CN102545750B - Control method and control device of stepping motor, matcher and plasma processing device - Google Patents
Control method and control device of stepping motor, matcher and plasma processing device Download PDFInfo
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Abstract
The invention provides a control method and a control device of a stepping motor, a matcher and a plasma processing device. The control method includes: acquiring the algorithm rotation direction of a current control period of the stepping motor; acquiring preset control period dimensions and the algorithm rotation direction of a historical control period based on the preset control period dimensions; and acquiring the actual rotation direction of the stepping motor according to the algorithm rotation direction of the current control period, the algorithm rotation direction of the historical control period and the preset control period dimensions, and adopting the actual rotation direction to control the stepping motor to rotate. The control method can reduce forward rotation and reverse rotation switching times of the stepping motor, accordingly reduces phenomena of step throw and step out of the stepping motor, and service life of the stepping motor is prolonged.
Description
Technical field
The invention belongs to plasma processing device field, relate to the adaptation for the nonlinear load impedance of plasma chamber is mated mutually with the output impedance of radio-frequency power supply, the plasma processing device that is specifically related to a kind of control method of stepping motor and device, adaptation and comprises this adaptation.
Background technology
Plasma is ionized into ion and free electron by material atom and forms, and presents the labile state highly exciting, and has good conductivity, can utilize magnetic field catch, mobile or accelerate.Therefore, plasma is widely used in the processing technologys such as etching, deposition, welding and spraying.
RF (radio frequency) thus plasma producing apparatus is a kind ofly to provide RF power to make gas in chamber that the device of plasma occur to ionize and produce by radio-frequency power supply to plasma chamber.Utilizing RF plasma producing apparatus to carry out in process that the processing such as etching processes, due to the constant output impedance of RF plasma producing apparatus and the nonlinear load impedance of plasma process chamber unequal, therefore there is serious impedance mismatching between RF plasma producing apparatus and plasma process chamber, make the larger reflection power of existence on RF transmission line, thereby the power that causes RF plasma producing apparatus to produce cannot all flow to plasma process chamber.For addressing this problem, must between RF plasma producing apparatus and plasma chamber, insert impedance matching box.
Fig. 1 is the schematic diagram of impedance matching box.Refer to Fig. 1, impedance matching box comprises transducer, controller and actuator, and described actuator comprises the variable impedance element in matching network and changes the drive unit of its impedance.Wherein, transducer detects the relevant parameters such as voltage on RF transmission line, electric current, forward power, backward power, to provide match control algorithm required input variable; Controller is realized match control algorithm according to these input variables, and provides the adjustment amount corresponding to actuator; The adjustment amount that drive unit provides according to controller changes the resistance value of variable impedance element, to reduce the reflection power on radio-frequency transmission line, thereby the input impedance that makes matching network equals the constant output impedance of RF plasma producing apparatus, and the two reaches coupling.In the time of perfect match state, the reflection power on RF transmission line is that the power that zero, RF plasma producing apparatus produces can all flow to plasma process chamber.
In actual applications, drive unit in actuator often adopts stepping motor, controller provides positive rotaring signal (CW) or reverse signal (CCW) (hereinafter to be referred as direction signal) accordingly as adjustment amount, and stepping motor is adjusted the resistance value of variable impedance element according to the clock signal of this direction signal and interior setting thereof.The specific works mode of stepping motor is in table 1, and wherein, control cycle m represents m control cycle.In control system signal one hurdle, "+" represents that it is high level that stepping motor clock signal (CLK) has pulse and direction signal (CW/CCW) corresponding to rising edge of a pulse, "-" represents that it is low level that stepping motor clock signal (CLK) has pulse and direction signal (CW/CCW) corresponding to rising edge of a pulse, and " 0 " represents that stepping motor clock signal (CLK) does not have pulse.In motor action one hurdle, "+1 " represents stepping motor forward 1 step, and " 1 " represents stepping motor 1 step of reversing, and " 0 " represents that stepping motor is failure to actuate.
Table 1 is the working method of stepping motor
| (control cycle m) for control system signal | Motor action |
| + | +1 |
| - | -1 |
| 0 | 0 |
Fig. 2 is the timing diagram of stepping motor, wherein, the fixed frequency of clock signal (CLK) for setting, direction signal (CW/CCW) carrys out self-controller.Refer to Fig. 2, stepping motor moves according to direction signal (CW/CCW) at the rising edge of clock signal (CLK), when clock signal (CLK) is that rising edge and direction signal (CW/CCW) are during for high level, present clock period stepping motor forward one step, as: t1, t3, the t5 moment; When clock signal (CLK) is rising edge and direction signal (CW/CCW) during for low level, the present clock period stepping motor step of reversing, as t2, t4, t6 moment; When without clock signal (CLK), no matter direction signal (CW/CCW) is high level or low level, and stepping motor is all failure to actuate, as t7, t8 moment.
As from the foregoing, stepping motor is to adjust according to the actual act direction signal of current acquisition.But in actual process process, the indoor nonlinear load of plasma chamber is very unstable, the actual act direction signal that utilizes match control algorithm to obtain come control step motor often cause stepping motor continually just/reversion switches, as t in Fig. 2
2-t
6during this time.And, there is inertia inertia in the rotor of stepping motor and load, therefore, stepping motor is in operation and inevitably has following problem: the first, and when stepping motor switches in rotating, the inertia before need to overcoming, therefore, the normal step phenomenon of losing, especially in the case of the rotating torque of stepping motor is larger, loses that to walk phenomenon more serious.This will affect the matching precision of adaptation, thereby causes the reflection power on RF transmission line larger.The second, easily there is lag in stepping motor in the time of instantaneous starting, easily exceedes phenomenon in the time stopping, and in the time that the pulse frequency of stepping motor is larger, delays and exceed phenomenon and will cause the step-out phenomenon of stepping motor.The 3rd, stepping motor continually rotating switching reduces its useful life, and then affects the useful life of adaptation.In addition, due to the precision interference not high and external environment condition of transducer, often to make transducer be input to the input variable of controller inaccurate, cause controller to the direction signal making mistake, this will reduce the matching precision of adaptation, thereby causes the reflection power on RF transmission line larger.
Summary of the invention
The present invention is directed to the above-mentioned defect that in adaptation, stepping motor exists, a kind of control method and device of stepping motor is provided, this control method and device not only can reduce losing of stepping motor and walk and step-out phenomenon, and can extend the useful life of stepping motor.
In addition, the present invention also provides a kind of adaptation, and the matching precision of this adaptation is high, can reduce the reflection power on RF transmission line, and long service life.
In addition, the present invention also provides a kind of plasma processing device, and in this plasma processing device, the output impedance of RF power supply and the nonlinear impedance of plasma chamber can be mated well, and the long service life of process equipment.
Solving the problems of the technologies described above the control method that adopted technical scheme is to provide a kind of stepping motor comprises:
Obtain the algorithm direction of rotation of the current control cycle of stepping motor;
Obtain the algorithm direction of rotation of default control cycle dimension and the historical control cycle based on this default control cycle dimension;
And according to the algorithm direction of rotation of the algorithm direction of rotation of described current control cycle, historical control cycle and default control cycle dimension, obtain the actual direction of rotation of described stepping motor, and be rotated with stepping motor described in this actual direction of rotation control.
Wherein, the actual direction of rotation of obtaining stepping motor described in comprises:
Statistics is corresponding to positive rotation number of times and the despining number of times of described default control cycle dimension;
Obtain the difference of described positive rotation number of times and described despining number of times;
Analyze described difference, if this difference is not less than zero, judge whether this difference is greater than zero, if, generate the signal that the described stepping motor of control carries out forward, if not, judge whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty, if and this difference equals zero or the algorithm direction of rotation of current control cycle is sky, generates and controls the signal that described stepping motor stops the rotation; If this difference is less than zero, generates and control the signal that described stepping motor reverses.
Wherein, described statistics, corresponding to positive rotation number of times and the despining number of times of described default control cycle dimension, comprising:
Obtain positive rotation number of times and despining number of times in the algorithm direction of rotation of described historical control cycle;
The algorithm direction of rotation of determining described current control cycle is direct rotational direction, makes positive rotation number of times add one, with the positive rotation number of times corresponding to described default control cycle dimension; Or the algorithm direction of rotation of determining described current control cycle is despining direction, make despining number of times add one, with the despining number of times corresponding to described default control cycle dimension.
Wherein, described control method also comprises;
Control described stepping motor with [n/2] × V
brotating speed be rotated, wherein, n represents default control cycle dimension, and n>=2; V
brepresent the reference speed of described motor; [n/2] integer for rounding downwards.
Wherein, described control method also comprises;
Control described stepping motor and enter the | [2c-n]/2| gear, wherein, c represents the positive rotation number of times corresponding to described default control cycle dimension, (c-n) represents the despining number of times corresponding to described default control cycle dimension; And can control respectively described stepping motor and enter 0～[n/2]+1 gear.
The present invention also provides a kind of control device of stepping motor, comprising:
The first acquisition module, for obtaining the algorithm direction of rotation of current control cycle of stepping motor;
The second acquisition module, for obtaining the algorithm direction of rotation of default control cycle dimension and the historical control cycle based on this default control cycle dimension;
The 3rd acquisition module, and according to the algorithm direction of rotation of the algorithm direction of rotation of described current control cycle, historical control cycle and default control cycle dimension, obtain the actual direction of rotation of described stepping motor;
The first control module, is rotated for stepping motor described in described this actual direction of rotation control.
Wherein, described the 3rd acquisition module comprises:
Statistic unit, for adding up positive rotation number of times and the despining number of times corresponding to described default control cycle dimension;
Acquiring unit, for obtaining the difference of described positive rotation number of times and described despining number of times;
Analyze generation unit, be used for analyzing described difference, if this difference is not less than zero, judge whether this difference is greater than zero, if so, generate and control described stepping motor and carry out the signal of forward, if not, judge whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty, and if this difference equals zero or the algorithm direction of rotation of current control cycle is sky, and generate and control the signal that described stepping motor stops the rotation; If this difference is less than zero, generates and control the signal that described stepping motor reverses.
Wherein, described statistic unit comprises:
Obtain subelement, for obtaining positive rotation number of times and the despining number of times of algorithm direction of rotation of described historical control cycle;
Adding a subelement, is direct rotational direction for the algorithm direction of rotation of determining described current control cycle, makes positive rotation number of times add one, with the positive rotation number of times corresponding to described default control cycle dimension; Or the algorithm direction of rotation of determining described current control cycle is despining direction, make despining number of times add one, with the despining number of times corresponding to described default control cycle dimension.
Wherein, the second control module, for controlling described stepping motor with [n/2] × V
brotating speed be rotated, wherein, n represents default control cycle dimension, and n>=2; V
brepresent the reference speed of described motor; [n/2] integer for rounding downwards.
Wherein, the 3rd control module, enters for controlling described stepping motor | [2c-n]/2| gear, wherein, c represents the positive rotation number of times corresponding to described default control cycle dimension, (c-n) represents the despining number of times corresponding to described default control cycle dimension; And can control respectively described stepping motor and enter 0～[n/2]+1 gear.
In addition, the present invention also provides a kind of adaptation, comprise transducer and actuator, and this actuator comprises variable resistor element and changes the drive unit of the impedance of described variable resistor element, also comprise control device provided by the invention, and this control device is connected respectively with drive unit with described transducer respectively.
In addition, the present invention also provides a kind of plasma processing device, comprise electrode radio-frequency power supply, electrode adaptation and plasma chamber, described electrode adaptation is arranged between described electrode radio-frequency power supply and described plasma chamber, mate for the output impedance of described electrode radio-frequency power supply and the input impedance of described plasma chamber are reached, described electrode adaptation adopts and the invention provides described adaptation.
Wherein, described electrode radio-frequency power supply comprises top electrode radio-frequency power supply and/or bottom electrode radio-frequency power supply, and corresponding described electrode adaptation comprises top electrode adaptation and bottom electrode adaptation.
The present invention has following beneficial effect:
The control method of stepping motor provided by the invention is to determine the actual direction of rotation of stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle, can proofread and correct the algorithm direction of rotation of current control cycle by the algorithm direction of rotation of historical control cycle like this, thereby improve the accuracy of actual direction of rotation, and then minimizing stepping motor forward and backward switching continually, this not only can reduce losing step and step-out phenomenon and the useful life that can improve stepping motor of stepping motor.Similarly, the control device of stepping motor provided by the invention is the actual direction of rotation of determining stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle, can proofread and correct the algorithm direction of rotation of current control cycle by the algorithm direction of rotation of historical control cycle like this, thereby improve the accuracy of actual direction of rotation, and then minimizing stepping motor forward and backward switching continually, this not only can reduce losing step and step-out phenomenon and the useful life that can improve stepping motor of stepping motor.
Adaptation provided by the invention, its control device is the actual direction of rotation of determining stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle, like this, even the algorithm direction of rotation of the current control cycle that must make mistake because of the precision of transducer and the interference of external environment condition, also can carry out error correction according to the algorithm direction of rotation of historical control cycle, thereby obtain actual direction of rotation accurately, can improve like this matching precision of adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply, and, can reduce adaptation switches frequently, thereby improve the useful life of adaptation.As one embodiment of the present of invention, actuator is stepping motor, the introducing of the algorithm direction of rotation of historical control cycle makes stepping motor between rotating and reverse, insert halted state, thereby can reduce losing of stepping motor walks and step-out phenomenon, and then the matching precision of raising adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply.
As another embodiment of the present invention, Execution driven unit increases gradually stepping motor or reduces gradually its rotating speed, can avoid losing of stepping motor to walk and step-out phenomenon, thereby further improve the matching precision of adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply.
Plasma processing device provided by the invention, adopt the control method of adaptation provided by the invention to control adaptation, or adopt adaptation provided by the invention to make the input impedance of matching network equal the constant output impedance of radio-frequency power supply, can improve the matching precision of adaptation, reduce the reflection power on RF transmission line, and can reduce adaptation and switch frequently, thereby the useful life of improving adaptation.
Brief description of the drawings
Fig. 1 is the schematic diagram of impedance matching box;
Fig. 2 is the timing diagram of stepping motor;
Fig. 3 is the flow chart of method for controlling stepping motor provided by the invention; And
Fig. 4 is the theory diagram of stepping motor control apparatus provided by the invention.
Embodiment
For making those skilled in the art understand better technical scheme of the present invention, control method, adaptation and plasma processing device below in conjunction with accompanying drawing to adaptation provided by the invention are described in detail.
The adaptation that the present embodiment provides comprises transducer, controller and actuator, transducer is for detection of the voltage on radio-frequency transmission line, electric current, forward power, backward power, the detected value that controller detects according to transducer obtains actual direction of rotation signal, actuator is implemented by stepping motor, and its actual direction of rotation signal obtaining according to controller is carried out matching operation.
Fig. 3 is the flow chart of the control method of stepping motor.Refer to Fig. 3, the control method of stepping motor comprises:
Step s1, obtains the algorithm direction of rotation of the current control cycle of stepping motor.
In this step, the controller that control step motor is rotated can obtain by existing certain special algorithm the algorithm direction of rotation of current control cycle, and the algorithm direction of rotation of current control cycle is specially: controller is wanted the direction that control step motor is rotated.But due to the impact of external interference factor, the algorithm direction of rotation of this current control cycle is likely wrong, therefore,, if controller is strictly rotated with the algorithm direction of rotation control step motor of this current control cycle, will inevitably produce misoperation to stepping motor.
Step s2, obtains the algorithm direction of rotation of default control cycle dimension and the historical control cycle based on this default control cycle dimension.
For preventing that controller is strictly rotated with the algorithm direction of rotation control step motor of current control cycle, and stepping motor is produced to misoperation; The present embodiment method, by setting default control cycle dimension n, is rotated the algorithm direction of rotation of the historical control cycle of control to stepping motor to introduce controller; Default control cycle dimension n represents that controller is rotated continuous n control cycle of control to stepping motor, it comprises 1 current control cycle and n-1 historical control cycle, can judge the rotation trend of controller wish control step motor in conjunction with n-1 the algorithm direction of rotation of historical control cycle and the algorithm direction of rotation of current control cycle thus, thereby can avoid misoperation and the losing of minimizing stepping motor of controller to stepping motor to walk and step-out phenomenon.
Step s3, according to the algorithm direction of rotation of the algorithm direction of rotation of described current control cycle, historical control cycle and default control cycle dimension, obtain the actual direction of rotation of described stepping motor, and be rotated with stepping motor described in this actual direction of rotation control.
In step s3, described in obtain stepping motor actual direction of rotation comprise:
Step s31, statistics is corresponding to positive rotation number of times and the despining number of times of described default control cycle dimension.
Add up all positive rotation number of times c and despining frequency n-c in the algorithm direction of rotation of continuous n control cycle of corresponding default control cycle dimension n, be specially:
Step s311, obtains positive rotation number of times and despining number of times in the algorithm direction of rotation of described historical control cycle.
Obtain positive rotation number of times and despining number of times in the algorithm direction of rotation of described historical control cycle.
Step s312, the algorithm direction of rotation of determining described current control cycle is direct rotational direction, makes the positive rotation number of times of described stepping motor add one, with the positive rotation number of times c corresponding to described default control cycle dimension; Or the algorithm direction of rotation of determining described current control cycle is despining direction, make the despining number of times of described stepping motor add one, with the despining frequency n-c corresponding to described default control cycle dimension.
If determine here, the algorithm direction of rotation of described current control cycle be sky, can be without implementation step s312 again, that is, and the positive rotation number of times in the algorithm direction of rotation of described historical control cycle and despining number of times; The algorithm direction of rotation of described current control cycle is that empty corresponding controller is wanted the operation that control step motor stops the rotation.
Step s32, obtains the difference of described positive rotation number of times and described despining number of times.
Obtain the difference of positive rotation number of times and described despining number of times by formula c-(n-c)=2c-n.
Step s33, analyzes described difference, if this difference is greater than zero, the described stepping motor of generation control carries out the signal of forward; If this difference is less than zero, generates and control the signal that described stepping motor reverses; If this difference equals zero, generate the signal of the actual direction of rotation that does not drive described stepping motor.
By analyzing described difference 2c-n, can generate control step motor the coherent signal that carries out actual rotation, and stepping motor can be rotated according to the coherent signal of this actual rotation; Particularly,
If first this difference 2c-n is not less than zero, judge whether this 2c-n is greater than zero, if, generate the signal that the described stepping motor of control carries out forward, if not, judge whether this 2c-n equals zero or whether the algorithm direction of rotation of current control cycle is empty, and if this 2c-n equals zero or the algorithm direction of rotation of current control cycle is sky, and generate and control the signal that described stepping motor stops the rotation; Moreover, if this 2c-n is less than zero, generates and control the signal that described stepping motor reverses.
Particularly, in the time of n=2, the actual direction of rotation of m control cycle of motor is affected by the algorithm direction of rotation of m and m-1 control cycle, wherein, the algorithm direction of rotation of m-1 control cycle is historical algorithm direction of rotation, so, the actual direction of rotation that step s3 obtains refers to table 2.
Table 2 is the corresponding relation of actual direction of rotation in the time that the actual direction of rotation of m control cycle is subject to affecting of 2 dimension control cycle dimensions and algorithm direction of rotation
In table 2, in algorithm direction of rotation hurdle, "+" represents that it is high level that stepping motor clock signal (CLK) has pulse and direction signal (CW/CCW) corresponding to rising edge of a pulse; "-" represents that it is low level that stepping motor clock signal (CLK) has pulse and direction signal (CW/CCW) corresponding to rising edge of a pulse; " 0 " represents that stepping motor clock signal (CLK) does not have pulse.In actual direction of rotation one hurdle, "+1 " represents stepping motor forward 1 step; " 1 " represents stepping motor 1 step of reversing; " 0 " represents that stepping motor does not rotate.
As shown in Table 2, in the time that the algorithm direction of rotation of m-1 the control cycle being calculated by match control algorithm and the algorithm direction of rotation of m control cycle are two contrary algorithm direction signals, as the 3rd walked to the 5th row in table 2, motor is failure to actuate.Being motor inserts a halted state rotating and reverse while switching, i.e. " 0 " state, and that can avoid like this stepping motor loses step phenomenon.
In actual mechanical process, if m < is n, now not enough n-1 of the algorithm direction of rotation of the historical control cycle before m control cycle, that is to say, now also not enough n of algorithm direction of rotation, so, in the time calculating the actual direction of rotation of m control cycle, the algorithm direction of rotation of the historical control cycle of the n-m before m control cycle can be defaulted as to 0, and then calculate the actual direction of rotation of m control cycle.
In actual moving process, the rotating speed of stepping motor can be controlled to [n/2] × V
b, wherein, n represents default control cycle dimension, and n>=2; V
brepresent the reference speed of described motor; [n/2] integer for rounding downwards.Accordingly, the rotating speed of stepping motor can be divided into | [2c-n]/2| gear, wherein, c represents the positive rotation number of times corresponding to described default control cycle dimension, (c-n) represents the despining number of times corresponding to described default control cycle dimension; And can control respectively described stepping motor and enter 0～[n/2]+1 gear.Like this, in the time that the load of stepping motor is larger, can makes to start frequency and be less than self-starting frequency by reducing toggle speed, thereby avoid stepping motor generation step-out.Here frequency when, the self-starting frequency of stepping motor is stepping motor generation step-out.In the time that the rotating speed of stepping motor is very fast, can reduce gradually rotating speed by changing the gear of stepping motor, thereby avoid overshoot phenomenon, thereby further improve the matching precision of adaptation, make the input impedance of matching network equal as much as possible the constant output impedance of radio-frequency power supply.
The control method of the present embodiment stepping motor is determined actual direction of rotation by the algorithm direction of rotation of current control cycle and the algorithm direction of rotation of historical control cycle, even the algorithm direction of rotation of the current control cycle that must make mistake because of the precision of transducer or the interference of external environment condition, also can carry out error correction to the algorithm of current control cycle according to the algorithm direction of rotation of historical control cycle, thereby improve the accuracy of actual direction of rotation, this not only can improve the matching precision of adaptation, reduces the reflection power on RF transmission line; And, can reduce stepping motor frequently just/reversion switches, thereby reduce the wearing and tearing of stepping motor, and then useful life of improving stepping motor.Simultaneously, the introducing of the algorithm direction of rotation of historical control cycle makes to insert halted state between rotating and reverse, thereby reducing losing of stepping motor walks and step-out phenomenon, and then the matching precision of raising adaptation, make the input impedance of matching network equal as much as possible the constant output impedance of radio-frequency power supply.
Fig. 4 is the theory diagram of the control device of stepping motor provided by the invention.Refer to Fig. 4, the control device of stepping motor comprises:
The first acquisition module 41, for obtaining the algorithm direction of rotation of current control cycle of stepping motor.
The controller that control step motor is rotated can obtain by existing certain special algorithm the algorithm direction of rotation of current control cycle, and the algorithm direction of rotation of current control cycle is specially: controller is wanted the direction that control step motor is rotated.But due to the impact of external interference factor, the algorithm direction of rotation of this current control cycle is likely wrong, therefore,, if controller is strictly rotated with the algorithm direction of rotation control step motor of this current control cycle, will inevitably produce misoperation to stepping motor.
The second acquisition module 42, for obtaining the algorithm direction of rotation of default control cycle dimension and the historical control cycle based on this default control cycle dimension.
For avoiding controller to be rotated with the algorithm direction of rotation control step motor of current control cycle, and stepping motor is produced to misoperation; The second acquisition module 42, by setting default control cycle dimension n, is rotated the algorithm direction of rotation of the historical control cycle of control to stepping motor to introduce controller; Default control cycle dimension n represents that controller is rotated continuous n control cycle of control to stepping motor, it comprises 1 current control cycle and n-1 historical control cycle, can judge the rotation trend of controller wish control step motor in conjunction with n-1 the algorithm direction of rotation of historical control cycle and the algorithm direction of rotation of current control cycle thus, thereby can avoid misoperation and the losing of minimizing stepping motor of controller to stepping motor to walk and step-out phenomenon.
The 3rd acquisition module 43, and according to the algorithm direction of rotation of the algorithm direction of rotation of described current control cycle, historical control cycle and default control cycle dimension, obtain the actual direction of rotation of described stepping motor.
The 3rd acquisition module 43 comprises statistic unit 431, acquiring unit 432 and analysis generation unit 433, wherein,
Statistic unit 431, for adding up positive rotation number of times and the despining number of times corresponding to described default control cycle dimension,, add up all positive rotation number of times c and despining frequency n-c in the algorithm direction of rotation of continuous n control cycle of corresponding default control cycle dimension n.Statistic unit 431 comprises and obtains subelement 4311 and add a subelement 4312, wherein,
Obtain subelement 4311, for obtaining positive rotation number of times and the despining number of times of algorithm direction of rotation of described historical control cycle, that is, obtain positive rotation number of times c and despining frequency n-c in the algorithm direction of rotation of described historical control cycle.
Adding a subelement 4312, is direct rotational direction for the algorithm direction of rotation of determining described current control cycle, makes the positive rotation number of times of described stepping motor add one, with the positive rotation number of times corresponding to described default control cycle dimension; Or the algorithm direction of rotation of determining described current control cycle is despining direction, make the despining number of times of described stepping motor add one, with the despining number of times corresponding to described default control cycle dimension.
If determine here, the algorithm direction of rotation of described current control cycle be sky, can be without implementation step s312 again, that is, and the positive rotation number of times in the algorithm direction of rotation of described historical control cycle and despining number of times; The algorithm direction of rotation of described current control cycle is that empty corresponding controller is wanted the operation that control step motor stops the rotation.
Acquiring unit 432, for obtaining the difference of described positive rotation number of times and described despining number of times.Obtain the difference of positive rotation number of times and described despining number of times by formula c-(n-c)=2c-n.
Analyze generation unit 433, for analyzing described difference, if this difference is greater than zero, the described stepping motor of generation control carries out the signal of forward; If this difference is less than zero, generates and control the signal that described stepping motor reverses; If this difference equals zero, generate the signal of the actual direction of rotation that does not drive described stepping motor.
By analyzing described difference 2c-n, can generate control step motor the coherent signal that carries out actual rotation, and stepping motor can be rotated according to the coherent signal of this actual rotation; Particularly,
If first this difference 2c-n is not less than zero, judge whether this 2c-n is greater than zero, if, generate the signal that the described stepping motor of control carries out forward, if not, judge whether this 2c-n equals zero or whether the algorithm direction of rotation of current control cycle is empty, and if this 2c-n equals zero or the algorithm direction of rotation of current control cycle is sky, and generate and control the signal that described stepping motor stops the rotation; Moreover, if this 2c-n is less than zero, generates and control the signal that described stepping motor reverses.
Analyze described difference c-(n-c), if c-(n-c) is greater than zero, the described stepping motor of generation control carries out the signal of forward; If c-(n-c) is less than zero, generates and control the signal that described stepping motor reverses; If c-(n-c) equals zero, generate the signal stopping the rotation.
The first control module 44, is rotated for stepping motor described in described this actual direction of rotation control.
The second control module 42, for controlling described stepping motor with [n/2] × V
brotating speed be rotated, wherein, n represents default control cycle dimension, and n>=2; V
brepresent the reference speed of described motor; [n/2] integer for rounding downwards.
The 3rd control module 43, be used for controlling described stepping motor and enter the | [2c-n]/2| gear, wherein, c represents the positive rotation number of times corresponding to described default control cycle dimension, (c-n) represents the despining number of times corresponding to described default control cycle dimension; And can control respectively described stepping motor and enter 0～[n/2]+1 gear.
In the time that the load of stepping motor is larger, can makes to start frequency and be less than self-starting frequency by reducing toggle speed, thereby avoid stepping motor generation step-out.Here frequency when, the self-starting frequency of stepping motor is stepping motor generation step-out.In the time that the rotating speed of stepping motor is very fast, can reduce gradually rotating speed by changing the gear of stepping motor, thereby avoid overshoot phenomenon, thereby further improve the matching precision of adaptation, make the input impedance of matching network equal as much as possible the constant output impedance of radio-frequency power supply.
The control device of the present embodiment stepping motor is determined actual direction of rotation by the algorithm direction of rotation of current control cycle and the algorithm direction of rotation of historical control cycle, even the algorithm direction of rotation of the current control cycle that must make mistake because of the precision of transducer or the interference of external environment condition, also can carry out error correction to the algorithm of current control cycle according to the algorithm direction of rotation of historical control cycle, thereby improve the accuracy of actual direction of rotation, this not only can improve the matching precision of adaptation, reduces the reflection power on RF transmission line; And, can reduce stepping motor frequently just/reversion switches, thereby reduce the wearing and tearing of stepping motor, and then useful life of improving stepping motor.Simultaneously, the introducing of the algorithm direction of rotation of historical control cycle makes to insert halted state between rotating and reverse, thereby reducing losing of stepping motor walks and step-out phenomenon, and then the matching precision of raising adaptation, make the input impedance of matching network equal as much as possible the constant output impedance of radio-frequency power supply.
The present embodiment also provides a kind of adaptation, comprises transducer, actuator and control device, and wherein, transducer is for detection of the voltage on radio-frequency transmission line, electric current, forward power, backward power; The detected value that controller detects according to transducer obtains the algorithm direction of rotation of current control cycle, then obtains actual direction of rotation in conjunction with the algorithm direction of rotation of current control cycle and the algorithm direction of rotation of historical control cycle; This actuator comprises variable resistor element and changes the stepping motor of the impedance of described variable resistor element, this control device is connected with described transducer and stepping motor respectively, the actual direction of rotation that stepping motor obtains according to controller is carried out matching operation, the control device that control device adopts the present embodiment to provide.The control device that the present embodiment provides is the actual direction of rotation of determining stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle, like this, even the algorithm direction of rotation of the current control cycle that must make mistake because of the precision of transducer and the interference of external environment condition, also can carry out error correction according to the algorithm direction of rotation of historical control cycle, thereby obtain actual direction of rotation accurately, can improve like this matching precision of adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply, and, can reduce adaptation switches frequently, thereby improve the useful life of adaptation.
The present invention also provides a kind of plasma processing device, comprise radio-frequency power supply, adaptation and plasma chamber, described adaptation is arranged between described radio-frequency power supply and described plasma chamber, for being reached, the output impedance of described radio-frequency power supply and the input impedance of described plasma chamber mates, the adaptation providing in the present embodiment is provided described adaptation, or adopts the control method providing in the present embodiment to control.Owing to adopting the present embodiment adaptation or control method, therefore, plasma processing device has the following advantages:, matching precision and the matching efficiency of adaptation are high, and the reflection power on RF transmission line is little, and the long service life of adaptation.
Be understandable that, above execution mode is only used to principle of the present invention is described and the illustrative embodiments that adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (9)
1. a control method for stepping motor, is characterized in that, comprising:
Obtain the algorithm direction of rotation of the current control cycle of stepping motor;
Obtain the algorithm direction of rotation of default control cycle dimension and the historical control cycle based on this default control cycle dimension;
And according to the algorithm direction of rotation of the algorithm direction of rotation of described current control cycle, historical control cycle and default control cycle dimension, obtain the actual direction of rotation of described stepping motor, and be rotated with stepping motor described in this actual direction of rotation control;
The described actual direction of rotation of obtaining stepping motor comprises:
Statistics is corresponding to positive rotation number of times and the despining number of times of described default control cycle dimension;
Obtain the difference of described positive rotation number of times and described despining number of times;
Analyze described difference, if this difference is not less than zero, judge whether this difference is greater than zero, if, generate the signal that the described stepping motor of control carries out forward, if not, judge whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty, if and this difference equals zero or the algorithm direction of rotation of current control cycle is sky, generates and controls the signal that described stepping motor stops the rotation; If this difference is less than zero, generates and control the signal that described stepping motor reverses;
Described statistics comprises corresponding to positive rotation number of times and the despining number of times of described default control cycle dimension:
Obtain positive rotation number of times and despining number of times in the algorithm direction of rotation of described historical control cycle;
The algorithm direction of rotation of determining described current control cycle is direct rotational direction, makes positive rotation number of times add one, with the positive rotation number of times corresponding to described default control cycle dimension; Or the algorithm direction of rotation of determining described current control cycle is despining direction, make despining number of times add one, with the despining number of times corresponding to described default control cycle dimension.
2. control method according to claim 1, is characterized in that, also comprises;
Control described stepping motor with [n/2] × V
brotating speed be rotated, wherein, n represents default control cycle dimension, and n>=2; V
brepresent the reference speed of described motor; [n/2] integer for rounding downwards.
3. control method according to claim 2, is characterized in that, also comprises;
Control described stepping motor and enter the | [2c-n]/2| gear, wherein, c represents the positive rotation number of times corresponding to described default control cycle dimension, (c-n) represents the despining number of times corresponding to described default control cycle dimension; And can control respectively described stepping motor and enter 0～[n/2]+1 gear.
4. a control device for stepping motor, is characterized in that, comprising:
The first acquisition module, for obtaining the algorithm direction of rotation of current control cycle of stepping motor;
The second acquisition module, for obtaining the algorithm direction of rotation of default control cycle dimension and the historical control cycle based on this default control cycle dimension;
The 3rd acquisition module, and according to the algorithm direction of rotation of the algorithm direction of rotation of described current control cycle, historical control cycle and default control cycle dimension, obtain the actual direction of rotation of described stepping motor;
The first control module, is rotated for stepping motor described in described this actual direction of rotation control;
Described the 3rd acquisition module comprises:
Statistic unit, for adding up positive rotation number of times and the despining number of times corresponding to described default control cycle dimension;
Acquiring unit, for obtaining the difference of described positive rotation number of times and described despining number of times;
Analyze generation unit, be used for analyzing described difference, if this difference is not less than zero, judge whether this difference is greater than zero, if so, generate and control described stepping motor and carry out the signal of forward, if not, judge whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty, and if this difference equals zero or the algorithm direction of rotation of current control cycle is sky, and generate and control the signal that described stepping motor stops the rotation; If this difference is less than zero, generates and control the signal that described stepping motor reverses;
Described statistic unit comprises:
Obtain subelement, for obtaining positive rotation number of times and the despining number of times of algorithm direction of rotation of described historical control cycle;
Adding a subelement, is direct rotational direction for the algorithm direction of rotation of determining described current control cycle, makes positive rotation number of times add one, with the positive rotation number of times corresponding to described default control cycle dimension; Or the algorithm direction of rotation of determining described current control cycle is despining direction, make despining number of times add one, with the despining number of times corresponding to described default control cycle dimension.
5. control device according to claim 4, is characterized in that, also comprises;
The second control module, for controlling described stepping motor with [n/2] × V
brotating speed be rotated, wherein, n represents default control cycle dimension, and n>=2; V
brepresent the reference speed of described motor; [n/2] integer for rounding downwards.
6. control device according to claim 5, is characterized in that, also comprises;
The 3rd control module, be used for controlling described stepping motor and enter the | [2c-n]/2| gear, wherein, c represents the positive rotation number of times corresponding to described default control cycle dimension, (c-n) represents the despining number of times corresponding to described default control cycle dimension; And can control respectively described stepping motor and enter 0～[n/2]+1 gear.
7. an adaptation, comprise transducer and actuator, and this actuator comprises variable resistor element and changes the drive unit of the impedance of described variable resistor element, it is characterized in that, also comprise the control device of arbitrary claim in claim 4 to 6, and this control device is connected respectively with drive unit with described transducer respectively.
8. a plasma processing device, comprise electrode radio-frequency power supply, electrode adaptation and plasma chamber, described electrode adaptation is arranged between described electrode radio-frequency power supply and described plasma chamber, for being reached, the output impedance of described electrode radio-frequency power supply and the input impedance of described plasma chamber mates, it is characterized in that, described electrode adaptation can adopt adaptation claimed in claim 7.
9. plasma processing device according to claim 8, is characterized in that described electrode radio-frequency power supply comprises top electrode radio-frequency power supply and/or bottom electrode radio-frequency power supply, and corresponding described electrode adaptation comprises top electrode adaptation and bottom electrode adaptation.
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| CN101119092A (en) * | 2007-09-06 | 2008-02-06 | 哈尔滨工业大学 | High subdivided integration type stepper motor driver |
| CN101542893A (en) * | 2006-10-30 | 2009-09-23 | 戴维·库图 | A method and apparatus for eliminating stall and cogging in multi-phase stepping motors |
| CN101719755A (en) * | 2009-12-18 | 2010-06-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for checking lost steps of stepping motor and impedance matching device |
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| CN1716757A (en) * | 2004-07-01 | 2006-01-04 | 倚强科技股份有限公司 | Error correcting method and circuit for step motor driving system |
| CN101542893A (en) * | 2006-10-30 | 2009-09-23 | 戴维·库图 | A method and apparatus for eliminating stall and cogging in multi-phase stepping motors |
| CN101119092A (en) * | 2007-09-06 | 2008-02-06 | 哈尔滨工业大学 | High subdivided integration type stepper motor driver |
| CN101719755A (en) * | 2009-12-18 | 2010-06-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for checking lost steps of stepping motor and impedance matching device |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015, M5 building, No. 1 Jiuxianqiao East Road, Beijing, Chaoyang District, two South Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |