CN102619863A - Single crystal furnace driving shaft and manufacturing method thereof - Google Patents
Single crystal furnace driving shaft and manufacturing method thereof Download PDFInfo
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- CN102619863A CN102619863A CN201210099126XA CN201210099126A CN102619863A CN 102619863 A CN102619863 A CN 102619863A CN 201210099126X A CN201210099126X A CN 201210099126XA CN 201210099126 A CN201210099126 A CN 201210099126A CN 102619863 A CN102619863 A CN 102619863A
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- axis body
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Abstract
The invention discloses a single crystal furnace driving shaft with good heat preservation performance and a manufacturing method thereof. The single crystal furnace driving shaft comprises a shaft body (1), and through holes (2) are arranged in the shaft body (1). The single crystal furnace driving shaft is characterized in that the shaft body (1) or a driving part connecting the shaft body (1) with an outer part of the single crystal furnace is made of carbon/carbon composites by processes of blank making, densifying, machining and purifying, or by processes of blank making, densifying, machining, stack mounting and purifying. The single crystal furnace driving shaft is simple in product structure, mechanics performance is greatly improved by utilizing the carbon/carbon composites, heat consumption of the single crystal furnace is reduced by 3% -10% simultaneously and manufacturing cost is lowered.
Description
Technical field
The present invention relates to a kind of High Temperature Furnaces, specifically a kind of single crystal growing furnace particularly relates to a kind of single crystal growing furnace transmission shaft and production method thereof.
Background technique
Single crystal growing furnace is a kind of in inert gas environment, with graphite heater polycrystalline materials such as polysilicon is melted, with the equipment of Grown by CZ Method dislocation-free monocrystalline.During single crystal growing furnace pulling monocrystal silicon rod; The quartz crucible of raw materials such as splendid attire polysilicon block is put into graphite or the C/C crucible that is positioned on the crucible holder; Heat fused in protective atmosphere (in the stove maximum temperature up to 1600 ℃ about) is regulated and control behind technological temperature, and seed crystal inserts seeding in the fusion polysilicon liquid through guide shell; Crucible is placed in the crucible holder and drives together rotation by the transmission shaft under it; Simultaneously, also counter-rotating and upwards promoting of seed crystal makes polysilicon liquid become single crystal silicon rod by the silicon atom of the seed crystal crystallization and freezing that puts in order.In the single crystal silicon rod pulling process, transmission shaft is positioned at bottom of furnace body, plays a part to carry the raw material and the transferring power of crucible and splendid attire thereof.
At present, the single crystal growing furnace transmission shaft adopts graphite material to make usually, for ease of the single crystal growing furnace transmission shaft being fixed in the conical seat of power system; When production and processing; Often have through hole at the center of transmission shaft, during installation, the tapped hole of the conical seat of power system is put into and be screwed into to clamping bolt from through hole; The single crystal growing furnace transmission shaft is fastened on the conical seat of power system, makes the single crystal growing furnace transmission shaft remain static relatively state at the conical seat of when work and power system.Because the graphite mechanical property is relatively poor, suffer external force collision easy damaged, so it is more to add the man-hour consumptive material; The axial wall of the transmission shaft that the while graphite material is processed is thicker relatively, and the through hole internal diameter is little, be generally less than 25 ㎜, and the graphite material heat-conducting property is better, and heat is prone to be delivered to outside the stove through transmission shaft in the stove, increases energy consumption, causes the enterprise production cost to increase.If fill insulant material in through hole then can play the effect that reduces heat loss, but little because of the hole, do not put how many thermal insulating materials, and operation is also not quite convenient, does not put thermal insulating material in the work basically, so just forms a passage, heat is easy to scatter and disappear.
Carbon/carbon compound material be a kind of net tire that graphite fiber is processed with net tire or carbon cloth and carbon cloth or net tire and carbon cloth compound; The carbon/carbon compound material that forms through density, carbonization and graphitization processing again; Have high specific strength, high ratio modulus, high temperature resistant, anti-ablation, little, the anti-rapid heat cycle of thermal expansion coefficient and indeformablely do not ftracture and have certain premium properties such as heat insulation effect concurrently; Be adapted to the high temperature field especially; Having become at present or will progressively become one of the important foundation material in fields such as Aero-Space, metallurgy, new energy, is the ideal substitute of graphite product.
Summary of the invention
The single crystal growing furnace transmission shaft and the production method thereof that the purpose of this invention is to provide a kind of good heat insulating.
The present invention adopts following technological scheme to realize its goal of the invention, a kind of single crystal growing furnace transmission shaft, and it comprises axis body, is provided with through hole in the axis body, described axis body adopts carbon/carbon compound material to process.
The external diameter of axis body according to the invention is 70 ㎜～150 ㎜, and the diameter of said through hole is 40 ㎜～100 ㎜.
The present invention overflows for ease of the gas that the thermal insulating material in the through hole at high temperature produces, and described axis body is provided with the vent that communicates with through hole.
A kind of production method of the transmission shaft of single crystal growing furnace as stated, it may further comprise the steps:
⑴ base: will be 0.3g/ ㎝ through the compound bulk density of processing of acupuncture by net tire and the carbon cloth that graphite fiber is processed
3～0.6g/ ㎝
3The transmission shaft precast body;
⑵ density: with the transmission shaft precast body of step ⑴ gained by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density, its density is progressively increased and through graphitization processing, processing bulk density is 1.0g/ ㎝
3～1.8g/ ㎝
3The transmission shaft base substrate;
⑶ machining: the transmission shaft base substrate of step ⑵ gained is machined to required shape and size;
⑷ purifying: the transmission shaft base substrate of step ⑶ gained is put into High Temperature Furnaces, heating removal of impurities under vacuum condition, cleansing temp is 1600 ℃～2600 ℃, holding time is 2h～5h.
A kind of single crystal growing furnace transmission shaft; It comprises axis body; Be provided with through hole in the axis body; Described axis body comprises crucible attachment portion and axis body and the outer power attachment portion of stove in axis body and the stove, and the crucible attachment portion adopts graphite material to process in axis body and the stove, and the outer power attachment portion of axis body and stove adopts carbon/carbon compound material to process.
In axis body of the present invention and the stove crucible attachment portion and axis body and stove outward the power attachment portion for being threaded or the tenon fourth of the twelve Earthly Branches is connected.
The external diameter of axis body according to the invention is 70 ㎜～150 ㎜, and the diameter of the through hole of the outer power attachment portion of axis body and stove is 40 ㎜～100 ㎜.
The gas effusion that the thermal insulating material in the through hole at high temperature produces is convenient in the present invention, and described axis body is provided with the vent that communicates with through hole.
A kind of production method of the transmission shaft of single crystal growing furnace as stated, it may further comprise the steps:
⑴ base:
1. the making of crucible attachment portion in axis body and the stove: manufacture crucible attachment portion in axis body and the stove of graphite material by tratitional technology;
2. the making of the outer power attachment portion of axis body and stove: will be 0.3g/ ㎝ through the compound bulk density of processing of acupuncture by net tire and the carbon cloth that graphite fiber is processed
3～0.6g/ ㎝
3The outer power attachment portion of axis body and stove precast body;
⑵ density: the axis body and the outer power attachment portion of the stove precast body of step ⑴ gained are pressed tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density; Its density is progressively increased and through graphitization processing, processing bulk density is 1.0g/ ㎝
3～1.8g/ ㎝
3The outer power attachment portion of axis body and stove base substrate;
⑶ machining: the axis body and the outer power attachment portion of the stove base substrate of step ⑵ gained are machined to required shape and size, promptly get the axis body and the outer power attachment portion of stove of carbon/carbon compound material;
⑷ stack mounting: crucible attachment portion employing in the axis body of the axis body of step ⑶ gained carbon/carbon compound material and outer power attachment portion of stove and step ⑴ gained graphite material and the stove is threaded or the tenon fourth of the twelve Earthly Branches connects into the transmission shaft finished product;
⑸ purifying: the transmission shaft finished product of step ⑷ gained is put into High Temperature Furnaces, heating removal of impurities under vacuum condition, cleansing temp is 1600 ℃～2600 ℃, holding time is 2h～5h.
Because adopt technique scheme, the present invention has realized goal of the invention preferably, product structure is simple; The carbon/carbon compound material that adopts has improved the mechanical property of product greatly; Reduced the thermal losses of single crystal growing furnace simultaneously, energy consumption has reduced by 3 ﹪～10 ﹪, has reduced cost of production.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1;
Fig. 2 is the structural representation of the embodiment of the invention 2;
Fig. 3 is the structural representation of the embodiment of the invention 3.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described further.
Embodiment 1:
Can know by Fig. 1, a kind of single crystal growing furnace transmission shaft, it comprises axis body 1, is provided with through hole 2 in the axis body 1, described axis body 1 adopts carbon/carbon compound material to process.
The length of axis body 1 according to the invention is 660 ㎜～900 ㎜ (present embodiment is 660 ㎜), and external diameter is 70 ㎜～150 ㎜ (present embodiment is 80 ㎜), and the diameter of said through hole 2 is 40 ㎜～100 ㎜ (present embodiment is 52 ㎜).The present invention is because axis body 1 adopts carbon/carbon compound material, and therefore, the diameter of said through hole 2 is compared with using graphite material, can do more greatly, so that fill insulant material.
The gas effusion that the present invention at high temperature produces for the ease of the thermal insulating material in the through hole 2 (present embodiment fill be soft carbon felt), described axis body 1 is provided with the vent 3 that communicates with through hole 2.
A kind of production method of the transmission shaft of single crystal growing furnace as stated, it may further comprise the steps:
⑴ base: will be 0.3g/ ㎝ through the compound bulk density of processing of acupuncture by net tire and the carbon cloth that graphite fiber is processed
3～0.6g/ ㎝
3(present embodiment is 0.4g/ ㎝
3) the transmission shaft precast body;
⑵ density: with the transmission shaft precast body of step ⑴ gained by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density, its density is progressively increased and through graphitization processing, processing bulk density is 1.0g/ ㎝
3～1.8g/ ㎝
3(present embodiment is 1.38g/ ㎝
3) the transmission shaft base substrate;
⑶ machining: the transmission shaft base substrate of step ⑵ gained is machined to required shape and size;
⑷ purifying: the transmission shaft base substrate of step ⑶ gained is put into High Temperature Furnaces, heating removal of impurities under vacuum condition, cleansing temp is 1600 ℃～2600 ℃ (present embodiment is 2100 ℃), holding time is 2h～5h (present embodiment is 2h).
When the present invention used, axis body 1 was fixed on through fastening piece in the conical seat of power system, and crucible is placed in the crucible holder, drove crucible holder rotation by the axis body under it 1, together rotated thereby drive crucible.
The carbon/carbon compound material that the present invention adopts has improved the mechanical property of product greatly; The heat-conducting property of carbon/carbon compound material is poor than graphite material simultaneously; And the thermal insulating material of filling in the through hole 2 has reduced heat loss, and the energy consumption of single crystal growing furnace has reduced by 3 ﹪～10 ﹪, has reduced the enterprise production cost.
Embodiment 2:
Can know by Fig. 2; Be the saving cost, a kind of single crystal growing furnace transmission shaft, it comprises axis body 1; Be provided with through hole 2 in the axis body 1; Described axis body 1 comprises crucible attachment portion 4 and axis body and the outer power attachment portion 5 of stove in axis body and the stove, and crucible attachment portion 4 adopts graphite material to process in axis body and the stove, and the outer power attachment portion 5 of axis body and stove adopts carbon/carbon compound material to process.
The length of axis body 1 according to the invention is 660 ㎜～900 ㎜ (present embodiment is 810 ㎜); External diameter is 70 ㎜～150 ㎜ (present embodiment is 90 ㎜); The length that the outer power attachment portion of its central axis and stove is 5 sections is 625 ㎜, and the diameter of the through hole 2 that the outer power attachment portion of axis body and stove is 5 sections is 40 ㎜～100 ㎜ (present embodiment is 58 ㎜).
The present invention is because carbon/carbon compound material is adopted in the outer power attachment portion 5 of axis body and stove, and therefore, axis body is compared with using graphite material with the diameter of the through hole 2 of 5 sections of the outer power attachment portions of stove, can do more greatly, so that fill insulant material.
The gas effusion that the present invention at high temperature produces for the ease of the thermal insulating material in the through hole 2 (present embodiment fill be soft carbon felt), described axis body 1 is provided with the vent 3 that communicates with through hole 2.
A kind of production method of aforesaid single crystal growing furnace transmission shaft, it may further comprise the steps:
⑴ base:
1. the making of crucible attachment portion 4 in axis body and the stove: manufacture crucible attachment portion 4 in axis body and the stove of graphite material by tratitional technology;
2. the making of the outer power attachment portion 5 of axis body and stove: will be 0.3g/ ㎝ through the compound bulk density of processing of acupuncture by net tire and the carbon cloth that graphite fiber is processed
3～0.6g/ ㎝
3(present embodiment is 0.5g/ ㎝
3) the outer power attachment portion of axis body and stove 5 precast bodies;
⑵ density: the axis body and the outer power attachment portion of stove 5 precast bodies of step ⑴ gained are pressed tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density; Its density is progressively increased and through graphitization processing, processing bulk density is 1.0g/ ㎝
3～1.8g/ ㎝
3(present embodiment is 1.49g/ ㎝
3) axis body and the outer power attachment portion of stove 5 base substrates;
⑶ machining: the axis body and the outer power attachment portion of stove 5 base substrates of step ⑵ gained are machined to required shape and size, promptly get the axis body and the outer power attachment portion 5 of stove of carbon/carbon compound material;
⑷ stack mounting: crucible attachment portion 4 employings in the axis body of the axis body of step ⑶ gained carbon/carbon compound material and outer power attachment portion 5 of stove and step ⑴ gained graphite material and the stove are threaded or the tenon fourth of the twelve Earthly Branches is connected (present embodiment is for being threaded) one-tenth transmission shaft finished product; Before the connection, earlier thermal insulating material (present embodiment is soft carbon felt) is filled in the through hole 2 of axis body and the outer power attachment portion 5 of stove;
⑸ purifying: the transmission shaft finished product of step ⑷ gained is put into High Temperature Furnaces, heating removal of impurities under vacuum condition, cleansing temp is 1600 ℃～2600 ℃ (present embodiment is 2000 ℃), holding time is 2h～5h (present embodiment is 3h).
Surplus with embodiment 1.
Embodiment 3:
Can know that by Fig. 3 axis body of the present invention is connected for the tenon fourth of the twelve Earthly Branches with axis body and the outer power attachment portion 5 of stove with the interior crucible attachment portion 4 of stove.
The present invention is in order to improve soundness, and crucible attachment portion 4 is provided with pin 6 with the joint of axis body and the outer power attachment portion 5 of stove in described axis body and the stove.
Surplus with embodiment 1, embodiment 2.
Claims (8)
1. single crystal growing furnace transmission shaft, it comprises axis body (1), is provided with through hole (2) in the axis body (1), it is characterized in that described axis body (1) adopts carbon/carbon compound material to process.
2. single crystal growing furnace transmission shaft according to claim 1, the external diameter that it is characterized in that said axis body (1) are 70 ㎜～150 ㎜, and the diameter of said through hole (2) is 40 ㎜～100 ㎜.
3. single crystal growing furnace transmission shaft; It comprises axis body (1); Be provided with through hole (2) in the axis body (1); It is characterized in that described axis body (1) comprises crucible attachment portion (4) and axis body and the outer power attachment portion (5) of stove in axis body and the stove, crucible attachment portion (4) adopts graphite material to process in axis body and the stove, and the outer power attachment portion (5) of axis body and stove adopts carbon/carbon compound material to process.
4. single crystal growing furnace transmission shaft according to claim 3, it is characterized in that in axis body and the stove crucible attachment portion (4) and axis body and stove outward power attachment portion (5) for being threaded or the tenon fourth of the twelve Earthly Branches is connected.
5. single crystal growing furnace transmission shaft according to claim 3, the external diameter that it is characterized in that said axis body (1) are 70 ㎜～150 ㎜, and the diameter of the through hole (2) of the outer power attachment portion (5) of axis body and stove is 40 ㎜～100 ㎜.
6. according to claim 1 or 2 or 3 or 4 or 5 described single crystal growing furnace transmission shafts, it is characterized in that described axis body (1) is provided with the vent (3) that communicates with through hole (2).
7. production method of single crystal growing furnace transmission shaft according to claim 1 is characterized in that it may further comprise the steps:
⑴ base: will be 0.3g/ ㎝ through the compound bulk density of processing of acupuncture by net tire and the carbon cloth that graphite fiber is processed
3～0.6g/ ㎝
3The transmission shaft precast body;
⑵ density: with the transmission shaft precast body of step ⑴ gained by tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density, its density is progressively increased and through graphitization processing, processing bulk density is 1.0g/ ㎝
3～1.8g/ ㎝
3The transmission shaft base substrate;
⑶ machining: the transmission shaft base substrate of step ⑵ gained is machined to required shape and size;
⑷ purifying: the transmission shaft base substrate of step ⑶ gained is put into High Temperature Furnaces, heating removal of impurities under vacuum condition, cleansing temp is 1600 ℃～2600 ℃, holding time is 2h～5h.
8. the production method of a single crystal growing furnace transmission shaft as claimed in claim 3 is characterized in that it may further comprise the steps:
⑴ base:
1. the making of crucible attachment portion (4) in axis body and the stove: manufacture crucible attachment portion (4) in axis body and the stove of graphite material by tratitional technology;
2. the making of the outer power attachment portion (5) of axis body and stove: will be 0.3g/ ㎝ through the compound bulk density of processing of acupuncture by net tire and the carbon cloth that graphite fiber is processed
3～0.6g/ ㎝
3The outer power attachment portion (5) of axis body and stove precast body;
⑵ density: the axis body and the outer power attachment portion (5) of the stove precast body of step ⑴ gained are pressed tratitional technology through chemical vapor infiltration and/or chemical vapor deposition and/or liquid infiltration density; Its density is progressively increased and through graphitization processing, processing bulk density is 1.0g/ ㎝
3～1.8g/ ㎝
3The outer power attachment portion (5) of axis body and stove base substrate;
⑶ machining: the axis body and the outer power attachment portion (5) of the stove base substrate of step ⑵ gained are machined to required shape and size, promptly get the axis body and the outer power attachment portion (5) of stove of carbon/carbon compound material;
⑷ stack mounting: the axis body of the axis body of step ⑶ gained carbon/carbon compound material and outer power attachment portion (5) of stove and step ⑴ gained graphite material is threaded with stove interior crucible attachment portion (4) employing or the tenon fourth of the twelve Earthly Branches connects into the transmission shaft finished product;
⑸ purifying: the transmission shaft finished product of step ⑷ gained is put into High Temperature Furnaces, heating removal of impurities under vacuum condition, cleansing temp is 1600 ℃～2600 ℃, holding time is 2h～5h.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210099126.XA CN102619863B (en) | 2012-04-06 | 2012-04-06 | Single crystal furnace driving shaft and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210099126.XA CN102619863B (en) | 2012-04-06 | 2012-04-06 | Single crystal furnace driving shaft and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102619863A true CN102619863A (en) | 2012-08-01 |
| CN102619863B CN102619863B (en) | 2015-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210099126.XA Active CN102619863B (en) | 2012-04-06 | 2012-04-06 | Single crystal furnace driving shaft and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110273913A (en) * | 2019-07-01 | 2019-09-24 | 一汽轿车股份有限公司 | A kind of electric cylinder quick change combined driving main shaft |
| CN115141029A (en) * | 2022-08-31 | 2022-10-04 | 浙江德鸿碳纤维复合材料有限公司 | Preparation method of carbon/carbon crucible supporting rod |
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| CN101319353A (en) * | 2008-05-20 | 2008-12-10 | 湖南金博复合材料科技有限公司 | Carbon/carbon composite material crucible pot and preparing technique thereof |
| CN102191537A (en) * | 2011-06-01 | 2011-09-21 | 奥特斯维能源（太仓）有限公司 | Crucible used for monocrystalline growth with czochralski method |
| CN202500886U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
| CN202500885U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
-
2012
- 2012-04-06 CN CN201210099126.XA patent/CN102619863B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101319353A (en) * | 2008-05-20 | 2008-12-10 | 湖南金博复合材料科技有限公司 | Carbon/carbon composite material crucible pot and preparing technique thereof |
| CN102191537A (en) * | 2011-06-01 | 2011-09-21 | 奥特斯维能源（太仓）有限公司 | Crucible used for monocrystalline growth with czochralski method |
| CN202500886U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
| CN202500885U (en) * | 2012-04-06 | 2012-10-24 | 湖南金博复合材料科技有限公司 | Transmission shaft of single crystal furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110273913A (en) * | 2019-07-01 | 2019-09-24 | 一汽轿车股份有限公司 | A kind of electric cylinder quick change combined driving main shaft |
| CN115141029A (en) * | 2022-08-31 | 2022-10-04 | 浙江德鸿碳纤维复合材料有限公司 | Preparation method of carbon/carbon crucible supporting rod |
| CN115141029B (en) * | 2022-08-31 | 2022-11-11 | 浙江德鸿碳纤维复合材料有限公司 | Preparation method of carbon/carbon crucible support rod |
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|---|---|
| CN102619863B (en) | 2015-06-17 |
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Address after: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee after: Hunan gold carbon Limited by Share Ltd Address before: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee before: Hunan KBCarbon Composite Science and Technology Co., Ltd. |