CN102560639B - Antileak protective system - Google Patents
Antileak protective system Download PDFInfo
- Publication number
- CN102560639B CN102560639B CN201210057323.5A CN201210057323A CN102560639B CN 102560639 B CN102560639 B CN 102560639B CN 201210057323 A CN201210057323 A CN 201210057323A CN 102560639 B CN102560639 B CN 102560639B
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- China
- Prior art keywords
- vacuum pump
- heat
- door plate
- polycrystalline furnace
- insulation door
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Abstract
The invention provides a kind of antileak protective system; comprise vacuum pump, vacuum pump leads to valve respectively by bypass and is connected polycrystalline furnace with pump main valve, and pipeline branch road one end is connected with vacuum pump; the pipeline branch road the other end is connected with two sliding screws respectively, plays the effect of anti-leak.Polycrystalline furnace is also equipped with heat-insulation door plate, arranges sealing-ring between heat-insulation door plate and sliding screw, prevents air from entering body of heater between heat-insulation door plate and sliding screw.Anti-leak pressure-retaining system vacuumizes channel by two kinds makes the stopping property of polycrystalline furnace obtain double insurance, guarantees the production quality of polycrystalline furnace better.
Description
Technical field
The present invention relates to securing system, be specifically related to a kind of polycrystalline ingot furnace antileak protective system.
Technical background
Ingot furnace is the specific equipment aiming at solar industry design, is the required equipment of polycrystalline silicon ingot casting.Polycrystalline silicon ingot or purifying furnace is mainly used in the large production of solar-grade polysilicon ingot, it adopts advanced polysilicon directional freezing technology, the directed condensation-crystallization of special process will be passed through after silicon material high-temperature fusion, thus reach the requirement of manufacture of solar cells polysilicon quality, that one is applicable to long time continuous working, the large production unit of the intellectuality that high precision, high reliability, level of automation are high.But the polycrystalline ingot furnace furnace sealing that prior art exists is not fine, affects quality product.
Summary of the invention
Technical problem to be solved by this invention solves in prior art the bad problem of the polycrystalline ingot furnace furnace sealing that exists.
The invention provides a kind of antileak protective system; comprise vacuum pump, vacuum pump leads to valve respectively by bypass and is connected polycrystalline furnace with pump main valve, and pipeline branch road one end is connected with vacuum pump; the pipeline branch road the other end is connected with two sliding screws respectively, plays the effect of anti-leak.
Polycrystalline furnace is also equipped with heat-insulation door plate, arranges sealing-ring between heat-insulation door plate and sliding screw, prevents air from entering body of heater between heat-insulation door plate and sliding screw.
Anti-leak pressure-retaining system vacuumizes channel by two kinds makes the stopping property of polycrystalline furnace obtain double insurance, guarantees the production quality of polycrystalline furnace better.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing, technical solution of the present invention is described in detail.
As shown in Figure 1, antileak protective system, comprises vacuum pump 1, and vacuum pump 1 leads to valve 2 respectively by bypass and is connected polycrystalline furnace 6 with pump main valve 3, and pipeline branch road 4 one end is connected with vacuum pump 1, and pipeline branch road 4 the other end is connected with two sliding screws 5 respectively.Polycrystalline furnace 6 is also equipped with heat-insulation door plate, arranges sealing-ring between heat-insulation door plate and sliding screw 5, prevents air from entering body of heater between heat-insulation door plate and sliding screw 5.
Polycrystalline furnace 6 operation process intermediate pump 1 is in normally open, to be taken away by gas unnecessary in polycrystalline furnace 6 and makes to reach vacuum state in polycrystalline furnace 6, can accomplish anti-leak pressure maintaining effect in the most of the time by pump main valve 3 and pump by-pass valve 2.
Specifically, will open when furnace pressure is greater than 40mbar pump main valve 3, vacuum pump 1 falls excessive gas by pump main valve 3 and extracts out, and will open when furnace pressure is less than 40mbar pump by-pass valve 2, excessive gas is extracted out by pump by-pass valve 2 by vacuum pump 1.This pipeline of pipeline support 4 is in normally open and is mainly taken away by the gas between heat-insulation door plate and sliding screw 5, prevents ambient atmos from flowing in polycrystalline furnace 6 between heat-insulation door plate and sliding screw 5.
Anti-leak pressure-retaining system vacuumizes channel by two kinds makes the stopping property of polycrystalline furnace 6 obtain double insurance, guarantees the production quality of polycrystalline furnace 6 better.
It should be noted last that, above embodiment is only unrestricted for illustration of technical scheme of the present invention, although with reference to preferred embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, can modify to technical scheme of the present invention or equivalent replacement, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in right of the present invention.
Claims (1)
1. antileak protective system; comprise vacuum pump (1); it is characterized in that; vacuum pump (1) leads to valve (2) respectively by bypass and is connected polycrystalline furnace (6) with pump main valve (3); pipeline branch road (4) one end is connected with vacuum pump (1); pipeline branch road (4) the other end is connected with two sliding screws (5) respectively; polycrystalline furnace (6) also arranges heat-insulation door plate, arranges sealing-ring between heat-insulation door plate and sliding screw (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210057323.5A CN102560639B (en) | 2012-03-06 | 2012-03-06 | Antileak protective system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210057323.5A CN102560639B (en) | 2012-03-06 | 2012-03-06 | Antileak protective system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102560639A CN102560639A (en) | 2012-07-11 |
| CN102560639B true CN102560639B (en) | 2015-12-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210057323.5A Expired - Fee Related CN102560639B (en) | 2012-03-06 | 2012-03-06 | Antileak protective system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102560639B (en) |
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| US20040173948A1 (en) * | 2002-09-19 | 2004-09-09 | Pandelisev Kiril A. | Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication |
| DE102009044249B3 (en) * | 2009-10-14 | 2011-06-30 | ReiCat GmbH, 63571 | Process and apparatus for separating argon from a gas mixture |
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2012
- 2012-03-06 CN CN201210057323.5A patent/CN102560639B/en not_active Expired - Fee Related
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4541475A (en) * | 1981-12-30 | 1985-09-17 | Rolls-Royce Limited | Method of, and apparatus for, producing castings in a vacuum |
| EP1852528A1 (en) * | 2006-05-04 | 2007-11-07 | Fairfield Crystal Technology LLC | Method and apparatus for aluminum nitride monocrystal boule growth |
| CN201151644Y (en) * | 2007-11-12 | 2008-11-19 | 中国电子科技集团公司第四十八研究所 | Multi-point synchronous lifting mechanism constituted by bowden cable |
| CN101240449A (en) * | 2007-11-29 | 2008-08-13 | 晶湛（南昌）科技有限公司 | Method for purifying silicon |
| CN101311341A (en) * | 2008-03-17 | 2008-11-26 | 中国电子科技集团公司第四十八研究所 | Vacuum pressure continuous control process for polysilicon ingot casting process and control system thereof |
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| CN102197169A (en) * | 2008-08-27 | 2011-09-21 | Amg艾迪卡斯特太阳能公司 | Apparatus and method of use for casting system with independent melting and solidification |
| CN101498039A (en) * | 2008-12-26 | 2009-08-05 | 苏州市万泰真空炉研究所有限公司 | Gradient cooling lifting mechanism for polysilicon casting ingot |
| CN101718490A (en) * | 2009-07-20 | 2010-06-02 | 浙江传媒学院 | Outlet positioning and adjusting device for fusant in crucible in closed cavity |
| CN101942697A (en) * | 2010-08-23 | 2011-01-12 | 清华大学 | Evacuating device of temperature thermocouple casing of photovoltaic polycrystalline silicon ingot casting furnace |
| CN201882916U (en) * | 2010-11-04 | 2011-06-29 | 浙江芯能光伏科技有限公司 | Vacuum system for multiple polycrystal furnaces to operate in parallel |
| CN201908151U (en) * | 2010-11-19 | 2011-07-27 | 湖南红太阳光电科技有限公司 | Soft air pumping device of polycrystalline silicon ingot production furnace vacuum system |
| CN201924103U (en) * | 2010-11-26 | 2011-08-10 | 安阳市凤凰光伏科技有限公司 | Pneumatic and manual valve for polycrystalline silicon ingot unidirectional solidification furnace |
| CN102094233A (en) * | 2010-12-28 | 2011-06-15 | 哈尔滨工业大学 | Device for preparing polycrystalline silicon ingots with directional solidification microstructures |
| CN202107794U (en) * | 2011-07-25 | 2012-01-11 | 营口晶晶光电科技有限公司 | Polycrystalline furnace with detective device for preventing accidental fire striking |
| CN102234837A (en) * | 2011-08-01 | 2011-11-09 | 浙江晶盛机电股份有限公司 | Closed cooling system of gas cooled polysilicon ingot furnace |
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| Publication number | Publication date |
|---|---|
| CN102560639A (en) | 2012-07-11 |
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Granted publication date: 20151202 Termination date: 20190306 |
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| CF01 | Termination of patent right due to non-payment of annual fee |