CN102692422B - 一种计量型高精度x射线显微镜扫描样品台 - Google Patents
一种计量型高精度x射线显微镜扫描样品台 Download PDFInfo
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- CN102692422B CN102692422B CN201210201001.3A CN201210201001A CN102692422B CN 102692422 B CN102692422 B CN 102692422B CN 201210201001 A CN201210201001 A CN 201210201001A CN 102692422 B CN102692422 B CN 102692422B
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- 238000000034 method Methods 0.000 claims abstract description 18
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- 238000003384 imaging method Methods 0.000 description 10
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CN201210201001.3A CN102692422B (zh) | 2012-06-18 | 2012-06-18 | 一种计量型高精度x射线显微镜扫描样品台 |
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CN102692422B true CN102692422B (zh) | 2014-10-29 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN103759681B (zh) * | 2014-01-10 | 2016-05-11 | 天津大学 | 显微ct转轴运动误差校正方法 |
CN104597062A (zh) * | 2015-02-02 | 2015-05-06 | 天津三英精密仪器有限公司 | 一种柱形束大视场x射线ct成像*** |
CN106248056A (zh) * | 2016-08-18 | 2016-12-21 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种多光源扫描检测方法 |
CN106352836A (zh) * | 2016-08-31 | 2017-01-25 | 无锡信欧光电科技有限公司 | 一种精密旋转位移台 |
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JP2004354215A (ja) * | 2003-05-29 | 2004-12-16 | Ihi Aerospace Co Ltd | 放射線透過非破壊検査装置 |
CN100473347C (zh) * | 2005-06-23 | 2009-04-01 | Ge医疗***环球技术有限公司 | X射线ct*** |
CN201328816Y (zh) * | 2008-12-26 | 2009-10-21 | 苏州和君科技发展有限公司 | 具有四自由度载物台的基于锥形束重建的成像装置 |
CN101813642A (zh) * | 2009-12-31 | 2010-08-25 | 苏州和君科技发展有限公司 | 具有三自由度运动控制的显微ct成像设备及其校准方法 |
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