comparatively speaking, metal works 5 clamping of the large several order of magnitude size of surface area is also fixed in electrolytic cell 7;
Step 2: electrode 1 is moved to above metal works 5, then passivity electrolytic solution 8 is poured with constant speed V effluent, after passivity electrolytic solution 8 pours with constant speed V effluent, the change of machining gap h causes the flow velocity in gap to change, flow velocity in gap changes the change causing induction field intensity on electrode lower surface and solution interface 3 and piece pole upper surface and solution interface 6, and then cause the change of its interface net charge density, the change of interface net charge density causes the change of interface motion electromotive force, thus causes interface second electric double layer capacitance C
2with the 3rd electric double layer capacitance C
3change, namely cause cylinder electrode 1, total equivalent electric double layer capacitance C between passivity electrolytic solution 8 and metal works 5
2 /change, the change of machining gap h causes total equivalent electric double layer capacitance C
2 /size change, from total equivalent electric double layer capacitance C
2 /the change of size can detect the size of machining gap h, and machining gap h becomes large, total equivalent electric double layer capacitance C
2 /also become large, vice versa, and electrolytic solution equivalent resistance is therebetween R;
Wherein: machining gap h is: electrode lower surface and solution interface 3 are apart from the height of piece pole upper surface and solution interface 6;
Total equivalent electric double layer capacitance C
2 /for the side wall insulating layer 2 of: electrode 1 is C with the first electric double layer capacitance on the electrode insulation sidewall/solution interface 4 of passivity electrolytic solution 8
1, the second electric double layer capacitance C on the electrode lower surface of electrode 1 and solution interface 3
2be far longer than the first electric double layer capacitance C
1, the second electric double layer capacitance C
2with the first electric double layer capacitance C
1equivalent capacitance value after being in parallel approximates the second electric double layer capacitance C
2, the 3rd electric double layer capacitance C on piece pole upper surface and solution interface 6
3be far longer than the second electric double layer capacitance C on electrode lower surface and solution interface 3
2, the second electric double layer capacitance C
2with the 3rd electric double layer capacitance C
3equivalent capacitance value after series connection approximates the second electric double layer capacitance C
2, then the second electric double layer capacitance C on electrode lower surface and solution interface 3
2namely be electrode 1, total equivalent electric double layer capacitance C between passivity electrolytic solution 8 and metal works 5
2 /;
Step 3: last, adopts existing impedance measurement, by electrode 1, total equivalent electric double layer capacitance C between passivity electrolytic solution 8 and metal works 5
2 /as measurand, in several microsecond, measure total equivalent electric double layer capacitance C
2 /value, the value of machining gap h can be obtained.
Described electrode 1 is cylinder electrode.
Described passivity electrolytic solution 8 is NaNO
3or NaClO
3electrolytic solution.
In described impedance measurement, by electrode 1, total equivalent electric double layer capacitance C between passivity electrolytic solution 8 and metal works 5
2as measurand, apply in measurand outside that peak-peak voltage is 500 millivolts, frequency is the sinusoidal signal of 100KHz, ensure that electrode reaction that electrode lower surface and solution interface 3 and piece pole upper surface and solution interface 6 occur seldom, makes metal be in passive state.
By the present invention is based on the online test method in the electrochemical micromachining gap of electric double layer capacitance, do not increase the prerequisite of additional sensors in system of processing under, adopt electrolytic solution effluent liquid-charging type, utilize electric double layer capacitance value on tool-electrode/solution interface to change and the relation of change with machining gap, realize the on-line checkingi of machining gap accurately and fast.Have method simple, be easy to realize, as 0<h<100 μm, its measuring accuracy is up to ± 1 μm; In addition, can in several milliseconds, the advantage such as the size detecting machining gap fast, for realizing the stable electrochemical micromachining process of high precision, high-quality workpiece, provide necessary condition.
Accompanying drawing explanation
Fig. 1 is the apparatus structure schematic diagram of the online test method in electrochemical micromachining gap based on electric double layer capacitance.
Fig. 2 is electrode lower surface/solution interface and piece pole/solution interface schematic equivalent circuit.
Fig. 3 is theoretical simulation, correlation curve figure between experiment measuring electric double layer capacitance and machining gap.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As depicted in figs. 1 and 2, the metal works 5 selected is metal plate, metal works 5 adopts have side wall insulating layer 2 and lower surface smooth and keep exposed microsize metal cylinder as electrode 1, for the technological process of fine columnar electrode end face electrolysis Milling Process micro three-dimensional structure, design a kind of online test method of the electrochemical micromachining gap based on electric double layer capacitance.First adopt have side wall insulating layer 2 and lower surface smooth and keep exposed microsize metal cylinder as electrode 1, with electrode 1 Comparatively speaking, metal works 5 clamping of large several order of magnitude size is also fixed in electrolytic cell 7, electrode 1 is moved to above metal works 5, then passivity electrolytic solution 8 is poured with constant speed V effluent.After passivity electrolytic solution 8 pours with constant speed V effluent, the change of machining gap h causes interface second electric double layer capacitance C
2with the 3rd electric double layer capacitance C
3change, namely cause cylinder electrode 1, total equivalent electric double layer capacitance C between electrolytic solution 8 and metal works 5
2 /change.The change of machining gap h causes total equivalent electric double layer capacitance C
2 /size variation, from total equivalent electric double layer capacitance C
2 /the change of size can detect the size of machining gap h.Machining gap h becomes large, total equivalent electric double layer capacitance C
2 /also become large, vice versa.As 0<h<100 μm, its measuring accuracy is up to ± 1 μm.Described be coated with electrode outer wall insulation course 2 and electrode lower surface smooth and keep exposed microsize metal cylinder electrode 1 can by electrode outer wall insulation course 2 and electrode lower surface smooth and keep the electrode of exposed other shapes of microsize metal to replace.
Adopt AV2781A type LCR tester in experiment, application impedance measurement, by electrode 1, total equivalent electric double layer capacitance C between passivity electrolytic solution 8 and metal works 5
2 /as measurand, electrode diameter is 100 μm, passivity electrolytic solution 8 for concentration be 0.5mol/L NaNO3, apply in measurand outside that voltage is 0.5V, frequency is the sinusoidal signal of 100KHz, ensure that the electrode reaction that electrode lower surface and solution interface 3 and piece pole upper surface and solution interface 6 occur is few, make metal electrode be in passive state, in several microsecond, measure total equivalent electric double layer capacitance C
2 /value.Under three kinds of differences rush liquid speed, when machining gap h increases gradually within the scope of 0 ~ 100 μm, corresponding total equivalent electric double layer capacitance C
2 /also from about 2.6nF, monotone increasing is to about about 5nF gradually, and its corresponding variation tendency is as shown in the solid line in Fig. 3.
When electrolytic solution effluent pours speed u
1for 0.505m/s, machining gap h increase gradually within the scope of 0 ~ 100 μm time, equivalent electric double layer capacitance C corresponding in emulation
2from about 2.47nF gradually monotone increasing to about about 4.12nF, as shown in the square frame dotted line in Fig. 3; Total equivalent electric double layer capacitance C corresponding in experiment
2 /from about 2.6nF gradually monotone increasing to about about 4.3nF.As shown in the dark square solid line in Fig. 3.
When electrolytic solution effluent pours speed u
2for 0.655m/s, machining gap h increase gradually within the scope of 0 ~ 100 μm time, total equivalent electric double layer capacitance C corresponding in emulation
2 /from about 2.49nF gradually monotone increasing to about about 4.54nF, as shown in the circle dotted line in Fig. 3; Total equivalent electric double layer capacitance C corresponding in experiment
2 /from about 2.6nF gradually monotone increasing to about about 4.6nF.As shown in the black circle solid line in Fig. 3.
When electrolytic solution effluent pours speed u
3for 1.058m/s, machining gap h increase gradually within the scope of 0 ~ 100 μm time, total equivalent electric double layer capacitance C corresponding in emulation
2 /from about 2.49nF gradually monotone increasing to about about 5.12nF, as shown in the triangle dotted line in Fig. 3; Total equivalent electric double layer capacitance C corresponding in experiment
2 /from about 2.67nF gradually monotone increasing to about about 4.89nF.As shown in the black triangle solid line in Fig. 3.
Known by analyzing, emulating and test, when machining gap h increases gradually within the scope of 0 ~ 100 μm, corresponding equivalent electric double layer capacitance C
2 /also from about 2.5nF monotone increasing to about about 5nF, when rushing liquid speed and being greater than 1m/s, machining gap h increases, and its relative error also becomes large gradually, and rushing under liquid speed is 1.058m/s, the maximum relative error between theoretical simulation and experimental measurements is less than 10%.Machining gap is detected by the size of tool-electrode/solution interface place electric double layer capacitance value, as 0<h<100 μm, the accuracy of detection of the method can reach ± and 1 μm.
Claims (4)
1., based on the online test method in the electrochemical micromachining gap of electric double layer capacitance, it is characterized in that: comprise the steps:
Step 1: first adopt have side wall insulating layer (2) and lower surface smooth and keep exposed microsize metal parts as electrode (1), then with electrode (1) Comparatively speaking, metal works (5) clamping of the large several order of magnitude size of surface area is also fixed in electrolytic cell (7);
Step 2: electrode (1) is moved to metal works (5) top, then passivity electrolytic solution (8) is poured with constant speed V effluent, after passivity electrolytic solution (8) pours with constant speed V effluent, the change of machining gap h causes the flow velocity in gap to change, flow velocity in gap changes the change causing electrode lower surface and solution interface (3) and piece pole upper surface and the upper induction field intensity of solution interface (6), and then cause the change of its interface net charge density, the change of interface net charge density causes the change of interface motion electromotive force, thus cause interface second electric double layer capacitance C
2with the 3rd electric double layer capacitance C
3change, namely cause cylinder electrode (1), total equivalent electric double layer capacitance C between passivity electrolytic solution (8) and metal works (5)
2 /change, the change of machining gap h causes total equivalent electric double layer capacitance C
2 /size change, from total equivalent electric double layer capacitance C
2 /the change of size can detect the size of machining gap h, and machining gap h becomes large, total equivalent electric double layer capacitance C
2 /also become large, vice versa, and electrolytic solution equivalent resistance is therebetween R,
Wherein: machining gap h is: the height of electrode lower surface and solution interface (3) distance piece pole upper surface and solution interface (6);
Total equivalent electric double layer capacitance C
2 /for: the side wall insulating layer (2) of electrode (1) is C with the first electric double layer capacitance on the electrode insulation sidewall/solution interface (4) of passivity electrolytic solution (8)
1, the second electric double layer capacitance C on the electrode lower surface of electrode (1) and solution interface (3)
2be far longer than the first electric double layer capacitance C
1, the second electric double layer capacitance C
2with the first electric double layer capacitance C
1equivalent capacitance value after being in parallel approximates the second electric double layer capacitance C
2, the 3rd electric double layer capacitance C on piece pole upper surface and solution interface (6)
3be far longer than the second electric double layer capacitance C on electrode lower surface and solution interface (3)
2, the second electric double layer capacitance C
2with the 3rd electric double layer capacitance C
3equivalent capacitance value after series connection approximates the second electric double layer capacitance C
2, then the second electric double layer capacitance C on electrode lower surface and solution interface (3)
2namely be electrode (1), total equivalent electric double layer capacitance C between passivity electrolytic solution (8) and metal works (5)
2 /;
Step 3: last, adopts existing impedance measurement, by electrode (1), total equivalent electric double layer capacitance C between passivity electrolytic solution (8) and metal works (5)
2 /as measurand, in several microsecond, measure total equivalent electric double layer capacitance C
2 /value, the value of machining gap h can be obtained.
2. the online test method in the electrochemical micromachining gap based on electric double layer capacitance according to claim 1, is characterized in that: described electrode (1) is cylinder electrode.
3. the online test method in the electrochemical micromachining gap based on electric double layer capacitance according to claim 1, is characterized in that: described passivity electrolytic solution (8) is NaNO
3or NaClO
3electrolytic solution.
4. the online test method in the electrochemical micromachining gap based on electric double layer capacitance according to any one of claims 1 to 3, it is characterized in that: in described impedance measurement, by electrode (1), total equivalent electric double layer capacitance C between passivity electrolytic solution (8) and metal works (5)
2as measurand, apply in measurand outside that peak-peak voltage is 500 millivolts, frequency is the sinusoidal signal of 100KHz, ensure that electrode lower surface and solution interface (3) and piece pole upper surface and solution interface (6) go up the electrode reaction that occurs seldom, make metal be in passive state.
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| CN104227156B (en) * | 2014-09-03 | 2016-09-14 | 哈尔滨工业大学 | A kind of online preparation method of lateral wall insulation micro tool electrode based on differential arc oxidation |
| CN106141342B (en) * | 2016-07-21 | 2017-12-22 | 江苏大学 | The electric deposition device and its method of work that a kind of electrode machining gap adaptively adjusts |
| CN110355433B (en) * | 2019-07-17 | 2020-09-22 | 常州工学院 | Plane electrolytic machining device |
| CN110802289A (en) * | 2019-11-28 | 2020-02-18 | 常州工学院 | Method and device for detecting minimum clearance between numerical control electrolytic machining electrodes |
| CN111390313B (en) * | 2020-04-08 | 2021-05-18 | 清华大学无锡应用技术研究院 | Machining gap setting method and system based on laser ranging and electric contact sensing |
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