CN102556664B - Traveling trolley system - Google Patents

Traveling trolley system Download PDF

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Publication number
CN102556664B
CN102556664B CN201210048074.3A CN201210048074A CN102556664B CN 102556664 B CN102556664 B CN 102556664B CN 201210048074 A CN201210048074 A CN 201210048074A CN 102556664 B CN102556664 B CN 102556664B
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substrate box
mentioned
aforesaid substrate
chassis
storage department
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CN102556664A (en
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石桥希远
村山晋
和田芳幸
大野俊孝
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IHI Corp
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IHI Corp
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Priority claimed from JP2009081662A external-priority patent/JP5402156B2/en
Priority claimed from JP2009081661A external-priority patent/JP5365302B2/en
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Abstract

The invention provides a kind of traveling trolley system.Traveling trolley system possesses the substrate board treatment implementing the keeping of substrate or the process of regulation, substrate is made to be housed in the lifting unit (10) be elevated along the vertical direction under the state in substrate box (1), by the parallel motion portion (8a of substrate box (1) towards substrate board treatment parallel motion, 8b), substrate box (1) to be advanced chassis (AG) along nobody of the orbit transports arranged towards substrate board treatment, keep with the top at track (L) and take care of the substrate box Storage Department (BF1) of substrate box (1).

Description

Traveling trolley system
The application is denomination of invention is " traveling trolley system ", the applying date is on March 29th, 2010 and application number is the divisional application of the application for a patent for invention of 20101045538.3.
Technical field
The present invention relates to the substrate box of mounting collecting substrate and the traveling trolley system of advancing in the track cocycle of ring-type.No. 2009-081661, the Patent that the application filed an application in Japan based on March 30th, 2009 and the Patent 2009-081662 CLAIM OF PRIORITY of filing an application in Japan on March 30th, 2009, quote its content here.
Background technology
The traveling trolley system (such as with reference to Unexamined Patent 10-273204 publication) of the transported substance the picked and placeed keeping shelf of transported substance is carried out to the traveler car of advancing in orbit conventionally, there is known have along track configurations and is provided with the traveling trolley system (such as with reference to JP 2001-341640 publication) in the berth that traveler car can enter in order to the processing equipment transfer transported substance to process transported substance.
In the traveling trolley system about Unexamined Patent 10-273204 publication, supply station is provided with in the inside of the central authorities of annular orbit, and the side along the track of ring-type be configured with keeping shelf, from both sides by transported substance transfer in the traveler car of advancing at track of advancing.
In addition, in the traveling trolley system about JP 2001-341640 publication, be used in the arranged outside of track the berth that traveler car rested on processing equipment, enter into carry out transported substance between the traveler car in berth and processing equipment loading, unloading.
In the traveling trolley system about Unexamined Patent 10-273204 publication, keeping shelf (automated storage retrievel system) is configured to high-rise.Therefore, the occupancy load of transported substance is comparatively large, but uses stack crane when picking and placeing transported substance from the Storage Department of keeping shelf.
Thus, about the traveling trolley system not only spended time in the picking and placeing of transported substance of Unexamined Patent 10-273204 publication, and the pooling feature of interim keeping transported substance is not possessed, so transport efficiency reduces.In addition, in the traveling trolley system about Unexamined Patent 10-273204 publication, shelf is formed multistage, multi-jointly certainly, but because shelf and traveler car are formed, individually so have the problem of transport efficiency variation certainly.
In addition, in the traveling trolley system about JP 2001-341640 publication, in the outside of track, the berth (space) of the loading for traveler car being rested in processing equipment, unloading position is provided with.Therefore, in the traveling trolley system about JP 2001-341640 publication, to the transfer spended time of traveler car, the problem that the transport efficiency with traveler car reduces.
Summary of the invention
The present invention makes in view of the foregoing, object be to provide a kind of can improve equipment space saving and nobody to advance the traveling trolley system of transport efficiency of chassis.
1st technical scheme for the present invention possesses following mechanism in order to solve the problem.
1st technical scheme possesses: substrate board treatment, implements the keeping of substrate or the process of regulation; Nobody advances chassis, have and make aforesaid substrate be housed in the lifting unit that is elevated along the vertical direction under the state in substrate box and by the parallel motion portion of aforesaid substrate box towards aforesaid substrate processing equipment parallel motion, by aforesaid substrate box along the orbit transports arranged towards aforesaid substrate processing equipment; Substrate box Storage Department, keeps and takes care of substrate box above above-mentioned track.
2nd technical scheme for the present invention is in above-mentioned 1st technical scheme, and nobody chassis of advancing above-mentioned possesses the chassis upper substrate box Storage Department of keeping aforesaid substrate box above above-mentioned lifting unit and above-mentioned parallel motion portion.
According to the present invention, because side is provided with substrate box Storage Department, so can realize the space saving of traveling trolley system entirety in orbit.And then, can shorten substrate box relative to traveler car the transfer time, improve nobody and advance the transport efficiency of chassis and setup time.
In addition, according to the present invention, aforesaid substrate box is provided with and is kept parts, aforesaid substrate box Storage Department is provided with and is engaged to the above-mentioned holding member be kept on parts.
Thereby, it is possible to easily and reliably substrate box is placed on substrate box Storage Department.
In addition, according to the present invention, above-mentioned holding member can along the vertical direction or horizontal direction move and form.
Thereby, it is possible to easily or expeditiously substrate box is remained on substrate box Storage Department.
In addition, according to the present invention, nobody chassis of advancing above-mentioned is stopped in the below of aforesaid substrate box Storage Department; Make above-mentioned lifting unit and above-mentioned parallel motion portion concerted action, aforesaid substrate box is remained on aforesaid substrate box Storage Department.
In addition, according to the present invention, make above-mentioned nobody to advance the travel section of chassis and above-mentioned lifting unit, concerted action, remains on substrate box on aforesaid substrate box Storage Department.
In addition, according to the present invention, aforesaid substrate box can multistagely be formed stackingly.
Thus, according to the present invention, the space saving of traveling trolley system entirety can be realized further.
In addition, according to the present invention, be engaged to the above-mentioned holding member be kept on parts and be located on above-mentioned chassis upper substrate box Storage Department.
Thereby, it is possible to easily and reliably substrate box is placed on chassis upper substrate box Storage Department.
In addition, above-mentioned holding member can along the vertical direction or horizontal direction move and form.
Thereby, it is possible to easily or expeditiously by substrate box remain on chassis upper substrate box Storage Department.
In addition, according to the present invention, the substrate box of the sky of not accommodating aforesaid substrate is remained on above-mentioned chassis upper substrate box Storage Department.Thereby, it is possible to realize the high efficiency utilization of traveling trolley system entirety.
Accompanying drawing explanation
Fig. 1 is the integrally-built skeleton diagram of the traveling trolley system representing the 1st embodiment for the present invention.
Fig. 2 A to Fig. 2 C is the figure of the substrate box represented about this system.
Fig. 3 represents about nobody of this system advances the front view of relation of chassis and substrate box Storage Department.
Fig. 4 represents about nobody of this system advances the lateral plan of relation of chassis and substrate box Storage Department.
Fig. 5 represents about nobody of this system advances the birds-eye view of relation of chassis and substrate box Storage Department.
Fig. 6 A to Fig. 6 D is within the system by the instruction diagram of substrate box transfer to the action of substrate box Storage Department.
Fig. 7 is the front view of the variation of the substrate box Storage Department represented about this system.
Fig. 8 is the lateral plan of the substrate box Storage Department about Fig. 7.
Fig. 9 is the birds-eye view of the substrate box Storage Department about Fig. 7.
Figure 10 be represent in the traveling trolley system of the 2nd embodiment for the present invention nobody to advance the front view of schematic configuration of chassis.
Figure 11 is that nobody that represent relevant Figure 10 advances the birds-eye view of schematic configuration of chassis.
Figure 12 is the instruction diagram of the action be unloaded to by substrate box within the system in buffer part (chassis upper substrate box Storage Department).
Figure 13 is the instruction diagram of the action of then Figure 12.
Figure 14 is the instruction diagram of the action of then Figure 13.
Figure 15 is the instruction diagram of the action of then Figure 14.
Detailed description of the invention
Below, be described with reference to the 1st embodiment of accompanying drawing to traveling trolley system A for the present invention.
As shown in Figure 1, be equipped with for guiding advance rail road nobody to advance the track L of ring-type of chassis (hereinafter referred to as chassis AG).This track L by cushioning siding track LA, process siding track LB is configured to ring-type with by a pair joining rails SL be connected between two ends of two track LA, LB.Further, chassis AG advances in the track L cocycle of above-mentioned ring-type.
In the both sides (doubling as processing the one-sided of siding track LB) of buffering siding track LA, be equipped with buffer part ST1, ST2 that interim keeping becomes the substrate box 1 of transported substance.Buffer part ST1, ST2 are made up of one or more levels shelf.Further, keeping substrate box 1 in buffer part ST1, ST2.
On the other hand, remaining one-sided at process siding track LB, adjacent being equipped such as is carried out the substrate board treatment R1 of clean to substrate G such as glass board and such as substrate G is carried out to the substrate board treatment R2 of coating process.
On the end of two track LA, LB, be equipped with the traverse table T for transfer chassis AG respectively with reciprocally advancing.Further, the mounting surface of traverse table T is provided with and the level track of two track LA, LB phases.
On substrate board treatment R1, R2, in the side in the face of process siding track LB, be equipped with the Liang Ge loading depot LS containing the substrate box 1 of untreated substrate G in receiving chassis AG and the discharge point ULS sent to chassis AG side by the substrate box 1 containing processed substrate G.
In addition, on substrate board treatment R1, R2, respectively connected for be placed between the substrate box 1 on loading depot LS and discharge point ULS substrate G slices are sent into, the feeding conveyer LC that sends and send conveyer ULC.
Chassis AG has four wheels 4, the chassis main body (travel section) 11 of advancing on track L by mounting substrate box 1 described later, is made to be positioned in elevator (lifting unit) 10 that the substrate box 1 in chassis main body 11 is elevated along the vertical direction and to be integrated and a pair fork driven (parallel motion portion) 8a, 8b are formed to make substrate box 1 form along the direction parallel motion being orthogonal to track LA, LB.
On the track L of ring-type, be configured with multiple stage (being 5 in the example in fig 1) chassis AG.These chassis AG has identical structure.
Then, the substrate box 1 carried by chassis AG is described.
Substrate box 1 is configured to, and can take care of the substrate G such as multi-disc (5 ~ 6) such as glass substrate.
Substrate box 1 as shown in Figure 2 A, is configured to box-shaped by the platypelloid type cuboid with the peristome 2 picking and placeing substrate G.Substrate box 1 by a pair framework being formed by front frame FFL, side frame SFL, after-frame BFL and intermediate beam parts 3, be configured in a pair framework corner on and a pair framework is linked pillar (not shown), be pasted onto beyond peristome 2 periphery on biside plate SP and top board TP form.
Below substrate box 1 as shown in Figure 2 B, for not arranging base plate and the open configuration that side frame SFL, front frame FFL, after-frame BFL and beam parts 3 expose.In the inside of substrate box 1, transversely open between two opposed side frame SFL and be provided with metal wool W, and this metal wool W is configured with many along the longitudinal direction at certain intervals.Further, the every predetermined distance of many wires W keeps multi-disc (5 ~ 6) substrate G.
On the biside plate SP of substrate box 1, the narrower calvus N of a pair width mutually leave interval at the position, front and back of upper end and from 4 positions respectively level project.
In addition, calvus N also can be formed as the calvus N of wider width.In the case, calvus N from the central upper end of the biside plate SP of substrate box 1 respectively on even keel project.
Then, the substrate box Storage Department BF 1 of the top being disposed in track LA (LB) is described.
To circulate at chassis AG the top of the track LA (LB) advanced, be provided with multiple substrate box Storage Department (hereinafter referred to as buffer part BF1) continuously.
Multiple pillars 5 that buffer part BF1 is erected on the F of ground at predetermined intervals by the side along track LA, LB, the supporting arm 6 extended from pillar 5 towards the upper horizontal cushioning siding track LA and the retention tab K1 given prominence to from the position, 4, both sides, front and back of supporting arm 6 towards direct of travel are formed.
Buffer part BF1 is formed as inverted L-shaped by pillar 5 and supporting arm 6.Further, supporting arm 6 is set as and the height that the substrate box 1 be positioned on chassis AG is not interfered.
Then, with reference to Fig. 6, be described to the action on the buffer part BF1 of track LA (LB) top by substrate box 1 transfer on chassis AG.
First, as shown in Figure 6A, the chassis AG being placed with substrate box 1 advances on track LA, stops in the below of buffer part BF1.More correctly say, on the direct of travel of chassis AG, on the position that the calvus N of the substrate box 1 be placed on chassis AG is consistent with the retention tab K1 of buffer part BF1, chassis AG stops.
Then, as shown in Figure 6B, by making the elevator 10 of chassis AG start, make the substrate box 1 on fork 8a, 8b rise to than buffer part BF1 retention tab K1 slightly by the top.
In this case, the retention tab K1 of supporting arm 6 is positioned at one-sided (being right side in fig. 6b) of buffering siding track LA.Therefore, even if make substrate box 1 rise to vertical direction, the interference with the calvus N of substrate box 1 can also be avoided.
And then as shown in Figure 6 C, fork 8a, 8b are elongated to the one-sided of buffering siding track LA, are located by the calvus N of substrate box 1 on the retention tab K1 of buffer part BF1.
Finally, as shown in Figure 6 D, elevator 10 is made to decline.Thus, the substrate box 1 on chassis AG is by the buffer part BF1 above transfer to buffering siding track LA.
Then, elevator 10 and fork 8a, 8b is made to get back to initial position.
In addition, when substrate box 1 transfer that will be placed on buffer part BF1 is to chassis AG, as long as it is just passable to carry out above-mentioned action in reverse order.
Like this, about the traveling trolley system A of present embodiment is owing to possessing buffer part BF1 in the top of track LA (LB), so the space saving of traveling trolley system A entirety can be realized.Thus, substrate box 1 is relative to the transfer time shorten of chassis AG, and the work efficiency of chassis AG and setup time (lead time) improve.
In addition, the elevator 10 had by using chassis AG and fork 8a, 8b, can easily be placed on substrate box 1 on buffer part BF1.Therefore, do not need special equipment, the cost degradation of traveling trolley system A can be realized.
Then, with reference to Fig. 7 ~ Fig. 9, the variation of substrate box Storage Department is described.
As shown in Fig. 7 ~ Fig. 9, buffer part BF2 has the structure making to have rotated 90 degree with the locking position of substrate box 1 relative to buffer part BF1.
That is, buffer part BF2 possesses and outside two of buffering siding track LA, to erect the not shown pillar on the ground F of front and back and be located at horizontal frame 12a, the 12b on the top for specified altitude position of this pillar abreast with buffering siding track LA.Further, in the inner side of these two horizontal frame 12a, 12b, front and back are left interval and arranged oppositely have the retention tab K2 projected towards buffering siding track LA on even keel.
On the other hand, on the substrate box 1 be placed on chassis AG, the narrower calvus M of width is on the position, left and right of substrate box 1 upper end and the retention tab K2 of buffer part leaves interval with same intervals and on even keel projects respectively.That is, calvus M is different from above-mentioned calvus N, relative on the face that throughput direction is located at left and right.
Then, with reference to Fig. 7 ~ Fig. 9, be described to the action on the buffer part BF2 of the top of track LA (LB) by substrate box 1 transfer on chassis AG.
First, chassis AG advances to immediately below buffer part BF2 and stops.More correctly say, on the direct of travel of chassis AG, in the place that the calvus M of the substrate box 1 and retention tab K1 of buffer part BF2 is inconsistent, chassis AG stops (with reference to Fig. 8, Fig. 9).
Then, by driving the elevator 10 of chassis AG, substrate box 1 rises mobile.
Then, after calvus N rises to the position higher than retention tab K1, chassis AG moves to the calvus M position overlapping in the vertical direction with retention tab K1 on buffering siding track LA.That is, chassis AG stops slightly to direct of travel moves.
Finally, elevator 10 is made to decline.Thus, calvus M is locked on retention tab K1 respectively, by substrate box 1 keeping in buffer part BF2.
Like this, when using buffer part BF2, by using elevator 10 and the travel section 11 of chassis AG, the substrate box 1 on chassis AG can be locked on buffer part BF2 and take care of.
Then, the 2nd embodiment of traveling trolley system A for the present invention is described.
In the present embodiment, in the system of the 1st embodiment, above chassis main body 11, be provided with the buffer part BF of interim keeping substrate box 1.
In addition, about in the chassis of present embodiment, because substrate box 1, claw N, wheel 4, chassis main body (travel section) 11, elevator (lifting unit) 10, fork (parallel motion portion) 8a, 8b are the structures same with above-mentioned 1st embodiment, so omit the description.
First, with reference to Figure 10, Figure 11, the chassis AG about present embodiment is described.
Above chassis main body 11, be provided with the buffer part BF of interim keeping substrate box 1.
That is, substrate box 1 can be loaded on the elevator 10 and fork 8a, 8b of chassis AG.And then, also can load substrate box 1 by buffer part BF by the top than elevator 10 and fork 8a, 8b.
Buffer part BF is formed by a pair abutment wall 14a, the 14b that erect on the direct of travel rear ends of chassis main body 11 with from the retention tab K that the opposed faces of abutment wall 14a, 14b projects towards interior side's on even keel respectively.
Retention tab K be located at abutment wall 14a, 14b respective Width two ends on.In addition, 4 retention tab K are located on mutually level position.Specifically, as shown in Figure 10,4 retention tab K are located at than being positioned in the end face of the substrate box 1 pitched on above 8a, 8b slightly by the top under the state making elevator 10 reduce.
Further, this retention tab K engages the calvus N of substrate box 1 described later, substrate box 1 is remained between abutment wall 14a, 14b.
Then, with reference to Figure 12 ~ Figure 15, to the buffer part BF of substrate box 1 couple of chassis AG being unloaded (Load せ, ろ falls) action be described.
First, as shown in figure 12, under the state on fork 8a, 8b that 1 substrate box 1 is positioned in chassis AG, by driving fork 8a, 8b, substrate box 1 parallel motion.More particularly, if top view, then the position that the calvus N that substrate box 1 is moved horizontally to substrate box 1 does not interfere with the retention tab K of buffer part BF.
Then, as shown in figure 13, by driving elevator 10, substrate box 1 rises.More particularly, substrate box 1 rise until the calvus N of substrate box 1 become than buffer part BF retention tab K slightly by the top.
Then, as shown in figure 14,8a, 8b is pitched back to initial position.That is, if top view, then substrate box 1 is moved horizontally to the calvus N of substrate box 1 position consistent with the retention tab K of buffer part BF.
Finally, as shown in figure 15, elevator 10 drops to initial position.Thus, the retention tab K of substrate box 1 engages with the calvus N of buffer part BF, and substrate box 1 is maintained on buffer part BF.That is, substrate box 1 is by from fork 8a, 8b upper transfer on buffer part BF.
In addition, in substrate box 1 transfer that will be placed on buffer part BF to fork 8a, 8b, as long as it is just passable to carry out above-mentioned action in reverse order.
Like this, about in the traveling trolley system B of present embodiment, chassis AG possesses the buffer part BF of interim keeping substrate box 1.Therefore, it is possible to realize the space saving of traveling trolley system B entirety.Thus, substrate box 1 is relative to the transfer time shorten of chassis AG, and the work efficiency of chassis AG and setup time improve.
In addition, the elevator 10 had by using chassis AG and fork 8a, 8b, can easily be placed on substrate box 1 on buffer part BF.Therefore, do not need special equipment, the cost degradation of traveling trolley system B can be realized.
In addition, also can by multistage for substrate box 1 stacking on the buffer part BF of chassis AG.
In the case, preferably, pin P is set on substrate box 1, multistage stacking multiple substrate boxes 1 can not be collapsed by goods.
On buffer part BF multistage stacking multiple substrate box 1, before the action of above-mentioned Figure 12 ~ Figure 15, make the substrate box 1 on fork 8a, 8b first increase for the time being by elevator 10.Then, this substrate box 1 is connected to be held in, on other substrate boxes 1 on buffer part BF, to make other substrate boxes 1 leave interval from the calvus N of buffer part BF.Then the action of above-mentioned Figure 12 ~ Figure 15 is carried out.
In addition, when by multistage for multiple substrate box 1 being stacked on buffer part BF, preferably by multistage stacking for the substrate box 1 of sky.This is because, if the substrate box of sky 1, then do not need the stacking order considering substrate box 1.In other words, this is because when by multistage for the substrate box 1 containing substrate G being stacked on buffer part BF, need many actions to only be unloaded from buffer part BF by specific substrate box 1 selectively, efficiency declines.
The track L of ring-type is configured with multiple stage (such as 5) chassis AG, but preferably using the substrate box 1 of wherein at least one multistage the stacking sky as the above-mentioned chassis AG with buffer part BF (such as chassis AG5).Thus, do not need the chassis AG5 preparing the empty substrate box 1 of multiple stage conveying, can suppression equipment cost.In addition, do not need many for the chassis AG5 of the empty substrate box 1 of conveying week circulation conveyings, transport efficiency improves.
As described above, according to traveling trolley system for the present invention, owing to being provided with buffer part BF1, the BF2 of keeping substrate box above track L, so the space saving of traveling trolley system A entirety can be realized.In addition, substrate box 1 was shortened relative to the transfer time of chassis AG, and the transport efficiency of chassis AG and setup time improve.
Each shape of each component parts represented by above-mentioned embodiment and combination etc. are examples, can carry out various change without departing from the spirit and scope of the invention based on designing requirement etc.
Such as, substrate G also can be semiconductor substrate.
In addition, chassis AG is illustrated with the structure of advancing on the ground, but also can be the structure entered at top ceiling skidding.
In addition, calvus N, M are set to the structure projected toward the outer side from biside plate SP and are illustrated, but are not limited to this, also can be configured to groove or hole.
In addition, be illustrated to the situation on buffer part BF1, BF2 for substrate box 1 is only loaded 1, but also can by multistage for substrate box 1 stacking.Thereby, it is possible to realize space saving further.When by multistage for substrate box 1 stacking, also the retention tab K1 of buffer part BF1, BF2 can be arranged many groups along short transverse.In addition, also one group of retention tab K1 can be formed up or down.
In addition, retention tab K1, K2 also can be configured to free to advance or retreat movable in the horizontal direction.Thereby, it is possible to by means of only the driving of elevator 10 transfer substrate box 1.
In addition, be not limited in the situation substrate box 1 with calvus N being placed on the situation on retention tab K, the K1 of buffer part BF, BF1 and being placed on by the substrate box 1 with calvus M on the retention tab K2 of BF2, also can pass through the side of the maintaining part clamping substrate box 1 of buffer part BF, BF1 and BF2.
In the above-described embodiment, track L is configured to ring-type, but also can is rectilinear orbit.That is, chassis AG also can move back and forth on rectilinear orbit.In addition, chassis AG can be also not all identical structure, also can mix the chassis that there is multiple kind.
In addition, in the buffer part BF of chassis AG, situation about being fixedly installed on abutment wall 14a, 14b by the retention tab K of supporting substrates box is illustrated, but is not limited to this.Such as retention tab K also can be the movable pawl that can haunt towards interior side.As a result, by substrate box 1 transfer to buffer part BF time, no longer need drive fork 8a, 8b, can transfer expeditiously.
In addition, also can be abutment wall 14a, 14b are extended upward, retention tab K can the structure of movement along the vertical direction.As a result, can by the integrally transfer between fork 8a, 8b and buffer part BF of multistage stacking substrate box 1 former state.
In addition, also can arrange on multiple positions of above-below direction can haunt movable pawl, make arbitrary retention tab give prominence to.

Claims (4)

1. a traveling trolley system, is characterized in that, possesses:
Substrate board treatment, implements the keeping of substrate or the process of regulation;
Nobody advances chassis, have and make aforesaid substrate be housed in the lifting unit that is elevated along the vertical direction under the state in substrate box and by the parallel motion portion of aforesaid substrate box towards aforesaid substrate processing equipment parallel motion, by aforesaid substrate box along the orbit transports arranged towards aforesaid substrate processing equipment;
Substrate box Storage Department, keeps and takes care of substrate box above above-mentioned track,
The side plate of aforesaid substrate box is provided with four and is kept parts;
Aforesaid substrate box Storage Department is provided with and is engaged to above-mentioned four four holding members be kept on parts,
The space that aforesaid substrate box is vertically passed through under the state left from above-mentioned four holding members is formed between above-mentioned four holding members in aforesaid substrate box Storage Department;
Above-mentioned parallel motion portion and above-mentioned nobody advance the side of travel section of chassis make to be kept at above-mentioned four the state that parts are positioned more top than above-mentioned four holding members under aforesaid substrate box move by above-mentioned space along horizontal direction, and above-mentioned lifting unit makes aforesaid substrate box decline and make above-mentioned four to be kept parts and to be sticked in above-mentioned four holding members, makes aforesaid substrate box be held in aforesaid substrate box Storage Department.
2. traveling trolley system as claimed in claim 1, is characterized in that,
Nobody chassis of advancing above-mentioned is stopped in the below of aforesaid substrate box Storage Department;
Make above-mentioned lifting unit and above-mentioned parallel motion portion concerted action, aforesaid substrate box is remained on aforesaid substrate box Storage Department.
3. traveling trolley system as claimed in claim 1, is characterized in that, make above-mentioned nobody to advance the travel section of chassis and above-mentioned lifting unit concerted action, substrate box is remained on aforesaid substrate box Storage Department.
4. traveling trolley system as claimed in claim 1, it is characterized in that, aforesaid substrate box can multistagely be stacked on substrate box Storage Department and form.
CN201210048074.3A 2009-03-30 2010-03-29 Traveling trolley system Active CN102556664B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2009081662A JP5402156B2 (en) 2009-03-30 2009-03-30 Traveling vehicle system
JP2009-081662 2009-03-30
JP2009-081661 2009-03-30
JP2009081661A JP5365302B2 (en) 2009-03-30 2009-03-30 Traveling vehicle system
CN 201010145538 CN101850883B (en) 2009-03-30 2010-03-29 Traveling trolley system

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CN102556664B true CN102556664B (en) 2015-09-30

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