CN102636498B - 玻璃基板的检测装置及检测方法 - Google Patents
玻璃基板的检测装置及检测方法 Download PDFInfo
- Publication number
- CN102636498B CN102636498B CN201210079294.2A CN201210079294A CN102636498B CN 102636498 B CN102636498 B CN 102636498B CN 201210079294 A CN201210079294 A CN 201210079294A CN 102636498 B CN102636498 B CN 102636498B
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- pick
- detection
- light
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (9)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210079294.2A CN102636498B (zh) | 2012-03-22 | 2012-03-22 | 玻璃基板的检测装置及检测方法 |
US13/510,378 US20130250288A1 (en) | 2012-03-22 | 2012-04-05 | Glass substrate inspection device and inspection method thereof |
PCT/CN2012/073506 WO2013139055A1 (zh) | 2012-03-22 | 2012-04-05 | 玻璃基板的检测装置及检测方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210079294.2A CN102636498B (zh) | 2012-03-22 | 2012-03-22 | 玻璃基板的检测装置及检测方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102636498A CN102636498A (zh) | 2012-08-15 |
CN102636498B true CN102636498B (zh) | 2014-04-16 |
Family
ID=46620972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210079294.2A Expired - Fee Related CN102636498B (zh) | 2012-03-22 | 2012-03-22 | 玻璃基板的检测装置及检测方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102636498B (zh) |
WO (1) | WO2013139055A1 (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI484160B (zh) * | 2013-04-23 | 2015-05-11 | Au Optronics Corp | 基板檢測裝置與方法 |
CN103245678B (zh) | 2013-04-26 | 2015-12-09 | 深圳市华星光电技术有限公司 | 一种异物检测装置 |
CN104142352A (zh) * | 2013-05-10 | 2014-11-12 | 上海和辉光电有限公司 | 一种玻璃检测装置 |
CN103698277A (zh) * | 2013-12-06 | 2014-04-02 | 浙江师范大学 | 一种微细物体的差动检测方法 |
CN105738383A (zh) * | 2016-03-09 | 2016-07-06 | 武汉华星光电技术有限公司 | 基板破片检测装置和基板加工设备 |
CN105806847A (zh) * | 2016-03-16 | 2016-07-27 | 京东方科技集团股份有限公司 | 一种基板的检测装置 |
CN107449778B (zh) * | 2016-05-31 | 2018-11-23 | 上海微电子装备(集团)股份有限公司 | 一种自动光学检测装置及方法 |
CN106198562B (zh) * | 2016-06-29 | 2019-10-25 | 昆山国显光电有限公司 | 一种玻璃基板检测方法、装置及*** |
CN106597709A (zh) * | 2017-01-06 | 2017-04-26 | 武汉华星光电技术有限公司 | 基板检测装置、显示面板加工***及显示面板加工方法 |
CN107153071A (zh) * | 2017-04-25 | 2017-09-12 | 武汉华星光电技术有限公司 | 一种玻璃基板的检测装置及检测方法 |
CN110378646B (zh) * | 2019-06-17 | 2023-07-28 | 北海惠科光电技术有限公司 | 管控异常玻璃基板的方法和玻璃基板生产控制*** |
CN112945084B (zh) * | 2019-12-10 | 2023-01-24 | 合肥欣奕华智能机器股份有限公司 | 线扫描传感器、线扫描检测***及线扫描检测方法 |
CN113418468A (zh) * | 2021-06-28 | 2021-09-21 | 宁波图锐自动化设备有限公司 | 一种玻璃曲率和轮廓度检测装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3792930A (en) * | 1973-05-31 | 1974-02-19 | Ppg Industries Inc | System for determining the nature of optical distortion in glass |
JPS511184A (ja) * | 1974-06-22 | 1976-01-07 | Nippon Sheet Glass Co Ltd | Ketsukankenshutsusochi |
JPH0769272B2 (ja) * | 1987-05-18 | 1995-07-26 | 株式会社ニコン | 異物検査装置 |
JPH09273997A (ja) * | 1996-04-05 | 1997-10-21 | Nikon Corp | 透明導電膜検査装置及び方法 |
GB9812091D0 (en) * | 1998-06-05 | 1998-08-05 | Glaverbel | Defect detecting unit |
FR2843460B1 (fr) * | 2002-08-09 | 2005-07-15 | Pellenc Environnement S A | Systeme d'analyse ou d'inspection automatique d'objets defilant sur un support |
KR100535563B1 (ko) * | 2003-05-30 | 2005-12-08 | 삼성코닝정밀유리 주식회사 | 틸팅 이송 라인스캔 검사방법 |
JP4575886B2 (ja) * | 2006-02-14 | 2010-11-04 | シャープ株式会社 | 多結晶半導体ウエハの割れ検査装置および割れ検査方法 |
JP2009014617A (ja) * | 2007-07-06 | 2009-01-22 | Olympus Corp | 基板外観検査装置 |
CN101887030A (zh) * | 2009-05-15 | 2010-11-17 | 圣戈本玻璃法国公司 | 用于检测透明基板表面和/或其内部的缺陷的方法及*** |
CN202083648U (zh) * | 2011-05-27 | 2011-12-21 | 北京京东方光电科技有限公司 | 一种光学检测装置及玻璃基板检测*** |
-
2012
- 2012-03-22 CN CN201210079294.2A patent/CN102636498B/zh not_active Expired - Fee Related
- 2012-04-05 WO PCT/CN2012/073506 patent/WO2013139055A1/zh active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2013139055A1 (zh) | 2013-09-26 |
CN102636498A (zh) | 2012-08-15 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Detection device and detection method for glass substrate Effective date of registration: 20190426 Granted publication date: 20140416 Pledgee: Bank of Beijing Limited by Share Ltd Shenzhen branch Pledgor: Shenzhen Huaxing Optoelectronic Technology Co., Ltd. Registration number: 2019440020032 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20140416 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140416 Termination date: 20210322 |
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CF01 | Termination of patent right due to non-payment of annual fee |