CN102539117B - Measurement device and measurement method for Polaroid extinction ratio and Brewster angles - Google Patents
Measurement device and measurement method for Polaroid extinction ratio and Brewster angles Download PDFInfo
- Publication number
- CN102539117B CN102539117B CN201110220562.3A CN201110220562A CN102539117B CN 102539117 B CN102539117 B CN 102539117B CN 201110220562 A CN201110220562 A CN 201110220562A CN 102539117 B CN102539117 B CN 102539117B
- Authority
- CN
- China
- Prior art keywords
- polaroid
- measured
- light
- polarized light
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A measurement device for the Polaroid extinction ratio and Brewster angles comprises a lambda/4 wave plate, a rotary glan prism system, a rotary Polaroid stage system and a power meter, wherein the optical axis of the lambda/4 wave plate forms an 45-degree angle with the transmission direction of Polaroid light, the rotary Polaroid stage system can rotate at a preset rotation angle range and change the polarization direction of the Polaroid light through the lambda/4 wave plate, the rotary lambda/4 wave plate bears a Polaroid to be measured and change the inclination angle of the Polaroid to be measured relative to the Polaroid light, and the power meter is used for measuring light intensity of the Polaroid light passing through the Polaroid. The measurement device for the Polaroid extinction ratio and Brewster angles can simply and accurately measure the extinction ratio and Brewster angles. The invention also provides a measurement method applied to the measurement device for the Polaroid extinction ratio and Brewster angles.
Description
Technical field
The present invention relates to polaroid measurement mechanism, particularly a kind of polaroid extinction ratio and Brewster angle measuring device and measuring method.
Background technology
Film polarizer has significant impact to the design of laser system and performance.For obtaining efficiency high as far as possible and optical quality, require that polaroid has p light transmission rate high as far as possible, and alap s light transmission rate.Use high-quality polaroid that laser instrument can be made to produce higher threshold value, thus produce high-quality laser, so the properties of product of polaroid on laser instrument have great impact.The important parameter wherein characterizing a polaroid quality is exactly extinction ratio.
The operating angle of polaroid is Brewster angle, usually it is a fixing angle, but in the production run of reality, due to process control issues, different polaroids may have different operating angles, in its respective operating angle, its performance only just can be made to reach optimum.
So the measurement to polaroid extinction ratio, strictly can control the quality of polaroid, thus improve the product quality of laser instrument.The measurement of Brewster angle, can be that directive significance has been produced in the quantification of laser instrument simultaneously.
But, in prior art not a kind of system, measure the extinction ratio of polaroid and the device of Brewster angle fast, in the production of laser instrument, in order to improve the quality of laser instrument, manual extinction ratio and the Brewster angle measuring polaroid one by one of usual needs, not only measuring speed is slow but also measuring accuracy is low, wastes a large amount of manpower and materials.
Summary of the invention
The technical matters that the present invention solves is to provide a kind of polaroid extinction ratio and Brewster angle measuring device and measuring method.
A kind of polaroid extinction ratio and Brewster angle measuring device are provided, comprise λ/4 wave plate set gradually along the polarized light direction of propagation, rotatable Glan prism system, rotating polaroid stage system and power meter, the optical axis of described λ/4 wave plate and the direction of propagation of polarized light are miter angle, described rotatable Glan prism system rotates and changes the polarization direction of the polarized light by described λ/4 wave plate in predetermined rotation angle range, rotating polaroid stage system carries polaroid to be measured and changes the angle of inclination of the opposite polarization light of polaroid to be measured, described power meter is for measuring the light intensity of the polarized light by described polaroid.
According to one of the present invention preferred embodiment, described rotatable Glan prism system comprises universal stage and is arranged on the Glan prism on described universal stage, and described universal stage drives described Glan prism to rotate, and changes the polarization direction by the polarized light of Glan prism.
According to one of the present invention preferred embodiment, described universal stage is automatically controlled universal stage, its rotation angle range is meet the rotation angle range that can occur a largest light intensity value and a minimum light intensity values, its reaction time interval greater than power meter rotated, and its angle rotated is dynamic change.
According to one of the present invention preferred embodiment, described rotating polaroid stage system comprises angular displacement platform and is arranged on the polaroid objective table on described angular displacement platform, described polaroid objective table for carrying described polaroid to be measured, and changes the angle of inclination of the relatively described polarized light of described polaroid to be measured under the rotation of described angular displacement platform.
According to one of the present invention preferred embodiment, comprise beam-expanding system further, described beam-expanding system is arranged between described rotatable Glan prism system and rotating polaroid stage system, and for expanding the clear field of described polarized light.
According to one of the present invention preferred embodiment, comprise control computer further, the rotation of rotatable Glan prism system described in described control conputer controlled, controls the rotation of described rotating polaroid stage system, and controls the measurement of described power meter to polarized light light intensity.
According to one of the present invention preferred embodiment, rotate rotatable Glan prism system and described rotating polaroid stage system, power meter measures the light intensity of polarized light when rotating polaroid stage system does not carry polaroid to be measured, as the first correlation data, and measure the light intensity of polarized light when rotating polaroid stage system carries polaroid to be measured, detect data as first, described control computer detects according to described first correlation data and described first Brewster angle that data calculate described polaroid to be measured.
According to one of the present invention preferred embodiment, set the angle of described polaroid to be measured at its Brewster angle, rotate rotatable Glan prism system, power meter measures the light intensity of polarized light when rotating polaroid stage system does not carry polaroid to be measured, as the second correlation data, and measure the light intensity of polarized light when rotating polaroid stage system carries polaroid to be measured, detect data as second, described control computer detects according to described second correlation data and described second extinction ratio that data calculate described polaroid to be measured.
A kind of polaroid extinction ratio and Brewster angle measuring method are also provided, comprise:
Step S1, provides measurement polarized light, measures polarized light without background intensity during polaroid;
Step S2, measures the intensity of polarized light to be measured through polaroid, thus measures the Brewster angle of polaroid;
Step S3, setting polaroid is Brewster angle, thus measures the extinction ratio of polaroid to be measured.
According to one of the present invention preferred embodiment, step S1 comprises further: change the polarization direction of polarized light and the polarized light measuring corresponding different polarization direction without the light intensity as a setting of light intensity during polaroid to be measured.
According to one of the present invention preferred embodiment, step S2 comprises further: what progressively change polaroid to be measured arranges angle, and measure the light intensity of polarized light through polaroid polarized light to be measured, formed and detect data, P light orientation angles and S light orientation angles is calculated according to detection data and background light intensity data, and form new image data, then polaroid to be measured is arranged on the position angle of P light, and the light intensity of polarized light corresponding to Real-time Collection, set polaroid to be measured pitch tilt in certain angle, and the angle residing for polaroid when gathering largest light intensity wherein, thus draw the Brewster angle of polaroid to be measured.
According to one of the present invention preferred embodiment, step S3 comprises further: set the angle of described polaroid to be measured at its Brewster angle, change the polarization direction of polarized light, measure the light intensity without polarized light during polaroid to be measured, as the second correlation data, change the polarization direction of polarized light, measure the light intensity of the polarized light through polaroid to be measured, detect data as second, detect according to described second correlation data and described second extinction ratio that data calculate described polaroid to be measured.
Compared to prior art, described polaroid extinction ratio and Brewster angle measuring device and measuring method can measure extinction ratio and the Brewster angle of polaroid simply, accurately, thus the quality of the high laser instrument of application polaroid can be improved, and provide important reference data to the quantification production of laser instrument.
Accompanying drawing explanation
Fig. 1 is the structural representation of a specific embodiment of polaroid extinction ratio provided by the invention and Brewster angle measuring device.
The process flow diagram of Fig. 2 polaroid extinction ratio provided by the invention and Brewster angle measuring method.
Embodiment
Refer to Fig. 1, Fig. 1 is the structural representation of a specific embodiment of polaroid extinction ratio of the present invention and Brewster angle measuring device.Polaroid extinction ratio and Brewster angle measuring device comprise λ/4 wave plate 1, universal stage 2, the Glan prism 3 be arranged on universal stage 2, beam-expanding system 4, angular displacement platform 6, the polaroid objective table 5 be arranged on angular displacement platform 6, contracting beam system 7, the power meter 8 that set gradually by the polarized light direction of propagation from left to right shown in Fig. 1 and control computer 9.The setting direction of said elements that is the direction of propagation of polarized light.
Wherein, polarized light is by λ/4 wave plate 1 input polarization sheet extinction ratio and Brewster angle measuring device, and the optical axis of λ/4 wave plate 1 and the direction of propagation of polarized light are miter angle, thus make polarized light by after λ/4 wave plate 1, become elliptically polarized light or circularly polarized light.In the present embodiment, elliptically polarized light or circularly polarized light on measurement result without impact.
In the present embodiment, polarized light is that continuous wave laser (not shown) launches the continuous polarized light produced, and its energy has higher stability, and stability, at least within 1%, is convenient to improve the accuracy measured.
Universal stage 2 can be such as automatically controlled universal stage, controls computer 9 programmable controller rotational speed to facilitate.Glan prism 3 is arranged on universal stage 2, and can rotate along with the rotation of universal stage 2, to pass through the polarization direction of the polarized light of Glan prism 3 according to certain cyclomorphosis.Usually, the rotating range of universal stage 2 can be set as from 0 degree to 360 degree, in some special cases, the rotation angle range that such as can set universal stage 2 in order to improve measurement efficiency is 0 degree to 135 degree, can ensure like this in the anglec of rotation of 0 degree to 135 degree, incident polarized light 20 can the appearance of once largest light intensity value and minimum light intensity values.Universal stage 2 can utilize rotating stepper motor to set its rotational speed, and like this, the rotational speed of universal stage 2 can as required, be manipulated by software program.Generally, the rotational speed of universal stage 2 is faster, and the measurement efficiency of polaroid extinction ratio and Brewster angle measuring device is higher.In order to ensure the accuracy measured, the reaction time interval greater than power meter 8 that universal stage 2 rotates is set.Further, the angular accuracy of universal stage 2 is larger, measurement result can be more accurate, but the usually less anglec of rotation often affects measurement efficiency, so universal stage 2 angle can be set by the design of program, and according to concrete measuring accuracy requirement, there is a change dynamically, when to meet different measuring precision, the anglec of rotation that setting is best.Universal stage 2 and Glan prism 3 form rotating Glan prism system.
The effect of beam-expanding system 4 is the certain proportions making incident polarized light 20 expand as the effective clear field of polaroid to be measured, as about 80%, test result can be made so more accurate.
Polaroid objective table 5 is for carrying polaroid 50 to be measured, and it can be polaroid clamping tooling, and can by regulating clamping tooling for the polaroid measuring different size.
Angular displacement platform 6 can be such as automatically controlled angular displacement platform, and it is for carrying polaroid objective table 5, and controls by computing machine the angle of inclination changing polaroid objective table 5.Angular displacement platform 6 precision is higher, is more conducive to the accuracy of measurement result.In actual measurement, the initial angle that can arrange angular displacement platform 6 is the Brewster angle of the theory calculate of polaroid 50 to be measured, then progressively rotational angle measuring, and finally obtains the actual polarization angle of polaroid 50 to be measured.Polaroid objective table 5 and angular displacement platform 6 form rotating polaroid stage system.
Contracting beam system 7 is corresponding with beam-expanding system 4, makes the clear field of incident polarized light 20 be reduced into pre-sizing, and by incident polarized light 20 all guiding power meters 8.
Power meter 8 is for measuring the power of institute's incident polarized light 20 in real time.Further, power meter 8 is PLC technology power meter, such as, can be to support Labview programming, is convenient to power meter 8 and background program to connect like this.Power meter 8 has reflecting time faster, is convenient to improve its work efficiency.
Control the anglec of rotation of computer 9 for programming Control universal stage 2, angular displacement platform 6, and elastic calibration device 8 measures the power of institute's detecting polarization light in real time simultaneously.
Refer to Fig. 2, Fig. 2 is the process flow diagram of polaroid extinction ratio and Brewster angle measuring method.Below specifically introduce the principle of work of polaroid extinction ratio and Brewster angle measuring device, in the present embodiment, to measure optical wavelength for 1053nm, specification be 50 × 35 × 5 polaroid be that example is specifically introduced, its principle of work comprises:
Step S1, provides measurement polarized light, measures polarized light without background intensity during polaroid;
In this step, first adjusting wavelength is the incident polarized light 20 of the continuous wave laser (not shown) of 1053nm, makes outgoing polarized light 20 center with certain height, and as 130mm, glancing incidence is to polaroid extinction ratio and Brewster angle measuring device.The polarized light 20 of laser emitting is linearly polarized light (level or vertical), first it by λ/4 wave plate 1, become elliptically polarized light by λ/4 wave plate 1 rear polarizer light 20, programmes by controlling computer 9, as Labview program, control the rotation of Glan prism 3.Open power meter 8, the light intensity value of record Glan prism 3 under different rotary angle simultaneously, and measurement result is stored into control 9 li, computer, light intensity as a setting.The rotation of Glan prism 3 angle is rotated by programmed control universal stage 2 and realizes.
In detail, owing to needing the extinction ratio measuring polaroid to be measured, so the data acquisition main when program design is distributed in horizontal direction and the vertical direction of linearly polarized light, and the excessive angle of centre on measurement result without impact, can not image data.First regulate the polarization direction of Glan prism 3 emergent light, make its polarization direction roughly in level or vertical direction, at this moment can initial setting two data acquisition centers, be respectively 0 ° and 90 °.Then regulate light path, make the direction of propagation of incident polarized light be in the vertical plane of polaroid to be measured, be S light direction relative to polaroid horizontal direction to be measured like this, vertical direction is P light direction.Like this in data acquisition, can set the data acquisition doing Gaussian distribution centered by vertical direction 90 °, and do the data acquisition of Gaussian distribution centered by level 0 °, every part can gather a certain amount of data, as the data of about 500.The test specification of vertical direction is within ± 5 °, and the test specification of horizontal direction is within ± 3 °, and other angle, can be measured without impact measurement result.
Polarized light, by after Glan prism 3, enters into beam-expanding system 4, because the hot spot of the incident light of laser instrument is general less, diameter is about 3mm, now select 8 power beam expansion lens as beam-expanding system 4, the light beam after amplification is again by contracting beam system 7 retrude bundle, thus the probe of ingoing power meter 8.Here same use reduction multiple is that the beam-shrinked mirror of 8 times is for contracting beam system 7.Power meter 8 such as can use a power meter that Labview can be used to programme of THORLABS, can link together with control computer 9 simultaneously.By the design of program software, without in polaroid situation to be measured, emptyly survey a background light intensity, be then stored in software with calculating later.
Step S2, measures the intensity of polarized light to be measured through polaroid, thus measures the Brewster angle of polaroid;
In this step, be first placed on polaroid objective table 5 by polaroid 50 to be measured, because polaroid objective table 5 is polaroid clamping tooling, it has clamp springs up and down, so can be clamped to the polaroid to be measured of different size.Angular displacement platform 6 initial angle is 34 °, can ensure that incident polarized light is 56 ° relative to the angle of polaroid 50 to be measured like this, the angular accuracy of angular displacement platform 6 is more high better, in order to avoid too high angular accuracy can reduce measurement efficiency, the angular accuracy of the stepper motor that angular displacement platform 6 is selected for can 0.1 degree, can take into account measuring accuracy and measurement efficiency like this.Then by the control of program, allow universal stage 2 again rotate according to the setting of program, gather corresponding test result with power meter 8 simultaneously.Result time this result measured and step S1 sky are surveyed is divided by, what ratio was maximum corresponds to P light orientation angles, what ratio was minimum corresponds to the orientation angles of S light, so just roughly can determine the angle in universal stage 2 of P light relative to polaroid to be measured and S light.These two angle values are stored in the middle of program respectively, then by 0 °, initial data acquisition center and 90 ° of data in these two data replacement step S1, form two new data acquisition centers.Programmed control universal stage 2 rotates to the orientation angles of P light, simultaneously the corresponding performance number of Real-time Collection.Program drives angular displacement platform 6 to be allowed to condition at pitch tilt in certain angle again, can the pitch tilt angular range of set angle displacement platform 6 be such as between ± 3 °, be captured in performance number when angle change simultaneously, in time measuring performance number and be maximum, program records the respective angles of angular displacement platform 6 automatically, and the angle obtained this time is exactly the Brewster angle of polaroid to be measured.
Step S3, setting polaroid is Brewster angle, thus measures the extinction ratio of polaroid to be measured.
In this step, first drive angular displacement platform 6, the angle of the Brewster angle making it rotate to measure.Then according to program setting universal stage 2, data acquisition is counted can be consistent with the collection number of the bias light in step S1, i.e. the data of about 500, often to rotate after one-period program automatically by gather to obtain result Storage and Processing.Program is by the detection data after placement polaroid 50 to be measured and be divided by without bias light data during polaroid 50 to be measured, thus obtains the transmitance of corresponding P light and S light, is then compared with S light by P light, just can obtain the extinction ratio of polaroid 50 to be measured.
In above-described embodiment, universal stage 2, angular displacement platform 6 and power meter 8 are all by controlling computer 9 programming Control, and the main body of program can be adopt Labview to write.Meanwhile, take two modes to carry out the process of data, a kind of is calculate to adopt fit approach when the transmitance of P light and S light, namely then simulates corresponding maximal value and minimum value by discrete data; Another kind strengthens the sampling number near being worth most, but the limit of corresponding sampling number is determined by the precision of universal stage 2, and this result has higher reliability.Meanwhile, the measurement result of above-mentioned two modes can be provided in a program simultaneously, test net result can be measured by three times and average and obtain, to strengthen the accuracy of measurement result.
Compared to prior art, the polaroid extinction ratio of the present embodiment and Brewster angle measuring device can measure extinction ratio and the Brewster angle of polaroid simply, accurately, thus the product quality of laser instrument can be improved, and provide important reference data to the quantification production of laser instrument.
In the above-described embodiments, only to invention has been exemplary description, but those skilled in the art can carry out various amendment to the present invention without departing from the spirit and scope of the present invention after reading present patent application.
Claims (1)
1. polaroid extinction ratio and a Brewster angle measuring method, comprising:
Step S1, is provided for the polarized light measured, and measures polarized light without background intensity during polaroid;
Wherein, change the polarization direction of polarized light and the polarized light measuring corresponding different polarization direction without the light intensity as a setting of light intensity during polaroid to be measured;
Step S2, measures the polarized light to be measured intensity through polaroid, thus measures the Brewster angle of polaroid;
Wherein, what progressively change polaroid to be measured arranges angle, and measure the light intensity of polarized light through polaroid polarized light to be measured, formed and detect data, P light orientation angles and S light orientation angles is calculated according to detection data and background light intensity data, and form new image data, then polaroid to be measured is arranged on the position angle of P light, and the light intensity of polarized light corresponding to Real-time Collection, set polaroid to be measured pitch tilt in certain angle, and the angle residing for polaroid when gathering largest light intensity wherein, thus draw the Brewster angle of polaroid to be measured;
Step S3, setting polaroid is Brewster angle, thus measures the extinction ratio of polaroid to be measured;
Wherein, set the angle of described polaroid to be measured at its Brewster angle, change the polarization direction of polarized light, measure the light intensity without polarized light during polaroid to be measured, as the second correlation data, change the polarization direction of polarized light, measure the light intensity of the polarized light through polaroid to be measured, detect data as second, detect according to described second correlation data and described second extinction ratio that data calculate described polaroid to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110220562.3A CN102539117B (en) | 2011-08-02 | 2011-08-02 | Measurement device and measurement method for Polaroid extinction ratio and Brewster angles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110220562.3A CN102539117B (en) | 2011-08-02 | 2011-08-02 | Measurement device and measurement method for Polaroid extinction ratio and Brewster angles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102539117A CN102539117A (en) | 2012-07-04 |
| CN102539117B true CN102539117B (en) | 2015-07-01 |
Family
ID=46346562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110220562.3A Expired - Fee Related CN102539117B (en) | 2011-08-02 | 2011-08-02 | Measurement device and measurement method for Polaroid extinction ratio and Brewster angles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102539117B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697836A (en) * | 2013-12-19 | 2014-04-02 | 合肥京东方光电科技有限公司 | Axial angle measuring device for polaroid |
| CN105785580B (en) * | 2016-04-15 | 2018-02-16 | 中国科学院上海技术物理研究所 | A kind of constant linearly polarized light generation device of controllable light intensity in polarization direction |
| CN110657954B (en) * | 2018-06-29 | 2020-09-22 | 上海微电子装备（集团）股份有限公司 | Projection objective polarization aberration measurement method |
| CN109639941B (en) * | 2018-12-14 | 2023-12-26 | 浙江大学 | Method for controlling image brightness by using polaroid |
| CN111947892B (en) * | 2020-07-17 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | Deep ultraviolet depolarizer detection device and detection method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2638044Y (en) * | 2003-06-18 | 2004-09-01 | 中国科学院上海光学精密机械研究所 | Device for measuring characteristics of wide-angle and wide-spectrum polarization beam splitting film |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3021338B2 (en) * | 1995-12-26 | 2000-03-15 | 株式会社生体光情報研究所 | Extinction ratio measurement method and extinction ratio measurement device |
| JP2000131193A (en) * | 1998-10-23 | 2000-05-12 | Nec Corp | Device for measuring extinction ratio of light module |
-
2011
- 2011-08-02 CN CN201110220562.3A patent/CN102539117B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2638044Y (en) * | 2003-06-18 | 2004-09-01 | 中国科学院上海光学精密机械研究所 | Device for measuring characteristics of wide-angle and wide-spectrum polarization beam splitting film |
Non-Patent Citations (2)
| Title |
|---|
| 根据布儒斯特定律确定偏振光元件的透光轴方位;徐昌杰;《西安工业大学学报》;19911031;第11卷(第04期);第34页倒数第1段，图2-3 * |
| 法拉第镜旋转角的偏振分束测量法;郝蕴琦等;《应用光学》;20090731;第30卷(第04期);第626-630页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102539117A (en) | 2012-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102539117B (en) | Measurement device and measurement method for Polaroid extinction ratio and Brewster angles | |
| CN103257150B (en) | The measuring method of direct measurement crystal orientation fleet angle | |
| CN103335819A (en) | Method and device for optical detection of high-precision cube-corner prism | |
| WO2011125829A1 (en) | Lens shape measurement device | |
| CN114440800B (en) | Method for accurately measuring effective area of light spot in laser damage threshold test | |
| CN105067528B (en) | Two-dimentional confocal microscopy nonlinear strength scanning system and measuring method | |
| CN104535500B (en) | The systematic parameter calibration steps of imaging ellipsometer | |
| CN208579747U (en) | A kind of angle rapid measurement device of transparent wedge | |
| CN102252830B (en) | Optical ghost image detection device and detection method thereof | |
| CN111458696A (en) | Calibration method for indication error of handheld laser range finder | |
| CN115079346B (en) | Installation and adjustment device and method for coupling space light to optical fiber | |
| CN109540803A (en) | A kind of ellipsometer device and the detection method based on the device | |
| CN102564741B (en) | Method and system for measuring grating diffraction efficiency by using ellipsoidal reflecting mirror | |
| CN100462773C (en) | Method for accurate determination of laser transmitting-receiving path coaxial reference using Zernike coefficient | |
| CN209477512U (en) | A kind of laser-processing system optical path calibrating device | |
| Hsia et al. | Bidirectional Reflectometry. Part I.: A High Resolution Laser Bidirectional Reflectometer With Results on Several Optical Coatings | |
| CN114812889A (en) | Large-caliber optical element stress detection device and detection method thereof | |
| CN207741917U (en) | A kind of spectroscope measuring device that can accurately control incidence angle | |
| CN201975681U (en) | Light-beam micro-displacement online automatic installation and adjustment system for ring laser | |
| CN205027666U (en) | Measurement device for medium refracting index | |
| CN107727371A (en) | Measure astronomical optical fiber transmissivity and the system and measuring method of focal ratio degradation simultaneously | |
| CN102162751A (en) | Method for measuring space optical distribution function | |
| CN109798849B (en) | Frequency doubling crystal dead axle error measuring device and measuring method | |
| CN110207587A (en) | A kind of prism of corner cube optical apex measuring device and measurement method | |
| CN105157617A (en) | Spherical surface automatic centering method applied to spherical surface optical element surface defect detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150701 Termination date: 20200802 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |