The laser parameter measuring system
Technical field
The present invention relates to a kind of measuring system, particularly a kind of for the measuring system that laser parameter is measured.
Background technology
The continuous development of laser technique makes it be widely used every field.Thus, also seem for the detection of each parameter of laser instrument and to become more and more important, common one-stop laser instrument testing synthesis parameter system mainly comprises energy test unit, time waveform test cell, time waveform test cell, near-field test unit, far field test cell.The energy test unit mainly carries out monitoring and the measurement of laser single-pulse energy, energy stability.The time waveform test cell carries out pulse width, pulse front edge, edge, back, pulse stability, the isoparametric measurement of repetition frequency.Best near field position is found out by control driven by motor one scientific grade CCD start in the near-field test unit, measures spot size, the softening factor, near field percentage modulation Rayleigh distance, as transmitting position etc.The far field test cell is found out beam waist position by the one scientific grade CCD start of control driven by motor, measures the angle of divergence, directive property and diffraction multiple, beam waist.
As shown in Figure 1, existing laser instrument comprehensive parameter measuring system comprises first lens 110 that set gradually according to the light beam incident direction, first wedge 120, a far field image harvester 130, second wedge 140,150, the 3rd wedges 160 of an energy probe, waveform 170, second lens 180 of probe and a near field image collecting device 190, this measuring system also comprises a platform (not shown), and said elements all is arranged on this platform.
According to the lens imaging principle, be the focal length of described first lens 110 to the distance of described far field image harvester 130 again from described first lens 110 through described first wedge 120, the focal length that equals first lens 110 to the distance of described second lens 180 again through described first wedge 120, described second wedge 140, described the 3rd wedge 160 from described first lens 110 adds the distance of the focal distance f of second lens 180, namely greater than the focal length of described first lens 110, take all factors into consideration above distance, the platform that then carries said elements needs bigger size.In like manner, if it is x that the picture of last a slice lens emergent light of the outside laser instrument to be measured of system requirements transmits distance, then first lens 110 in the existing measuring system transmit apart from x for picture with the distance of last a slice lens (not shown) of outside laser instrument to be measured, namely first lens 110 just in time are positioned on the picture plane of outside laser instrument to be measured, and namely the platform of this measuring system is far away to the distance of last a slice lens of outside laser instrument to be measured.
This shows, because the use of existing measuring system need occupy bigger space, do not meet the trend of current lightness, portability.In addition, the platform size that existing measuring system is used for carrying each element is bigger, has increased the hard work amount to mass production, and it is not easy to reach up and down move left and right, makes range of application be very restricted.And when testing laser device and above-mentioned optical table not at grade the time, as shown in Figure 1, the general employing of existing measuring system hangs over a vertical frame with two 45 degree catoptrons 113,115, the light beam of the output of testing laser device is imported this measuring system, cause the cost of total system higher thus, and increased and installed and regulated above-mentioned two 45 degree catoptrons 113,115 operation, caused the installation of total system and regulate comparatively complicated.
Summary of the invention
Big for taking up room of solving that prior art laser parameter measuring system exists, cost is high and regulate the complicated technology problem, the invention provides a kind of take up room little, cost is low, be convenient to the laser parameter measuring system of installing and regulating.
The invention provides a kind of laser parameter measuring system, it comprises first lens, first wedge, second wedge, the 3rd wedge, first image collecting device, second image collecting device, an energy probe and a waveform probe, the light beam of laser instrument output outside to be measured is transmitted to described first wedge through described first lens, pass second wedge successively through the described first wedge beam reflected, the 3rd wedge enters first image collecting device, light beam through the described first wedge transmission enters described energy probe, enter second image collecting device through the described second wedge beam reflected, enter described waveform probe through described the 3rd wedge beam reflected.
Described laser parameter measurement system also comprises a platform, and described first wedge, described second wedge, described the 3rd wedge, described first image collecting device, described second image collecting device, described energy probe and described waveform probe all are arranged on the described platform.
Described first lens are arranged on the output end position of laser instrument outside to be measured, and the distance of the outgoing mirror of the output terminal of the laser instrument that described first lens and outside are to be measured is transmitted distance less than the picture of this outgoing mirror.
Described laser parameter measuring system also comprises second lens, and described second lens are arranged on the described platform, and the light beam of described the 3rd wedge transmission enters into described first image collecting device after restrainting through described second lens contracting.
Described laser parameter measuring system also comprises the 3rd lens, and the 3rd lens are arranged on the described platform, enters described energy probe after the light beam of the described first wedge transmission expands through described the 3rd lens.
Described first lens and described second lens are convex lens, and described the 3rd lens are concavees lens.
Described first lens and its are the focal length of described first lens along described first wedge, the described second wedge direction to the distance of the projection of described second image collecting device.
Described first wedge, described second wedge and described the 3rd wedge all are glass plate.
Described first image collecting device and described second image collecting device all are CCD.
Described platform also comprises a lifting structure and a translation structure, and it is vertically mobile that described lifting structure is controlled described platform, and described translation structure is controlled described platform along continuous straight runs and moved.
Compared to prior art, main beneficial effect of the present invention is:
Laser parameter measuring system of the present invention is arranged on laser output position to be measured, outside according to the virtual object image-forming principle with its first lens, and transmit distance with the distance of the outgoing mirror of output terminal less than the picture of this outgoing mirror, and other elements all are arranged on the platform, institute so that this laser parameter measuring system when using occupation space less.In addition, because reduced by first lens on the described platform, thus the size of having dwindled described platform, and platform provided by the invention can carry out up and down and move left and right, make its range of application comparatively extensive, the installation of total system and adjusting are also comparatively easy.
Description of drawings
Fig. 1 is the schematic top plan view of prior art laser parameter measuring system.
Fig. 2 is the schematic top plan view of the driver module of laser parameter measuring system embodiment 1 of the present invention.
Embodiment
Embodiment 1
The present invention relates to a kind of laser parameter measuring system, it comprises first lens 210, second lens 212, the 3rd lens 214, first wedge 220, second wedge 222, the 3rd wedge 224, first image collecting device 230, second image collecting device 232,250 and platforms 260 of 240, waveforms probes of an energy probe.Described first lens 210 and described second lens 212 are convex lens, and described the 3rd lens 214 are concavees lens.Described first lens 210 are used for the contracting bundle of the Laser Output Beam that the outside is to be measured and enter described first wedge 220, described second lens 212 are used for making light beam contracting bundle to enter described first image collecting device 230, and described the 3rd lens 214 are used for making beam expander to enter described energy probe 240.Described first wedge 220, described second wedge 222 and described the 3rd wedge 224 all are glass plate, can make to incide its surperficial light generating unit sub reflector and part transmission.
Described first lens 210 are arranged on the output terminal (not shown) position of laser instrument (not shown) outside to be measured, namely when total system is in running order, described first lens 210 and outside laser instrument to be measured is set is fixed together; When being in off working state, described first lens and outside laser instrument to be measured can being set separating.Picture transmits the distance before lens and the image that object becomes of being commonly defined as of distance in these lens.According to the virtual object image-forming principle, the distance that described first lens and the outgoing mirror (not shown) of the output terminal of outside laser instrument to be measured be set is transmitted distance less than the picture of this outgoing mirror.Described first lens 210 are the focal length of described first lens 210 along described first wedge 220, described second wedge, 220 directions to the distance of the projection of described second image collecting device 232 with it.
Described second lens 212, described the 3rd lens 214, described first wedge 220, described second wedge 222, described the 3rd wedge 224, described first image collecting device 230, described second image collecting device 232, described energy probe 240 and described waveform probe 250 all are arranged on the described platform 260.Described second lens 212 are between described the 3rd wedge 220 and described first image collecting device 230.Described the 3rd lens 214 are between described first wedge 220 and described energy probe 240.Described energy probe 240 receives the light beam that transmits through described first wedge 220, described second lens 212 successively, and it is used for surveying the energy of incident beam.Described waveform probe 250 receives successively through 220 reflections of described first wedge, 222 transmissions of described second wedge, described the 3rd wedge 224 beam reflected, and it is used for surveying the waveform of incident beam.Described first image collecting device 230 and described second image collecting device 232 all are CCD, all are used for writing light beam.
Described platform 260 also comprises a lifting structure (not shown) and a translation structure (not shown), and described lifting structure makes described platform vertically mobile, and described translation structure moves described platform along continuous straight runs.
The principle of work of described laser parameter measuring system is: the output end position that described first lens 210 is arranged on laser instrument outside to be measured, adjust lifting structure and the translation structure of described platform 260, make this platform 260 corresponding in same plane and position with the output of this laser instrument to be measured; The light beam of the laser instrument output that this is to be measured is transmitted to described first wedge 220 through described first lens, 210 contracting bundles, after expanding through described the 3rd lens 214 again, the light beam of described first wedge of process 220 transmissions enters described energy probe 240, described energy probe 240 is surveyed the energy value of this light beam, enters into described second wedge 222 through described first wedge, 220 beam reflected; Enter described second image collecting device 232 through described second wedge, 222 beam reflected, described second image collecting device 232 is used for recording this light beam, and the light beam of described second wedge of process 222 transmissions enters into described the 3rd wedge; Enter described waveform probe 250 through described the 3rd wedge 224 beam reflected, described waveform probe 250 is surveyed the waveform of this light beam, light beam through 224 transmissions of described the 3rd wedge enters into described first image collecting device 230 behind described second lens of the process 212 contracting bundles again, and described first image collecting device 230 is used for recording this light beam.
Embodiment 2
The laser parameter measuring system of laser parameter measuring system of the present invention and embodiment 1 is roughly the same, its key distinction is: this measuring system also comprises a support, described support is arranged between the laser instrument and described platform outside to be measured, described first lens are arranged on this support, described support Height Adjustable.
In other distortion embodiment, according to the needs of practical operation, described first wedge, described second wedge and described the 3rd wedge can all be selected for use with a kind of transparent medium, also can select three kinds of different transparent mediums respectively for use.
Compared to prior art, main beneficial effect of the present invention is:
Laser parameter measuring system of the present invention is arranged on laser output position to be measured, outside according to the virtual object image-forming principle with its first lens, and transmit distance with the distance of the outgoing mirror of output terminal less than the picture of this outgoing mirror, and other elements all are arranged on the platform, institute so that this laser parameter measuring system when using occupation space less.In addition, because reduced by first lens on the described platform, thus the size of having dwindled described platform, and platform provided by the invention can carry out up and down and move left and right, make its range of application comparatively extensive, the installation of total system and adjusting are also comparatively easy.