CN102621390B - Square resistance measurement method and Square resistance measurement device - Google Patents
Square resistance measurement method and Square resistance measurement device Download PDFInfo
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Abstract
The invention provides a kind of Square resistance measurement method and Square resistance measurement device.A kind of Square resistance measurement method according to the present invention includes: connect the first test point, the second test point, the 3rd test point and the 4th test point in four limits of square resistance respectively；Set multiple reference current value successively；For all reference current values, carry out Computational block resistance value by reference current value being set to impressed current value, and record calculated square resistance；Judge to be suitable as the reference current value of impressed current value according to all square resistances recorded, and described reference current value is set to final impressed current value.
Description
Technical field
The present invention relates to semiconductor design arts, it is more particularly related to a kind of Square resistance measurement
Method and Square resistance measurement device.
Background technology
Square resistance is also known as sheet resistance, and it is defined as foursquare semiconductor lamella, the sense of current institute in
Existing resistance, unit is ohm often side.In simple terms, square resistance (Sheet Resistance) is exactly
Instruct the resistance value in electric material unit thickness unit are.Being called for short sheet resistance, ideally it is equal to this material
The resistivity of material is divided by thickness.
Square resistance has the resistance of the square edge to edge of a characteristic, i.e. arbitrary size to be just as, no
Tube edge length is 1m or 0.1m, and their sheet resistance is just as, such sheet resistance only with thickness and the electricity of conducting film
Resistance rate is relevant.
Fig. 1 and Fig. 2 schematically shows the Square resistance measurement method according to prior art；Wherein Fig. 1
Schematically showing the flow chart of Square resistance measurement method according to prior art, Fig. 2 schematically shows
Go out the measurement structure of Square resistance measurement method according to prior art.In the measurement structure shown in Fig. 2,
Four limits of square resistance connect respectively first test point the 1, second test point the 2, the 3rd test point 3 and
4th test point 4.
As it is shown in figure 1, for measurement structure as shown in Figure 2, perform following steps:
In step so), first, impressed current value If is set；
In step sl, it is institute making the size of current flow through between the first test point 1 and the second test point 2
In the case of impressed current value If set, measure first between the 3rd test point 3 and the 4th test point 4
Magnitude of voltage V34；
In step s 2, it is institute making the size of current flow through between the second test point 2 and the 3rd test point 3
In the case of impressed current value If set, measure second between the 4th test point 4 and the first test point 1
Magnitude of voltage V41；
In step s3, it is institute making the size of current flow through between the 3rd test point 3 and the 4th test point 4
In the case of impressed current value If set, measure the 3rd between the first test point 1 and the second test point 2
Magnitude of voltage V12；
In step s 4, it is institute making the size of current flow through between the 4th test point 4 and the first test point 1
In the case of impressed current value If set, measure the 4th between the second test point 2 and the 3rd test point 3
Magnitude of voltage V23；
In step s 5, Rs=4.5324* (V12+V23+V34+V41)/4/If Computational block resistance value is utilized
Rs。
But, the defect of above-mentioned existing Square resistance measurement method is that certainty of measurement is inadequate, and can not
Measure the square resistance that square resistance is the least.
Summary of the invention
The technical problem to be solved is for there is drawbacks described above in prior art, it is provided that a kind of survey
Accuracy of measurement improves and can measure Square resistance measurement method and the side of the least square resistance of square resistance
Block electric resistance measuring apparatus.
According to the first aspect of the invention, it is provided that a kind of Square resistance measurement method, comprising: at square
Four limits of resistance connect the first test point, the second test point, the 3rd test point and the 4th test point respectively；
Set multiple reference current value successively；For all reference current values, by reference current value is arranged
Carry out Computational block resistance value for impressed current value, and record calculated square resistance；According to record
All square resistances judge to be suitable as the reference current value of impressed current value, and by described reference current
Value is set to final impressed current value.
Preferably, described the step of Computational block resistance value is carried out by reference current value being set to impressed current value
The method calculating square resistance in rapid includes: flow through the electricity between the first test point and the second test point making
In the case of stream size is set impressed current value, measure between the 3rd test point and the 4th test point
First magnitude of voltage；It is set strong making to flow through the size of current between the second test point and the 3rd test point
In the case of current value processed, measure the second magnitude of voltage between the 4th test point and the first test point；Make stream
Cross in the case of the size of current between the 3rd test point and the 4th test point is set impressed current value,
Measure the third voltage value between the first test point and the second test point；Flow through the 4th test point and first making
In the case of size of current between test point is set impressed current value, measure the second test point and
The 4th magnitude of voltage between three test points；Utilize following formula Computational block resistance value: square resistance
=4.5324 × (first magnitude of voltage the+the second magnitude of voltage+third voltage value the+the four magnitude of voltage)/4/ impressed current values.
Preferably, measure square resistance every time, take multiple measurement object, and right according to each measurement
The square resistance of elephant draws curve, finally, selects final according to the stability of square resistance curve
Impressed current value.
Preferably, curve little for curve fluctuation range is set to final impressed current value.
According to the second aspect of the invention, it is provided that a kind of Square resistance measurement device, comprising: and square
The first test point, the second test point, the 3rd test point and the 4th test point that four limits of resistance connect respectively；
Reference current value arranges module, for setting multiple reference current value successively；Square resistance calculates mould
Block, for for all reference current values, by reference current value is set to the impressed current value side of calculating
Block resistance value, and record calculated square resistance；Impressed current value judge module, for according to institute
All square resistances of record judge to be suitable as the reference current value of impressed current value, and by described reference
Current value is set to final impressed current value.
Preferably, described square resistance computing module performs following step: make to flow through the first test point and
In the case of size of current between second test point is set impressed current value, measure the 3rd test point
And the first magnitude of voltage that the 4th between test point；Flow through the electricity between the second test point and the 3rd test point making
In the case of stream size is set impressed current value, measure between the 4th test point and the first test point
Second magnitude of voltage；It is set strong making to flow through the size of current between the 3rd test point and the 4th test point
In the case of current value processed, measure the third voltage value between the first test point and the second test point；Make stream
Cross in the case of the size of current between the 4th test point and the first test point is set impressed current value,
Measure the 4th magnitude of voltage between the second test point and the 3rd test point；Utilize following formula Computational block electricity
Resistance: square resistance=4.5324 × (first magnitude of voltage the+the second magnitude of voltage+third voltage value the+the four voltage
Value)/4/ impressed current value.
Preferably, described square resistance computing module, when measuring square resistance every time, takes multiple measurement
Object, and draw curve, and wherein said impressed current according to the square resistance of each measurement object
Value judge module selects final impressed current value according to the stability of square resistance curve.
Preferably, curve little for curve fluctuation range is set to final by described impressed current value judge module
Impressed current value.
Accompanying drawing explanation
In conjunction with accompanying drawing, and by with reference to detailed description below, it will more easily the present invention is had more complete
Understand and its adjoint advantage and feature is more easily understood, wherein:
Fig. 1 schematically shows the flow chart of the Square resistance measurement method according to prior art.
Fig. 2 schematically shows the schematic diagram of the Square resistance measurement method according to prior art.
Fig. 3 schematically shows the flow chart of Square resistance measurement method according to embodiments of the present invention.
Fig. 4 schematically shows Square resistance measurement method testing result according to embodiments of the present invention.
It should be noted that accompanying drawing is used for illustrating the present invention, and the unrestricted present invention.Note, represent structure
Accompanying drawing may be not necessarily drawn to scale.Further, in accompanying drawing, same or like element indicate identical or
The label that person is similar to.
Detailed description of the invention
In order to make present disclosure more clear and understandable, below in conjunction with specific embodiments and the drawings to this
Bright content is described in detail.
Fig. 3 schematically shows the flow chart of Square resistance measurement method according to embodiments of the present invention.Fig. 3
The Square resistance measurement method according to embodiments of the present invention illustrated is equally for the test structure shown in Fig. 2.
That is, in four limits of square resistance, connect first test point the 1, second test point the 2, the 3rd test point 3 respectively
And the 4th test point 4.It practice, the survey of resistance value finding square resistance that the present inventor is favourable
During amount, the value of impressed current value is the most extremely important for the accurate of measurement result and the scope of measurement.
Based on above-mentioned discovery, as described in Figure 3, Square resistance measurement method according to embodiments of the present invention includes:
In step SS1, set multiple reference current value successively；Such as can set successively 2mA, 5mA,
Five reference current values of 10mA, 20mA, 50mA, are wherein set as the first reference current value, by 5mA by 2mA
It is set as the second reference current value, 10mA is set as the 3rd reference current value, 20mA is set as the 4th
Reference current value, 50mA is set as the 5th reference current value.It should be noted that above-mentioned reference current value
Concrete size of current and the quantity of above-mentioned reference current value be all exemplary, be used for the present invention is described,
Other current value or quantity can essentially be taked.
In step SS2, the first reference current value is set as impressed current value If；In the examples described above,
Will be set as that the first reference current value 2mA is set as impressed current value If.
Hereafter, in step sl, make to flow through the electric current between the first test point 1 and the second test point 2 big
Little for set impressed current value If in the case of, measure between the 3rd test point 3 and the 4th test point 4
The first magnitude of voltage V34；
In step s 2, it is institute making the size of current flow through between the second test point 2 and the 3rd test point 3
In the case of impressed current value If set, measure second between the 4th test point 4 and the first test point 1
Magnitude of voltage V41；
In step s3, it is institute making the size of current flow through between the 3rd test point 3 and the 4th test point 4
In the case of impressed current value If set, measure the 3rd between the first test point 1 and the second test point 2
Magnitude of voltage V12；
In step s 4, it is institute making the size of current flow through between the 4th test point 4 and the first test point 1
In the case of impressed current value If set, measure the 4th between the second test point 2 and the 3rd test point 3
Magnitude of voltage V23；
It should be noted that step S1 to the order of step S4 can exchange.
Hereafter, in step SS3, utilize following formula Computational block resistance value Rs:Rs=4.5324 ×
(V12+V23+V34+V41)/4/If (that is, square resistance=4.5324 × (first magnitude of voltage the+the second magnitude of voltage
+ third voltage value the+the four magnitude of voltage)/4/ impressed current value)；And the square resistance Rs that will calculate
Record, such as, record in memory or register.
Subsequently, judge whether to take all of reference current value in step SS4.
If step SS4 judging the most do not take all of reference current value, then perform step SS5, under inciting somebody to action
One reference current value is set as impressed current value If.Hereafter, program returns to step S1, thus for new
Impressed current value If performs the calculating of square resistance Rs.
Such as, in the examples described above, in step SS5, it is the first reference current at current reference current value
In the case of value 2mA, in step SS5, lower second reference current value 5mA is set as impressed current value If；
In the case of current reference current value is the second reference current value 5mA, the 3rd ginseng under inciting somebody to action in step SS5
Examine current value 10mA and be set as impressed current value If；It is the 3rd reference current value 10mA at current reference current value
In the case of, in step SS5, lower 4th reference current value 20mA is set as impressed current value If；Working as
In the case of front reference current value is the 4th reference current value 20mA, under inciting somebody to action in step SS5, the 5th with reference to electricity
Flow valuve 50mA is set as impressed current value If.
If step SS4 judging the most do not take all of reference current value, then perform step SS6, wherein
Optimal impressed current value is judged according to the square resistance Rs calculated for all reference current values.
More specifically, Fig. 4 schematically shows Square resistance measurement method according to embodiments of the present invention
Test result for the example of above-mentioned five reference current values.The abscissa of the coordinate of Fig. 4 represents resistance value,
Ordinate represents the circuit-under-test of test or the different square resistances of other measured target.
As shown in Figure 4, wherein identify the first test curve C1 for the first reference current value 2mA and
The second test curve C2 for the 5th reference current value 5mA.Figure 4, it is seen that the 4th with reference to electricity
Flow valuve 20mA can obtain stable curve.This mean that the 4th reference current value 20mA be most reliable by force
Current value processed (that is, is suitable as the reference current value of impressed current value), thus by the 4th reference current value 20mA
It is set as final impressed current value.
That is, in the preferred embodiment shown in Fig. 4, measuring square resistance every time, taking multiple measurement right
As, and draw curve according to the square resistance of each measurement object, finally, bent according to square resistance
The stability of line selects final impressed current value.
In sum, in above-mentioned Square resistance measurement method, take multiple impressed current value (in such as embodiment
2mA, 5mA, 10mA, 20mA, 50mA), utilize these impressed current values to measure square resistance Rs,
And curve (the square resistance Rs of the calculating) figure obtained judges which impressed current is most suitable.The most permissible
Obtain more accurate square resistance, and utilize above-mentioned Square resistance measurement method, resistance can be measured
It is worth minimum square resistance, the square resistance of such as copper sheet.
Preferably, can first calculate or measure a refrence square before performing the method for above-described embodiment
Resistance value, as the conjecture value that of actual square resistance is started most, hereafter can by measured value with
This refrence square resistance value is compared to judge final impressed current value.
According to another embodiment of the present invention, present invention also offers and a kind of can automatically perform said method
Square resistance measurement device.
Specifically, such as, Square resistance measurement device according to embodiments of the present invention includes: with square electricity
The first test point, the second test point, the 3rd test point and the 4th test point that four limits of resistance connect respectively；
Reference current value arranges module, for setting multiple reference current value successively；Square resistance computing module,
For for all reference current values, carrying out Computational block electricity by reference current value being set to impressed current value
Resistance, and record calculated square resistance；Impressed current value judge module, for according to record
All square resistances judge to be suitable as the reference current value of impressed current value, and by described reference current
Value is set to final impressed current value.
Thus, it is possible to complete each step above-mentioned by said structure and module.Such as, for each ginseng
Examining current value (as impressed current value), square resistance computing module can perform following step: flows through making
In the case of size of current between first test point 1 and the second test point 2 is set impressed current value,
Measure the first magnitude of voltage between the 3rd test point 3 and the 4th test point 4；Flow through the second test point 2 making
With the 3rd in the case of the size of current between test point 3 is set impressed current value, measure the 4th survey
The second magnitude of voltage between pilot 4 and the first test point 1；Flow through the 3rd test point 3 and the 4th test making
In the case of size of current between point 4 is set impressed current value, measure the first test point 1 and the
Third voltage value between two test points 2；Flow through between the 4th test point 4 and the first test point 1 making
In the case of size of current is set impressed current value, measure the second test point 2 and the 3rd test point 3
Between the 4th magnitude of voltage；Utilize following formula Computational block resistance value: square resistance=4.5324 × (
One magnitude of voltage the+the second magnitude of voltage+third voltage value the+the four magnitude of voltage)/4/ impressed current value.
Although it is understood that the present invention discloses as above with preferred embodiment, but above-described embodiment is also
It is not used to limit the present invention.For any those of ordinary skill in the art, without departing from skill of the present invention
In the case of art aspects, technical solution of the present invention is made many by the technology contents that all may utilize the disclosure above
Possible variation and modification, or it is revised as the Equivalent embodiments of equivalent variations.Therefore, every without departing from this
The content of bright technical scheme, according to the present invention technical spirit to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all still fall within the range of technical solution of the present invention protection.
Claims (6)
1. a Square resistance measurement method, it is characterised in that including:
The first test point, the second test point, the 3rd test point and the 4th is connected respectively in four limits of square resistance
Test point；
Set multiple reference current value successively；
For all reference current values, carry out Computational block resistance value by reference current value being set to impressed current value,
And record calculated square resistance；
Judge to be suitable as the reference current value of impressed current value according to all square resistances recorded, and by institute
State reference current value and be set to final impressed current value, measuring square resistance every time, taking multiple measurement
Object, and draw curve, finally, according to square resistance according to the square resistance of each measurement object
The stability of curve selects final impressed current value.
Square resistance measurement method the most according to claim 1, it is characterised in that described by will be with reference to electricity
Flow valuve is set to impressed current value and to calculate in the step of Computational block resistance value the method bag of square resistance
Include:
In the feelings making the size of current flowing through between the first test point and the second test point be set impressed current value
Under condition, measure the first magnitude of voltage between the 3rd test point and the 4th test point；
Flow through the feelings that the size of current between the second test point and the 3rd test point is set impressed current value making
Under condition, measure the second magnitude of voltage between the 4th test point and the first test point；
Make the feelings that size of current is set impressed current value that flow through between the 3rd test point and the 4th test point
Under condition, measure the third voltage value between the first test point and the second test point；
Flow through the feelings that the size of current between the 4th test point and the first test point is set impressed current value making
Under condition, measure the 4th magnitude of voltage between the second test point and the 3rd test point；
Utilize following formula Computational block resistance value: square resistance=4.5324 × (first magnitude of voltage the+the second voltage
Value+third voltage value the+the four magnitude of voltage)/4/ impressed current value.
Square resistance measurement method the most according to claim 1, it is characterised in that by little for curve fluctuation range
Curve be set to final impressed current value.
4. a Square resistance measurement device, it is characterised in that including:
The first test point of being connected respectively with four limits of square resistance, the second test point, the 3rd test point and the 4th
Test point；
Reference current value arranges module, for setting multiple reference current value successively；
Square resistance computing module, for for all reference current values, by being set to by force by reference current value
Current value processed carrys out Computational block resistance value, and records calculated square resistance；
Impressed current value judge module, for judging to be suitable as forcing electricity according to all square resistances recorded
The reference current value of flow valuve, and described reference current value is set to final impressed current value；
Described square resistance computing module, when measuring square resistance every time, takes multiple measurement object, and root
Curve, and wherein said impressed current value judge module root is drawn according to the square resistance of each measurement object
Final impressed current value is selected according to the stability of square resistance curve.
Square resistance measurement device the most according to claim 4, it is characterised in that described square resistance meter
Calculation module execution following step:
In the feelings making the size of current flowing through between the first test point and the second test point be set impressed current value
Under condition, measure the first magnitude of voltage between the 3rd test point and the 4th test point；
Flow through the feelings that the size of current between the second test point and the 3rd test point is set impressed current value making
Under condition, measure the second magnitude of voltage between the 4th test point and the first test point；
Make the feelings that size of current is set impressed current value that flow through between the 3rd test point and the 4th test point
Under condition, measure the third voltage value between the first test point and the second test point；
Flow through the feelings that the size of current between the 4th test point and the first test point is set impressed current value making
Under condition, measure the 4th magnitude of voltage between the second test point and the 3rd test point；
Utilize following formula Computational block resistance value: square resistance=4.5324 × (first magnitude of voltage the+the second voltage
Value+third voltage value the+the four magnitude of voltage)/4/ impressed current value.
Square resistance measurement device the most according to claim 4, it is characterised in that described impressed current value is sentenced
Curve little for curve fluctuation range is set to final impressed current value by disconnected module.
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| CN103884912B (en) | 2014-03-14 | 2016-09-07 | 京东方科技集团股份有限公司 | A kind of measuring method of square resistance |
| CN105203847B (en) * | 2015-09-29 | 2018-10-02 | 中国科学院上海硅酸盐研究所 | A kind of layer material square resistance and tie point contact resistance test method |
| CN105182081B (en) * | 2015-09-29 | 2018-10-02 | 中国科学院上海硅酸盐研究所 | A kind of layer material square resistance test method |
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| CN102200552A (en) * | 2010-11-17 | 2011-09-28 | 浙江正泰太阳能科技有限公司 | Method and equipment for testing square resistor of silicon sheet |
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| US7714596B2 (en) * | 2006-12-15 | 2010-05-11 | Four Dimensions Inc. | System and methods of measuring semiconductor sheet resistivity and junction leakage current |
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| CN101413972B (en) * | 2008-11-27 | 2011-05-11 | 天津大学 | System and method for testing electric resistivity of thin film thermoelectricity material |
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