CN102778194A - Online detection method for micro electrochemical machining gap based on electric double-layer capacitor - Google Patents
Online detection method for micro electrochemical machining gap based on electric double-layer capacitor Download PDFInfo
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Abstract
The invention relates to an online detection method for a micro electrochemical machining gap based on an electric double-layer capacitor. The online detection method comprises the steps that micro-size metal parts which have side wall insulating layers and flat lower end faces and keep exposed are used as electrodes; and then a plurality of orders of magnitude metal workpieces with great surface area are gradually fixed in an electrolytic cell; the electrodes are moved above the metal workpieces; blunt electrolyte flows into the metal workpieces by a constant speed V so that the processing gap h is changed and then the total equivalent electric double-layer capacitor C2 among cylinder electrodes, the blunt electrolyte and the metal workpieces is changed; the size of the processing gap h can be detected through the variation of the total equivalent electric double-layer capacitor C2; and finally, the total equivalent electric double-layer capacitor C2 is used as a detected object through using the impedance measurement method; the value of the total equivalent electric double-layer capacitor C2 is detected in a few seconds, namely, the value of the processing gap h is obtained. The method is simple and easy to realize; and the processing gap can sized by on-line and accurate detection in a few milliseconds.
Description
Technical field
The present invention relates to the detection technique field of interelectrode gap, be specifically related to a kind of online test method of the micro-electrochemical machining machining gap based on electric double layer capacitance.
Background technology
Electrochemical machining (Electrochemical Machining, ECM) be utilize electric current flow through machining gap make anode metal in electrolytic solution with ionic species dissolving, thereby with a kind of job operation of anode metal workpiece processing moulding.Electrochemical machining and traditional mechanical processing and special process method (Laser Processing, electron beam processing, I.B.M., Ultrasonic machining, electrosparking etc.) commonly used are Comparatively speaking; Following advantage is arranged: applied range; Every conductive material all can be processed, and not influenced by intensity, hardness and the toughness etc. of material; Workpiece material is removed with ionic species, and theoretical machining precision is high, can reach micron even nanoscale; Good, the no heat affected layer of surface quality, processing back surface of the work does not have unrelieved stress and burr; Tool-electrode is lossless.Conventional yardstick electrochemical machining has become a kind of indispensable manufacturing process in the manufacturing field.Since the nineties in last century,, impelled micro-electrochemical machining processing (Micro-ECM or μ ECM) to have and developed rapidly along with continuing to bring out and growing to high precision high-quality micro three-dimensional structure part demand of the metal alloy compositions of excellent performance.
In micro-electrochemical machining processing; In order to improve the processing locality; Reduce dispersion corrosion and reduce workpiece surface roughness, and then improve machining precision and crudy, the method that adopts usually has: the one, through amplitude, frequency and the electrode speed of feed of control high-frequency impulse electric signal; Reduce machining gap, the variation of machining gap will directly influence the form accuracy and the dimensional accuracy of processing parts; Machining gap is excessive, will cause working (machining) efficiency to reduce, not even processing; Under the prerequisite that guarantees normal process, machining gap is more little, and pulsewidth is narrow more, and machining precision is high more.The 2nd, reduce electrode size and change the rim condition of electrode, such as the electrode part surface is carried out insulation processing etc., to reduce the influence of line of electric force around the electrode.In addition, adopting low concentration passivity electrolytic solution also is one of necessary technology means.When processing dimension was contracted to meso-scale, tool-electrode was about several microns to hundreds of microns, and machining gap also has only several microns to tens of microns.Machining gap is too small, and electrolytic solution renewal and elaboration products (electrolytic slime and bubble) are discharged not smooth, possibly cause sparking or short circuit, also will damage instrument and workpiece when serious, causes processing to be failed, and processing stability variation, repetitive error become big.Several factors in the workpiece anodic dissolution processes causes the variation of machining gap, and machining gap receives electric field, flow field, metal/several respects factor affecting such as solution interface electrochemical properties, changes along with the different of process time and Working position; It is one of key factor of decision machining precision, directly influences working (machining) efficiency, surface quality and processing stability, also is design tool negative electrode, the main foundation of selecting machined parameters, is the core process key element of electrochemical machining.
The present detection method that has successively occurred multiple interelectrode gap both at home and abroad mainly is divided into two big types: indirect control method and direct Detection Method.Indirectly control method is to reach the observing and controlling to the gap through the control to machined parameters such as the voltage that influences machining gap, electric current, electrolytic conductivity, concentration of electrolyte, pH value, temperature, flows.Control method mainly comprises permanent parameter investigating method, self-adaptation measurement and control method and model prediction etc. indirectly.Direct Detection Method is in the process to be sampled in the gap, or the information such as electric signal in reflection gap are sampled, and then machined parameters is revised, and makes machining gap near theoretical value.Direct Detection Method comprises that mainly inductive loop probe method, supersonic sounding method, electromagnetic radiation detection method, loop cycle to the skill in using a kitchen knife in cookery, primary element potentiometric method, machining voltage wave form distortion method, gap average current detection method etc., directly measure machining gap.
The major parameter sampling that influences the gap in the permanent parameter investigating method process is that accomplish in the zone outside the gap, thereby is not instantaneous value, but the mean value of macroscopic view can not detect machining gap by real-time online, and the control effect is general, is difficult to realize high-precision processing.
The self-adaptation measurement and control method changes according to certain rules through making between the machined parameters each other, and the gap that causes respectively with these parameters of cancelling out each other changes, and reaches the purpose of clearance constant.The major defect of adaptive control law is to control mean gap; Before reaching balance; Because the error of blank profile; Each point gap difference is big on the finished surface, and mean gap just can not correctly reflect minimum clearance, at this moment only controls mean gap and causes the too small and short circuit of minimum clearance, burn easily; Or minimum clearance is excessive and reduce shaping efficient.U.S. Anocut company, German AEG company adopt electrolytic conductivity, concentration of electrolyte, the pH value self-adaptation control method for control signal respectively, though combine the information of temperature, concentration, but still can not reflect gap state comprehensively, effect is not ideal.
Model prediction is the technological parameter that goes out the minimum theoretical gap through model prediction, and signal and gap width are carried out linearity correction, makes machining gap approach the minimum theoretical gap.Like scholars such as the B.Wei of U.S. Nebraska-Lincoln university and K.P.Rajurkar, the current signal of paired pulses electrochemical machining carries out the stochastic modeling analysis and to the spectrum analysis of current signal, proposition can adopt the characteristics such as variance of current signal to come detector gap.This method is simple in structure, but does not draw the quantitative relation formula between variance signal and the machining gap value, can't carry out detection by quantitative, and be applicable to the occasion that the gap is bigger.Based on sextuple power and processing electric current, utilize multisensor data fusion for another example, obtain the gap and merge equation.This fusion equation more accurately reflects the machining gap value than the equation that sextuple power or the independent signal of processing electric current obtain; This method is suitable for online detection machining gap 0.2 ~ 0.4mm, and error is in < the gap detection of the macro-scale workpiece about 10%, and for micro-electrochemical machining processing; Because electrode size is very little; And the pressure that acts on the tool-electrode towards the very little electrolytic solution of hydraulic coupling is very faint, and this gap detection based on force signal is difficult to be suitable for, and sensor is installed relatively difficulty.For another example, in the electromachining gap detection based on statistics, gap state uses this recognition result to carry out servocontrol through statistical information and the identification of Bayes's minimum risk decision-making technique with gap detection.Model prediction can improve the reliability and stability of electromachining, but online detection is not realized in gap itself, and error is bigger.
The inductive loop probe method is to utilize a kind of detection method that inductive loop is online, non-intruding detects machining gap.But current vortex sensor difficult installation, and to some special process parameters of electrochemical machining, like the conductivity of instrument and workpiece material composition, density, electrolytic solution, all very responsive, this makes that the confidence level of measurement result is poor.
The supersonic sounding method is to utilize a kind of detection method of ultrasound wave on-line measurement machining gap.But ultrasonic propagation receives aeration in temperature and the machining gap, and this method has certain requirement to electrode size and electrolyte channel size, and precision is not high, and the difficult installation of popping one's head in.
The electromagnetic radiation detection method is to utilize the radiofrequency signal that gives off in the gap and the relation between the machining state, detects a kind of detection method of machining gap.This method can qualitative monitoring gap state, but accurate measurement clearance value, complex structure realizes that difficulty is higher, measuring error is bigger.
Loop cycle is to utilize cycle contact detection (tool setting) to keep a kind of detection method of machining gap to the skill in using a kitchen knife in cookery.This method is online, quasi real time machining gap is maintained certain limit (minor fluctuations is arranged); Can reduce and add spark and the generation of abnormal conditions such as short circuit in man-hour, improve crudy, and this method realize more or less freely; Has certain precision; But periodically contact detection can make working (machining) efficiency decrease, and can produce spot corrosion, reduces surfaceness.
The primary element potentiometric method is to measure a kind of method that interpolar primary element potential value is judged gap length through the back of stopping.This method does not contact error, but measuring accuracy is not high, can't realize high-precision processing.
Machining voltage wave form distortion method is as the foundation of control gap and realize a kind of method of gap detection with distortion information.Though can measure the machining gap size, the sinusoidal wave pulse electric current processing that this method can only be used for sine wave or chop off is of limited application.
Gap average current detection method is a kind of method that the gap is detected through current average and these two parameters of variance thereof.This average current detection device also has simple in structure, advantages such as cost is low, good reliability, but accuracy of detection is lower, can't realize the high precision electrochemical machining.
Said method is in the electrochemical machining process of macro-size; Realized the detection of machining gap or the prediction of machining state, but still lacked the practical and effective means, especially be applied to micro-electrochemical machining and add man-hour for the exact value of gap length and the accurate prediction of gap state; How to reach under the prerequisite of desired requirement in machining precision; Realize the online detection of machining gap simply, efficiently, accurately and fast, in micro-electrochemical machining processing, still for key technical problem to be solved is arranged.
Summary of the invention
For solving the problem that exists in the above-mentioned prior art; Order of the present invention is to provide a kind of online test method of the micro-electrochemical machining machining gap based on electric double layer capacitance; The inventive method is simple; Be easy to realize, can be in several milliseconds the online size that accurately detects machining gap, for the stable micro-electrochemical machining processing that realizes high precision, high-quality workpiece provides necessary condition.
In order to achieve the above object, the technical scheme that the present invention adopted is:
A kind of online test method of the micro-electrochemical machining machining gap based on electric double layer capacitance comprises the steps:
Step 1: at first adopting has side wall insulating layer 2 and lower surface smooth and keep exposed metal parts as electrode 1, then with electrode 1 Comparatively speaking, metal works 5 clampings of big several order of magnitude sizes of surface area also are fixed in the electrolytic cell 7;
Step 2: electrode 1 is moved to metal works 5 tops; Then passivity electrolytic solution 8 is poured with constant speed V effluent; After passivity electrolytic solution 8 pours with constant speed V effluent; The variation of machining gap h causes that the flow velocity in the gap changes, and the flow velocity in the gap changes and causes the variation of induction field intensity on electrode lower surface/solution interface 3 and the piece pole/solution interface 6, and then causes the change of its interface net charge density; The variation of interface net charge density causes the variation of Interface Current electrokinetic emf, thereby causes the interface second electric double layer capacitance C
2With the 3rd electric double layer capacitance C
3Change, promptly cause the total equivalent electric double layer capacitance C between cylinder electrode 1, passivity electrolytic solution 8 and the metal works 5
2Change, the variation of machining gap h causes total equivalent electric double layer capacitance C
2Size change, from total equivalent electric double layer capacitance C
2The change of size can detect the size of machining gap h, and it is big that machining gap h becomes, equivalent electric double layer capacitance C
2Also become big, vice versa, and electrolytic solution equivalent resistance therebetween is R;
Wherein: machining gap h is: the electrode lower surface/solution interface 3 of electrode 1 lower surface and passivity electrolytic solution 8, apart from the height between the piece pole/solution interface 6 of workpiece 5 upper surfaces and passivity electrolytic solution 8;
Total equivalent electric double layer capacitance C
2For: first electric double layer capacitance on the side wall insulating layer 2 of electrode 1 and the electrode insulation sidewall/solution interface 4 of passivity electrolytic solution 8 is C
1, the second electric double layer capacitance C on the electrode lower surface/solution interface 3 of electrode 1
2Be far longer than the first electric double layer capacitance C
1, the second electric double layer capacitance C
2With the first electric double layer capacitance C
1Equivalent capacitance value after being in parallel approximates the second electric double layer capacitance C
2, the 3rd electric double layer capacitance C on piece pole/solution interface 6
3Be far longer than the second electric double layer capacitance C on electrode lower surface/solution interface 3
2, the second electric double layer capacitance C
2With the 3rd electric double layer capacitance C
3Equivalent capacitance value after the series connection approximates the second electric double layer capacitance C
2, the second electric double layer capacitance C on electrode lower surface/solution interface 3 then
2It promptly is the total equivalent electric double layer capacitance between electrode 1, passivity electrolytic solution 8 and the metal works 5;
Step 3: last, adopt existing impedance measurement, with the total equivalent electric double layer capacitance C between electrode 1, passivity electrolytic solution 8 and the metal works 5
2As measurand, in the number microsecond, measure total equivalent electric double layer capacitance C
2Value, can obtain the value of machining gap h.
Said electrode 1 is a cylinder electrode.
Said passivity electrolytic solution 8 is NaNO
3Or NaClO
3Electrolytic solution.
In the described impedance measurement, with the total equivalent electric double layer capacitance C between electrode 1, passivity electrolytic solution 8 and the metal works 5
2As measurand; Applying peak-peak voltage in the measurand outside is that hundreds of millivolts, frequency are the sinusoidal signal of hundreds of KHz; Guarantee that the electrode reaction that takes place on electrode lower surface/solution interface 3 and the piece pole/solution interface 6 is few, make metal be in passive state.
The online test method of the micro-electrochemical machining machining gap through the present invention is based on electric double layer capacitance; In system of processing, do not increase under the prerequisite of additional sensors; Adopt electrolytic solution effluent liquid-charging type; Utilize the relation that the electric double layer capacitance value changes with machining gap on tool-electrode/solution interface, realize the online detection of machining gap accurately and fast.It is simple to have method, is easy to realize that when 0 < h < 100 μ m, its measuring accuracy is up to ± 1 μ m; In addition, can be in several milliseconds, fast detecting goes out the advantages such as size of machining gap, for realizing the stable micro-electrochemical machining process of high precision, high-quality workpiece, necessary condition is provided.
Description of drawings
Fig. 1 is based on the apparatus structure synoptic diagram of online test method of the micro-electrochemical machining machining gap of electric double layer capacitance.
Fig. 2 is electrode lower surface/solution interface and piece pole/solution interface schematic equivalent circuit.
Fig. 3 is the correlation curve figure between theoretical simulation, experiment measuring electric double layer capacitance and the machining gap.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is done further explain.
As depicted in figs. 1 and 2; The metal works of selecting for use 5 is metal plate; On metal works 5, adopting has side wall insulating layer 2 and lower surface smooth and keep exposed microsize metal cylinder as electrode 1; To the technological process of fine columnar electrode end face electrolysis Milling Process micro three-dimensional structure, design a kind of online test method of the micro-electrochemical machining machining gap based on electric double layer capacitance.At first adopting has side wall insulating layer 2 and lower surface smooth and keep exposed microsize metal cylinder as electrode 1; With electrode 1 Comparatively speaking; Metal works 5 clampings of big several order of magnitude sizes also are fixed in the electrolytic cell 7; Electrode 1 is moved to metal works 5 tops, then passivity electrolytic solution 8 is poured with constant speed V effluent.After passivity electrolytic solution 8 poured with constant speed V effluent, the change of machining gap h caused the interface second electric double layer capacitance C
2With the 3rd electric double layer capacitance C
3Variation, promptly cause the total equivalent electric double layer capacitance C between cylinder electrode 1, electrolytic solution 8 and the metal works 5
2Change.The change of machining gap h causes total equivalent electric double layer capacitance C
2Size variation, from total equivalent electric double layer capacitance C
2The variation of size can detect the size of machining gap h.It is big that machining gap h becomes, equivalent electric double layer capacitance C
2Also become big, vice versa.When 0 < h < 100 μ m, its measuring accuracy is up to ± 1 μ m.The described electrode outer wall insulation course 2 of being coated with is smooth and keep exposed microsize metal cylinder electrode 1 can be by electrode outer wall insulation course 2 and electrode lower surface smooth and keep the electrodes of exposed other shapes of microsize metal to replace with the electrode lower surface.
Adopt AV2781A type LCR tester in the experiment, use impedance measurement, total equivalent electric double layer capacitance C between electrode 1, passivity electrolytic solution 8 and the metal works 5
2As measurand; Electrode diameter is 100 μ m; Passivity electrolytic solution 8 is 0.5mol/L NaNO3 for concentration, and applying voltage in the measurand outside is that 0.5V, frequency are the sinusoidal signal of 100KHz, guarantees that the electrode reaction that takes place on electrode lower surface/solution interface 3 and the piece pole/solution interface 6 is few; Make metal electrode be in passive state, in the number microsecond, measure equivalent electric double layer capacitance C
2Value.Three kinds of differences under liquid speed, when machining gap h increases in 0 ~ 100 mu m range gradually, corresponding equivalent electric double layer capacitance C
2Also monotone increasing is to about 5nF gradually from about 2.6nF, and its corresponding variation tendency is shown in the solid line among Fig. 3.
When the electrolytic solution effluent pours speed u
1When in 0 ~ 100 mu m range, increasing gradually for 0.505m/s, machining gap h, the equivalent electric double layer capacitance C of correspondence in the emulation
2From about 2.47nF gradually monotone increasing to about 4.12nF, shown in the square frame dotted line among Fig. 3; The equivalent electric double layer capacitance C of correspondence in the experiment
2From about 2.6nF gradually monotone increasing to about 4.3nF.Shown in the dark square solid line among Fig. 3.
When the electrolytic solution effluent pours speed u
2When in 0 ~ 100 mu m range, increasing gradually for 0.655m/s, machining gap h, the equivalent electric double layer capacitance C of correspondence in the emulation
2From about 2.49nF gradually monotone increasing to about 4.54nF, shown in the circle dotted line among Fig. 3; The equivalent electric double layer capacitance C of correspondence in the experiment
2From about 2.6nF gradually monotone increasing to about 4.6nF.Shown in the black circle solid line among Fig. 3.
When the electrolytic solution effluent pours speed u
3When in 0 ~ 100 mu m range, increasing gradually for 1.058m/s, machining gap h, the equivalent electric double layer capacitance C of correspondence in the emulation
2From about 2.49nF gradually monotone increasing to about 5.12nF, shown in the triangle dotted line among Fig. 3; The equivalent electric double layer capacitance C of correspondence in the experiment
2From about 2.67nF gradually monotone increasing to about 4.89nF.Shown in the black triangle solid line among Fig. 3.
Can know through analysis, emulation and experiment, when machining gap h increases in 0 ~ 100 mu m range gradually, corresponding equivalent electric double layer capacitance C
2Also from about 2.5nF monotone increasing to about 5nF, when towards liquid speed during greater than 1m/s, machining gap h increases, its relative error also becomes greatly gradually, is being under the 1.058m/s towards liquid speed, the maximum relative error between theoretical simulation and the experiment measuring value is less than 10%.Through tool-electrode/electric double layer capacitance value C of solution interface place
2Size detect machining gap, when 0<h<during 100 μ m, the accuracy of detection of this method can reach ± 1 μ m.
Claims (4)
1. the online test method based on the micro-electrochemical machining machining gap of electric double layer capacitance is characterized in that: comprise the steps:
Step 1: the microsize metal parts that at first employing has side wall insulating layer (2) and the lower surface is smooth and maintenance is exposed is as electrode (1); Then with electrode (1) Comparatively speaking, metal works (5) clamping of big several order of magnitude sizes of surface area also is fixed in the electrolytic cell (7);
Step 2: electrode (1) is moved to metal works (5) top; Then passivity electrolytic solution (8) is poured with constant speed V effluent; After passivity electrolytic solution (8) pours with constant speed V effluent; The variation of machining gap h causes that the flow velocity in the gap changes, and the flow velocity in the gap changes and causes the upward variation of induction field intensity of electrode lower surface/solution interface (3) and piece pole/solution interface (6), and then causes the change of its interface net charge density; The variation of interface net charge density causes the variation of Interface Current electrokinetic emf, thereby causes the interface second electric double layer capacitance C
2With the 3rd electric double layer capacitance C
3Change, promptly cause the total equivalent electric double layer capacitance C between cylinder electrode 1, passivity electrolytic solution 8 and the metal works 5
2Change, the variation of machining gap h causes total equivalent electric double layer capacitance C
2Size change, from total equivalent electric double layer capacitance C
2The change of size can detect the size of machining gap h, and it is big that machining gap h becomes, equivalent electric double layer capacitance C
2Also become big, vice versa, and electrolytic solution equivalent resistance therebetween is R;
Wherein: machining gap h is: the electrode lower surface/solution interface (3) of electrode (1) lower surface and passivity electrolytic solution (8), apart from the height between the piece pole/solution interface (6) of workpiece (5) upper surface and passivity electrolytic solution (8);
Total equivalent electric double layer capacitance C
2For: first electric double layer capacitance on the side wall insulating layer (2) of electrode (1) and the electrode insulation sidewall/solution interface (4) of passivity electrolytic solution (8) is C
1, the second electric double layer capacitance C on the electrode lower surface/solution interface (3) of electrode (1)
2Be far longer than the first electric double layer capacitance C
1, the second electric double layer capacitance C
2With the first electric double layer capacitance C
1Equivalent capacitance value after being in parallel approximates the second electric double layer capacitance C
2, the 3rd electric double layer capacitance C on piece pole/solution interface (6)
3Be far longer than the second electric double layer capacitance C on electrode lower surface/solution interface (3)
2, the second electric double layer capacitance C
2With the 3rd electric double layer capacitance C
3Equivalent capacitance value after the series connection approximates the second electric double layer capacitance C
2, the second electric double layer capacitance C on electrode lower surface/solution interface (3) then
2It promptly is the total equivalent electric double layer capacitance between electrode (1), passivity electrolytic solution (8) and the metal works (5);
Step 3: last, adopt existing impedance measurement, with the total equivalent electric double layer capacitance C between electrode (1), passivity electrolytic solution (8) and the metal works (5)
2As measurand, in the number microsecond, measure total equivalent electric double layer capacitance C
2Value, can obtain the value of machining gap h.
2. the online test method of the micro-electrochemical machining machining gap based on electric double layer capacitance according to claim 1, it is characterized in that: said electrode (1) is a cylinder electrode.
3. the online test method of the micro-electrochemical machining machining gap based on electric double layer capacitance according to claim 1, it is characterized in that: said passivity electrolytic solution (8) is NaNO
3Or NaClO
3Electrolytic solution.
4. according to the online test method of each described micro-electrochemical machining machining gap based on electric double layer capacitance of claim 1 to 3; It is characterized in that: in the described impedance measurement, the total equivalent electric double layer capacitance C between electrode (1), passivity electrolytic solution (8) and the metal works (5)
2As measurand; Applying peak-peak voltage in the measurand outside is that hundreds of millivolts, frequency are the sinusoidal signal of hundreds of KHz; It is few to guarantee that electrode lower surface/solution interface (3) and piece pole/solution interface (6) are gone up the electrode reaction that takes place, and makes metal be in passive state.
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| CN110355433A (en) * | 2019-07-17 | 2019-10-22 | 常州工学院 | A kind of plane electrolytic machining device |
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| CN111390313A (en) * | 2020-04-08 | 2020-07-10 | 清华大学无锡应用技术研究院 | Machining gap setting method and system based on laser ranging and electric contact sensing |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111390313A (en) * | 2020-04-08 | 2020-07-10 | 清华大学无锡应用技术研究院 | Machining gap setting method and system based on laser ranging and electric contact sensing |
| CN111390313B (en) * | 2020-04-08 | 2021-05-18 | 清华大学无锡应用技术研究院 | Machining gap setting method and system based on laser ranging and electric contact sensing |
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