CN102749042A - Double-triangle type multi-channel medium wave infrared interference detection device - Google Patents
Double-triangle type multi-channel medium wave infrared interference detection device Download PDFInfo
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- CN102749042A CN102749042A CN2012102450193A CN201210245019A CN102749042A CN 102749042 A CN102749042 A CN 102749042A CN 2012102450193 A CN2012102450193 A CN 2012102450193A CN 201210245019 A CN201210245019 A CN 201210245019A CN 102749042 A CN102749042 A CN 102749042A
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Abstract
A double-triangle type multi-channel medium wave infrared interference detection device comprises a 4.4-micron semiconductor laser, a first reflection mirror, a second reflection mirror, a beam expanding lens, a first spectroscope, a second spectroscope, an off-axis parabolic reflection mirror, a diaphragm, an imaging lens, a medium wave infrared detector, a first reflex reflection mirror, a ground glass, a second reflex reflection mirror, an opposite point imaging lens, a switching reflection mirror, a reference mirror and a member to be detected in sequence, wherein the second reflection mirror, the beam expanding lens, the first spectroscope and the second spectroscope form an inner triangle; the first reflex reflection mirror, a ground glass, a second reflex reflection mirror and the switching reflection mirror form an outer triangle; therefore, the light path is called a double-triangle light path; the double-triangle type multi-channel medium wave infrared interference detection device carries out the optimization design of achromatism on the imaging lens; and the detection device can normally work under the three wave lengths of 3.39 microns, 4.4 microns and 10.6 microns just by replacing the laser and the detector.
Description
Technical field
The present invention relates to a kind of interference checking device, particularly a kind of operation wavelength is 4.4 μ m, has the design of " two triangle " light path layout, realizes the two triangular form hyperchannel medium wave infrared interference pick-up units to a light path and the shared same detector of optical system for testing.
Background technology
The medium wave infrared radiation is roughly corresponding with the 720K blackbody radiation, is the typical composition that high-temperature targets is sent.4.4 the laser transmissive medium wave infrared optical material of mum wavelength detects so two triangular form hyperchannel medium wave infrared interference pick-up unit can be used for the refractive index homogeneity of medium wave infrared optical system transmitted wave aberration and medium wave infrared optical material.The binary optical elements etched surface is owing to exist microstructure, if adopt the visible light interferometer to detect its face shape, the diffraction light that the binary optical elements etched surface produces will disturb interfering to produce; And the operation wavelength of two triangular form hyperchannel medium wave infrared interference pick-up units is much larger than the space periodic of binary optical elements, and its microstructure is equivalent to film, and diffraction light will disappear, so available its measured binary optical elements etched surface face shape.
Developed the infrared interference detection technique at present both at home and abroad, but be directed against the interference detection system of medium wave infrared band, domestic research is very few, has not also had product and model machine to occur.K.N.Prettyjohns; S.Devore, E.Dereniak and James C.Wyant are at " Direct phase measurement interferometer working at 3.8 μ m " (" Applied Optics ", vol.24; No.14; 1985) developed the infrared Thailand of a kind of medium wave graceful Green's formula interferometer in, be used to measure the face shape of the dielectric film that the infrared components surface is coated with, light source adopts wavelength 3.8 μ m monochromatic light; Receive interferogram with Honeywell2793 model IR CCD, resolution is 32*64.Klaus Freischlad; Jasmin C
t
is at " Infra-red interferometer for optical testing " (SPIE; Vol.2860; 1996) developed a kind of Tai Man-Green's type medium wave infrared interferometer in; Operation wavelength 3.392 μ m; Laser works is in many longitudinal modes pattern, so coherent length is shorter.Because above two kinds of instruments have all adopted safe graceful Green's formula, belong to non-light path interference system altogether, can introduce bigger systematic error.Japan Akira Furuya is at " Design of Infrared Interferometer " (SPIE; Vol.1320; 1990) develop striking rope type medium wave infrared interferometer in, be used to detect medium wave infrared optical material refractive index homogeneity, the wavefront distortion of medium wave infrared optical system etc.This instrument adopts 3.39 μ m He-Ne laser instruments as light source, adopts parabola as collimating mirror in the light channel structure, and refluxing reflection mirror has been blocked the collimated light path of central visual field.Yuan Qun, Gao Zhishan, Li Jianxin etc. are at " development of Fei Suoshi infrared interferometer and Testing Technology Study " (" Chinese laser "; The 38th volume; The 8th phase, 2011), " have infrared interference pick-up unit " (patent of invention, application number: developed the Fei Suoshi infrared interferometer 201110029807.4) to point, test double detector; Operation wavelength is 10.6 μ m; Adopt two infrared eyes to form respectively a debugging and interferogram imaging two-way imaging optical path in the interferometer, thereby light channel structure is compact inadequately, cost is higher.Above instrument all can only be worked under some wavelength.
Summary of the invention
The object of the present invention is to provide a kind of operation wavelength is 4.4 μ m; Adopt " two triangle " light path layout design proposal; Realization is to a light path and the shared same detector of optical system for testing, primary optical system general two triangular form hyperchannel medium wave infrared interference pick-up units under 3.39 μ m, 4.4 μ m, three kinds of wavelength of 10.6 μ m.
The technical solution that realizes the object of the invention is: a kind of pair of triangular form hyperchannel medium wave infrared interference pick-up unit; Comprise 4.4 μ m semiconductor lasers, first catoptron, second catoptron, beam expanding lens, first spectroscope, second spectroscope, off-axis parabolic mirror, diaphragm, imaging len, medium wave infrared eye, first refluxing reflection mirror, ground glass, second refluxing reflection mirror, an imaging len, switched mirror, reference mirror, to be measured order are successively constituted, it is characterized in that: triangle in second catoptron, beam expanding lens, first spectroscope, second spectroscope constitute; First refluxing reflection mirror, ground glass, second refluxing reflection mirror and switched mirror have constituted outer triangle; The medium wave infrared laser that is sent by 4.4 μ m semiconductor lasers is successively through first catoptron and second mirror reflects; Be incident to beam expanding lens; Beam expanding lens is assembled the incident directional light; Convergent beam becomes the spherical wave of dispersing later on through assembling focus, and spherical wave reflexes to off-axis parabolic mirror through first spectroscope and second spectroscope successively, and the focus of this off-axis parabolic mirror overlaps with the focus of beam expanding lens; Divergent spherical wave becomes the parallel beam of collimation after the off-axis parabolic mirror reflection; Return behind this parallel beam process standard mirror and the measured piece, again through the spherical wave of off-axis parabolic mirror reflection becoming convergence, a part of assembling spherical wave is through second spectroscopical front surface reflection; Transmission is finally formed the test imaging optical path by the collection of medium wave infrared eye through first spectroscope, diaphragm and imaging len successively; Another part of assembling spherical wave is through the second spectroscope transmission; Through first refluxing reflection mirror light path of turning back; Transmission is through ground glass decay part light intensity; Be incident to imaging len through second refluxing reflection mirror with to an imaging len by switched mirror again, finally formed an imaging optical path by same medium wave infrared eye collection; In the said process, moving into and shift out switched mirror by the control of electromigration platform can change between to a debugging light path and interferogram imaging optical path; Form interference cavity between standard mirror and the measured piece, standard mirror clamping is on two-dimentional adjustment rack, and the measured piece clamping is on five dimension adjustment racks.
The present invention compared with prior art, its remarkable advantage: (1) adopts 4.4 μ m semiconductor lasers as light source, adopts the medium wave infrared eye as detector; (2) adopt " two triangle " light path layout design proposal, optical system for testing with to the shared same medium wave infrared eye of a light path; (3) multichannel interference checking device has carried out achromatic optimal design to imaging len, only needs replacing laser instrument and detector just can make this pick-up unit operate as normal under 3.39 μ m, 4.4 μ m and three wavelength of 10.6 μ m respectively.
Description of drawings
Fig. 1 is according to of the present invention pair of triangular form hyperchannel medium wave infrared interference pick-up unit principle schematic.
Fig. 2 is based on the principle schematic of of the present invention pair of triangular form hyperchannel medium wave infrared interference pick-up unit test binary optical elements etched surface face shape.
Fig. 3 is based on the principle schematic of of the present invention pair of triangular form hyperchannel medium wave infrared interference pick-up unit test medium wave infrared transmission system transmitted wave aberration quality.
Fig. 4 is based on the inhomogeneity principle schematic of refractive index of of the present invention pair of triangular form hyperchannel medium wave infrared interference pick-up unit test medium wave infra-red material; Wherein synoptic diagram is tested in Fig. 4 (a) transmission; Fig. 4 (b) is a front surface test synoptic diagram; Fig. 4 (c) is a back surface test synoptic diagram; Fig. 4 (d) is a cavity test synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
In conjunction with Fig. 1, two triangular form hyperchannel medium wave infrared interference pick-up units are by 4.4 μ m semiconductor lasers 1, first catoptron 2, second catoptron 3, beam expanding lens 4, first spectroscope 5, second spectroscope 6, off-axis parabolic mirror 7, diaphragm 8, imaging len 9, medium wave infrared eye 10, first refluxing reflection mirror 11, ground glass 12, second refluxing reflection mirror 13, constitute an imaging len 14, switched mirror 15 order successively.The infrared 4.4 μ m laser of medium wave that sent by 4.4 μ m semiconductor lasers 1 are incident to beam expanding lens 4 through first catoptron 2 and second catoptron 3, and beam expanding lens 4 is assembled the directional light of incident, and convergent beam becomes the spherical wave of dispersing after assembling focus.Spherical wave reflexes to off-axis parabolic mirror 7 through first spectroscope 5 and second spectroscope 6 successively.The focus of off-axis parabolic mirror 7 overlaps with the focus of beam expanding lens 4, and the spherical wave of dispersing becomes the parallel beam of collimation after off-axis parabolic mirror 7 reflections.Parallel beam returns through standard mirror 16 and measured piece 17, reflects the spherical wave that becomes convergence through off-axis parabolic mirror 7 again.A spherical wave part of assembling is through 6 front surface reflections of second spectroscope; Transmission is finally gathered by medium wave infrared eye 10 and is formed the interferogram imaging optical paths through first spectroscope 5, diaphragm 8 and imaging len 9 successively, and another part is after 6 transmissions of second spectroscope; Through first refluxing reflection mirror 11 light path of turning back; Be focused at the surface and be carved with on the ground glass 12 of spider silk thread, the intersection point of spider silk thread is the position of converging light focus, is incident to an imaging len 14 through second refluxing reflection mirror 13; Through switched mirror 15, on medium wave infrared eye 10 target surfaces, obtain the picture of ground glass 12 by imaging len 9.In the interferogram imaging optical path, diaphragm 8 places the focal position of assembling spherical wave.Switched mirror can move into or shift out light path through the control of electromigration platform, and medium wave infrared eye 10 is gathered a light path imaging when it moves in the light path, and medium wave infrared eye 10 is gathered the interferogram imaging when shifting out light path.Form interference cavity between standard mirror 16 and the measured piece 17, standard mirror 16 clampings are on two-dimentional adjustment rack, and measured piece 17 clampings are on five dimension adjustment racks.Wherein, for adapting to different measured pieces, standard mirror 16 can be the standard germanium optical flat 16 shown in Fig. 1, Fig. 3 and Fig. 4, also can be standard sphere germainium lens 19 shown in Figure 2.Constitute the interior triangle of light path by second catoptron 3, beam expanding lens 4, first spectroscope 5 and second spectroscope 6, mainly realize the light path beam-expanding collimation, accomplish a beam splitting a debugging light path and interferogram imaging optical path; Constitute the outer triangle of light path by first refluxing reflection mirror 11, ground glass 12, second refluxing reflection mirror 13 and switched mirror 15; The main merging that realizes a debugging light path and interferogram imaging optical path; So this design light path is called " two triangle " light path design scheme, to some a debugging light path and the shared medium wave infrared eye 10 of interferogram imaging optical path, light channel structure is compact; Reduce cost, be convenient to miniaturization.In this system light path; Most of element is a reflecting element; And the optical material that transmissive element uses is zinc selenide or germanium infra-red material, and the light of 3.39 μ m, 4.4 μ m, three kinds of wavelength of 10.6 μ m all can see through, and imaging len 9 is carried out achromatic optimal design; And the control distortion, can make the interferogram imaging optical path under three kinds of wavelength, all satisfy the image quality requirement.At present; It is semiconductor laser and the medium wave infrared eye of 4.4 μ m that this pick-up unit has used operation wavelength; If change operation wavelength is laser instrument and the corresponding detector of 3.39 μ m, 10.6 μ m, can realize the hyperchannel property of pick-up unit in operate as normal under the respective wavelength.
In conjunction with Fig. 1, two triangular form hyperchannel medium wave infrared interference pick-up units also have following principal character: the angle of the normal direction of first refluxing reflection mirror 11 and incoming laser beam chief ray is 23 ° ± 5 °; Chief ray is along the normal direction incident of ground glass 12; The angle of the normal direction of second refluxing reflection mirror 13 and incoming laser beam chief ray is 31.46 ° ± 5 °; Chief ray is along the normal direction incident to an imaging len 14; The normal direction of switched mirror 15 and the angle of incident laser are 41.46 ° ± 2.5 °.
In conjunction with Fig. 1,2, use two triangular form hyperchannel medium wave infrared interference pick-up units to detect binary optical elements etched surface face shape (being example) with aspheric surface.Standard sphere germainium lens 19 is converted into the standard ball ground roll with the collimated light of two triangular form hyperchannel medium wave infrared interference pick-up unit main frame 18 outgoing; And provide with reference to sphere (referring to Fig. 1, two triangular form hyperchannel medium wave infrared interference pick-up unit main frames 18 are made up of the optical element shown in the frame of broken lines shown in Fig. 1: 4.4 μ m semiconductor lasers 1, first catoptron 2, second catoptron 3, beam expanding lens 4, first spectroscope 5, second spectroscope 6, off-axis parabolic mirror 7, diaphragm 8, imaging len 9, medium wave infrared eye 10, first refluxing reflection mirror 11, ground glass 12, second refluxing reflection mirror 13, to an imaging len 14 and switched mirror 15) for tested binary optical elements etched surface 20.The reference surface of standard sphere germainium lens 19 and the aspheric surface of tested binary optical elements etched surface 20 are placed on confocal position, form interference cavity between the two.When clamping is adjusted, at first with standard sphere germainium lens 19 clampings on two-dimentional adjustment rack, move into switched mirror 15; Switch to an image formation state, on monitor, observe the some picture that medium wave infrared eye 10 subscript director sphere germainium lens 19 return, adjustment two-dimensional adjustment knob; The invocation point picture is overlapped with crosshair basically; Shift out switched mirror 15, switch to the interferogram image formation state, the background patterns that the standard sphere germainium lens of gathering according to medium wave infrared eye on the monitor 10 again 19 returns; Trace adjustment two-dimensional adjustment knob makes that background patterns edge clear and brightness are even; Then tested binary optical elements etched surface 20 clampings are tieed up on the adjustment racks five; Structural parameters according to standard sphere germainium lens 19 and tested binary optical elements etched surface 20; Tested binary optical elements etched surface 20 is adjusted to and standard sphere germainium lens 19 approaching confocal states; Switch to an image formation state; Can observe the some picture that tested binary optical elements etched surface 20 returns on the medium wave infrared eye 10 this moment on the monitor, regulate the adjusting knob of five dimension adjustment racks, and the some picture that makes tested binary optical elements etched surface 20 return looks like to overlap with the point that standard sphere germainium lens 19 returns; Switch to the interferogram image formation state; Can on monitor, observe the interferogram that medium wave infrared eye 10 is gathered this moment, the adjusting knob of trace adjustment five dimension adjustment racks shows 1 ~ 2 interference fringe in contrast better edge clear ground on monitor.Adopt the movable phase interfere testing software, can calculate the surface form deviation value of tested binary optical elements etched surface 20 and best-fit sphere.
In conjunction with Fig. 1,3, use two triangular form hyperchannel medium wave infrared interference pick-up units to detect the quality of the transmitted wave aberration of medium wave infrared transmission system.The collimated light beam of two triangular form hyperchannel medium wave infrared interference pick-up unit main frame 18 outgoing is assembled through tested medium wave infrared transmission system 21, and is confocal with tested medium wave infrared transmission system 21 with reference to sphere 22, standard germanium optical flat 16 with form interference cavity with reference to sphere 22.The method for test adjusting of medium wave infrared transmission system 21 transmitted wave aberration quality is identical with the said method of Fig. 2.Can detect the quality of the wave aberration of medium wave infrared transmission system according to this principle device.Wherein, medium wave infrared transmission system can be made up of multiple mode, for example multi-disc transmissive element, multi-disc reflecting element, the folding commingled system etc. of spreading out.
In conjunction with Fig. 1,4, use two triangular form hyperchannel medium wave infrared interference pick-up units to detect the refractive index homogeneity of medium wave infrared optical material.Use this pick-up unit to measure medium wave infrared optical material refractive index homogeneity and be divided into the completion of four steps: the first step; The collimated light beam incident of two triangular form hyperchannel medium wave infrared interference pick-up unit main frame 18 outgoing sees through testing sample 23; Through the plane of reflection 24 reflections; Interfere with the light that returns by surface, standard germanium optical flat 16 back, record corrugated
; Second step; The collimated light beam incident of two triangular form hyperchannel medium wave infrared interference pick-up unit main frame 18 outgoing; The light beam that light beam that is returned by testing sample 23 front surface reflections and surfaces, standard germanium optical flat 16 back are returned interferes, and records corrugated
; The 3rd step; The collimated light beam incident of two triangular form hyperchannel medium wave infrared interference pick-up unit main frame 18 outgoing; The light beam that is returned by the light beam and the surface, standard germanium optical flat 16 back of testing sample 23 back return reflection surfaces interferes, and records
; The 4th step; Remove testing sample; The collimated light beam incident of two triangular form hyperchannel medium wave infrared interference pick-up unit main frame 18 outgoing; The light beam that is returned by surfaces, standard germanium optical flat 16 back and the light beam of the plane of reflection 24 reflected backs interfere, and record
; Interference testing software is analyzed and is handled data, can calculate the refractive index homogeneity of testing sample.
Claims (10)
1. two triangular form hyperchannel medium wave infrared interference pick-up unit; Comprise 4.4 μ m semiconductor lasers [1], first catoptron [2], second catoptron [3], beam expanding lens [4], first spectroscope [5], second spectroscope [6], off-axis parabolic mirror [7], diaphragm [8], imaging len [9], medium wave infrared eye [10], first refluxing reflection mirror [11], ground glass [12], second refluxing reflection mirror [13], an imaging len [14], switched mirror [15], reference mirror [16], to be measured [17] order are successively constituted, it is characterized in that: triangle in second catoptron [3], beam expanding lens [4], first spectroscope [5], second spectroscope [6] constitute; First refluxing reflection mirror [11], ground glass [12], second refluxing reflection mirror [13] have constituted outer triangle with switched mirror [15]; The medium wave infrared laser that is sent by 4.4 μ m semiconductor lasers [1] reflects through first catoptron [2] and second catoptron [3] successively; Be incident to beam expanding lens [4]; Beam expanding lens [4] is assembled the incident directional light; Convergent beam becomes the spherical wave of dispersing later on through assembling focus, and spherical wave reflexes to off-axis parabolic mirror [7] through first spectroscope [5] and second spectroscope [6] successively, and the focus of this off-axis parabolic mirror [7] overlaps with the focus of beam expanding lens [4]; Divergent spherical wave becomes the parallel beam of collimation after off-axis parabolic mirror [7] reflection; Return behind this parallel beam process standard mirror [16] and the measured piece [17], pass through the spherical wave of off-axis parabolic mirror [7] reflection becoming convergence again, assemble of the front surface reflection of the part of spherical wave through second spectroscope [6]; Transmission is finally formed the test imaging optical path by medium wave infrared eye [10] collection through first spectroscope [5], diaphragm [8] and imaging len [9] successively; Another part of assembling spherical wave is through second spectroscope [6] transmission; Through first refluxing reflection mirror [11] light path of turning back; Transmission is through ground glass [12] decay part light intensity; Be incident to imaging len [9] through second refluxing reflection mirror [13] with to an imaging len [14] by switched mirror [15] again, finally formed an imaging optical path by same medium wave infrared eye [10] collection; In the said process, moving into and shift out switched mirror [15] by the control of electromigration platform can change between to a debugging light path and interferogram imaging optical path; Form interference cavity between standard mirror [16] and the measured piece [17], standard mirror [16] clamping is on two-dimentional adjustment rack, and measured piece [17] clamping is on five dimension adjustment racks.
2. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit, it is characterized in that: the normal direction of first refluxing reflection mirror [11] and the angle of incoming laser beam chief ray are 23 ° ± 5 °.
3. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit, it is characterized in that: chief ray is along the normal direction incident of ground glass [12].
4. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit, it is characterized in that: the normal direction of second refluxing reflection mirror [13] and the angle of incoming laser beam chief ray are 31.46 ° ± 5 °.
5. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit is characterized in that: chief ray is along the normal direction incident to an imaging len [14].
6. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit, it is characterized in that: the normal direction of switched mirror [15] and the angle of incident laser are 41.46 ° ± 2.5 °.
7. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit; It is characterized in that: imaging len has been carried out achromatic optimal design; Changing the shoot laser wavelength is the laser instrument of 3.39 μ m, 10.6 μ m and the detector of corresponding detectable above wavelength, and instrument still can operate as normal.
8. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit is characterized in that: diaphragm [8] is positioned at the focal position of assembling spherical wave.
9. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit, it is characterized in that: the focus of beam expanding lens [4] overlaps with the focus of off-axis parabolic mirror [7].
10. according to claim 1 pair of triangular form hyperchannel medium wave infrared interference pick-up unit is characterized in that: the intersection point that ground glass [12] is gone up crosshair overlaps with incident converging light focus.
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Cited By (8)
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| CN103499848A (en) * | 2013-09-06 | 2014-01-08 | 中国科学院西安光学精密机械研究所 | Laser micro thruster optical system and installation method thereof |
| CN107037575A (en) * | 2017-05-08 | 2017-08-11 | 北京北方群星科技发展有限公司 | A kind of off-axis reflection optical antenna and system |
| CN108132026A (en) * | 2018-01-24 | 2018-06-08 | 赵智亮 | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor |
| CN108918429A (en) * | 2018-06-20 | 2018-11-30 | 中国科学院西安光学精密机械研究所 | A kind of online and offline spectrum data gathering device based on linear array detector |
| CN110941024A (en) * | 2019-12-11 | 2020-03-31 | 江西莱利电气有限公司 | Device and method for detecting foreign matters in fan based on interference imaging |
| CN112362307A (en) * | 2020-10-23 | 2021-02-12 | 北京空间机电研究所 | Double-beam-expanding cascade polarization testing system of large-caliber optical remote sensor |
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| CN103499848A (en) * | 2013-09-06 | 2014-01-08 | 中国科学院西安光学精密机械研究所 | Laser micro thruster optical system and installation method thereof |
| CN103499848B (en) * | 2013-09-06 | 2015-11-18 | 中国科学院西安光学精密机械研究所 | A kind of laser micro thruster optical system and installation method thereof |
| CN107037575A (en) * | 2017-05-08 | 2017-08-11 | 北京北方群星科技发展有限公司 | A kind of off-axis reflection optical antenna and system |
| CN108132026A (en) * | 2018-01-24 | 2018-06-08 | 赵智亮 | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor |
| CN108132026B (en) * | 2018-01-24 | 2024-02-27 | 赵智亮 | Infrared and visible light dual-wavelength transmission type interference testing device in semiconductor |
| CN108918429A (en) * | 2018-06-20 | 2018-11-30 | 中国科学院西安光学精密机械研究所 | A kind of online and offline spectrum data gathering device based on linear array detector |
| CN110941024A (en) * | 2019-12-11 | 2020-03-31 | 江西莱利电气有限公司 | Device and method for detecting foreign matters in fan based on interference imaging |
| CN112362307A (en) * | 2020-10-23 | 2021-02-12 | 北京空间机电研究所 | Double-beam-expanding cascade polarization testing system of large-caliber optical remote sensor |
| CN112362307B (en) * | 2020-10-23 | 2022-07-29 | 北京空间机电研究所 | Double-beam-expanding cascade polarization testing system of large-caliber optical remote sensor |
| CN114061449A (en) * | 2021-11-01 | 2022-02-18 | 南京理工大学 | Infrared interference detection device of single detector and design method thereof |
| CN116625528A (en) * | 2023-07-25 | 2023-08-22 | 南京理工大学 | Design method and system application of large dynamic range infrared radiation source test system |
| CN116625528B (en) * | 2023-07-25 | 2023-10-31 | 南京理工大学 | Design method and system application of large dynamic range infrared radiation source test system |
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Application publication date: 20121024 |