CN102615728A

CN102615728A - Cutting wire tension control device of crystalline silicon square cutting machine

Info

Publication number: CN102615728A
Application number: CN2012100910489A
Authority: CN
Inventors: 王学仕; 宁宗娥; 刘嘉宾; 吕文利
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2012-03-30
Filing date: 2012-03-30
Publication date: 2012-08-01

Abstract

The invention discloses a cutting wire tension control device of a crystalline silicon square cutting machine. The cutting wire tension control device comprises a servo motor, a swing arm, guide wheels, a rotating shaft, a limiting block, a tension sensor and the like. The servo motor is installed on a flange. The swing arm for adjusting tension is installed on the rotating shaft. The rotating shaft is connected with the motor through a coupling. A steel cutting wire is sequentially wound on a first guide wheel, a second guide wheel and a third guide wheel. The first guide wheel is installed on the tension sensor. When the tension of the steel cutting wire is changed, a control system analyzes the data of the tension sensor and adjusts the rotating angle of the servo motor, the tension of the entire steel cutting wire is driven to be changed and the tension of the steel cutting wire is enabled to reach the tension required during cutting.

Description

A kind of crystalline silicon side of cuing open machine line of cut tenslator

Technical field

The present invention relates to the crystalline silicon side of cuing open machine, relate in particular to a kind of line of cut tenslator that is used on the side's of cuing open machine.

Background technology

In present semiconductor and solar energy industry; The processing of the silicon ingot side's of the cuing open machines that use more; Its principle is the steel wire through a high-speed motion, and the cutting abrasive material that drives attached to steel wire carries out grinding to semiconductor crisp and hard materials such as silicon, thereby reaches cutting effect.In whole cutting process; Steel wire is through the switching-over guiding of a plurality of directive wheels; On home roll, form a cross gauze of forming by one group of mutually perpendicular steel wire; Driving through motor is cut workpiece, can crisp and hard materials such as silicon ingot once be cut into the dozens of silicon rod simultaneously, is the cutting technique that adopts at present crisp and hard material such as semiconductor the most widely.

The core component of the side's of cuing open machine " cutter wire ", its Tension Control are that can decision device carry out smoothly within the specific limits, the key whether cutting process breaks, and present similar lathe " steel wire tension " control is of a great variety, generally controls inaccurate and meticulous.

Summary of the invention

To the inaccurate and meticulous defective of the existing side of cuing open machine line of cut tenslator control, the present invention aims to provide a kind of crystalline silicon side of cuing open machine line of cut tenslator, and is simple in structure, and control accuracy is high.

For realizing above-mentioned purpose, the present invention has adopted following technical scheme:

A kind of crystalline silicon side of cuing open machine line of cut tenslator; Comprise a plurality of directive wheels, the cutter wire on each directive wheel successively, its design feature is; On at least one directive wheel in a plurality of directive wheels tension pick-up is housed; At least one directive wheel in a plurality of directive wheels links to each other with the swing arm of regulating the cutter wire rate of tension, and this swing arm is fixedly connected with rotating shaft, and the output shaft of a said rotating shaft and a servomotor links.

The direction of motion of said swing arm is provided with lower position block and the upper limit position block that is used to limit the swing arm slewing area, is used to limit the slewing area of swing arm, prevents that servomotor from bumping against with other parts of equipment under out of control situation.

Said servomotor is contained on the ring flange, and the junction of rotating shaft and servomotor output shaft is provided with the protective cover that is contained on the ring flange.There is protective cover the junction of rotating shaft and servo motor shaft, is semi-closed structure, in the swing arm hunting range, opening is arranged.

Said directive wheel comprises first directive wheel, second directive wheel, the 3rd directive wheel; Said cutter wire on first directive wheel, second directive wheel, the 3rd directive wheel, is equipped with tension pick-up on first directive wheel successively, and said swing arm links to each other with second directive wheel.

Nationality is by said structure, and servomotor is installed on the ring flange, and the swing arm of adjustment of tonicity is installed in the rotating shaft; Rotating shaft links to each other through the shaft coupling motor, and on first directive wheel, second directive wheel, the 3rd directive wheel, first directive wheel is installed on the tension pick-up cutter wire successively; When steel wire tension changed, the control system regulated the rotational angle of servomotor through the data analysis to tension pick-up; Make cutter wire reach tension force required when cutting, guarantee carrying out smoothly of cutting.

The described crystalline silicon side of cuing open machine line of cut tenslator, the swing arm direction of motion is equipped with lower position block and upper limit position block, can limit the slewing area of swing arm, prevents that servomotor from bumping against with other parts of equipment under out of control situation.

Compared with prior art, the invention has the beneficial effects as follows: when cutter wire tension force changed, the control system was through after the data analysis to tension pick-up; Regulate the rotational angle of servomotor, drive swing arm and move downward or upward, make cutter wire reach tension force required when cutting; Guaranteed carrying out smoothly of cutting, whole adjustment process is closed-loop control, the fastest Position Control ring up to 125us; System responses is exceedingly fast; Far above the response speed of other control devices of the same trade, and it is simple in structure, and control accuracy is high.

Description of drawings

Fig. 1 is the structural representation of an embodiment of the present invention;

Fig. 2 is the fragmentary top TV structure sketch map of Fig. 1;

Fig. 3 is control principle figure of the present invention;

Fig. 4 is the circuit block diagram that the present invention controls system.

In the drawings:

The specific embodiment

A kind of crystalline silicon side of cuing open machine line of cut tenslator, as depicted in figs. 1 and 2, servomotor 10 is installed on the ring flange 13, and the swing arm 8 of adjustment of tonicity is fixed in the rotating shaft 12, and rotating shaft 12 links to each other with servomotor 10 through shaft coupling 11.Cutter wire 3 is successively on first directive wheel 2, second directive wheel 4, the 3rd directive wheel 6; First directive wheel 2 is installed on the tension pick-up 1; Lower position block 5 and upper limit position block 7 are equipped with in swing arm for 8 times; Rotating shaft 12 has protective cover 9 with the junction of 10 of servomotors, and said protective cover 9 is a semi-closed structure, in swing arm 8 hunting ranges, opening is arranged.

When the side's of cuing open machine was worked, cutter wire was at directive wheel 2,4; The path operation that 6 guiding lower edge is certain; When the tension force of cutter wire changed, the control system regulated the rotational angle of servomotor through the data analysis to tension pick-up; Make cutter wire reach tension force required when cutting, guarantee carrying out smoothly of cutting.

Control principle of the present invention such as Fig. 3 and Fig. 4, when the tension force of steel wire changed, tension pick-up 1 was given the control system with signal feedback; The control system compares according to the setting value and the value of feedback of tension force; Behind tension force PID internalarithmetic, regulate the rotational angle of servomotor 10, tension adjustment is arrived stable state; Whole process adopts closed-loop control, can realize real-time regulated.The content that the foregoing description is illustrated is to be understood that to these embodiment and only is used to be illustrated more clearly in the present invention; And be not used in the restriction scope of the present invention; After having read the present invention, those skilled in the art all fall within the application's accompanying claims institute restricted portion to the modification of the various equivalent form of values of the present invention.

Claims

1. the crystalline silicon side of cuing open a machine line of cut tenslator comprises a plurality of directive wheels (2,4,6); Cutter wire (3) on each directive wheel is characterized in that a plurality of directive wheels (2,4 successively; Tension pick-up (1) is housed, a plurality of directive wheels (2,4 at least one directive wheel 6); 6) at least one directive wheel in links to each other with the swing arm (8) of regulating cutter wire (3) rate of tension, and this swing arm (8) is fixedly connected with rotating shaft (12), and said rotating shaft (12) links with the output shaft of a servomotor (10).

2. the crystalline silicon according to claim 1 side of cuing open machine line of cut tenslator is characterized in that, the direction of motion of said swing arm (8) is provided with lower position block (5) and the upper limit position block (7) that is used to limit swing arm (8) slewing area.

3. the crystalline silicon according to claim 1 side of cuing open machine line of cut tenslator; It is characterized in that; Said servomotor (10) is contained on the ring flange (13), and rotating shaft (12) is provided with the protective cover (9) that is contained on the ring flange (13) with the junction of servomotor (10) output shaft.

4. according to the described crystalline silicon of one of claim 1～3 side of cuing open machine line of cut tenslator, it is characterized in that said directive wheel comprises first directive wheel (2), second directive wheel (4), the 3rd directive wheel (6); Said cutter wire (3) on first directive wheel (2), second directive wheel (4), the 3rd directive wheel (6), is equipped with tension pick-up (1) successively on first directive wheel (2), said swing arm (8) links to each other with second directive wheel (4).