CN102662310B - A kind of method detecting template indexer - Google Patents
A kind of method detecting template indexer Download PDFInfo
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- CN102662310B CN102662310B CN201210142934.XA CN201210142934A CN102662310B CN 102662310 B CN102662310 B CN 102662310B CN 201210142934 A CN201210142934 A CN 201210142934A CN 102662310 B CN102662310 B CN 102662310B
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- indexer
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- warning value
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- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
The object of the present invention is to provide a kind of method detecting template indexer, the operation conditions of index can be detected under index duty, the method is nondestructive, do not need to take machine apart to detect each several part, can safeguard in time index by method of the present invention and overhaul, to avoid occurring unnecessary fault.
Description
Technical field
The present invention relates to mask transmission system, particularly relate to a kind of method detecting template indexer.
Background technology
In a photolithographic process, mask transmission system is the important composition subsystem of litho machine, mainly bears the work such as the access of mask, transmission, location and exchange, people can be avoided directly to contact with mask and cause damage to mask.Existing mask lift locating device, as the index (indexer) that ASYST company of american semiconductor manufacturer releases, comprise: laser sensing system, locking device, elevating mechanism, wherein, elevating mechanism comprises direct current generator, belt and drive lead screw, and elevating mechanism drives the slide block being connected to mask chassis to do straight reciprocating motion along support post.Index arranges with its servocontrol action accurately, intelligent locking and senses (carriersensing) with optimized carrier, provides superior performance.
But, easily there is mechanical loss in drive lead screw, the direct current generator and belt etc. of the elevating mechanism of index, the performance of index is made to reduce the normal transmission affecting mask, common detection method all needs to carry out when machine is out of service, because whole photoetching process is that continuous print can not interrupt, therefore the detection method of routine is not suitable for this.Therefore, a kind of method that can detect index state under index duty is needed.
Summary of the invention
The object of the present invention is to provide a kind of method detecting template indexer, to detect index operation conditions under index duty.
Detect a method for template indexer, comprising: the electric current measuring index circuit with multimeter, when the electric current of described index exceedes warning value, then will check index in following 2 months ~ 4 months; When the electric current of described index arrives dangerous values, will check index within the week of 1 week ~ 2, determine that whether all parts wear condition of index is all normal.
A kind of method detecting template indexer of the present invention, comprising: the electric current measuring index circuit with multimeter, when the electric current of described index exceedes warning value, then will check index in following 2 months ~ 4 months; When the electric current of described index arrives dangerous values, will check index within the week of 1 week ~ 2, determine that whether all parts wear condition of index is all normal.
As preferably, obtain described warning value and dangerous values by test of many times.
As preferably, described warning value is 1.95A ~ 2.3A.
As preferably, described dangerous values is 2.3A ~ 2.5A.
The method of detection template indexer of the present invention, the operation conditions of index can be detected under index duty, the method is nondestructive, do not need to take machine apart to detect each several part, can safeguard in time index and overhaul by method of the present invention, to avoid unnecessary fault.
Accompanying drawing explanation
Fig. 1 is the front elevation of template indexer;
Fig. 2 is the side view of template indexer;
Fig. 3 is the schematic diagram of the elevating mechanism of template indexer;
Fig. 4 is a kind of schematic diagram detecting the method for template indexer of the present invention.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.
Fig. 1 and Fig. 2 is respectively front elevation and the side view of template indexer, and wherein, 11 is the lifting chassis of index, and mask can be driven to move up and down; 12 is the base of index, plays a part to support and fixing, and is also provided with the control circuit board of index in it; 13 and/or 14 is the framework support post of index, play a supportive role, the elevating mechanism on lifting chassis 11 is also installed in 14, as shown in Figure 3, described elevating mechanism comprises direct current generator 31, belt 32 and drive lead screw 33, belt 32 is by the power transmission of direct current generator 31 to drive lead screw 33, and described drive lead screw 33 is with the slide block 34 on the lifting chassis 11 that is dynamically connected to pump along framework support post 13 and 14, and lifting chassis 11 and the mask on it move up and down along with slide block 34.
Respectively there is an index both sides of exposure bench.When index is because of malfunction coefficient Wrong localization, and when can not deal with problems after oneself detects, need index to unload from equipment, change accessory, this will take a long time.A kind of method detecting template indexer of the present invention is that a multimeter is connected to index input and output both sides, during due to index generation exception, the electric current flowing through it can be made to exceed normal level, therefore, the present invention detects the running status of template indexer by detecting its size of current.
Fig. 4 is a kind of schematic diagram detecting the method for template indexer of the present invention, and 1 in figure represents index, and described index 1 is just equivalent to the variable resistor in figure, and multimeter 2 is connected on the input and output two ends of index 1.Adopt ISIM simulation software, index is done to the experiment of limit holding capacity, then rule of thumb calculate a general warning value and dangerous values.In the present embodiment, be that (0kg (free time), 1.4Kg (sylphon), 1.6Kg (1 mask), 4.0Kg (6 masks), 5.0Kg (12 masks) and 8Kg (alarm current) emulate for multiple loaded states of 7 pairs of template indexer of APDSS respectively to the model of the ASYST company of exposure bench both sides, draw in index current output value under normal circumstances, as shown in table 1:
As shown in table 1, under normal circumstances, the electric current of index is no more than 1.93A, otherwise the electric current of index has very large jump, up to more than 2.3A; The scope of described warning value is 1.93A ~ 2.3A, and the scope of described dangerous values is 2.3 ~ 2.5A.In the present embodiment, the present invention, in above current value range, according to the experiment of repeatedly index limit holding capacity, show that the electric current warning value of this index is 1.95A, and current hazard value is 2.3A.The current value record institute's multimeter and warning value and dangerous values compare, if the electric current that multimeter is measured meets or exceeds warning value (1.95A), then will check index in following 3 months and prepare associated components (such as direct current generator, screw mandrel and belt) simultaneously; If electric current meets or exceeds dangerous values (2.3A), will check index within a week, determine that whether all parts wear condition of index is all normal.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (4)
1. detect a method for template indexer, it is characterized in that, comprising:
Determine warning value and the dangerous values of index, described warning value is the maximum current value under index normal operation, and described dangerous values is index minimum current value under undesirably heavy loads;
Measure the electric current at index input and output two ends with multimeter under index duty;
Measured current value and warning value and dangerous values are compared, when the electric current of described index exceedes warning value, then will check index in following 2 ~ 4 months; When the electric current of described index meets or exceeds dangerous values, will check index within following 1 ~ 2 week, determine that whether all parts wear condition of index is all normal.
2. the method for claim 1, is characterized in that, obtains described warning value and dangerous values by test of many times.
3. the method for claim 1, is characterized in that, described warning value is 1.95A ~ 2.3A.
4. the method for claim 1, is characterized in that, described dangerous values is 2.3A ~ 2.5A.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210142934.XA CN102662310B (en) | 2012-05-09 | 2012-05-09 | A kind of method detecting template indexer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210142934.XA CN102662310B (en) | 2012-05-09 | 2012-05-09 | A kind of method detecting template indexer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102662310A CN102662310A (en) | 2012-09-12 |
| CN102662310B true CN102662310B (en) | 2016-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210142934.XA Active CN102662310B (en) | 2012-05-09 | 2012-05-09 | A kind of method detecting template indexer |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101424885A (en) * | 2008-12-01 | 2009-05-06 | 上海微电子装备有限公司 | Mask alignment system and method thereof |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN102193320A (en) * | 2010-03-05 | 2011-09-21 | 上海微电子装备有限公司 | Alignment device for photoetching machines and alignment method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007310209A (en) * | 2006-05-19 | 2007-11-29 | Nsk Ltd | Exposure device |
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2012
- 2012-05-09 CN CN201210142934.XA patent/CN102662310B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101424885A (en) * | 2008-12-01 | 2009-05-06 | 上海微电子装备有限公司 | Mask alignment system and method thereof |
| CN102193320A (en) * | 2010-03-05 | 2011-09-21 | 上海微电子装备有限公司 | Alignment device for photoetching machines and alignment method thereof |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
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| CN102662310A (en) | 2012-09-12 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140425 |
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Effective date of registration: 20140425 Address after: 201203 Shanghai Zhangjiang hi tech park Zuchongzhi Road No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai Guo Shou Jing Road, Pudong New Area Zhangjiang hi tech Park No. 818 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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