CN102687240B - 基板用涂布装置及基板涂布方法 - Google Patents
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Abstract
基板用涂布装置(10)具有:精密载物台(7)、喷嘴(8)、传送带(3~6、21)。精密载物台(7)水平设置有放置基板W的放置面,沿着传送方向在上游端和下游端之间自由往返移动。传送带(3~6、21)以基板W的表面位于水平面内的方式沿着规定的传送方向经由精密载物台(7)的放置面传送基板W。中间传送带(21)在传送面与载物台的放置面一致的传送位置、和传送面比载物台的放置面靠下方的非传送位置之间自由升降。
Description
技术领域
本发明涉及一种使喷嘴相对于玻璃基板等板状基板向一个方向扫描并从喷嘴喷出抗蚀液等涂布液而对基板的涂布面涂布涂布液的基板用涂布装置。
背景技术
对玻璃基板等板状基板表面涂布涂布液时,使用下述基板用涂布装置:使狭缝状的喷嘴在与基板表面之间设置有间隙的状态下,沿着与狭缝正交的规定的扫描方向相对于基板表面而进行扫描。
为了提高大型基板的生产效率,可考虑以下方式:经由传送带,将多块基板依次传送到配置有喷嘴的涂布处理位置,将涂布处理后的基板传送到下一个处理位置。
为了对基板表面以所需厚度均匀地涂布涂布液,需要使喷嘴的前端和基板的表面的间隔保持一定。因此,在涂布处理位置上,配置上表面平滑的精密载物台。对放置在精密载物台上的基板,从喷嘴涂布涂布液。
作为现有的基板用涂布装置,存在以下装置(例如,参照专利文献1):将使狭缝状的喷嘴移动的导轨以不与基板干扰的状态,沿着与基板传送方向正交的方向配置在配置有称为放置台的精密载物台的涂布处理位置上。
在记载于专利文献1的构成中,狭缝状的喷嘴的长度方向沿着基板传送方向配置,相对于传送到精密载物台上的基板,狭缝状的喷嘴沿着导轨向与基板传送方向正交的方向移动。
现有技术文献
专利文献
专利文献1:日本特开2004-298775号公报
发明内容
发明要解决的问题
但是,记载于专利文献1的基板用涂布装置中,使喷嘴相对于在涂布处理位置上停止了向传送方向的移动的基板而向与基板传送方向正交的方向移动,因此在涂布处理中无法使基板向传送方向移动,从而涂布处理作业的生产节拍时间变得长时间化。
另一方面,在配置有精密载物台的涂布处理位置上,在使用传送用机器人、单元间传送机构的情况下,在涂布处理作业过程中也需要停止基板的移动,涂布处理作业的生产节拍时间变得长时间化。
本发明的目的在于提供一种基板用涂布装置,能够使基板沿着传送路径移动的同时将涂布液涂布到基板表面,从而能够缩短涂布处理作业的生产节拍时间。
用于解决问题的手段
本发明涉及的基板用涂布装置具有载物台、喷嘴、传送带、载物台移动单元、喷嘴升降单元、传送带升降单元、控制单元。载物台水平地设置有放置基板的放置面,沿着传送方向在上游端和下游端之间自由往返移动。传送带以基板的表面位于水平面内的方式沿着规定的传送方向经由载物台的放置面传送基板,该传送带的至少规定范围的长度的中间部自由升降。载物台移动单元使载物台在规定范围内的上游端和下游端之间往返移动。传送带升降单元使传送带的中间部在传送面与载物台的放置面一致的传送位置、和传送面比载物台的放置面靠下方的非传送位置之间升降。控制单元构成为控制载物台移动单元及传送带升降单元的动作,使得在放置面放置有通过传送带传送的基板的载物台从上游端向下游端移动的期间,从喷嘴对基板的表面喷出涂布液。
发明效果
根据本发明,能够不停止基板在传送方向的移动而进行对基板表面的涂布处理,从而能够缩短涂布处理作业的生产节拍时间。
附图说明
图1是本发明的实施方式涉及的基板用涂布装置的俯视图。
图2是该基板用涂布装置的主视图。
图3是该基板用涂布装置的控制部的框图。
图4是表示该控制部的处理步骤的流程图。
图5的(A)~(E)是说明本发明的基板涂布方法的图。
附图标记说明
1主框架;
2副框架;
3第1上游侧传送带;
4第2上游侧传送带;
5第1下游侧传送带;
6第2下游侧传送带;
7精密载物台;
8喷嘴;
9涂底辊(priming roller);
10基板用涂布装置;
100控制部;
W基板。
具体实施方式
以下,参照附图说明本发明的实施方式涉及的基板用涂布装置。
如图1及图2所示,本发明的实施方式涉及的基板用涂布装置10具有:主框架1、副框架2、第1上游侧传送带3、第2上游侧传送带4、第1下游侧传送带5、第2下游侧传送带6、精密载物台7、喷嘴8、涂底辊9、控制部100。
主框架1在上表面保持有:副框架2、第1上游侧传送带3、第2上游侧传送带4、第1下游侧传送带5、第2下游侧传送带6。并且,主框架1经由支持部件11、12保持有喷嘴8、涂底辊9。在主框架1的上表面配置有导轨13。
副框架2自由升降地保持于主框架1,并支持中间传送带21。中间传送带21是本发明的传送带的中间部,由多个辊211构成。
第1上游侧传送带3、第2上游侧传送带4、第1下游侧传送带5、第2下游侧传送带6与中间传送带21共同构成本发明的传送带。各传送带3~6分别由多个辊31、41、51、61构成。传送带3~6及中间传送带21从上游侧朝向下游侧在直线上传送基板。辊31、41、51、61、211与基板底面中的与传送方向平行的两端部抵接。基板的传送方向与导轨13的长度方向一致。
此外,各传送带3~6、21不限于由多个辊31、41、51、61、211构成的辊道炉床(roller hearth),可使用轮带、链条等适于基板传送的机构。
精密载物台7是本发明的载物台,沿着导轨13的长度方向在上游端和下游端之间的规定范围内自由往返移动。精密载物台7的上表面是平滑的水平面,用于放置基板。精密载物台7往返移动的规定范围设定在基板传送方向上的副框架内。此外,精密载物台7也可在上表面吸附基板。
喷嘴8从向下表面开放的狭缝喷出涂布液。喷嘴8通过支持部件11在精密载物台7的上方自由升降支持于喷出位置和退避位置之间。喷嘴8配置成使狭缝的长度方向在水平面内与基板传送方向正交。
涂底辊9是本发明的清洁部件,圆周面与喷嘴8的狭缝抵接并旋转。涂底辊9与涂底辊用电机一起通过涂底单元12,在精密载物台7的上方,沿着基板传送方向自由往返移动于清洁位置和待机位置之间。作为清洁部件的涂底辊9用于使喷嘴8的涂布液的喷出状态稳定,当能够从喷嘴8将涂布液稳定地喷出到基板表面整个面时,可以省略。
如图3所示,控制部100在具有ROM102及RAM103的CPU101上连接电机驱动器104~111、阀驱动器112而构成。控制部100相当于本发明的控制部,收容在设置于离开主框架1的位置的盒子内。CPU101根据ROM102中存储的程序,将驱动数据输出到电机驱动器104~111及阀驱动器112。这期间输入输出的数据暂时存储到RAM103中。
电机驱动器104~111分别连接到:传送带电机301~303、喷嘴用电机304、涂底辊用电机305、涂底单元用电机310、载物台用电机306、副框架升降用电机307,阀驱动器112连接到涂布液用阀308。
喷嘴用电机304、载物台用电机306、副框架升降用电机307分别相当于本发明的喷嘴升降单元、载物台移动单元、传送带升降单元。喷嘴升降单元、载物台移动单元、传送带升降单元不限于电机,也可使用气缸、线性电机等任意的驱动源。
如图4所示,CPU101在基板涂布作业时向电机驱动器104~106输出驱动信号,以规定的基板传送速度旋转传送带电机301~303(S1)。这样一来,辊31、41、51、61、211开始旋转,如图5的(A)所示,基板W向箭头X所示的基板传送方向传送。
如图5的(A)所示,在基板涂布作业开始时,副框架2在上下方向上位于中间传送带21的传送面与传送带3~6的传送面一致的传送位置。并且,精密载物台7位于箭头X方向的上游端,喷嘴8位于离开基板W的退避位置,涂底辊9位于与喷嘴8的狭缝抵接的清洁位置。并且,箭头X方向上的喷嘴8的位置与位于上游端的精密载物台7的下游端基本一致。
在基板W的下游端到达精密载物台7的下游端的位置(S2)时,CPU101向电机驱动器107、109、111输出驱动信号,分别以规定量使喷嘴用电机304、涂底单元用电机310、副框架升降用电机307正转(S3~S5)。这样一来,如图5的(B)所示,搭载有涂底辊9的涂底单元12移动到退避位置,喷嘴8下降到涂布位置,副框架2下降到非传送位置。
CPU101进一步向电机驱动器110及阀驱动器112输出驱动信号,从而使载物台用电机306正转(S6),并打开涂布液阀308(S7)。这样一来,精密载物台7从上游端向下游端沿着箭头X方向开始移动,并且从喷嘴8涂布涂布液。在喷嘴8位于涂布位置的状态下,喷嘴8的狭缝和基板W的上表面之间形成最适于涂布液的涂布的间隔。在基板W放置到平滑形成的精密载物台7的上表面的状态下,从喷嘴8喷出的涂布液均匀地涂布到表面整个面。
如图5的(C)所示,在精密载物台7到达下游端而基板W的上游端到达喷嘴8的狭缝位置时(S8),CPU101向阀驱动器112输出驱动信号而关闭涂布液用阀(S9)。进一步,CPU101向电机驱动器107、108、111输出驱动信号,分别以规定量使喷嘴用电机304、载物台用电机306、副框架升降用电机307逆转(S10~S12)。这样一来,如图5的(D)所示,喷嘴8上升到退避位置,精密载物台7向上游端移动,副框架2上升到传送位置。进一步,在喷嘴8到达退避位置后(S13),CPU101向电机驱动器109输出驱动信号,以规定量使涂底单元用电机310逆转(S14)。这样一来,如图5的(E)所示,搭载有涂底辊9的涂底单元12移动到清洁位置。CPU101经由电机驱动器108而驱动涂底辊用电机305,使涂底辊9旋转而清洁喷嘴8。
直到没有下一基板W为止,CPU101反复执行步骤S2~S14的处理(S15),依次执行对多块基板W的涂布液的涂布作业。
对1块基板W的涂布作业完成后,对各基板W之间设置空间,使得在精密载物台7从下游端移动到上游端的期间,下一基板W的下游端不到达箭头X方向上的喷嘴8的配置位置。这样一来,能够不停止各基板W的传送而依次进行对多块基板的涂布液的涂布,能够缩短基板涂布作业的生产节拍。
应当认为上述实施方式的说明从所有角度都为示例,不是限定性的。本发明的范围不是通过上述实施方式而通过权利要求范围所表示。进一步,本发明的范围中包括与权利要求范围均等的含义及范围内的所有变更。
Claims (6)
1.一种基板用涂布装置,具有:
载物台,水平设置有放置基板的放置面,沿着传送方向在规定范围内自由往返移动;
喷嘴,具有向下方喷出涂布液的狭缝,该狭缝与上述传送方向正交;
传送带,以基板的表面位于水平面内的方式沿着上述传送方向经由上述放置面传送基板,该传送带的至少上述规定范围的长度的中间部自由升降;
载物台移动单元,使上述载物台在上述规定范围内的上游端和下游端之间往返移动;
传送带升降单元,使上述传送带的中间部在传送面与上述放置面一致的传送位置、和传送面比上述放置面靠下方的非传送位置之间升降;和
控制部,构成为控制上述载物台移动单元及上述传送带升降单元的动作,使得在上述放置面放置有通过上述传送带传送的基板的上述载物台从上述上游端向上述下游端移动的期间,从上述喷嘴对基板的表面喷出涂布液,并使得上述载物台从下游端移动到上游端的期间,下一基板的下游端不到达传送方向上的喷嘴的配置位置。
2.根据权利要求1所述的基板用涂布装置,其中,
上述控制部控制上述载物台移动单元的动作,使得上述载物台:在上述放置面放置基板而从上述上游端去往上述下游端;在上述放置面不放置基板而从上述下游端返回上述上游端,
上述控制部控制上述传送带升降单元的动作,使得上述传送带的中间部:在基板到达至位于上述上游端的上述载物台的上方时,下降到上述非传送位置;在上述放置面放置有基板的上述载物台到达至上述下游端时,上升到上述传送位置。
3.根据权利要求2所述的基板用涂布装置,其中,
上述喷嘴在上述载物台的上方上向上下方向自由往返移动,
该基板用涂布装置具有喷嘴升降单元,该喷嘴升降单元使上述喷嘴在以下位置之间升降:对放置在上述放置面的基板的表面喷出涂布液的喷出位置、和与该喷出位置相比靠上方的退避位置,
上述控制部控制上述喷嘴升降单元的动作,使得上述喷嘴:在上述传送带的中间部下降到上述非传送位置后,下降到上述喷出位置;在上述放置面放置有基板的上述载物台到达至上述下游端时,上升到上述退避位置。
4.根据权利要求3所述的基板用涂布装置,其中,
还具有:清洁部件,是清洁上述喷嘴的狭缝的清洁单元,沿着上述传送方向自由往返移动;以及清洁部件移动单元,使上述清洁部件在与上述喷嘴抵接的清洁位置、及不与上述喷嘴抵接的待机位置之间移动,
上述控制部控制上述清洁部件移动单元,使得上述清洁部件:在上述喷嘴从上述涂布位置上升到上述退避位置时,移动到上述清洁位置;在上述喷嘴从上述退避位置移动到上述涂布位置之前,位于上述待机位置。
5.根据权利要求1至4中任一项所述的基板用涂布装置,其中,
上述传送带的辊和基板底面中的与传送方向平行的2端部接触。
6.一种基板涂布方法,经由传送带沿着规定的传送方向水平传送基板,将从喷嘴喷出的涂布液涂布到基板的表面,该基板涂布方法包括以下步骤:
准备载物台和传送带,所述载物台水平设置有用于放置基板的放置面,沿着传送方向在上游端和下游端之间自由往返移动,所述传送带以基板的表面位于水平面内的方式沿着上述传送方向经由上述放置面传送基板,该传送带的至少上述规定范围的长度的中间部在使传送面的高度与上述放置面一致的传送位置、及与该传送位置相比靠下方的非传送位置之间自由升降;
当通过上述传送带传送的第1基板到达位于上述上游端的上述载物台的放置面上时,使上述传送带的中间部从上述传送位置下降到上述非传送位置;
使搭载有上述第1基板的上述载物台从上述上游端向上述下游端移动的同时,从上述喷嘴对上述第1基板的表面喷出涂布液;
当上述载物台到达至上述下游端后,使上述传送带的中间部从上述非传送位置上升到上述传送位置;和
将上述载物台从上述下游端返回上述上游端,使得在上述载物台从下游端移动到上游端的期间,第2基板的下游端不到达传送方向上的喷嘴的配置位置。
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US20150128856A1 (en) * | 2013-11-14 | 2015-05-14 | Illinois Tool Works Inc. | Dispensing apparatus having transport system and method for transporting a substrate within the dispensing apparatus |
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