CN102608003A - 无尘室微粒自动测量小车、自动测量***及其测量方法 - Google Patents
无尘室微粒自动测量小车、自动测量***及其测量方法 Download PDFInfo
- Publication number
- CN102608003A CN102608003A CN2012100688243A CN201210068824A CN102608003A CN 102608003 A CN102608003 A CN 102608003A CN 2012100688243 A CN2012100688243 A CN 2012100688243A CN 201210068824 A CN201210068824 A CN 201210068824A CN 102608003 A CN102608003 A CN 102608003A
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- CN
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- particulate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000002245 particle Substances 0.000 title abstract 5
- 238000005259 measurement Methods 0.000 claims abstract description 91
- 230000006698 induction Effects 0.000 claims abstract description 36
- 238000012545 processing Methods 0.000 claims abstract description 36
- 239000000428 dust Substances 0.000 claims description 38
- 230000005674 electromagnetic induction Effects 0.000 claims description 6
- 230000002159 abnormal effect Effects 0.000 claims description 4
- 230000005856 abnormality Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000010419 fine particle Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
- G01N35/04—Details of the conveyor system
- G01N2035/0474—Details of actuating means for conveyors or pipettes
- G01N2035/0489—Self-propelled units
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210068824.3A CN102608003B (zh) | 2012-03-15 | 2012-03-15 | 无尘室微粒自动测量小车、自动测量***及其测量方法 |
US13/510,388 US20130246004A1 (en) | 2012-03-15 | 2012-04-06 | Automatic particle measurement cart and automatic particle measurement system for clean room and measurement method thereof |
PCT/CN2012/073569 WO2013134977A1 (zh) | 2012-03-15 | 2012-04-06 | 无尘室微粒自动测量小车、自动测量***及其测量方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210068824.3A CN102608003B (zh) | 2012-03-15 | 2012-03-15 | 无尘室微粒自动测量小车、自动测量***及其测量方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102608003A true CN102608003A (zh) | 2012-07-25 |
CN102608003B CN102608003B (zh) | 2015-07-01 |
Family
ID=46525562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210068824.3A Expired - Fee Related CN102608003B (zh) | 2012-03-15 | 2012-03-15 | 无尘室微粒自动测量小车、自动测量***及其测量方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102608003B (zh) |
WO (1) | WO2013134977A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108873909A (zh) * | 2018-07-17 | 2018-11-23 | 苏州冠卓自动化科技有限公司 | 智能小车控制***及运行方法 |
CN108918349A (zh) * | 2018-03-23 | 2018-11-30 | 张家港康得新光电材料有限公司 | 测量分散系内的分散质粒子数目和/或粒径的装置及方法 |
CN110108607A (zh) * | 2019-05-06 | 2019-08-09 | 江苏耀群工业技术有限公司 | 一种智能巡回环境量测***及量测方法 |
CN111463857A (zh) * | 2020-04-09 | 2020-07-28 | 深圳市华星光电半导体显示技术有限公司 | 微粒检测***的自动充电***及自动充电方法 |
CN115560807A (zh) * | 2022-12-06 | 2023-01-03 | 广州粤芯半导体技术有限公司 | 环境检测*** |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000019095A (ja) * | 1998-06-30 | 2000-01-21 | Nec Kyushu Ltd | クリーンルームの清浄度測定装置およびクリーンルームの清浄度測定方法 |
US6433870B1 (en) * | 1999-09-20 | 2002-08-13 | M. T. System Co. Ltd. | Robot system for measuring dust and particles in duct |
CN101871796A (zh) * | 2009-04-24 | 2010-10-27 | 村田机械株式会社 | 测量单元和运送***、测量方法 |
CN102147259A (zh) * | 2011-01-14 | 2011-08-10 | 南京航空航天大学 | 环形阵列磁导引装置及其导引磁标识别方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63158618A (ja) * | 1986-09-29 | 1988-07-01 | Daifuku Co Ltd | クリ−ンル−ム用の移動車誘導設備 |
JP4186123B2 (ja) * | 2006-05-02 | 2008-11-26 | 村田機械株式会社 | 測定ユニットを備えた搬送システム |
CN201107319Y (zh) * | 2007-11-20 | 2008-08-27 | 华南理工大学 | 中央空调风管多功能空气质量分析机器人 |
US7973668B2 (en) * | 2008-02-07 | 2011-07-05 | Veltek Associates, Inc. | Air sampling system having a plurality of air sampling devices with their own flow switches |
-
2012
- 2012-03-15 CN CN201210068824.3A patent/CN102608003B/zh not_active Expired - Fee Related
- 2012-04-06 WO PCT/CN2012/073569 patent/WO2013134977A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000019095A (ja) * | 1998-06-30 | 2000-01-21 | Nec Kyushu Ltd | クリーンルームの清浄度測定装置およびクリーンルームの清浄度測定方法 |
US6433870B1 (en) * | 1999-09-20 | 2002-08-13 | M. T. System Co. Ltd. | Robot system for measuring dust and particles in duct |
CN101871796A (zh) * | 2009-04-24 | 2010-10-27 | 村田机械株式会社 | 测量单元和运送***、测量方法 |
CN102147259A (zh) * | 2011-01-14 | 2011-08-10 | 南京航空航天大学 | 环形阵列磁导引装置及其导引磁标识别方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108918349A (zh) * | 2018-03-23 | 2018-11-30 | 张家港康得新光电材料有限公司 | 测量分散系内的分散质粒子数目和/或粒径的装置及方法 |
CN108873909A (zh) * | 2018-07-17 | 2018-11-23 | 苏州冠卓自动化科技有限公司 | 智能小车控制***及运行方法 |
CN108873909B (zh) * | 2018-07-17 | 2021-10-26 | 苏州冠卓自动化科技有限公司 | 智能小车控制***及运行方法 |
CN110108607A (zh) * | 2019-05-06 | 2019-08-09 | 江苏耀群工业技术有限公司 | 一种智能巡回环境量测***及量测方法 |
CN111463857A (zh) * | 2020-04-09 | 2020-07-28 | 深圳市华星光电半导体显示技术有限公司 | 微粒检测***的自动充电***及自动充电方法 |
CN115560807A (zh) * | 2022-12-06 | 2023-01-03 | 广州粤芯半导体技术有限公司 | 环境检测*** |
Also Published As
Publication number | Publication date |
---|---|
WO2013134977A1 (zh) | 2013-09-19 |
CN102608003B (zh) | 2015-07-01 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Automatic dust-free room particle measuring trolley, automatic measuring system and measuring method thereof Effective date of registration: 20190426 Granted publication date: 20150701 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
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Date of cancellation: 20201016 Granted publication date: 20150701 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
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