CN102545750A - Control method and control device of stepping motor, matcher and plasma processing device - Google Patents
Control method and control device of stepping motor, matcher and plasma processing device Download PDFInfo
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Abstract
The invention provides a control method and a control device of a stepping motor, a matcher and a plasma processing device. The control method includes: acquiring the algorithm rotation direction of a current control period of the stepping motor; acquiring preset control period dimensions and the algorithm rotation direction of a historical control period based on the preset control period dimensions; and acquiring the actual rotation direction of the stepping motor according to the algorithm rotation direction of the current control period, the algorithm rotation direction of the historical control period and the preset control period dimensions, and adopting the actual rotation direction to control the stepping motor to rotate. The control method can reduce forward rotation and reverse rotation switching times of the stepping motor, accordingly reduces phenomena of step throw and step out of the stepping motor, and service life of the stepping motor is prolonged.
Description
Technical field
The invention belongs to the plasma processing device field; Relate to and be used for adaptation that the output impedance of the nonlinear load impedance of plasma chamber and radio-frequency power supply is mated each other, the plasma processing device that is specifically related to a kind of Stepping Motor Control method and device, adaptation and comprises this adaptation.
Background technology
Plasma is ionized into ion and free electron by material atom and forms, and demonstrates the labile state that highly excites, and has good conductivity, can utilize magnetic field to catch, move or quicken.Therefore, plasma is widely used in processing technologys such as etching, deposition, welding and spraying.
RF (radio frequency) thus plasma producing apparatus is a kind ofly to provide RF power to make the gas generation ionization in the chamber and produce the device of plasma to plasma chamber through radio-frequency power supply.Utilizing the RF plasma producing apparatus to carry out in the process of processed such as etching; Because the constant output impedance of RF plasma producing apparatus and the nonlinear load impedance of plasma process chamber are unequal; So between RF plasma producing apparatus and plasma process chamber, have serious impedance mismatching; Make to have bigger reflection power on the RF transmission line, thereby the power that causes the RF plasma producing apparatus to produce can't all flow to plasma process chamber.For addressing this problem, must between RF plasma producing apparatus and plasma chamber, insert impedance matching box.
Fig. 1 is the schematic diagram of impedance matching box.See also Fig. 1, impedance matching box comprises transducer, controller and actuator, and said actuator comprises the variable impedance element and the drive unit that changes its impedance in the matching network.Wherein, relevant parameters such as the voltage on the sensor RF transmission line, electric current, forward power, backward power are to provide the coupling control algolithm required input variable; Controller is realized the coupling control algolithm according to these input variables, and provides the adjustment amount corresponding to actuator; The adjustment amount that drive unit provides according to controller changes the resistance value of variable impedance element; To reduce the reflection power on the radio-frequency transmission line; Thereby the input impedance that makes matching network equals the constant output impedance of RF plasma producing apparatus, and promptly the two reaches coupling.When being in the perfect match state, the reflection power on the RF transmission line is zero, and the power that the RF plasma producing apparatus produces can all flow to plasma process chamber.
In practical application; Drive unit in the actuator often adopts stepping motor; Controller provides positive rotaring signal (CW) or reverse signal (CCW) (hereinafter to be referred as direction signal) accordingly as adjustment amount, and stepping motor is adjusted the resistance value of variable impedance element according to the clock signal of this direction signal and interior setting thereof.The concrete working method of stepping motor is seen table 1, and wherein, control cycle m representes m control cycle.In control system signal one hurdle; It is high level that "+" expression stepping motor clock signal (CLK) has pulse and the corresponding direction signal (CW/CCW) of rising edge of a pulse; It is low level that "-" expression stepping motor clock signal (CLK) has pulse and the corresponding direction signal (CW/CCW) of rising edge of a pulse, and " 0 " expression stepping motor clock signal (CLK) does not have pulse.In motor action one hurdle, "+1 " expression stepping motor was just changeing for 1 step, and in " 1 " expression stepping motor 1 step of counter-rotating, " 0 " expression stepping motor is failure to actuate.
Table 1 is the working method of stepping motor
| Control system signal (control cycle m) | Motor action |
| + | +1 |
| - | -1 |
| 0 | 0 |
Fig. 2 is the timing diagram of stepping motor, wherein, the fixed frequency of clock signal (CLK) for setting, direction signal (CW/CCW) comes self-controller.See also Fig. 2, stepping motor moves according to direction signal (CW/CCW) at the rising edge of clock signal (CLK), when clock signal (CLK) is that rising edge and direction signal (CW/CCW) are during for high level; The present clock period stepping motor is just changeing a step; As: t1, t3, t5 are constantly; When clock signal (CLK) is rising edge and direction signal (CW/CCW) during for low level, in one step of present clock period stepping motor counter-rotating, like t2, t4, t6 are constantly; When no clock signal (CLK), no matter direction signal (CW/CCW) is high level or low level, and stepping motor all is failure to actuate, like t7, t8 constantly.
By on can know that stepping motor is to adjust according to the actual act direction signal of current acquisition.Yet in the actual process process, the indoor nonlinear load of plasma chamber is very unstable, the actual act direction signal that utilizes the coupling control algolithm to obtain come the control step motor often cause stepping motor continually just/counter-rotating switches, like t among Fig. 2
2-t
6During this time.And there are inertia inertia in the rotor of stepping motor and load, therefore; Stepping motor is in operation and has following problem inevitably: the first, and when stepping motor switches in rotating, the inertia before need overcoming; Therefore; The normal step phenomenon of losing especially under the bigger situation of the rotating torque of stepping motor, loses that to go on foot phenomenon more serious.This will influence the matching precision of adaptation, thereby cause the reflection power on the RF transmission line bigger.The second, lag takes place easily in stepping motor when instantaneous starting, and phenomenon takes place to surpass when stopping easily, when the pulse frequency of stepping motor is big, delays and surpass the step-out phenomenon that phenomenon will cause stepping motor.The 3rd, stepping motor rotating switching continually reduces its useful life, and then influences the useful life of adaptation.In addition; Because it is inaccurate that the precision interference not high and external environment condition of transducer often makes that transducer is input to the input variable of controller; The direction signal that causes controller to be given making mistake, this will reduce the matching precision of adaptation, thereby cause the reflection power on the RF transmission line bigger.
Summary of the invention
The present invention is directed to the above-mentioned defective that stepping motor exists in the adaptation, a kind of Stepping Motor Control method and device are provided, this control method and device not only can reduce losing of stepping motor and go on foot and the step-out phenomenon, and can prolong the useful life of stepping motor.
In addition, the present invention also provides a kind of adaptation, and the matching precision of this adaptation is high, can reduce the reflection power on the RF transmission line, and long service life.
In addition, the present invention also provides a kind of plasma processing device, and the nonlinear impedance of the output impedance of RF power supply and plasma chamber can be mated well in this plasma process equipment, and the long service life of process equipment.
Solving the problems of the technologies described above the technical scheme that is adopted provides a kind of Stepping Motor Control method and comprises:
Obtain the algorithm direction of rotation of the current control cycle of stepping motor;
Obtain default control cycle dimension and based on the algorithm direction of rotation of the historical control cycle of this default control cycle dimension;
And according to the algorithm direction of rotation and the default control cycle dimension of the algorithm direction of rotation of said current control cycle, historical control cycle; Obtain the actual direction of rotation of said stepping motor, and control said stepping motor with this actual direction of rotation and be rotated.
Wherein, the said actual direction of rotation of obtaining stepping motor comprises:
Statistics is corresponding to the positive rotation number of times and the despining number of times of said default control cycle dimension;
Obtain the difference of said positive rotation number of times and said despining number of times;
Analyze said difference,, judge that then whether this difference is greater than zero if this difference is not less than zero; If; Then generate the signal that the said stepping motor of control is just changeing, if not, judge then whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty; And, then generate the signal that the said stepping motor of control stops the rotation if this difference equals zero or the algorithm direction of rotation of current control cycle is sky; If this difference less than zero, then generates the signal that the said stepping motor of control reverses.
Wherein, said statistics comprises corresponding to the positive rotation number of times and the despining number of times of said default control cycle dimension:
Obtain positive rotation number of times and despining number of times in the algorithm direction of rotation of said historical control cycle;
The algorithm direction of rotation of confirming said current control cycle is a direct rotational direction, then makes the positive rotation number of times add one, with the positive rotation number of times corresponding to said default control cycle dimension; Perhaps, the algorithm direction of rotation of confirming said current control cycle is the despining direction, then makes the despining number of times add one, with the despining number of times corresponding to said default control cycle dimension.
Wherein, described control method also comprises;
Control said stepping motor with [n/2] * V
bRotating speed be rotated, wherein, n representes default control cycle dimension, and n>=2; V
bThe reference speed of representing said motor; [n/2] integer for rounding downwards.
Wherein, described control method also comprises;
Control said stepping motor and get into the | [2c-n]/2| gear, wherein, c representes the positive rotation number of times corresponding to said default control cycle dimension, (c-n) representes the despining number of times corresponding to said default control cycle dimension; And can control said stepping motor respectively and get into 0～[n/2]+1 gear.
The present invention also provides a kind of Stepping Motor Control device, comprising:
First acquisition module is used to obtain the algorithm direction of rotation of the current control cycle of stepping motor;
Second acquisition module is used to obtain default control cycle dimension and based on the algorithm direction of rotation of the historical control cycle of this default control cycle dimension;
The 3rd acquisition module, and, obtain the actual direction of rotation of said stepping motor according to the algorithm direction of rotation and the default control cycle dimension of the algorithm direction of rotation of said current control cycle, historical control cycle;
First control module is used for saidly should actual direction of rotation controlling said stepping motor and being rotated.
Wherein, said the 3rd acquisition module comprises:
Statistic unit is used to add up positive rotation number of times and the despining number of times corresponding to said default control cycle dimension;
Acquiring unit is used to obtain the difference of said positive rotation number of times and said despining number of times;
Analyze generation unit, be used to analyze said difference, if this difference is not less than zero; Whether then judge this difference greater than zero, if then generate the signal that the said stepping motor of control is just changeing; If not; Judge then whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty, and, then generate the signal that the said stepping motor of control stops the rotation if this difference equals zero or the algorithm direction of rotation of current control cycle is empty; If this difference less than zero, then generates the signal that the said stepping motor of control reverses.
Wherein, obtain subelement, be used for obtaining the positive rotation number of times and the despining number of times of the algorithm direction of rotation of said historical control cycle;
Add a subelement, be used for confirming that the algorithm direction of rotation of said current control cycle is a direct rotational direction, then make the positive rotation number of times add one, with positive rotation number of times corresponding to said default control cycle dimension; Perhaps, the algorithm direction of rotation of confirming said current control cycle is the despining direction, then makes the despining number of times add one, with the despining number of times corresponding to said default control cycle dimension.
Wherein, second control module is used to control said stepping motor with [n/2] * V
bRotating speed be rotated, wherein, n representes default control cycle dimension, and n>=2; V
bThe reference speed of representing said motor; [n/2] integer for rounding downwards.
Wherein, The 3rd control module is used for the said stepping motor of control control and gets into the | [2c-n]/2| gear, wherein; C representes the positive rotation number of times corresponding to said default control cycle dimension, and (c-n) expression is corresponding to the despining number of times of said default control cycle dimension; And can control said stepping motor respectively and get into 0～[n/2]+1 gear.
In addition; The present invention also provides a kind of adaptation; Comprise transducer and actuator; And this actuator comprises the drive unit of variable resistor element and the impedance that changes said variable resistor element, also comprise control device provided by the invention, and this control device is connected respectively with drive unit with said transducer respectively.
In addition; The present invention also provides a kind of plasma processing device; Comprise electrode radio-frequency power supply, electrode adaptation and plasma chamber; Said electrode adaptation is arranged between said electrode radio-frequency power supply and the said plasma chamber, is used to make the output impedance of said electrode radio-frequency power supply and the input impedance of said plasma chamber to reach coupling, and said electrode adaptation adopts the present invention that described adaptation is provided.
Wherein, said electrode radio-frequency power supply comprises top electrode radio-frequency power supply and/or bottom electrode radio-frequency power supply, and corresponding said electrode adaptation comprises top electrode adaptation and bottom electrode adaptation.
The present invention has following beneficial effect:
Stepping Motor Control method provided by the invention is to confirm the actual direction of rotation of stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle; Can come the algorithm direction of rotation of current control cycle is proofreaied and correct by the algorithm direction of rotation of historical control cycle like this; Thereby improve the accuracy of actual direction of rotation; And then minimizing stepping motor forward and backward switching continually; This not only can reduce losing step and step-out phenomenon and the useful life that can improve stepping motor of stepping motor.Similarly; Stepping Motor Control device provided by the invention is an actual direction of rotation of confirming stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle; Can come the algorithm direction of rotation of current control cycle is proofreaied and correct by the algorithm direction of rotation of historical control cycle like this; Thereby improve the accuracy of actual direction of rotation; And then reducing stepping motor forward and backward switching continually, this not only can reduce losing step and step-out phenomenon and the useful life that can improve stepping motor of stepping motor.
Adaptation provided by the invention; Its control device is an actual direction of rotation of confirming stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle; Like this, even the algorithm direction of rotation of the current control cycle that must make mistake because of the interference of the precision of transducer and external environment condition also can be carried out error correction according to the algorithm direction of rotation of historical control cycle; Thereby obtain actual accurately direction of rotation; Can improve the matching precision of adaptation like this, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply, and; Can reduce the frequent switching of adaptation, thereby improve the useful life of adaptation.As one embodiment of the present of invention; Actuator is a stepping motor; The introducing of the algorithm direction of rotation of historical control cycle makes stepping motor between rotating and reverse, insert halted state; Thereby that can reduce stepping motor loses step and step-out phenomenon, and then the matching precision of raising adaptation, makes the input impedance of matching network equal the constant output impedance of radio-frequency power supply.
As another embodiment of the present invention; The execution driver element makes stepping motor increase gradually or reduces its rotating speed gradually; Can avoid losing of stepping motor to go on foot and the step-out phenomenon; Thereby further improve the matching precision of adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply.
Plasma processing device provided by the invention; Adopt the control method of adaptation provided by the invention to control adaptation; Perhaps adopt adaptation provided by the invention to make the input impedance of matching network equal the constant output impedance of radio-frequency power supply, can improve the matching precision of adaptation, reduce the reflection power on the RF transmission line; And can reduce the frequent switching of adaptation, thereby improve the useful life of adaptation.
Description of drawings
Fig. 1 is the schematic diagram of impedance matching box;
Fig. 2 is the timing diagram of stepping motor;
Fig. 3 is the flow chart of method for controlling stepping motor provided by the invention; And
Fig. 4 is the theory diagram of stepping motor control apparatus provided by the invention.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, be described in detail below in conjunction with control method, adaptation and the plasma processing device of accompanying drawing to adaptation provided by the invention.
The adaptation that present embodiment provides comprises transducer, controller and actuator; Transducer is used to detect voltage, electric current, forward power, the backward power on the radio-frequency transmission line; Controller according to sensor to detected value obtain actual direction of rotation signal; Actuator is implemented by stepping motor, and it carries out matching operation according to the actual direction of rotation signal that controller obtains.
Fig. 3 is the flow chart of Stepping Motor Control method.See also Fig. 3, the Stepping Motor Control method comprises:
Step s1 obtains the algorithm direction of rotation of the current control cycle of stepping motor.
In this step; The controller that the control step motor is rotated can obtain the algorithm direction of rotation of current control cycle through existing certain special algorithm, and the algorithm direction of rotation of current control cycle is specially: controller is desired the direction that the control step motor is rotated.But because the influence of external interference factor; The algorithm direction of rotation of this current control cycle might be wrong; Therefore, controller is rotated as if strict algorithm direction of rotation control step motor with this current control cycle, will inevitably produce misoperation to stepping motor.
Step s2 obtains default control cycle dimension and based on the algorithm direction of rotation of the historical control cycle of this default control cycle dimension.
For preventing that the controller strictness is rotated with the algorithm direction of rotation control step motor of current control cycle, and stepping motor is produced misoperation; The present embodiment method is through setting default control cycle dimension n, to introduce controller is rotated the historical control cycle of control to stepping motor algorithm direction of rotation; On behalf of controller, default control cycle dimension n stepping motor is rotated continuous n control cycle of control; It comprises 1 current control cycle and n-1 historical control cycle; Can combine the algorithm direction of rotation of n-1 historical control cycle and the algorithm direction of rotation of current control cycle to judge the rotation trend of controller desire control step motor thus, thereby can avoid controller that the misoperation and the losing of minimizing stepping motor of stepping motor are gone on foot and the step-out phenomenon.
Step s3; Algorithm direction of rotation and default control cycle dimension according to the algorithm direction of rotation of said current control cycle, historical control cycle; Obtain the actual direction of rotation of said stepping motor, and control said stepping motor with this actual direction of rotation and be rotated.
In step s3, the said actual direction of rotation of obtaining stepping motor comprises:
Step s31, statistics is corresponding to the positive rotation number of times and the despining number of times of said default control cycle dimension.
Add up all positive rotation number of times c and despining frequency n-c in the algorithm direction of rotation of continuous n control cycle of corresponding default control cycle dimension n, be specially:
Step s311 obtains positive rotation number of times and despining number of times in the algorithm direction of rotation of said historical control cycle.
Obtain positive rotation number of times and despining number of times in the algorithm direction of rotation of said historical control cycle.
Step s312, the algorithm direction of rotation of confirming said current control cycle is a direct rotational direction, then makes the positive rotation number of times of said stepping motor add one, with the positive rotation number of times c corresponding to said default control cycle dimension; Perhaps, the algorithm direction of rotation of confirming said current control cycle is the despining direction, then makes the despining number of times of said stepping motor add one, with the despining frequency n-c corresponding to said default control cycle dimension.
Here if it is empty confirming the algorithm direction of rotation of said current control cycle, then can need not implementation step s312 again, that is, and positive rotation number of times in the algorithm direction of rotation of said historical control cycle and despining number of times; The algorithm direction of rotation of said current control cycle is that empty corresponding controller is desired the operation that the control step motor stops the rotation.
Step s32 obtains the difference of said positive rotation number of times and said despining number of times.
Obtain the difference of positive rotation number of times and said despining number of times through formula c-(n-c)=2c-n.
Step s33 analyzes said difference, if this difference greater than zero, then generates the signal that the said stepping motor of control is just changeing; If this difference less than zero, then generates the signal that the said stepping motor of control reverses; If this difference equals zero, then generate the signal of the actual direction of rotation that does not drive said stepping motor.
Through analyzing said difference 2c-n, can generate the coherent signal that the control step motor carries out actual rotation, and stepping motor can be rotated according to the coherent signal of this actual rotation; Particularly,
At first if this difference 2c-n is not less than zero; Whether then judge this 2c-n greater than zero, if then generate the signal that the said stepping motor of control is just changeing; If not; Judge then whether this 2c-n equals zero or whether the algorithm direction of rotation of current control cycle is empty, and, then generate the signal that the said stepping motor of control stops the rotation if this 2c-n equals zero or the algorithm direction of rotation of current control cycle is empty; Moreover, if this 2c-n less than zero, then generates the signal that the said stepping motor of control reverses.
Particularly; When n=2; The actual direction of rotation of m control cycle of motor is by the algorithm direction of rotation influence of m and m-1 control cycle, and wherein, the algorithm direction of rotation of m-1 control cycle is historical algorithm direction of rotation; So, the actual direction of rotation that obtains of step s3 sees also table 2.
The corresponding relation of actual direction of rotation and algorithm direction of rotation when table 2 receives influencing of 2 dimension control cycle dimensions for the actual direction of rotation when m control cycle
In the table 2, in the algorithm direction of rotation hurdle, it is high level that "+" expression stepping motor clock signal (CLK) has pulse and the corresponding direction signal (CW/CCW) of rising edge of a pulse; It is low level that "-" expression stepping motor clock signal (CLK) has pulse and the corresponding direction signal (CW/CCW) of rising edge of a pulse; " 0 " expression stepping motor clock signal (CLK) does not have pulse.In actual direction of rotation one hurdle, "+1 " expression stepping motor was just changeing for 1 step; " 1 " expression stepping motor 1 step of counter-rotating; " 0 " expression stepping motor does not rotate.
Can know that by table 2 when the algorithm direction of rotation by the algorithm direction of rotation of m-1 control cycle calculating of coupling control algolithm and m control cycle was two opposite algorithm direction signals, as the 3rd walking to the 5th capablely in the table 2, motor was failure to actuate.Being motor inserts a halted state rotating and reverse when switching, i.e. " 0 " state, and that can avoid stepping motor like this loses the step phenomenon.
In actual mechanical process, if m＜n, not enough n-1 of the algorithm direction of rotation of m control cycle this moment historical control cycle before; That is to say; Also not enough n of algorithm direction of rotation this moment, so, when calculating the actual direction of rotation of m control cycle; Can the algorithm direction of rotation of the historical control cycle of the n-m before m the control cycle be defaulted as 0, and then calculate the actual direction of rotation of m control cycle.
In actual moving process, can the rotating speed of stepping motor be controlled at [n/2] * V
b, wherein, n representes default control cycle dimension, and n>=2; V
bThe reference speed of representing said motor; [n/2] integer for rounding downwards.Accordingly, can the rotating speed of stepping motor be divided into | [2c-n]/2| gear, wherein, c representes the positive rotation number of times corresponding to said default control cycle dimension, (c-n) expression is corresponding to the despining number of times of said default control cycle dimension; And can control said stepping motor respectively and get into 0～[n/2]+1 gear.Like this, when the load of stepping motor is big, can makes the startup frequency less than the self-starting frequency through reducing toggle speed, thereby avoid stepping motor generation step-out.Frequency when here, the self-starting frequency of stepping motor is stepping motor generation step-out.When the rotating speed of stepping motor is very fast; Can reduce rotating speed gradually through the gear that changes stepping motor; Thereby avoid overshoot phenomenon, thereby further improve the matching precision of adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply as much as possible.
Present embodiment Stepping Motor Control method is confirmed actual direction of rotation through the algorithm direction of rotation of current control cycle and the algorithm direction of rotation of historical control cycle; Even the algorithm direction of rotation of the current control cycle that must make mistake because of the interference of the precision of transducer or external environment condition; Also can carry out error correction to the algorithm of current control cycle according to the algorithm direction of rotation of historical control cycle; Thereby improve the accuracy of actual direction of rotation; This not only can improve the matching precision of adaptation, reduces the reflection power on the RF transmission line; And, can reduce stepping motor frequent just/counter-rotating switches, thereby reduce the wearing and tearing of stepping motor, and then useful life of improving stepping motor.Simultaneously; The introducing of the algorithm direction of rotation of historical control cycle makes inserts halted state between rotating and reverse; Thereby reducing losing of stepping motor goes on foot and the step-out phenomenon; And then the matching precision of raising adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply as much as possible.
Fig. 4 is the theory diagram of Stepping Motor Control device provided by the invention.See also Fig. 4, the Stepping Motor Control device comprises:
The controller that the control step motor is rotated can obtain the algorithm direction of rotation of current control cycle through existing certain special algorithm, and the algorithm direction of rotation of current control cycle is specially: controller is desired the direction that the control step motor is rotated.But because the influence of external interference factor; The algorithm direction of rotation of this current control cycle might be wrong; Therefore, controller is rotated as if strict algorithm direction of rotation control step motor with this current control cycle, will inevitably produce misoperation to stepping motor.
For avoiding controller to be rotated, and stepping motor is produced misoperation with the algorithm direction of rotation control step motor of current control cycle; Second acquisition module 42 is through setting default control cycle dimension n, to introduce controller is rotated the historical control cycle of control to stepping motor algorithm direction of rotation; On behalf of controller, default control cycle dimension n stepping motor is rotated continuous n control cycle of control; It comprises 1 current control cycle and n-1 historical control cycle; Can combine the algorithm direction of rotation of n-1 historical control cycle and the algorithm direction of rotation of current control cycle to judge the rotation trend of controller desire control step motor thus, thereby can avoid controller that the misoperation and the losing of minimizing stepping motor of stepping motor are gone on foot and the step-out phenomenon.
The 3rd acquisition module 43, and, obtain the actual direction of rotation of said stepping motor according to the algorithm direction of rotation and the default control cycle dimension of the algorithm direction of rotation of said current control cycle, historical control cycle.
The 3rd acquisition module 43 comprises statistic unit 431, acquiring unit 432 and analysis generation unit 433, wherein,
Obtain subelement 4311, be used for obtaining the positive rotation number of times and the despining number of times of the algorithm direction of rotation of said historical control cycle, that is, obtain positive rotation number of times c and despining frequency n-c in the algorithm direction of rotation of said historical control cycle.
Add a subelement 4312, be used for confirming that the algorithm direction of rotation of said current control cycle is a direct rotational direction, then make the positive rotation number of times of said stepping motor add one, with positive rotation number of times corresponding to said default control cycle dimension; Perhaps, the algorithm direction of rotation of confirming said current control cycle is the despining direction, then makes the despining number of times of said stepping motor add one, with the despining number of times corresponding to said default control cycle dimension.
Here if it is empty confirming the algorithm direction of rotation of said current control cycle, then can need not implementation step s312 again, that is, and positive rotation number of times in the algorithm direction of rotation of said historical control cycle and despining number of times; The algorithm direction of rotation of said current control cycle is that empty corresponding controller is desired the operation that the control step motor stops the rotation.
Acquiring unit 432 is used to obtain the difference of said positive rotation number of times and said despining number of times.Obtain the difference of positive rotation number of times and said despining number of times through formula c-(n-c)=2c-n.
Analyze generation unit 433, be used to analyze said difference, if this difference greater than zero, then generates the signal that the said stepping motor of control is just changeing; If this difference less than zero, then generates the signal that the said stepping motor of control reverses; If this difference equals zero, then generate the signal of the actual direction of rotation that does not drive said stepping motor.
Through analyzing said difference 2c-n, can generate the coherent signal that the control step motor carries out actual rotation, and stepping motor can be rotated according to the coherent signal of this actual rotation; Particularly,
At first if this difference 2c-n is not less than zero; Whether then judge this 2c-n greater than zero, if then generate the signal that the said stepping motor of control is just changeing; If not; Judge then whether this 2c-n equals zero or whether the algorithm direction of rotation of current control cycle is empty, and, then generate the signal that the said stepping motor of control stops the rotation if this 2c-n equals zero or the algorithm direction of rotation of current control cycle is empty; Moreover, if this 2c-n less than zero, then generates the signal that the said stepping motor of control reverses.
Analyze said difference c-(n-c), if c-(n-c) greater than zero, then generates the signal that the said stepping motor of control is just changeing; If c-(n-c) less than zero, then generates the signal that the said stepping motor of control reverses; If c-(n-c) equals zero, then generate the signal that stops the rotation.
The 3rd control module 43; Be used for the said stepping motor of control control and get into the | [2c-n]/2| gear; Wherein, c representes the positive rotation number of times corresponding to said default control cycle dimension, and (c-n) expression is corresponding to the despining number of times of said default control cycle dimension; And can control said stepping motor respectively and get into 0～[n/2]+1 gear.
When the load of stepping motor is big, can makes the startup frequency less than the self-starting frequency through reducing toggle speed, thereby avoid stepping motor generation step-out.Frequency when here, the self-starting frequency of stepping motor is stepping motor generation step-out.When the rotating speed of stepping motor is very fast; Can reduce rotating speed gradually through the gear that changes stepping motor; Thereby avoid overshoot phenomenon, thereby further improve the matching precision of adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply as much as possible.
Present embodiment Stepping Motor Control device is confirmed actual direction of rotation through the algorithm direction of rotation of current control cycle and the algorithm direction of rotation of historical control cycle; Even the algorithm direction of rotation of the current control cycle that must make mistake because of the interference of the precision of transducer or external environment condition; Also can carry out error correction to the algorithm of current control cycle according to the algorithm direction of rotation of historical control cycle; Thereby improve the accuracy of actual direction of rotation; This not only can improve the matching precision of adaptation, reduces the reflection power on the RF transmission line; And, can reduce stepping motor frequent just/counter-rotating switches, thereby reduce the wearing and tearing of stepping motor, and then useful life of improving stepping motor.Simultaneously; The introducing of the algorithm direction of rotation of historical control cycle makes inserts halted state between rotating and reverse; Thereby reducing losing of stepping motor goes on foot and the step-out phenomenon; And then the matching precision of raising adaptation, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply as much as possible.
Present embodiment also provides a kind of adaptation, comprises transducer, actuator and control device, and wherein, transducer is used to detect voltage, electric current, forward power, the backward power on the radio-frequency transmission line; Controller according to sensor to detected value obtain the algorithm direction of rotation of current control cycle, combine the algorithm direction of rotation of current control cycle and the algorithm direction of rotation of historical control cycle to obtain actual direction of rotation then; This actuator comprises the stepping motor of variable resistor element and the impedance that changes said variable resistor element; This control device is connected with stepping motor with said transducer respectively; Stepping motor is carried out matching operation according to the actual direction of rotation that controller obtains, the control device that control device adopts present embodiment to provide.The control device that present embodiment provides is an actual direction of rotation of confirming stepping motor according to the algorithm direction of rotation of the algorithm direction of rotation of current control cycle and historical control cycle; Like this, even the algorithm direction of rotation of the current control cycle that must make mistake because of the interference of the precision of transducer and external environment condition also can be carried out error correction according to the algorithm direction of rotation of historical control cycle; Thereby obtain actual accurately direction of rotation; Can improve the matching precision of adaptation like this, make the input impedance of matching network equal the constant output impedance of radio-frequency power supply, and; Can reduce the frequent switching of adaptation, thereby improve the useful life of adaptation.
The present invention also provides a kind of plasma processing device; Comprise radio-frequency power supply, adaptation and plasma chamber; Said adaptation is arranged between said radio-frequency power supply and the said plasma chamber; Be used to make the output impedance of said radio-frequency power supply and the input impedance of said plasma chamber to reach coupling, said adaptation adopts the adaptation that provides in the present embodiment, perhaps adopts the control method that provides in the present embodiment to control.Because adopt present embodiment adaptation or control method, therefore, plasma processing device has the following advantages: promptly, the matching precision of adaptation and matching efficiency are high, and the reflection power on the RF transmission line is little, and the long service life of adaptation.
It is understandable that above execution mode only is the illustrative embodiments that adopts for principle of the present invention is described, yet the present invention is not limited thereto.For the one of ordinary skilled in the art, under the situation that does not break away from spirit of the present invention and essence, can make various modification and improvement, these modification also are regarded as protection scope of the present invention with improving.
Claims (13)
1. a Stepping Motor Control method is characterized in that, comprising:
Obtain the algorithm direction of rotation of the current control cycle of stepping motor;
Obtain default control cycle dimension and based on the algorithm direction of rotation of the historical control cycle of this default control cycle dimension;
And according to the algorithm direction of rotation and the default control cycle dimension of the algorithm direction of rotation of said current control cycle, historical control cycle; Obtain the actual direction of rotation of said stepping motor, and control said stepping motor with this actual direction of rotation and be rotated.
2. control method according to claim 1 is characterized in that, the said actual direction of rotation of obtaining stepping motor comprises:
Statistics is corresponding to the positive rotation number of times and the despining number of times of said default control cycle dimension;
Obtain the difference of said positive rotation number of times and said despining number of times;
Analyze said difference,, judge that then whether this difference is greater than zero if this difference is not less than zero; If; Then generate the signal that the said stepping motor of control is just changeing, if not, judge then whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty; And, then generate the signal that the said stepping motor of control stops the rotation if this difference equals zero or the algorithm direction of rotation of current control cycle is sky; If this difference less than zero, then generates the signal that the said stepping motor of control reverses.
3. control method according to claim 2 is characterized in that, said statistics comprises corresponding to the positive rotation number of times and the despining number of times of said default control cycle dimension:
Obtain positive rotation number of times and despining number of times in the algorithm direction of rotation of said historical control cycle;
The algorithm direction of rotation of confirming said current control cycle is a direct rotational direction, then makes the positive rotation number of times add one, with the positive rotation number of times corresponding to said default control cycle dimension; Perhaps, the algorithm direction of rotation of confirming said current control cycle is the despining direction, then makes the despining number of times add one, with the despining number of times corresponding to said default control cycle dimension.
4. according to claim 2 or 3 described control methods, it is characterized in that, also comprise;
Control said stepping motor with [n/2] * V
bRotating speed be rotated, wherein, n representes default control cycle dimension, and n>=2; V
bThe reference speed of representing said motor; [n/2] integer for rounding downwards.
5. control method according to claim 4 is characterized in that, also comprises;
Control said stepping motor and get into the | [2c-n]/2| gear, wherein, c representes the positive rotation number of times corresponding to said default control cycle dimension, (c-n) representes the despining number of times corresponding to said default control cycle dimension; And can control said stepping motor respectively and get into 0～[n/2]+1 gear.
6. a Stepping Motor Control device is characterized in that, comprising:
First acquisition module is used to obtain the algorithm direction of rotation of the current control cycle of stepping motor;
Second acquisition module is used to obtain default control cycle dimension and based on the algorithm direction of rotation of the historical control cycle of this default control cycle dimension;
The 3rd acquisition module, and, obtain the actual direction of rotation of said stepping motor according to the algorithm direction of rotation and the default control cycle dimension of the algorithm direction of rotation of said current control cycle, historical control cycle;
First control module is used for saidly should actual direction of rotation controlling said stepping motor and being rotated.
7. control device according to claim 6 is characterized in that, said the 3rd acquisition module comprises:
Statistic unit is used to add up positive rotation number of times and the despining number of times corresponding to said default control cycle dimension;
Acquiring unit is used to obtain the difference of said positive rotation number of times and said despining number of times;
Analyze generation unit, be used to analyze said difference, if this difference is not less than zero; Whether then judge this difference greater than zero, if then generate the signal that the said stepping motor of control is just changeing; If not; Judge then whether this difference equals zero or whether the algorithm direction of rotation of current control cycle is empty, and, then generate the signal that the said stepping motor of control stops the rotation if this difference equals zero or the algorithm direction of rotation of current control cycle is empty; If this difference less than zero, then generates the signal that the said stepping motor of control reverses.
8. control device according to claim 7 is characterized in that, said statistic unit comprises:
Obtain subelement, be used for obtaining the positive rotation number of times and the despining number of times of the algorithm direction of rotation of said historical control cycle;
Add a subelement, be used for confirming that the algorithm direction of rotation of said current control cycle is a direct rotational direction, then make the positive rotation number of times add one, with positive rotation number of times corresponding to said default control cycle dimension; Perhaps, the algorithm direction of rotation of confirming said current control cycle is the despining direction, then makes the despining number of times add one, with the despining number of times corresponding to said default control cycle dimension.
9. according to claim 7 or 8 described control device, it is characterized in that, also comprise;
Second control module is used to control said stepping motor with [n/2] * V
bRotating speed be rotated, wherein, n representes default control cycle dimension, and n>=2; V
bThe reference speed of representing said motor; [n/2] integer for rounding downwards.
10. control device according to claim 9 is characterized in that, also comprises;
The 3rd control module is used for the said stepping motor of control control and gets into the | [2c-n]/2| gear, and wherein, c representes the positive rotation number of times corresponding to said default control cycle dimension, (c-n) representes the despining number of times corresponding to said default control cycle dimension; And can control said stepping motor respectively and get into 0～[n/2]+1 gear.
11. adaptation; Comprise transducer and actuator; And this actuator comprises the drive unit of variable resistor element and the impedance that changes said variable resistor element; It is characterized in that, also comprise the control device of arbitrary claim in the claim 6 to 10, and this control device is connected respectively with drive unit with said transducer respectively.
12. plasma processing device; Comprise electrode radio-frequency power supply, electrode adaptation and plasma chamber; Said electrode adaptation is arranged between said electrode radio-frequency power supply and the said plasma chamber; Be used to make the output impedance of said electrode radio-frequency power supply and the input impedance of said plasma chamber to reach coupling, it is characterized in that said electrode adaptation can adopt the described adaptation of claim 11.
13. plasma processing device according to claim 12 is characterized in that said electrode radio-frequency power supply comprises top electrode radio-frequency power supply and/or bottom electrode radio-frequency power supply, and corresponding said electrode adaptation comprises top electrode adaptation and bottom electrode adaptation.
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| CN101719755A (en) * | 2009-12-18 | 2010-06-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for checking lost steps of stepping motor and impedance matching device |
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| US20080100249A1 (en) * | 2006-10-30 | 2008-05-01 | David Coutu | Method and apparatus for eliminating stall and cogging in multi-phase stepping motors |
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