CN110207587A - A kind of prism of corner cube optical apex measuring device and measurement method - Google Patents
A kind of prism of corner cube optical apex measuring device and measurement method Download PDFInfo
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- CN110207587A CN110207587A CN201910495513.7A CN201910495513A CN110207587A CN 110207587 A CN110207587 A CN 110207587A CN 201910495513 A CN201910495513 A CN 201910495513A CN 110207587 A CN110207587 A CN 110207587A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
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- Chemical & Material Sciences (AREA)
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- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
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Abstract
The present invention relates to precise engineering survey technical field, disclosing a kind of prism of corner cube optical apex measuring device and measurement method, prism of corner cube optical apex measuring device includes laser ranging module, spectroscope and the prism of corner cube set gradually along same optical path;Laser ranging module is used for emission measurement light, and measures the distance between the optical apex with prism of corner cube;The second reflecting mirror is provided on the reflected light path of spectroscopical first light splitting surface, the transmitted light path of spectroscopical first light splitting surface relative laser range finder module is equipped with prism of corner cube;Spectroscopical first light splitting surface is equipped with position sensitive detector with respect to the transmitted light path of the second reflecting mirror, while position sensitive detector also is located on the reflected light path of spectroscopical second light splitting surface.The present invention utilizes prism of corner cube optical apex measuring device, makes it that should be able to be applied to the calibration process of prism of corner cube station meter in laser tracker measuring system, realizes that diagonal cone lens optical vertex spatial position is accurately positioned and is measured.
Description
Technical field
The present invention relates to precise engineering survey technical field, in particular to a kind of prism of corner cube optical apex measuring device and
Measurement method.
Background technique
Currently, generalling use prism of corner cube station meter to the calibration of laser tracker to complete.Laser tracker is by dividing
Not Miao Zhun station meter both ends prism of corner cube, measurement obtains the space coordinate of two prism of corner cube optical apex, and then obtains two
Linear distance value between optical apex calibrates laser tracker by being compared with nominal value.
Acquisition methods between the diagonal cone prism station meter optical apex of domestic minority measurement technology mechanism apart from nominal value
Carried out some researchs, and usually Multi-point detection was carried out using the diagonal cone prism spherical outside surface of coordinate measuring machine probe, by sensing point
It is fitted to a sphere, determines the length value of standard ball bar by evaluating the spacing of two centre ofs sphere.Above-mentioned calibration process assumes
Prism of corner cube spherical outside surface center is overlapped with lens optical center, but practical since there are deviations for prism of corner cube processing, and two centers must
It is not overlapped so, it reduce the accuracy of prism of corner cube station meter.The process that therefore, it is necessary to calibrate in diagonal cone prism station meter
In direct pointing the optical apex of prism of corner cube, determine its spatial position, improve the accuracy of prism of corner cube station meter.
Summary of the invention
(1) technical problems to be solved
In view of above-mentioned technological deficiency and application demand, the application proposes a kind of prism of corner cube optical apex measuring device and measurement
Method, to solve the problems, such as that prism of corner cube optical apex is accurately positioned in prism of corner cube station meter calibration process.
(2) technical solution
To solve the above problems, the present invention provides a kind of prism of corner cube optical apex measuring device, comprising: along same optical path
Laser ranging module, spectroscope and the prism of corner cube set gradually;The laser ranging module is used for emission measurement light, and measures
The distance between optical apex of the prism of corner cube;
It is provided with the second reflecting mirror on the reflected light path of spectroscopical first light splitting surface, described spectroscopical first point
The transmitted light path of the relatively described laser ranging module of smooth surface is equipped with the prism of corner cube;Spectroscopical first light splitting surface phase
Position sensitive detector is equipped with to the transmitted light path of second reflecting mirror, while the position sensitive detector also is located at described point
On the reflected light path of the relatively described prism of corner cube of second light splitting surface of light microscopic.
Further, further includes: position adjusts platform, and the position adjustment platform is used to fix the prism of corner cube, and
The prism of corner cube is controlled to move in three-dimensional space.
Further, further includes: first laser absorbing sheet;First laser absorbing sheet setting is described spectroscopical the
On the transmitted light path of the relatively described laser ranging module of one light splitting surface, the first laser absorbing sheet piece is detachably secured to described
Between spectroscope and the prism of corner cube.
Further, further includes: second laser absorbing sheet;Second laser absorbing sheet setting is described spectroscopical the
On the reflected light path of one light splitting surface, the second laser absorbing sheet piece is detachably secured to the spectroscope and second reflection
Between mirror.
Further, further includes: the first reflecting mirror;First reflecting mirror setting is in the laser ranging module and described
In optical path between spectroscope, for controlling the direction of propagation of measurement light.
Further, the spectroscope is cubic type beam splitter, is put together by two pieces of 45 ° of right angle prisms, is measured
Light divides on the inclined-plane of the prism.
Further, the measurement light angle that the spectroscope and the laser ranging module issue is 45 degree, the laser
The measurement light that range finder module issues passes through the center of spectroscopical first light splitting surface.
To solve the above problems, the present invention also provides a kind of measurement method of prism of corner cube optical apex, the method packet
Include following steps:
Step S1: starting laser ranging module, the measurement light for issuing laser ranging module is by spectroscopical first point
It is divided into two parts after smooth surface;
Step S2: first part measures light and reaches the second reflecting mirror, quilt along reflected light path by spectroscopical first light splitting surface
Measurement light after the reflection of second reflecting mirror passes through spectroscopical first light splitting surface along transmitted light path in-position Sensitive Apparatus, record
Under position coordinates of the spot center on position sensitive detector and as reference coordinate at this time;
Step S3: second part measures light and reaches prism of corner cube, adjustment along transmitted light path by spectroscopical first light splitting surface
The position of prism of corner cube arrives the measurement light after reflecting by prism of corner cube along reflected light path by spectroscopical second light splitting surface
Up to position sensitive detector, until position coordinates of the spot center on position sensitive detector are consistent with reference coordinate at this time, record
The space coordinate of prism of corner cube at this time;
Step S4: keeping the position of prism of corner cube constant, using the laser ranging function of laser ranging module, measures pyramid
The distance between prism apex and laser ranging module obtain the height coordinate of prism of corner cube, determine the optics top of prism of corner cube
The space coordinate of point.
Further, if first laser absorbing sheet and second laser are arranged in the prism of corner cube optical apex measuring device
After absorbing sheet, the step S2 specifically comprises the following steps:
First laser absorbing sheet is placed, second laser absorbing sheet is removed, makes first part's measurement light by spectroscopical first
Light splitting surface reaches the second reflecting mirror along reflected light path, passes through spectroscopical first light splitting by the measurement light after the reflection of the second reflecting mirror
Position coordinates and work of the spot center on position sensitive detector at this time are recorded along transmitted light path in-position Sensitive Apparatus in face
For reference coordinate.
Further, if first laser absorbing sheet and second laser are arranged in the prism of corner cube optical apex measuring device
After absorbing sheet, the step S3 specifically comprises the following steps:
Second laser absorbing sheet is placed, first laser absorbing sheet is removed, makes second part measurement light by spectroscopical first
Light splitting surface reaches prism of corner cube along transmitted light path, adjusts the position of prism of corner cube, makes the measurement light after reflecting by prism of corner cube
By spectroscopical second light splitting surface along reflected light path in-position Sensitive Apparatus, until spot center is in position sensor at this time
Position coordinates on part are consistent with reference coordinate, record the space coordinate of prism of corner cube at this time.
(3) beneficial effect
The present invention provides a kind of prism of corner cube optical apex measuring device and measurement method, which surveys
Amount device passes through the laser ranging module, spectroscope and the prism of corner cube that set gradually along same optical path.At spectroscopical first point
The second reflecting mirror, the transmitted light path of spectroscopical first light splitting surface relative laser range finder module are provided on the reflected light path of smooth surface
It is equipped with prism of corner cube.Spectroscopical first light splitting surface is equipped with position sensitive detector with respect to the transmitted light path of the second reflecting mirror,
Position sensitive detector also is located on the reflected light path of spectroscopical second light splitting surface simultaneously, makes to utilize the prism of corner cube optical apex
Measuring device can realize that diagonal cone lens optical vertex spatial position is accurately positioned and is measured after straight calibration.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram of prism of corner cube optical apex measuring device provided in an embodiment of the present invention;
Fig. 2 is the flow diagram of the measurement method of prism of corner cube optical apex provided in an embodiment of the present invention;
Wherein, 1: laser ranging module;2: the first reflecting mirrors;3: second laser absorbing sheet;4: the second reflecting mirrors;5: the first
Laser absorption piece;6: prism of corner cube;7: position adjusts platform;8: spectroscope;9: position sensitive detector.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
The embodiment of the present invention provides a kind of prism of corner cube optical apex measuring device, as shown in Figure 1, the prism of corner cube optics
Vertex measuring device includes the laser ranging module 1 set gradually along same optical path, spectroscope 8 and prism of corner cube 6.Laser ranging
Module 1 is used for emission measurement light, and measures the distance between the optical apex with prism of corner cube 6, i.e. laser ranging module 1 has
Two kinds of functions, on the one hand can issue continuous collimation laser, and for measuring the optical apex position of prism of corner cube 6, this swashs
The wavelength of light depends on the response wave length of position sensitive detector 9.On the other hand it can be measured by way of laser ranging sharp
The distance between the optical apex of ligh-ranging module 1 and prism of corner cube 6.It is set on the reflected light path of first light splitting surface of spectroscope 8
It is equipped with the second reflecting mirror 4, the transmitted light path of the first light splitting surface relative laser range finder module 1 of spectroscope 8 is equipped with prism of corner cube
6.First light splitting surface of spectroscope 8 is equipped with position sensitive detector 9 with respect to the transmitted light path of the second reflecting mirror 4, while position is quick
Inductor component 9 also is located on the reflected light path of the opposite prism of corner cube 6 of the second light splitting surface of spectroscope 8.Wherein, prism of corner cube 6
Optical characteristics is to reflect after it can will be incident to light shift a distance of prism of corner cube 6 along former direction.Particularly, work as light
When being incident to 6 optical apex of prism of corner cube, reflected light will not deviated, directly be returned along former direction.
In the present embodiment, the collimation laser that laser ranging module 1 issues is divided into two after propagating to the light splitting surface of spectroscope 8
Point, a part is propagated as calibration laser along X-axis positive direction, is reflected after reaching the second reflecting mirror of plane 4.Second reflecting mirror 4
Surface normal is parallel with incident ray, therefore light is propagated after the reflection of the second reflecting mirror 4 along X-axis negative direction, and spectroscope 8 is passed through
In-position Sensitive Apparatus 9 afterwards.Another part is propagated along Z axis negative direction as measurement laser, passes through angle of arrival after spectroscope 8
Cone prism 6 is propagated after being reflected by prism of corner cube 6 along Z axis positive direction, and the face of being split reflexes to position sensing after reaching spectroscope 8
Device 9.
During measuring optical apex using the prism of corner cube optical apex measuring device, first start laser ranging module
1, the measurement light for issuing laser ranging module 1 is divided into two parts after the first light splitting surface of spectroscope 8.First part's measurement
Light reaches the second reflecting mirror 4 along reflected light path by the first light splitting surface of spectroscope 8, by the measurement light after the reflection of the second reflecting mirror 4
It is quick in position to record spot center at this time along transmitted light path in-position Sensitive Apparatus 9 for the first light splitting surface across spectroscope 8
Position coordinates on inductor component 9 and as reference coordinate.Second part measures light by the first light splitting surface of spectroscope 8 along transmitted light
Road reaches prism of corner cube 6.The position for adjusting prism of corner cube 6, in the present embodiment, it is only necessary to along the position of X, Y-direction adjustment prism of corner cube 6
It sets, makes the measurement light after reflecting by prism of corner cube 6 by the second light splitting surface of spectroscope 8 along reflected light path in-position sensitivity
Device 9 records pyramid at this time until position coordinates of the spot center on position sensitive detector 9 are consistent with reference coordinate at this time
The space coordinate of prism 6 completes aiming measurement of 6 optical apex of prism of corner cube in X/Y plane at this time.Keep prism of corner cube 6
Position is constant, using the laser ranging function of laser ranging module 1, measures between prism of corner cube vertex and laser ranging module 1
Distance, obtain prism of corner cube 6 height coordinate, determine the space coordinate of the optical apex of prism of corner cube 6.
Wherein, it is the position for being conveniently adjusted and recording prism of corner cube 6, as shown in Figure 1, settable position adjusts platform 7, leads to
The fixed prism of corner cube 6 of position adjustment platform 7 is crossed, and controls prism of corner cube 6 and moves in three-dimensional space, the prism of corner cube being aimed
6 are placed on position adjustment platform 7.Position adjustment platform 7, which can drive, to be aimed prism of corner cube 6 and moves along tri- directions X, Y, Z.
The present invention provides a kind of prism of corner cube optical apex measuring device prism of corner cube optical apex measuring device and passes through
Laser ranging module, spectroscope and the prism of corner cube set gradually along same optical path.In the reflection of spectroscopical first light splitting surface
The second reflecting mirror is provided in optical path, the transmitted light path of spectroscopical first light splitting surface relative laser range finder module is equipped with pyramid
Prism;Spectroscopical first light splitting surface is equipped with position sensitive detector with respect to the transmitted light path of the second reflecting mirror, while position is quick
Inductor component also is located on the reflected light path of spectroscopical second light splitting surface, enables to utilize the prism of corner cube optical apex measuring device
Enough after straight calibration, realize that diagonal cone lens optical vertex spatial position is accurately positioned and is measured.
According to one embodiment of present invention, as shown in Figure 1, if without enough spaces, and laser ranging module 1
The collimated laser beam of sending is propagated along X-axis positive direction, and the first reflecting mirror can be arranged between laser ranging module 1 and spectroscope 8
2, change the direction of propagation of measurement light.
According to one embodiment of present invention, as shown in Figure 1, to avoid in measurement process between a variety of measurement light
Interference causes the error of experiment, also settable first laser absorbing sheet 5.The of spectroscope 8 is arranged in first laser absorbing sheet 5
On the transmitted light path of one light splitting surface relative laser range finder module 1, first laser absorbing sheet 5 is detachably secured to spectroscope 8 and angle
Between cone prism 6.Similarly, first point of spectroscope 8 is arranged in also settable second laser absorbing sheet 3, second laser absorbing sheet 3
On the reflected light path of smooth surface, second laser absorbing sheet 3 is detachably secured between spectroscope 8 and the second reflecting mirror 4.First laser
Absorbing sheet 5 and second laser absorbing sheet 3 absorb laser for blocking to respective place optical path.
When measuring reference coordinate, first laser absorbing sheet 5 is first placed, second laser absorbing sheet 3 is removed, surveys first part
It measures light and reaches the second reflecting mirror 4 along reflected light path by the first light splitting surface of spectroscope 8, by the measurement after the reflection of the second reflecting mirror 4
Light pass through spectroscope 8 the first light splitting surface along transmitted light path in-position Sensitive Apparatus 9, record at this time spot center in position
Position coordinates on Sensitive Apparatus 9 and as reference coordinate.
When needing to measure the space coordinate of prism of corner cube, second laser absorbing sheet 3 is first placed, removes first laser absorbing sheet
5, so that second part measurement light is reached prism of corner cube 6 along transmitted light path by the first light splitting surface of spectroscope 8, adjusts prism of corner cube 6
Position, make by prism of corner cube 6 reflect after measurement light by spectroscope 8 the second light splitting surface along reflected light path in-position
Sensitive Apparatus 9, until position coordinates of the spot center on position sensitive detector 9 are consistent with reference coordinate at this time, record is at this time
The space coordinate of prism of corner cube 6.
According to one embodiment of present invention, as shown in Figure 1, spectroscope 8 is cubic type beam splitter, by two pieces
45 ° of right angle prisms are put together, and measurement light divides on prism inclined-plane.Spectroscope 8 and laser ranging module 1 issue
Measurement light angle be 45 degree, i.e., spectroscope 8 be located at along the measuring beam that Z axis is propagated, the angle of light splitting surface and YZ plane
It is 45 °, and the light that measures that laser ranging module 1 issues passes through the center of the first light splitting surface of spectroscope 8.
The present invention also provides a kind of measurement methods of prism of corner cube optical apex.As shown in Figure 1, measurement method utilizes pyramid
Lens optical vertex measuring device, prism of corner cube optical apex measuring device include the laser ranging set gradually along same optical path
Module 1, spectroscope 8 and prism of corner cube 6.Laser ranging module 1 is used for emission measurement light, and measures the optics with prism of corner cube 6
The distance between vertex, is provided with the second reflecting mirror 4 on the reflected light path of the first light splitting surface of spectroscope 8, and the first of spectroscope 8
The transmitted light path of light splitting surface relative laser range finder module 1 is equipped with prism of corner cube 6.First light splitting surface of spectroscope 8 is with respect to second
The transmitted light path of reflecting mirror 4 is equipped with position sensitive detector 9, while position sensitive detector 9 also is located at the second light splitting of spectroscope 8
On the reflected light path of the opposite prism of corner cube 6 in face.More specifical structure please refers to the relevant verbal description of above-mentioned Fig. 1, herein
It repeats no more.
As shown in Fig. 2, this method comprises the following steps:
Step S1: starting laser ranging module, the measurement light for issuing laser ranging module is by spectroscopical first point
It is divided into two parts after smooth surface;
Step S2: first part measures light and reaches the second reflecting mirror, quilt along reflected light path by spectroscopical first light splitting surface
Measurement light after the reflection of second reflecting mirror passes through spectroscopical first light splitting surface along transmitted light path in-position Sensitive Apparatus, record
Under position coordinates of the spot center on position sensitive detector and as reference coordinate at this time;
Step S3: second part measures light and reaches prism of corner cube, adjustment along transmitted light path by spectroscopical first light splitting surface
The position of prism of corner cube arrives the measurement light after reflecting by prism of corner cube along reflected light path by spectroscopical second light splitting surface
Up to position sensitive detector, until position coordinates of the spot center on position sensitive detector are consistent with reference coordinate at this time, record
The space coordinate of prism of corner cube at this time;
Step S4: keeping the position of prism of corner cube constant, using the laser ranging function of laser ranging module, measures pyramid
The distance between prism apex and laser ranging module obtain the height coordinate of prism of corner cube, determine the optics top of prism of corner cube
The space coordinate of point.
Wherein, as shown in Figure 1, if first laser absorbing sheet 5 and the are arranged in prism of corner cube optical apex measuring device
After dual-laser absorbing sheet 3, step S2 includes the following steps: first to place first laser absorbing sheet 5, removes second laser absorbing sheet 3,
First part's measurement light is set to reach the second reflecting mirror 4 along reflected light path by the first light splitting surface of spectroscope 8, by the second reflecting mirror 4
The first light splitting surface that measurement light after reflection passes through spectroscope 8 records this time along transmitted light path in-position Sensitive Apparatus 9
Position coordinates of the spot center on position sensitive detector 9 and as reference coordinate.
Wherein, as shown in Figure 1, if first laser absorbing sheet 5 and the are arranged in prism of corner cube optical apex measuring device
After dual-laser absorbing sheet 3, step S3 includes the following steps: first to place second laser absorbing sheet 3, removes first laser absorbing sheet 5,
Second part measurement light is set to reach prism of corner cube 6 along transmitted light path by the first light splitting surface of spectroscope 8, adjustment prism of corner cube 6
Position keeps the measurement light after reflecting by prism of corner cube 6 quick along reflected light path in-position by the second light splitting surface of spectroscope 8
Inductor component 9 records this hour angle until position coordinates of the spot center on position sensitive detector 9 are consistent with reference coordinate at this time
The space coordinate of cone prism 6.
Specifically, as shown in Figure 1, the detailed process of prism of corner cube optical apex measurement are as follows: carry out the self-correcting of device first
It is quasi-.Start laser ranging module 1, place first laser absorbing sheet 5, removes second laser absorbing sheet 3.Laser ranging module 1 is sent out
Continuous collimation laser out reaches the second reflecting mirror 4 after the first reflecting mirror 2, spectroscope 8, after the reflection of the second reflecting mirror 4
Across 8 in-position Sensitive Apparatus 9 of spectroscope.Position coordinates of the spot center on position sensitive detector 9 at this time are recorded to make
For reference coordinate, finishing device self calibration.After the self calibration of finishing device, starts diagonal cone lens optical vertex and carry out aiming survey
Amount.First laser absorbing sheet 5 is removed, second laser absorbing sheet is placed.It is aimed prism of corner cube 6 and is placed on position adjustment platform 7
On.Position adjustment platform 7, which can drive, to be aimed prism of corner cube 6 and moves along tri- directions X, Y, Z.The optics of prism of corner cube 6 is special
Property be that it can will be incident to after light shift a distance of prism of corner cube and reflects along former direction.Particularly, when light is incident to
When prism of corner cube optical apex, reflected light will not deviated, directly be returned along former direction.Therefore when measurement light does not impinge on angle
When the optical centre of cone prism 6, when reflected light travels to position sensitive detector 9, the centre coordinate of reflected light hot spot and reference
Coordinate is inconsistent.Along the position of X, Y-direction adjustment prism of corner cube 6, until reflected light spot center coordinate is consistent with reference coordinate,
The space coordinate of prism of corner cube 6 at this time is recorded, completes aiming measurement of 6 optical apex of prism of corner cube in X/Y plane at this time.It protects
The position for holding prism of corner cube 6 is constant, using the laser ranging function of laser ranging module 1, measures prism of corner cube vertex and laser
The distance between range finder module 1.In this way, the spatial position of 6 optical apex of prism of corner cube can determine completely.
Multiplicating test is carried out using the measurement on above-mentioned technical proposal diagonal cone lens optical vertex, utilizes laser interference
Instrument measures three-dimensional position adjustment platform along X, the displacement of Y-direction, investigates its repetitive positioning accuracy.Prism of corner cube is being aimed at for the first time
Optical apex after, set 0 for the displacement measurement system indicating value of X, Y, Z-direction, using this position as reference.Diagonal cone prism
Optical apex, which be repeated several times, aims at measurement, the reading of X, Y, Z-direction level measuring system is recorded respectively, according to Bessel Formula
Calculate the repetitive positioning accuracy and space coordinate repetitive positioning accuracy of all directions.Measurement result see the table below 1.
The standard uncertainty that all directions positioning repeatability introduces are as follows:
Space coordinate measurement standard uncertainty are as follows:
By above-mentioned calculating it is found that diagonal cone prism apex carries out multiplicating location test, the measurement of all directions is uncertain
Degree and space coordinate uncertainty of measurement are smaller, it was demonstrated that the measurement method has preferable measurement accuracy.
1 prism of corner cube optical apex measurement reproducibility test data of table
In conclusion the measurement method of prism of corner cube optical apex provided by the invention, by successively being set along same optical path
Laser ranging module, spectroscope and the prism of corner cube set.Second is provided on the reflected light path of spectroscopical first light splitting surface
The transmitted light path of reflecting mirror, spectroscopical first light splitting surface relative laser range finder module is equipped with prism of corner cube.Spectroscopical
One light splitting surface is equipped with position sensitive detector with respect to the transmitted light path of the second reflecting mirror, while position sensitive detector also is located at light splitting
On the reflected light path of second light splitting surface of mirror, enable using the prism of corner cube optical apex measuring device after straight calibration, it is real
Existing diagonal cone lens optical vertex spatial position is accurately positioned and is measured.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member
It is physically separated with being or may not be, component shown as a unit may or may not be physics list
Member, it can it is in one place, or may be distributed over multiple network units.It can be selected according to the actual needs
In some or all of the modules achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying creativeness
Labour in the case where, it can understand and implement.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features;
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of prism of corner cube optical apex measuring device characterized by comprising
Laser ranging module, spectroscope and the prism of corner cube set gradually along same optical path;The laser ranging module is for sending out
Measurement light is penetrated, and measures the distance between the optical apex with the prism of corner cube;
The second reflecting mirror, spectroscopical first light splitting surface are provided on the reflected light path of spectroscopical first light splitting surface
The transmitted light path of the relatively described laser ranging module is equipped with the prism of corner cube;Spectroscopical first light splitting surface is with respect to institute
The transmitted light path for stating the second reflecting mirror is equipped with position sensitive detector, while the position sensitive detector is positioned at described spectroscopical
On the reflected light path of the relatively described prism of corner cube of second light splitting surface.
2. prism of corner cube optical apex measuring device according to claim 1, which is characterized in that further include:
Position adjusts platform, and the position adjustment platform controls the prism of corner cube three for fixing the prism of corner cube
It is moved in dimension space.
3. prism of corner cube optical apex measuring device according to claim 1, which is characterized in that further include:
First laser absorbing sheet;The first laser absorbing sheet is arranged in spectroscopical relatively described laser of first light splitting surface
On the transmitted light path of range finder module, the first laser absorbing sheet be detachably secured to the spectroscope and the prism of corner cube it
Between.
4. prism of corner cube optical apex measuring device according to claim 1, which is characterized in that further include:
Second laser absorbing sheet;The reflected light path of spectroscopical first light splitting surface is arranged in the second laser absorbing sheet
On, the second laser absorbing sheet is detachably secured between the spectroscope and second reflecting mirror.
5. prism of corner cube optical apex measuring device according to claim 1, which is characterized in that further include:
First reflecting mirror;First reflecting mirror is arranged in the optical path between the laser ranging module and the spectroscope,
For controlling the direction of propagation of measurement light.
6. prism of corner cube optical apex measuring device according to claim 1, which is characterized in that the spectroscope is cube
Figure beam splitter is put together by two pieces of 45 ° of right angle prisms, and measurement light divides on the inclined-plane of the prism.
7. prism of corner cube optical apex measuring device according to claim 6, which is characterized in that the spectroscope with it is described
The measurement light angle that laser ranging module issues is 45 degree, and the measurement light that the laser ranging module issues passes through the spectroscope
The first light splitting surface center.
8. a kind of measurement method of prism of corner cube optical apex, which is characterized in that the measurement method is appointed using claim 1-7
One prism of corner cube optical apex measuring device, described method includes following steps:
Step S1: starting laser ranging module, the measurement light for issuing laser ranging module is by spectroscopical first light splitting surface
After be divided into two parts;
Step S2: first part measures light and reaches the second reflecting mirror along reflected light path by spectroscopical first light splitting surface, by second
Measurement light after reflecting mirror reflection passes through spectroscopical first light splitting surface along transmitted light path in-position Sensitive Apparatus, records this
When position coordinates of the spot center on position sensitive detector and as reference coordinate;
Step S3: second part measures light and reaches prism of corner cube along transmitted light path by spectroscopical first light splitting surface, adjusts pyramid
The position of prism makes the measurement light after reflecting by prism of corner cube reach position along reflected light path by spectroscopical second light splitting surface
Sensitive Apparatus is set, until position coordinates of the spot center on position sensitive detector are consistent with reference coordinate at this time, record is at this time
The space coordinate of prism of corner cube;
Step S4: keeping the position of prism of corner cube constant, using the laser ranging function of laser ranging module, measures prism of corner cube
The distance between vertex and laser ranging module obtain the height coordinate of prism of corner cube, determine the optical apex of prism of corner cube
Space coordinate.
9. measurement method according to claim 8, which is characterized in that if in the prism of corner cube optical apex measuring device
After first laser absorbing sheet and second laser absorbing sheet is arranged, the step S2 specifically comprises the following steps:
First laser absorbing sheet is placed, second laser absorbing sheet is removed, is divided first part's measurement light by spectroscopical first
Face reaches the second reflecting mirror along reflected light path, passes through spectroscopical first light splitting surface edge by the measurement light after the reflection of the second reflecting mirror
Transmitted light path in-position Sensitive Apparatus records position coordinates on position sensitive detector of spot center at this time and as ginseng
Examine coordinate.
10. measurement method according to claim 8, which is characterized in that if the prism of corner cube optical apex measuring device
After middle setting first laser absorbing sheet and second laser absorbing sheet, the step S3 specifically comprises the following steps:
Second laser absorbing sheet is placed, first laser absorbing sheet is removed, is divided second part measurement light by spectroscopical first
Face reaches prism of corner cube along transmitted light path, adjusts the position of prism of corner cube, passes through the measurement light after reflecting by prism of corner cube
Spectroscopical second light splitting surface is along reflected light path in-position Sensitive Apparatus, until spot center is on position sensitive detector at this time
Position coordinates it is consistent with reference coordinate, the space coordinate of record prism of corner cube at this time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910495513.7A CN110207587B (en) | 2019-06-10 | 2019-06-10 | Method for measuring optical vertex of pyramid prism |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114978301A (en) * | 2022-03-28 | 2022-08-30 | 昂纳信息技术(深圳)有限公司 | Optical test system, calibration method thereof and calibration piece |
US20230063646A1 (en) * | 2020-11-18 | 2023-03-02 | Lumus Ltd. | Optical-based validation of orientations of internal facets |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05215526A (en) * | 1992-02-06 | 1993-08-24 | Hitachi Ltd | Surface-shape measuring apparatus |
US20020182743A1 (en) * | 1999-12-07 | 2002-12-05 | Perkins Elaine Ann | Surface plasmon resonance |
CA2214517C (en) * | 1996-01-24 | 2005-08-09 | Leica Ag | Measuring ball reflector |
CN102506764A (en) * | 2011-10-14 | 2012-06-20 | 上海理工大学 | Laser interference system for displacement linearity measurement |
CN108089196A (en) * | 2017-12-14 | 2018-05-29 | 中国科学院光电技术研究所 | Optics is initiative and is fused non-cooperative target position appearance measuring device passively |
CN108286997A (en) * | 2018-01-16 | 2018-07-17 | 广东省特种设备检测研究院珠海检测院 | A kind of laser tracking measurement system and method |
CN207636023U (en) * | 2017-12-18 | 2018-07-20 | 中国科学院西安光学精密机械研究所 | Cube-corner prism retroreflective light spot positioning accuracy detection device |
-
2019
- 2019-06-10 CN CN201910495513.7A patent/CN110207587B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05215526A (en) * | 1992-02-06 | 1993-08-24 | Hitachi Ltd | Surface-shape measuring apparatus |
CA2214517C (en) * | 1996-01-24 | 2005-08-09 | Leica Ag | Measuring ball reflector |
US20020182743A1 (en) * | 1999-12-07 | 2002-12-05 | Perkins Elaine Ann | Surface plasmon resonance |
CN102506764A (en) * | 2011-10-14 | 2012-06-20 | 上海理工大学 | Laser interference system for displacement linearity measurement |
CN108089196A (en) * | 2017-12-14 | 2018-05-29 | 中国科学院光电技术研究所 | Optics is initiative and is fused non-cooperative target position appearance measuring device passively |
CN207636023U (en) * | 2017-12-18 | 2018-07-20 | 中国科学院西安光学精密机械研究所 | Cube-corner prism retroreflective light spot positioning accuracy detection device |
CN108286997A (en) * | 2018-01-16 | 2018-07-17 | 广东省特种设备检测研究院珠海检测院 | A kind of laser tracking measurement system and method |
Non-Patent Citations (1)
Title |
---|
匡萃方 等: "《角锥棱镜用于激光直线度测量的特性分析》", 《光学技术》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230063646A1 (en) * | 2020-11-18 | 2023-03-02 | Lumus Ltd. | Optical-based validation of orientations of internal facets |
US11747137B2 (en) * | 2020-11-18 | 2023-09-05 | Lumus Ltd. | Optical-based validation of orientations of internal facets |
CN114978301A (en) * | 2022-03-28 | 2022-08-30 | 昂纳信息技术(深圳)有限公司 | Optical test system, calibration method thereof and calibration piece |
CN114978301B (en) * | 2022-03-28 | 2023-09-12 | 昂纳科技(深圳)集团股份有限公司 | Optical test system, calibration method thereof and calibration piece |
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