CN102554666B - Blade attached and removed device - Google Patents
Blade attached and removed device Download PDFInfo
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- CN102554666B CN102554666B CN201110445508.9A CN201110445508A CN102554666B CN 102554666 B CN102554666 B CN 102554666B CN 201110445508 A CN201110445508 A CN 201110445508A CN 102554666 B CN102554666 B CN 102554666B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Hand Tools For Fitting Together And Separating, Or Other Hand Tools (AREA)
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention provides a blade attached and removed device, comprising a flange holding unit (1) used for attaching and removing a flange, and a nut rotating and supporting unit (2) used for attaching and removing a nut, wherein the flange holding unit (1) is mounted on the nut rotating and supporting unit (2) in a dismountable and mountable manner. A flange (D) held by each clamping pawl (11b) of the flange holding unit (1) and a nut (E) held in the recess (21d) of the nut rotating and supporting unit (2) are simultaneously attached and removed at a blade attached and removed position under a state that the nut rotating and supporting unit (1) and the flange holding unit (1) are integrated. Furthermore, the flange (D) and the nut (E) are respectively attached and removed at the blade mounting position under a state that the nut rotating and supporting unit (2) and the flange holding unit (1) are separated.
Description
Technical field
The present invention relates to a kind of blade handler, particularly a kind of for installing with respect to the cutting apparatus that is used for cutting off semiconductor crystal wafer etc., dismounting is as the blade handler of the blade of rotary cutting sharpener.
Background technology
For cutting off the assigned position of the machined objects such as semiconductor crystal wafer and the cutting apparatus that semiconductor crystal wafer is divided into least unit being provided with to blade (rotary cutting sharpener).Blade utilizes the blade handling nut of use and the installation position, top of the main shaft (spindle) that flange is arranged on cutting apparatus.If blade consumption or breakage, need more allowing blade replacement.In addition,, in the situation that change the kind of machined object or change the processing content of processed portion, also need aptly more allowing blade replacement.
As the method that blade is installed to the installation position, top of main shaft, known have for example make cutting blade clip be held between two flanges and under this state to utilize nut flange to be installed to the method for installation position, main shaft top.
In addition,, in patent documentation (TOHKEMY 2005-191096 communique), propose to be useful on the blade handler that simultaneously loads and unloads nut and flange with respect to the installation position, top of main shaft.In this blade handler, under the state of flange of controlling the place, installation position, top that is installed in main shaft, make nut rotation, thereby load and unload flange and nut simultaneously.
Adopt above-mentioned blade handler, while at least can control the flange that is positioned at nut side, make nut rotation.Thus, after installation position, the top dismounting nut from main shaft, can become the maintained state of flange of nut and this nut side, and prevent that nut and flange from coming off.
In addition,, in this blade handler, owing to can also dismantling flange in dismounting nut, therefore can utilize the process contrary with this unloading process kept nut and flange to be installed to the installation position, top of main shaft.
Like this, in above-mentioned blade handler, by while retention nut and flange, can prevent that nut etc. from coming off, in addition, can be simultaneously with respect to installation position, top handling nut and the flange of main shaft.
Summary of the invention
the problem that invention will solve
But, in above-mentioned blade handler, in the situation that only load and unload nut or only load and unload flange with respect to the installation position, top of main shaft, exist on the contrary and lack operability, the such problem of operating efficiency variation.
For example,, while when confirming the installment state of flange with respect to the installation position, top of main shaft, this flange is installed, sometimes existing when not making nut be held in blade handler can be efficiently and situation about operating swimmingly.In addition, while when carrying out the fitting operation of flange, while carrying out the fitting operation of nut simultaneously, need more cautiously carry out both fitting operations so this job requirements dexterity.
The present invention completes in view of the above problems, its object be to provide a kind of when installation position, the top handling nut with respect to main shaft and flange the blade handler of operability excellence.
for the scheme of dealing with problems
The present invention is a kind of blade handler, it is for the blade with respect to cutting apparatus is installed, dismounting of cutting is used, this cutting apparatus is for machining machined object, above-mentioned blade handler comprises: flange handle part, it is for carrying out the handling of flange, and this flange is for being installed to blade the blade installation position of cutting apparatus; And nut swivel bearing portion, it is for carrying out the handling of nut, and this nut is for being installed to blade installation position by blade.
Flange handle part comprises: the flange handle part main body of sleeve-shaped; Flange is controlled parts, and it is arranged at the circumferential of flange handle part main body; And control member, it is arranged at the outer peripheral face of flange handle part main body, and for operating flange handle part part.
Flange is controlled parts and is comprised: the 1st engagement pawl, and it can be centered by this flange of pivot suspension be controlled distolateral a 1st pivot suspension point of parts, to the 1st direction in the 1st axle center away from flange handle part main body and rotate near the 2nd direction in the 1st axle center; And the 1st elastic component, its for to the 1st engagement pawl to the 1st direction application of force.
Flange is controlled parts and is had following function: make control member endwisely slipping and making the 1st engagement pawl overcome the elastic force of the 1st elastic component and rotate to the 2nd direction to flange handle part main body, thereby the 1st engagement pawl is engaged with the 1st week groove that is formed at blade installation position, on the contrary, utilize the elastic force of the 1st elastic component that the 1st engagement pawl is rotated to the 1st direction, thereby the 1st engagement pawl is left from the 1st week groove.
Nut swivel bearing portion comprises: nut swivel bearing portion main body; Flange handle part handling member, it is arranged at nut swivel bearing portion, and for install, dismantle flange handle part with respect to nut swivel bearing portion; And nut rotating member, it is arranged at nut swivel bearing portion main body.
Flange handle part handling member comprises: the 2nd engagement pawl, it can be centered by one of this flange handle part of pivot suspension handling member distolateral the 2nd pivot suspension point, to the 3rd direction in the 2nd axle center away from nut swivel bearing portion main body and near the 4th direction rotation in the 2nd axle center; And the 2nd elastic component, its for to the 2nd engagement pawl to the 3rd direction application of force.
Flange handle part handling member has following function: utilize the elastic force of the 2nd elastic component that the 2nd engagement pawl is rotated to the 3rd direction, the 2nd engagement pawl is engaged with the 2nd week groove that is formed at the inner peripheral surface of flange handle part main body, thereby flange handle part is installed on to nut swivel bearing portion, on the contrary, make the 2nd engagement pawl overcome the elastic force of the 2nd elastic component and rotate to the 4th direction, the 2nd engagement pawl is left from the 2nd week groove, thereby from nut swivel bearing portion dismounting flange handle part.
According to blade handler of the present invention, by using under the integrated state of flange handle part and nut swivel bearing portion, retention nut and flange, can prevent that nut and flange from coming off, and can load and unload nut and flange with respect to the installation position, top of main shaft simultaneously simultaneously.
In addition, by parting flange handle part and nut swivel bearing portion and use respectively, can load and unload respectively nut and flange with respect to the installation position, top of main shaft.
Thus, can be adapted to the nut that carries out with respect to the installation position, top of main shaft and the multiple handling operation (operation) of flange.
Preferably, as its flange, control parts, in the week of flange handle part main body, upwards uniformly-spaced to dispose three flanges, control parts.
In addition, preferably at the outer peripheral face of nut swivel bearing portion and control member, be provided with slip-proofing device.In this situation, can be efficiently and utilize reliably flange handle part to control the operation of blade and utilize nut swivel bearing portion to make the operation of nut rotation, thus can improve the security of operation.
And, preferably on flange handle part, be provided with for limiting the stop part of the slip of control member.
And preferably this stop part and the 1st engagement pawl form as one.
Accompanying drawing explanation
Fig. 1 is the whole stereogram that roughly represents the blade handler of embodiments of the invention 1.
Fig. 2 means the figure of the position relationship between the blade handler shown in Fig. 1 and the main shaft of cutting apparatus in same embodiment, (a) of Fig. 2 is the longitudinal section of 1st state corresponding with hatching IIa-IIa shown in Fig. 1 blade handler and the side view that represents main shaft, and (b) of Fig. 2 is the longitudinal section of 2nd state corresponding with hatching IIa-IIa shown in Fig. 1 blade handler and the side view that represents main shaft.
Fig. 3 is for the figure in the operation of same embodiment blade handler is described, (a) of Fig. 3 mean make flange handle part from nut swivel bearing part from the longitudinal section of state, (b) of Fig. 3 is the longitudinal section of flange handle part.
Fig. 4 is for the figure in the operation of same embodiment blade handler is described, (a) of Fig. 4 is the 1st longitudinal section of nut swivel bearing portion, and (b) of Fig. 4 is the 2nd longitudinal section of nut swivel bearing portion.
Fig. 5 is for the figure in the operation of same embodiment blade handler is described, (a) of Fig. 5 means the longitudinal section of the state before the installation position, top that makes blade handler and main shaft is chimeric, and (b) of Fig. 5 means the longitudinal section of the state after making the installation position, top of blade handler and main shaft chimeric.
Fig. 6 is for the figure in the operation of same embodiment blade handler is described, also means the longitudinal section of the engaging mode between flange handle part and nut swivel bearing portion.
Fig. 7 is for the figure in the operation of same embodiment blade handler is described, also means the longitudinal section of dismantling flange and nut from the installation position, top of main shaft and keeping their state.
Fig. 8 is the whole stereogram that roughly represents the blade handler of embodiments of the invention 2.
Fig. 9 roughly represents the flange handle part of blade handler of embodiments of the invention 3 and the longitudinal section of the major part of nut swivel bearing portion.
The specific embodiment
The blade handler of embodiments of the invention 1 is described with reference to Fig. 1～Fig. 5 below.
(embodiment 1)
Fig. 1 represents the blade handler of embodiment 1.
This blade handler is used in the situation of the blade (rotary cutting sharpener) of handling cutting apparatus, and this cutting apparatus is divided into least unit (chip) for cutting off the assigned position of the machined objects such as semiconductor crystal wafer by semiconductor crystal wafer.More particularly, blade handler is used in the situation of the nut of blade, the flange that clamps this blade and the fixed blade etc. that load and unload cutting apparatus.
Blade handler comprises for loading and unloading the flange handle part 1 of flange and for loading and unloading the nut swivel bearing portion 2 of nut.
In addition, in this blade handler, owing to forming the flange that comprises required lower limit and control the simple structure of function, therefore represented to be provided with the situation that 3 flanges are controlled parts, also can corresponding to the structure of flange, weight, other require item and flange handle part main body circumferentially on the flange that equally spaced arranges more than 4 or 4 control parts.
As shown in Fig. 2 (a) or Fig. 2 (b), 3 flanges control parts 11 respectively at one end side (towards the left side of paper) there is the engagement pawl 11b that utilizes pivot 11a to be supported on flange handle part main body 10.It is fulcrum that engagement pawl 11b be take the part of pivot suspension (11a), installing along the mode of the radial rotating of flange handle part 1.That is, engagement pawl 11b is installing to the direction in the axle center away from flange handle part 1 and the mode of rotating near the direction in axle center.In addition, engagement pawl 11b by the elastic force of the elastic component 11c such as spring to a side (away from the direction in the axle center) application of force contrary with flange handle part main body 10 axle center.
As shown in Fig. 2 (a), thereby utilization makes control member 12 to axial (towards the right of paper) of flange handle part main body 10 slides and make 3 engagement pawl 11b overcome the operation (closed procedure) that the elastic force of elastic component 11c is rotated to the center axis (near the direction in axle center) of flange handle part main body 10, makes engagement pawl 11b become closed state.Utilize this operation that 3 engagement pawl 11b are rotated to the direction near flange handle part main body 10 axle center, can make each engagement pawl 11b engage with all groove D 1 that are formed on the outer peripheral face of flange D.
On the other hand, as shown in Fig. 2 (b), utilization make control member 12 to flange handle part main body 10 axially (towards the left of paper to) slide and operation (opening operation) that 3 engagement pawl 11b are rotated to a side (away from the direction in axle center) contrary with flange handle part main body 10 axle center under the effect of the elastic force of elastic component 11c, make engagement pawl 11b become the state of opening.Utilize this operation that 3 engagement pawl 11b are rotated to the direction away from flange handle part main body 10 axle center, can make each engagement pawl 11b depart from from the state engaging with all groove D1 of flange D.
Nut swivel bearing portion 2 comprises: the nut swivel bearing portion main body 20 of sleeve-shaped; Flange handle part handling member 21, it is for installing, dismantle flange handle part 1 with respect to nut swivel bearing portion main body 20; And nut rotating member 22, it is for making nut rotation.
As shown in Fig. 2 (a) or Fig. 2 (b), flange handle part handling member 21 at one end side (towards the right side of paper) has the engagement pawl 21b that utilizes pivot 21a to be supported on nut swivel bearing portion 2.It is fulcrum that engagement pawl 21b be take the part of pivot suspension (21a), installing along the mode of the radial rotating of nut swivel bearing portion main body 20.That is, engagement pawl 21b is installing to the direction away from the main body 20 of nut swivel bearing portion axle center and the mode of rotating near the direction in axle center.In addition, engagement pawl 21b by the elastic force of the elastic component 21c such as spring to a side (away from the direction in the axle center) application of force contrary with the main body 20 of nut swivel bearing portion axle center.
As shown in Fig. 2 (a) or Fig. 2 (b), by the engagement pawl 21b that makes to be biased, engage with all groove 10a that are formed on the inner peripheral surface of flange handle part main body 10, and being become, flange handle part 1 is arranged on the state in nut swivel bearing portion 2.
In addition, now, although flange handle part 1 in being arranged on the state in nut swivel bearing portion 2, engagement pawl 21b and all groove 10a are in can be to the circumferential counterrotating state of all groove 10a.
As shown in Fig. 3 (a), utilization makes engagement pawl 21b overcome the elastic force of elastic component 21c and the operation of rotating to the center axis of nut swivel bearing portion main body 20 (near the direction in axle center), the state can engagement release pawl 21b engaging with all groove 10a of flange handle part main body.Under this state, by making flange handle part 1 and nut swivel bearing portion 2 relative sliding vertically, simply parting flange handle part 1 and nut swivel bearing portion 2.
On the nut swivel bearing portion main body end faces relative with the installation position, top of main shaft B cutting apparatus 20 sides (end face on Tu Zhongwei right side), be formed with for the recess 21d that is arranged on the embed wholly of the nut E locating installation position, top.
In this recess 21d, be formed with two nut rotating members 22, these two nut rotating members 22 run through the connecting hole being arranged on nut E described later.
In addition, in this blade handler, represented with required being simply configured to object of lower limit and with uniformly-spaced along the situation that circumferentially disposes two nut rotating members 22 in recess 21d, but also can be according to being formed at the structure of the connecting hole of nut E, the quantity of connecting hole, other require shape, quantity that item changes nut rotating member 22 etc. to be configured.
In addition, in this blade handler, represented nut rotating member 22 to be fixed on the situation in recess 21d, but also can change with can be corresponding to the thickness of nut E, the shape of connecting hole etc.For example, also can use in the lump elastic telescopic parts (not shown), these elastic telescopic parts utilize the elastic force of the elastic components such as spring to make nut rotating member to axially outstanding, and adjust the situation that this outstanding nut rotating member is advanced and retreat vertically.
In addition,, as shown in Fig. 4 (b), in this blade handler, at the axle center part of nut swivel bearing portion main body 20, be provided with through hole 24.Through hole 24 forms can be for described later for preventing that the instruments such as torque wrench 3 of main shaft rotation from running through such size.
On main shaft B, be formed with for preventing with main shaft rotation the slot B1 that the instrument 3 of use engages.In addition, as shown in Figure 6, in nut E, be formed with the connecting hole E1 running through for nut rotating member 22.
In addition, as cutting apparatus, in the situation that not carrying out machining operation, in the situation that be provided with for stopping automatically or manually the cutting apparatus of (not shown) such as locking mechanisms of the rotation of main shaft B, when carrying out the charge and discharge operations of nut E, without use, be used for preventing the instrument 3 of main shaft rotation.In this case, the through hole 24 running through for instrument 3 not necessarily must be set in blade handler.
Then,, with reference to Fig. 1～Fig. 7, installation position, the top handling blade handling nut of use and the process of flange with respect to the main shaft B of cutting apparatus are described.
Dismantle at the same time under the blade handling nut E of use and the situation of flange D at the place, installation position, top that is installed in main shaft B, as long as proceed as follows.
First, shown in Fig. 5 (a), make control member 12 to axle (axle center) direction of flange handle part main body 10 (towards the left of paper to) slide, each engagement pawl 11b outward direction (away from the direction in axle center) that utilizes the elastic force of each elastic component 11c to make flange control parts 11 rotates, thus the state (opening operation of engagement pawl 11b) that each engagement pawl 11b is become open.
Then, as shown in Fig. 5 (b), under the state of opening at each engagement pawl 11b, the end face (end face towards the right side of paper) of blade handler is engaged with the installation position, top of main shaft B, and each engagement pawl 11b is engaged with all groove D1 that are formed on the outer peripheral face of flange D, and the integral body that is arranged on the nut E on the installation position, top of main shaft is fitted in the recess 21d on the end face (end face towards the right side of paper) of nut swivel bearing portion main body 20 sides that are arranged on this blade handler.
In the situation that the integral body of nut E is fitted in recess 21d, nut swivel bearing portion main body 20 is rotated in a circumferential direction on one side, Yi Bian two nut rotating members 22 that make to be as shown in Figure 6 arranged in recess 21d run through in the connecting hole E1 being arranged on nut E.
In addition, as shown in Fig. 5 (b) and Fig. 6, make after nut rotating member 22 runs through connecting hole E1, control member 12 is slided to axle (axle center) direction (towards the right of paper) of flange handle part main body 10, the elastic force inward direction (near the direction in axle center) that each engagement pawl 11b that makes flange control parts 11 overcomes each elastic component 11c rotates, thereby makes each engagement pawl 11b become closed state (closed procedure of engagement pawl 11b).Thus, can make each engagement pawl 11b engaging with all groove D1 of the outer peripheral face of flange D be fastened on reliably in this week groove, thereby can utilize each engagement pawl 11b to control reliably flange D.
Then, by making 20 rotations of nut swivel bearing portion main body loosen nut E, can be from the installation position, top of main shaft B dismounting nut E.
Now, the engagement pawl 21b of flange handle part handling member 21 is sticked in all groove 10a of flange handle part main body 10.Therefore, although nut swivel bearing portion main body 20 (nut swivel bearing portion 2) and flange handle part main body 10 (flange handle part 1) one are also side by side to moving axially, but because each engagement pawl 21b can be to rotating in a circumferential direction in all groove 10a, so nut swivel bearing portion main body 20 and flange handle part main body 10 can be relatively to rotating in a circumferential direction.
In addition, now, nut E remains in the recess 21d of nut swivel bearing portion main body 20 to be penetrated with the state of nut rotating member 22 in connecting hole E1.
Above-mentioned in the situation that, so long as make main shaft B can not rotate the state of such locking, if make nut swivel bearing portion main body 20 rotation, loosen nut E, nut swivel bearing portion main body 20 and nut E will to axially (towards the left of paper to) mobile.
Thus, also to identical direction, move with nut swivel bearing portion main body 20 integrated flange handle part main bodys 10 simultaneously.Its result, the flange D that also can side by side be controlled by each engagement pawl 11b from the dismounting of the installation position, top of main shaft B with nut E.
In addition, as shown in Figure 7, the flange D dismantling from the installation position, top of main shaft B and nut E are in being held in reliably the state of blade handler.Thus, can prevent that flange D, nut E from coming off from installation position, top, the blade handler of main shaft B.
In these cases, in the situation that state not locked in main shaft B and that can rotate, because main shaft B when making 20 rotation of nut swivel bearing portion main body also rotates together by nut E, therefore cannot be from the installation position, top of main shaft B dismounting nut E.
In this case, as shown in Fig. 4 (b), as long as make the instruments such as torque wrench 3 run through the through hole 24 of nut swivel bearing portion main body 20, and the top ends of instrument 3 and the slot B1 of main shaft are engaged, thereby stop the rotation of main shaft.Under this state, by making 20 rotations of nut swivel bearing portion main body, can be from installation position, top dismounting nut E.
Then, the situation that flange D and nut E is installed on respectively to the installation position, top of main shaft B is described.
For example,, to new blade being installed in the installation position, top of having dismantled the main shaft B of blade and utilizing flange and the situation of position that nut is fixed on this new blade the regulation of installation position, top describes as the situation of allowing blade replacement more.
In addition, now, the nut E of installation position, the top dismounting from main shaft B is remained in the recess 21d of nut swivel bearing portion 2, in addition, at flange, control in each engagement pawl 11b of parts 11 the flange D holding after the dismounting of installation position, top.
As shown in Figure 7, nut E is held in the recess 21d of nut swivel bearing portion 2, and in addition, in each engagement pawl 11b of flange handle part 1, handle is held flange D.In addition, now, because flange handle part 1 is integrated with nut swivel bearing portion 2, therefore become the state that flange D and nut E are held in blade handler.
Therefore,, as shown in Fig. 3 (a), by operation flange handle part, load and unload member 21 and remove the state that each engagement pawl 21b engages with all groove 10a of flange handle part main body, thereby making flange handle part 1 separated with nut swivel bearing portion 2.
In addition, now, in separation flange handle part 1 in holding flange D, in addition, in nut swivel bearing portion 2 holding nut E.
Compare with the unitary construction of blade handler before, because the flange handle part 1 after separation becomes simpler tectosome, therefore can make its processing become easily, and raising operability.
Then, make the flange handle part 1 after separation chimeric with the installation position, top of main shaft B, and flange D is installed on to the flange installation site of installation position, top.Then, make control member 12 to axle (axle center) direction (towards the left of paper to) slide, each engagement pawl 11b outward direction (away from the direction in axle center) is rotated, thereby open each engagement pawl 11b, remove the state that each engagement pawl 11b engages with all groove D 1 that are formed on the outer peripheral face of flange D.Afterwards, flange handle part 1 is retreated from installation position, top.
In addition, compare with the unitary construction of blade handler before, because the nut swivel bearing portion 2 after separation becomes simpler tectosome, therefore can make its processing become easily, and raising operability.
Nut swivel bearing portion 2 after separation is engaged with the installation position, top of main shaft B, and the nut E in recess 21d is installed on to the nut installation site (threaded portion) of installation position, top.Then, by nut swivel bearing portion 2 is rotated and clamp nut E, and new blade (C) is fixed on to the position of the regulation of installation position, top.Afterwards, nut swivel bearing portion 2 is retreated from installation position, top.
In addition, above-mentioned in the situation that, in the situation that state not locked in main shaft B and that can rotate need to prevent also rotation together of main shaft B when utilizing nut swivel bearing portion 2 to make nut E rotation.
Therefore,, as shown in Fig. 4 (b), as long as instrument 3 is run through to the through hole 24 of nut swivel bearing portion 2, and the top ends of instrument 3 and the slot B1 of main shaft B are engaged, thereby stop the rotation of main shaft.Under this state, by making 2 rotations of nut swivel bearing portion, nut E can be installed on to installation position, top.
According to this embodiment, when the nut E of installation position, the top handling blade handling use of the main shaft B with respect to cutting apparatus and flange D, retention nut and flange carry out handling operation at the same time or separately.
Thus, can select best process according to the multiple handling operation requiring in the machining operation at cutting apparatus.
In addition,, due to retention nut E and flange D at the same time or separately, therefore can eliminate when the charge and discharge operations of blade handler the problems such as nut, flange come off by mistake.
The blade handler of embodiments of the invention 2 then, is described with reference to Fig. 8.
(embodiment 2)
In this embodiment 2, can be efficiently while expressing the multiple handling operation (charge and discharge operations) of carrying out nut and flange in the installation position, top with respect to main shaft and reliably carry out the blade handler of the slide of control member 12 and the rotary manipulation of nut swivel bearing portion main body 20.
In addition, in the blade handler of embodiment 2, as described below with the difference of the blade handler of embodiment 1, because the part except difference is identical with the structure of the blade handler of embodiment 1, therefore identical member is marked identical Reference numeral and no longer repeats its explanation.
As shown in Figure 8, the blade handler of embodiment 2 is characterised in that the outer peripheral face of controlling the control member 12 of parts 11 at flange arranges slip-proofing device 12a and at the outer peripheral face of nut swivel bearing portion main body 20, slip-proofing device 20a is set.Form jog, groove or matsurface etc. as slip-proofing device 12a, 20a.
In order more efficiently and reliably to bring into play control member 12 to axial slip effect, preferably the outer peripheral face along control member 12 forms many all grooves as slip-proofing device 12a.
In addition, in order more efficiently and reliably to bring into play nut swivel bearing portion main body 20 to the circumferentially turning effort of (direction of rotation), preferably along axially forming many grooves as slip-proofing device 20a on the outer peripheral face of nut swivel bearing portion main body 20.
According to the blade handler of the above embodiments 2, can more efficiently and carry out reliably the slide of control member 12 and the rotary manipulation of nut swivel bearing portion main body 20.
Thus, can with respect to the installation position, top of main shaft, carry out aptly the multiple handling operation of nut and flange, in addition, can assist aptly this multiple handling operation.
The blade handler of embodiments of the invention 3 then, is described with reference to Fig. 9.
(embodiment 3)
In this embodiment 3, express in the installation position, top with respect to main shaft, carry out in the multiple handling operation of nut and flange, particularly can prevent during the handling operation of flange control member 12 from situations such as flange handle part main body 10 come off in the blade handler of possible trouble.
In addition, in the blade handler of embodiment 3, as described below with the difference of the blade handler of embodiment 1 or embodiment 2, because the part except difference is identical with the structure of the blade handler of embodiment 1 or embodiment 2, therefore identical member is marked identical Reference numeral and no longer repeats its explanation.
As shown in Figure 9, the blade handler of embodiment 3 is characterised in that and on flange handle part 1, is provided with for limiting the stop part 11d of the slip of control member 12.
In the blade handler shown in Fig. 9, the engagement pawl 11b end (towards the right part of paper) of controlling parts 11 at flange is provided with for limiting the stop part 11d of overshooting shape of the slip of control member 12.
The advantage of this stop part 11d is, without adopting special stop mechanism, when shaping engagement pawl 11b, can form with engagement pawl 11b.
On the other hand, also can form this stop part at the outer peripheral face of flange handle part main body 10 end (towards paper right part).
According to the blade handler of the above embodiments 3, when utilizing engagement pawl 11b to control flange D, can prevent such as make control member 12 control that parts 11 (flange handle part main body 10) depart from and each engagement pawl 11b outward direction (away from the direction in axle center) thereby rotate causes flange D to depart from and the situation such as fall in possible trouble from each engagement pawl 11b from flange due to job error.
Although explain and represented the present invention, this is illustration and non-limiting, should clearly be interpreted as that protection scope of the present invention can make an explanation according to appending claims.
description of reference numerals
B, main shaft; B1, slot; C, blade; D, flange; D1, all grooves; E, nut; E1, connecting hole; 1, flange handle part; 2, nut swivel bearing portion; 3, instrument; 10, flange handle part main body; 10a, all grooves; 11, flange is controlled parts; 11a, pivot; 11b, engagement pawl; 11c, elastic component; 11d, stop part; 12, control member; 12a, slip-proofing device; 20, nut swivel bearing portion main body; 20a, slip-proofing device; 21, flange handle part handling member; 21a, pivot; 21b, engagement pawl; 21c, elastic component; 21d, recess; 22, nut rotating member; 24, through hole.
Claims (5)
1. a blade handler, it is for the blade with respect to cutting apparatus is installed, dismounting of cutting is used, and this cutting apparatus is for machining machined object, and above-mentioned blade handler comprises:
Flange handle part, it is for carrying out the handling of flange, and this flange is for being installed to blade the blade installation position of above-mentioned cutting apparatus; And
Nut swivel bearing portion, it is for carrying out the handling of nut, and this nut is for being installed to above-mentioned blade installation position by blade;
Above-mentioned flange handle part comprises:
The flange handle part main body of sleeve-shaped;
Flange is controlled parts, and it is arranged at the circumferential of above-mentioned flange handle part main body; And
Control member, it is arranged at the outer peripheral face of above-mentioned flange handle part main body, and controls parts for operating above-mentioned flange;
Above-mentioned flange is controlled parts and is comprised:
The 1st engagement pawl, it can be centered by this flange of pivot suspension be controlled distolateral a 1st pivot suspension point of parts, to the 1st direction in the 1st axle center away from above-mentioned flange handle part main body and rotate near the 2nd direction in above-mentioned the 1st axle center; And
The 1st elastic component, its for to above-mentioned the 1st engagement pawl to above-mentioned the 1st direction application of force;
Above-mentioned flange is controlled parts and is had following function: make aforesaid operations member endwisely slipping and making above-mentioned the 1st engagement pawl overcome the elastic force of above-mentioned the 1st elastic component and rotate to above-mentioned the 2nd direction to above-mentioned flange handle part main body, thereby above-mentioned the 1st engagement pawl is engaged with the 1st week groove that is formed at above-mentioned blade installation position, on the contrary, utilize the elastic force of above-mentioned the 1st elastic component that above-mentioned the 1st engagement pawl is rotated to above-mentioned the 1st direction, thereby above-mentioned the 1st engagement pawl is left from above-mentioned the 1st week groove
Above-mentioned nut swivel bearing portion comprises:
Nut swivel bearing portion main body;
Flange handle part handling member, it is arranged at above-mentioned nut swivel bearing portion, and for installing, dismantle above-mentioned flange handle part with respect to above-mentioned nut swivel bearing portion; And
Nut rotating member, it is arranged at above-mentioned nut swivel bearing portion main body;
Above-mentioned flange handle part handling member comprises:
The 2nd engagement pawl, it can be centered by one of this flange handle part of pivot suspension handling member distolateral the 2nd pivot suspension point, to the 3rd direction in the 2nd axle center away from above-mentioned nut swivel bearing portion main body and near the 4th direction rotation in above-mentioned the 2nd axle center; And
The 2nd elastic component, its for to above-mentioned the 2nd engagement pawl to above-mentioned the 3rd direction application of force;
Above-mentioned flange handle part handling member has following function: utilize the elastic force of above-mentioned the 2nd elastic component that above-mentioned the 2nd engagement pawl is rotated to above-mentioned the 3rd direction, above-mentioned the 2nd engagement pawl is engaged with the 2nd week groove that is formed on the inner peripheral surface of above-mentioned flange handle part main body, thereby above-mentioned flange handle part is installed on to above-mentioned nut swivel bearing portion, on the contrary, make above-mentioned the 2nd engagement pawl overcome the elastic force of above-mentioned the 2nd elastic component and rotate to above-mentioned the 4th direction, above-mentioned the 2nd engagement pawl is left from above-mentioned the 2nd week groove, thereby dismantle above-mentioned flange handle part from above-mentioned nut swivel bearing portion.
2. blade handler according to claim 1, wherein,
As above-mentioned flange, control parts, in the week of above-mentioned flange handle part main body, upwards uniformly-spaced to dispose three flanges, control parts.
3. blade handler according to claim 1, wherein,
Outer peripheral face at above-mentioned nut swivel bearing portion and aforesaid operations member is provided with slip-proofing device.
4. blade handler according to claim 1, wherein,
On above-mentioned flange handle part, be provided with for limiting the stop part of the slip of aforesaid operations member.
5. blade handler according to claim 4, wherein,
Above-mentioned stop part and above-mentioned the 1st engagement pawl form as one.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010285401A JP5216075B2 (en) | 2010-12-22 | 2010-12-22 | Blade attachment / detachment device |
| JP2010-285401 | 2010-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102554666A CN102554666A (en) | 2012-07-11 |
| CN102554666B true CN102554666B (en) | 2014-01-15 |
Family
ID=46401989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110445508.9A Active CN102554666B (en) | 2010-12-22 | 2011-12-22 | Blade attached and removed device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5216075B2 (en) |
| KR (1) | KR101285962B1 (en) |
| CN (1) | CN102554666B (en) |
| TW (1) | TWI444243B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5723837B2 (en) * | 2012-07-18 | 2015-05-27 | Ｔｏｗａ株式会社 | Blade attachment / detachment device |
| JP6189135B2 (en) * | 2013-08-19 | 2017-08-30 | 株式会社ディスコ | Blade remover and blade case |
| JP2015085466A (en) * | 2013-10-31 | 2015-05-07 | 株式会社ディスコ | Flange mechanism |
| JP6355441B2 (en) * | 2014-06-09 | 2018-07-11 | 株式会社ディスコ | Hub blade jig and hub blade mounting method |
| CN104227558B (en) * | 2014-09-30 | 2016-08-24 | 常州强德电机有限公司 | Polisher and grinding head Quick-disassembling mechanism and using method thereof |
| CN105798684A (en) * | 2014-12-29 | 2016-07-27 | 山东普鲁特机床有限公司 | Device for automatically exchanging milling heads |
| JP6312327B2 (en) * | 2015-04-08 | 2018-04-18 | 三菱日立パワーシステムズ株式会社 | Support method, processing method, and apparatus for performing these methods |
| TWI627042B (en) * | 2017-01-19 | 2018-06-21 | All Ring Tech Co Ltd | Wafer cutting device |
| JP6560714B2 (en) * | 2017-06-26 | 2019-08-14 | Ｔｏｗａ株式会社 | Blade replacement mechanism, cutting device, and blade replacement method |
| JP7126749B2 (en) * | 2018-03-19 | 2022-08-29 | 株式会社ディスコ | cutting equipment |
| JP7229093B2 (en) * | 2019-05-13 | 2023-02-27 | 株式会社ディスコ | Blade attachment/detachment auxiliary device |
| JP7330914B2 (en) * | 2020-02-13 | 2023-08-22 | 株式会社マキタ | vibration tool |
| CN117283350A (en) * | 2023-11-10 | 2023-12-26 | 响水县永恒传动件制造有限公司 | Bearing seat machining and milling device and application method thereof |
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- 2011-12-14 TW TW100146112A patent/TWI444243B/en active
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| US3842477A (en) * | 1973-08-27 | 1974-10-22 | Gleason Works | Cutter blade changing apparatus |
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| CN1550296A (en) * | 2003-05-15 | 2004-12-01 | 罗伯特・博施有限公司 | Hand tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5216075B2 (en) | 2013-06-19 |
| TW201236806A (en) | 2012-09-16 |
| KR20120071325A (en) | 2012-07-02 |
| KR101285962B1 (en) | 2013-07-12 |
| CN102554666A (en) | 2012-07-11 |
| JP2012130991A (en) | 2012-07-12 |
| TWI444243B (en) | 2014-07-11 |
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