CN102589446A - High precision micro-displacement measurement apparatus and method - Google Patents
High precision micro-displacement measurement apparatus and method Download PDFInfo
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- CN102589446A CN102589446A CN2012100563483A CN201210056348A CN102589446A CN 102589446 A CN102589446 A CN 102589446A CN 2012100563483 A CN2012100563483 A CN 2012100563483A CN 201210056348 A CN201210056348 A CN 201210056348A CN 102589446 A CN102589446 A CN 102589446A
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Abstract
The invention discloses a high precision micro-displacement measurement apparatus. The apparatus includes a housing; and a light source and gratings are successively arranged along an optical path in the housing, wherein the gratings are slidably installed in the housing along an optical axis direction. Besides, piezoelectric ceramics parts are also arranged; one sides of the piezoelectric ceramics parts are attached with the surfaces of the gratings; and the other sides of the piezoelectric ceramics parts are relatively fixed with the housing. Spacing between the gratings and a to-be-measured object can be adjusted by controlling shape variables of the piezoelectric ceramics parts themselves; therefore, light intensity change rates at all level directions can reach maximum values near the spacing, wherein the light intensity change rates are obtained by interferences of light beams directly reflected by the gratings and the light beam reflected by the reflecting surface of the to-be-measured object, so that the micro-displacement value of the to-be-measured object can be amplified by the light intensity variation. Compared with the current micro-displacement sensor, the provided micro-displacement measurement apparatus enables measurement precision to be improved.
Description
Technical field
The present invention relates to a kind of high-precision micro displacement measurement mechanism and method, particularly a kind of micro-displacement measuring device and method of the adjustment measuring accuracy based on piezoelectric ceramics.
Background technology
Displacement transducer is as the important part in the sensor field; Can be used for accurately measuring the variation such as position, change in displacement of testee; Be mainly used in the measurement of the geometric sense such as displacement, thickness, vibration, distance, diameter of inspected object, have a wide range of applications in the civil and military field.
In existing report, displacement transducer mainly is divided into inductive displacement transducer, capacitive displacement transducer, optical displacement sensor, ultrasonic type displacement transducer, Hall displacement transducer.Though kind is a lot, the displacement accuracy of existing displacement transducer is the highest can only to reach nanometer scale, therefore, needs high precision position shift measurement aspect to play restriction to some.
Fig. 1 is a kind of micro-displacement sensor of the prior art; Determinand 1 is connected with reflecting surface 2, and through grating 4 and reflecting surface 2 reflections, two bundle folded light beams interfere light source 3 outgoing beams respectively; The light intensity of this interfering beam is surveyed by photoelectric detector 5; Between determinand 1 and grating 4, change distance between the two, when the distance when between the two changes, correspondingly through electrostatic attraction; The intensity signal of the coherent light beam that photodetection module 5 detects also can change thereupon, can calculate the displacement that determinand 1 is taken place through the change of analyzing intensity signal.
Summary of the invention
The present invention is directed to the low problem of the existing measuring accuracy of micro-displacement sensor of the prior art, proposed a kind of high-precision micro displacement measurement mechanism.
A kind of high-precision micro displacement measurement mechanism; Comprise shell; Be provided with light source and the grating arranged successively along light path in the shell, described grating is slidably installed in the enclosure along optical axis direction, also is provided with piezoelectric ceramic part; The surface of this piezoelectric ceramic part one side and described grating fits, opposite side and shell relative fixed.
Adopt the micro-displacement measuring device of said structure; The light source outgoing beam is respectively after grating and determinand reflection; Form interfering beam at grating towards a side of light source, described piezoelectric ceramic part is applied in behind the voltage and drives the grating that is attached thereto through self deformation and move along optical axis direction, has adjusted the spacing between grating and the determinand; When the spacing between grating and the determinand remains on certain certain value; The light intensity change amount that the micro-displacement of determinand can cause said each grade of interfering beam power to make progress is maximum, has produced maximum light intensity difference, can extrapolate the micro-displacement that determinand takes place according to the difference of light intensity; The difference that is micro-displacement to be measured through light intensity obtains amplifying, and can draw the micro-displacement value through the value that detects light intensity.
Described piezoelectric ceramic part is the center annular element corresponding with light path and has two electrodes that this loop configuration is passed through the light beam through grating, does not influence the propagation of this light beam.
Described micro-displacement measuring device is provided with: the Piezoelectric Ceramic module that is used to drive piezoelectric ceramic part deformation; Be used to detect the photodetection module of interfering beam light intensity, described interfering beam is for to interfere formation by the light beam of optical grating reflection with by the determinand beam reflected; Be used for controlling the signal processing module of Piezoelectric Ceramic module according to the signal of photodetection module.
Two electrodes of described piezoelectric ceramic part insert the corresponding interface of Piezoelectric Ceramic module respectively.
In the high-precision micro displacement measurement mechanism of the present invention; The photodetection module all is connected with signal processing module with the Piezoelectric Ceramic module; Signal processing module changes the deformation quantity of piezoelectric ceramic part on the one hand through control Piezoelectric Ceramic module; Be used to receive the information that the photodetection module is collected on the other hand; Signal processing module is through analyzing the spacing between photodetection module institute's feedack and grating and the determinand; And control Piezoelectric Ceramic module comes distance between drive pressure electroceramics adjustment grating and the reflecting surface to apply the modulation signal of certain frequency and amplitude simultaneously to piezoelectric ceramics, through detectable signal being taked lock the size that the phase processing and amplifying can accurately obtain the measured surface displacement.
The present invention also provides a kind of high-precision micro displacement measuring method, may further comprise the steps:
(1) the light source outgoing beam is through projecting the reflecting surface of determinand behind the grating;
(2) interfered through time diffracted beam at the same level that grating produces by the diffracted beam of optical grating reflection and the face reflection that is reflected;
(3) utilize modulation voltage to drive piezoelectric ceramic part and produce a position phase modulation signal, the light intensity signal of the interfering beam that detector is surveyed advances the displacement that the horizontal lock processing and amplifying calculates determinand.
The key of the inventive method is; Before beginning measurement; Self deformation through piezoelectric ceramics drives the grating that is attached thereto and moves vertically, and the initial distance between the reflecting surface of grating and determinand is the odd of λ/8, and λ is the wavelength of light source outgoing beam; Because the light intensity of each of described interfering beam grade time can change along with the variation of the distance between the grating and the determinand surface of emission, like the light intensity expression of first-order diffraction light be: I=(4I
In/ π
2) * sin
2(2 π d/ λ), wherein I
InBe respectively the light intensity and the wavelength of light source outgoing beam with λ, d is the spacing between grating and the determinand reflecting surface, and first-order diffraction light light intensity I can be expressed as the change amount of spacing d:
When the d value is the odd of λ/8;
is maximum; It is maximum that the light intensity that is promptly detected changes speed; Like this, micro-displacement obtains amplifying through the change amount of light intensity, can measure micro-displacement indirectly through measuring this light intensity.
The present invention is provided with piezoelectric ceramic part between shell and grating; Adjust the spacing between the reflecting surface of grating and determinand through self deformation of control piezoelectric ceramics; When this spacing is controlled at a certain fixed value; The light intensity change amount that the unit displacement of determinand can cause each grade of interfering beam power to make progress is maximum, through surveying this light intensity change amount and detectable signal being taked to lock the size that the phase processing and amplifying can accurately obtain the measured surface displacement.The present invention's micro-displacement sensor of the prior art has relatively improved measurement sensitivity.
Description of drawings
Fig. 1 is a kind of micro-displacement sensor structural representation of the prior art;
Fig. 2 is a micro-displacement measuring device structural representation of the present invention;
Fig. 3 is the structural representation of piezoelectric ceramic part of the present invention.
Embodiment
Below in conjunction with description of drawings one embodiment of the present invention.
Fig. 2 is a kind of high-precision micro displacement measurement mechanism structural representation of the present invention; Comprise shell 6; Be provided with the light source 3 and grating 4 arranged successively along light path in the shell 6, grating 4 slidably is installed in the shell 6 along optical axis direction, also is provided with piezoelectric ceramic part 7; The surface of these piezoelectric ceramic part 7 one sides and described grating 4 fits, opposite side and shell 6 relative fixed.
As shown in Figure 3, piezoelectric ceramic part 7 is an annular, and the middle part is that the light beam that light hole tolerable light source sends passes through.
Concrete measuring process is following: at first, open light source 3, the light beam of light source 3 outgoing is successively through projecting the reflecting surface 2 of determinand 1 behind quartz glass 8, grating 4, the piezoelectric ceramic part 7; Utilize signal processing module 10 control Piezoelectric Ceramic modules 9, adjustment Piezoelectric Ceramic module 9 is applied to the voltage on two electrodes of piezoelectric ceramic part 7, is used to change the deformation quantity of piezoelectric ceramic part 7; And drive grating 4 and move along optical axis direction, making the spacing of the reflecting surface 2 of grating 4 and determinand 1 is λ/8, λ is the wavelength of light source outgoing beam; And the light intensity value of the interfering beam first-order diffraction light that detects of photodetection record this moment module 5; Then adjust the position of determinand 1, make it to produce micro-displacement, and write down the light intensity value of interfering beam first-order diffraction light once more along optical axis direction; Amplify mutually and difference processing through lock; Higher measuring accuracy can be obtained,, micro-displacement value to be measured can be calculated through twice light intensity value before and after comparing.
The grating 4 that adopts in the embodiment of the invention is metal material, and the cycle is 2 μ m; The present invention adopts the ceramics-glass bonding technology, the metal grating on the quartz glass 8 is combined to make the sensing unit of measurement with piezoelectric ceramics.Concrete is realized by following content: at first at 8 one metal-coated films chromium of quartz glass Cr, produce metal grating through electron beam exposure.Then, adopt bonding technology that grating 4 and piezoelectric ceramic part 7 are combined into a global facility.Reflecting surface 2 is for having the plane reflection face of certain reflectivity.
The light source 3 that adopts in the embodiment of the invention is Vcsel, and power is 1mW, and wavelength is 850nm, is driven by permanent power circuit; Photoelectric detector 5 adopts photodiode, and detectable minimum light electric current is 0.1nA, and response sensitivity is 0.6A/W.The present invention changes the spacing between grating and the determinand through piezoelectric ceramic part; When making this spacing get a certain value; The change speed of light intensity is maximum; And survey near the caused light intensity variable quantity of micro-displacement that determinand produces this value, micro-displacement measuring device of the present invention and method improve detection accuracy.
Claims (4)
1. high-precision micro displacement measurement mechanism; Comprise shell (6); Be provided with light source (3) and the grating (4) arranged successively along light path in the shell (6), it is characterized in that: described grating (4) slidably is installed in the shell (6) along optical axis direction, also is provided with piezoelectric ceramic part (7); The surface of these piezoelectric ceramic part (7) one sides and described grating (4) fits, opposite side and shell (6) relative fixed.
2. high-precision micro displacement measurement mechanism according to claim 1 is characterized in that, described piezoelectric ceramic part (7) is the center annular element corresponding with light path and has two electrodes.
3. high-precision micro displacement measurement mechanism according to claim 1 is characterized in that, is provided with:
Be used to drive the Piezoelectric Ceramic module (9) of piezoelectric ceramic part (7) deformation;
Be used to detect the photodetection module (5) of interfering beam light intensity, described interfering beam is for to interfere formation by grating (4) beam reflected with by determinand (1) beam reflected;
Be used for controlling the signal processing module (10) of Piezoelectric Ceramic module (9) according to the signal of photodetection module (5).
4. a high-precision micro displacement measuring method is characterized in that, may further comprise the steps:
(1) the light source outgoing beam is through projecting the reflecting surface of determinand behind the grating;
(2) interfered through time diffracted beam at the same level that grating produces by the diffracted beam of optical grating reflection and the face reflection that is reflected;
(3) utilize modulation voltage to drive piezoelectric ceramic part and produce a position phase modulation signal, the light intensity signal of the interfering beam that detector is surveyed advances the displacement that the horizontal lock processing and amplifying calculates determinand.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104406525A (en) * | 2014-11-13 | 2015-03-11 | 浙江大学 | Grating group micro-displacement sensor and displacement measuring method using same |
| CN104406524A (en) * | 2014-11-13 | 2015-03-11 | 浙江大学 | Combined grating micrometric displacement sensor and displacement measuring method using same |
| WO2017016144A1 (en) * | 2015-07-27 | 2017-02-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Displacement sensor, method of use and manufacture thereof, and interferometer |
| CN106872283A (en) * | 2017-01-13 | 2017-06-20 | 西南交通大学 | A kind of Young's modulus minute elongation measuring method based on optical grating diffraction |
| CN107432733A (en) * | 2016-05-27 | 2017-12-05 | 深圳硅基传感科技有限公司 | Implanted intraocular pressure monitor |
| CN108680107A (en) * | 2018-05-16 | 2018-10-19 | 中北大学 | A kind of high-precision prism displacement measuring device and method based on digital servo-control |
| CN109297397A (en) * | 2018-10-25 | 2019-02-01 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for measuring thickness, device and the system of electrostatic transducer movable electrode |
| CN110815147A (en) * | 2019-11-06 | 2020-02-21 | 青岛理工大学 | Micro-displacement platform driven by piezoelectric ceramics |
| CN112755919A (en) * | 2020-12-04 | 2021-05-07 | 中国石油大学(华东) | Vertical adjustment method for micron displacement in microscopic visualization experiment |
| CN114001661A (en) * | 2021-11-04 | 2022-02-01 | 北方工业大学 | Optical interference type integrated micro-displacement sensing structure and detection method thereof |
| CN114152194A (en) * | 2021-11-16 | 2022-03-08 | 华中科技大学 | Micro-displacement measuring device and method based on reflection grating |
| WO2022104906A1 (en) * | 2020-11-17 | 2022-05-27 | 中国科学院上海微***与信息技术研究所 | Micro-displacement mechanism with non-hermitian coupling angle detection and correction device |
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Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104406525A (en) * | 2014-11-13 | 2015-03-11 | 浙江大学 | Grating group micro-displacement sensor and displacement measuring method using same |
| CN104406524A (en) * | 2014-11-13 | 2015-03-11 | 浙江大学 | Combined grating micrometric displacement sensor and displacement measuring method using same |
| CN104406524B (en) * | 2014-11-13 | 2017-02-15 | 浙江大学 | Combined grating micrometric displacement sensor and displacement measuring method using same |
| CN104406525B (en) * | 2014-11-13 | 2017-02-15 | 浙江大学 | Grating group micro-displacement sensor and displacement measuring method using same |
| WO2017016144A1 (en) * | 2015-07-27 | 2017-02-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Displacement sensor, method of use and manufacture thereof, and interferometer |
| CN106403821A (en) * | 2015-07-27 | 2017-02-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Displacement sensor, usage and manufacturing method thereof and interferometer |
| CN107432733B (en) * | 2016-05-27 | 2019-08-20 | 深圳硅基传感科技有限公司 | Implanted intraocular pressure monitor |
| CN107432733A (en) * | 2016-05-27 | 2017-12-05 | 深圳硅基传感科技有限公司 | Implanted intraocular pressure monitor |
| CN106872283B (en) * | 2017-01-13 | 2020-08-25 | 西南交通大学 | Young modulus micro-elongation measurement method based on grating diffraction |
| CN106872283A (en) * | 2017-01-13 | 2017-06-20 | 西南交通大学 | A kind of Young's modulus minute elongation measuring method based on optical grating diffraction |
| CN108680107A (en) * | 2018-05-16 | 2018-10-19 | 中北大学 | A kind of high-precision prism displacement measuring device and method based on digital servo-control |
| CN109297397A (en) * | 2018-10-25 | 2019-02-01 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for measuring thickness, device and the system of electrostatic transducer movable electrode |
| CN109297397B (en) * | 2018-10-25 | 2020-07-31 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method, device and system for measuring thickness of movable electrode of electrostatic transducer |
| CN110815147A (en) * | 2019-11-06 | 2020-02-21 | 青岛理工大学 | Micro-displacement platform driven by piezoelectric ceramics |
| WO2022104906A1 (en) * | 2020-11-17 | 2022-05-27 | 中国科学院上海微***与信息技术研究所 | Micro-displacement mechanism with non-hermitian coupling angle detection and correction device |
| CN112755919A (en) * | 2020-12-04 | 2021-05-07 | 中国石油大学(华东) | Vertical adjustment method for micron displacement in microscopic visualization experiment |
| CN112755919B (en) * | 2020-12-04 | 2022-04-19 | 中国石油大学(华东) | Vertical adjustment method for micron displacement in microscopic visualization experiment |
| CN114001661A (en) * | 2021-11-04 | 2022-02-01 | 北方工业大学 | Optical interference type integrated micro-displacement sensing structure and detection method thereof |
| CN114152194A (en) * | 2021-11-16 | 2022-03-08 | 华中科技大学 | Micro-displacement measuring device and method based on reflection grating |
| CN114152194B (en) * | 2021-11-16 | 2022-10-04 | 华中科技大学 | Micro-displacement measuring device and method based on reflection grating |
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Application publication date: 20120718 |