CN102517539A - Method for improving bonding strength of interface between hard coating and substrate - Google Patents
Method for improving bonding strength of interface between hard coating and substrate Download PDFInfo
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Abstract
The invention discloses a method for improving the bonding strength of an interface between a hard coating and a substrate. The method is implemented by treating the hard coating/substrate compound system at the low temperature or ultralow temperature of between 50 DEG C and 273 DEG C below zero for 5-48 hours. The hard coating comprises nitride coatings such as TiN, CrN, TiAlN, TiSiN, CrAlTiN, BN and the like, C coatings such as diamond, diamond-like carbon and the like, and carbide coatings such as TiC, WC and the like. Due to the adoption of the method, the bonding strength of the interface between the coating and the substrate can be raised by 10-50 percent, and deterioration of the performance of the substrate or coating can be avoided by adopting of the conventional high-temperature annealing method; and meanwhile, low-temperature or ultralow-temperature treatment cost is low, and the method is suitable for various coatings/substrate compound systems.
Description
Technical field
The present invention relates to chemical technology field, particularly relate to a kind of method that improves friction pair component surface hard coats such as cutter, mould and component of machine and basal body interface bond strength.
Background technology
Solid-state coated material and high base strength are to concern that can coating bring into play the key factor of its various functions, and how to improve film substrate bond strength is the hot research problem of functional coating (film) field of materials always.The compound system that common coating and matrix are formed all is a kind of heterogeneous systems; Coating and the matrix difference on composition, structure and physics, chemical property must cause not matching and the generation of interfacial stress at the interface, also can be in the preparation process in the coating residual enough big internal stress.Especially hard coat; Its internal stress is difficult in coating lax with mode of texturing, thereby in coating, stores the great number of elastic ability, and acts on the interface of coating and matrix; Bring the problem on the film substrate bond strength, finally cause coming off of coating and cause the inefficacy of system.
The major technique means that reduce interfacial stress raising coating/basal body interface bond strength at present comprise: 1) middle layer, excessive layer, gradient layer or multilayer film are set between the interface; 2) between the interface, form the mixing zone through ion implantation or thermodiffusion; 3) matrix surface pre-treatment is like surface strengthening pre-treatment, surface ion bombardment or micropartical sandblast alligatoring pre-treatment etc., reinforcing membrane base interface mechanical snap and system supporting capacity.Aforesaid method or use separately or combination is used has become in the practical application fundamental method.But these methods are still having limitation aspect the raising interface bond strength, and the superhard coating high to some internal residual stress still can not satisfy its requirement, particularly thick film requirement.Because it is inner have a high unrelieved stress, will explosion broken even come off fully when coat-thickness surpasses about 100nm like the cubic boron nitride coating, cause the cubic boron nitride coating all not realize commercial applications so far.Another kind of method relatively more commonly used is a coating deposition after annealing.This follows the series of phase transitions process usually, and coating performance is changed, and particularly reduces the original hardness of coating significantly, also can cause the distortion of workpiece.And annealing temperature is often higher that effect just arranged, and this is inapplicable for the low body material of tempering temperature.
It is a kind of sophisticated metallic substance treatment technology that low temperature or very low temperature are handled, and is a kind of effective way of improving the metal material mechanics performance.But, also low temperature or very low temperature are not handled the research report that is applied to improve coating and basal body interface bond strength at present.
Summary of the invention
In view of this; The method that the purpose of this invention is to provide a kind of raising hard coat (film) and basal body interface bond strength; Make it to solve when eliminating hard coat/matrix inside and interfacial stress coating and the matrix problem of performance degradation at high temperature through high temperature annealing; When improving coating/basal body interface bond strength at a lower temperature, keep or improve the comprehensive mechanical property or the mechanical property of coating/substrate complex system.
Technical thought of the present invention is; Utilize low temperature or very low temperature to handle influence to stress field between compound system inside and coating and basal body interface; It is adjusted, the interfacial stress of coating and matrix is obtained fully or to a certain degree lax, thereby improve the interface bond strength of compound system; Utilize the microstructural variation in interface under low temperature or the condition of ultralow temperature to reach the purpose that improves interface bond strength simultaneously; In addition, also utilize low temperature or very low temperature to handle when improving interface bond strength, improve the mechanics or the mechanical characteristics of hard coat and coating/matrix thereof, comprise hardness, intensity, wear resistance etc.
A kind of method that improves hard coat and basal body interface bond strength of the present invention, the low temperature or the very low temperature that hard coat/substrate complex are lain in-50 ℃～-273 ℃ were handled 5～48 hours down;
Described hard coat is meant metallic coating, alloy coat or inorganic non-metallic coating, comprises nitride coatings, diamond coatings, amorphous C coating or carbide coating.
Nitride coatings is meant TiN, CrN, TiAlN, TiSiN, CrAlTiN or BN etc.;
Amorphous C coating is meant quasi-diamond, amorphous diamond etc.;
Carbide coating is meant TiC or WC etc.
In order to reach the optimal effectiveness that improves interface bond strength, better in conjunction with the low-temperature annealing treatment effect that adopts low temperature or very low temperature processing front and back.
Description of drawings
Fig. 1 is the impression pattern before and after TiN coating/YW2 hard alloy substrate compound system very low temperature is handled.
Fig. 2 is the Vickers' hardness of TiN coating/YW2 hard alloy substrate compound system before and after very low temperature is handled, the hardness value before and after grey is represented respectively to handle with redness.
Fig. 3 is the cut pattern before and after TiN coating/stainless steel base compound system very low temperature is handled.
Fig. 4 is the Vickers' hardness of TiN coating/stainless steel base compound system before and after very low temperature is handled, the hardness value before and after grey is represented respectively to handle with redness.
Fig. 5 is the impression pattern before and after DLC coating/YW2 hard alloy substrate compound system subzero treatment.
Fig. 6 is the load-depth curve in the nano indentation test before and after DLC coating/YW2 hard alloy substrate compound system subzero treatment.
Fig. 7 is the impression pattern under the big load-up condition before and after TiN coating/YW2 hard alloy substrate compound system very low temperature is handled
The invention has the beneficial effects as follows: use the inventive method, coating/basal body interface bond strength is significantly improved, generally can improve 10% ~ 50% and when having avoided adopting traditional high temperature annealing method, the deterioration of matrix or the performance of coating own; Simultaneously, low temperature or very low temperature processing cost are low, and the coating/substrate complex that is suitable for is that kind is extensive.
Embodiment
For the present invention and effect thereof are specified; Adopt arc ion plating membrane technique and the magnetron sputtered deposition technology on the stainless steel, wimet steel matrix of polishing, to have deposited certain thickness TiN, CrN, TiAlN, CrAlTiN, quasi-diamond and TiC coating respectively, put into Vakuumkammer after ultrasonic cleaning and the cold wind that before the deposition matrix has been carried out respectively respectively 10 minutes dries up in ethanol and deionized water.Adopted liquid nitrogen or liquid helium directly to soak the liquid method of deep cooling after the deposition; And the employing liquid nitrogen is the gas method of refrigeration agent; Under-196 ℃ ,-273 ℃ and-50 ℃ ~-150 ℃ temperature condition, be directly exposed to after with the coating/immersion treatment of substrate complex system respectively and make it to return to room temperature in the air, and before and after low temperature or very low temperature are handled, append or do not append low-temperature annealing as the case may be and handle through certain hour.Then distinguish interface bond strength qualitative and the detection by quantitative coating, handle improving the effect of coating interface bonding strength to judge low temperature or very low temperature with Rockwell pressing in method and scratch method.Adopt microhardness appearance or nano-hardness tester that coating is carried out hardness simultaneously and detect, handle improvement effect mechanical characteristics such as coating and compound system hardness, Young's modulus to judge very low temperature.Adopt the Rockwell pressing in method also can carry out qualitative analysis to the fracture toughness property of compound system through analysis to impression and crack morphology.Below, the use example through reality specifies the present invention.
Adopt the arc ion plating membrane technique on the YW2 hard alloy substrate, to deposit the thick TiN coating of 3 μ m; After-196 ℃ of very low temperature are handled in 30 hours liquid nitrogen; It has been carried out the Rockwell indentation test, and the impression pattern is as shown in Figure 1: a), b) be respectively the Rockwell impression pattern gold of very low temperature before and after handling as microphotograph, therefrom can find out; Very low temperature is handled the circumferential coating bulk situation that comes off of back impression and is obviously alleviated, and shows that TiN adhesive force of coatings level obviously improves.The scratch test detection by quantitative shows simultaneously, and the sticking power before handling is 55N, rises to 83N after the processing, and sticking power has improved 51%.
Fig. 2 is the Vickers' hardness of coated carbides before and after very low temperature is handled under the similarity condition, the hardness value before and after grey is represented respectively to handle with redness, and as can be seen from the figure, after very low temperature was handled, the hardness of coating or coated carbides obviously improved.Because what adopt is the detected result of microhardness tester, can affirm basically, the hardness value principal reaction that records the changes in hardness of coating.That is to say that very low temperature is handled the raising that helps the TiN coating hardness.
Adopt the arc ion plating membrane technique on 304 stainless steel bases of polishing, to deposit the thick TiN coating of 3 μ m; After-196 ℃ of very low temperature are handled in 30 hours liquid nitrogen; It has been carried out scratch test, and the cut pattern is as shown in Figure 3: a), b) be respectively the cut pattern gold of very low temperature before and after handling as microphotograph, therefrom can find out; Cut edge and middle part TiN came off all more serious before very low temperature was handled; And very low temperature is handled the back coating bulk situation that comes off and is obviously alleviated, have suffered cut to the end at the cut edge and the middle part coating all do not come off and coming off fully basically of not handling fully.This interface bond strength that shows very low temperature processing back TiN coating/stainless steel base has obtained obvious improvement.The scratch test detection by quantitative shows simultaneously, and the sticking power before handling is 35N, rises to 52N after the processing, and sticking power has improved 49%.
Fig. 4 is the Vickers' hardness of TiN coating/stainless steel base compound system before and after very low temperature is handled; Grey is handled the hardness value of front and back with red expression respectively; As can be seen from the figure, after very low temperature was handled, TiN coating or its hardness with the compound system of matrix composition obviously improved.Because what adopt is the detected result of microhardness tester, can affirm basically, the hardness value principal reaction that records the changes in hardness of coating.That is to say that very low temperature is handled the raising that helps the TiN coating hardness.
Adopt the arc ion plating membrane technique on the YW2 hard alloy substrate, to deposit the thick CrN coating of 3 μ m; After-273 ℃ of very low temperature are handled in 5 hours liquid heliums; It has been carried out the test of cut detection by quantitative, and test-results shows that handling back CrN adhesive force of coatings level through very low temperature obviously improves, and the sticking power before handling is 58N; Rise to 72N after the processing, sticking power has improved 24%.
Embodiment 4
Adopt the arc ion plating membrane technique on the YW2 hard alloy substrate, to deposit the thick TiAlN coating of 3 μ m; After-196 ℃ of very low temperature are handled in 48 hours liquid nitrogen; It has been carried out the test of cut detection by quantitative, and test-results shows that handling back TiAlN adhesive force of coatings level through very low temperature obviously improves, and the sticking power before handling is 50N; Rise to 72N after the processing, sticking power has improved 44%.
Adopt magnetron sputtering technology on the YW2 hard alloy substrate, to deposit the thick CrAlTiN coating of 2 μ m; After 5 hours liquid nitrogen gas method-100 ℃ subzero treatment; It has been carried out the test of cut detection by quantitative, and test-results shows through CrAlTiN adhesive force of coatings level after the subzero treatment obviously to be improved, and the sticking power before handling is 54N; Rise to 60N after the processing, sticking power has improved 11%.
Embodiment 6
Adopt magnetron sputtering technique on the YW2 hard alloy substrate, to deposit thick quasi-diamond (DLC) coating of 2 μ m; After 5 hours liquid nitrogen gas method-50 ℃ subzero treatment; And be aided with under 150 ℃ of conditions, after 2 hours the anneal, it is carried out the Rockwell indentation test; For the purpose of contrast, contrast piece has also carried out 150 ℃ of anneal that condition is following 2 hours.The impression pattern is as shown in Figure 5: a), b) be respectively Rockwell impression pattern gold before and after the subzero treatment as microphotograph; Therefrom can find out; The coating of no subzero treatment exemplar circumferentially has tangible bulk to come off along impression; And circumferentially almost cannot see coating shedding through impression after the subzero treatment, show through the DLC adhesive force of coatings level after the subzero treatment and obviously improve.
The scratch test detection by quantitative shows that the DLC coating adhesion of no subzero treatment is 45N, rises to 62N after the subzero treatment simultaneously, and sticking power has improved 38%.
The nano indentation test result is as shown in table 1, and table 1 is its consistency and elasticity modulus, and the result shows: the DLC through after the subzero treatment has increased by 4% and 8% respectively on the consistency and elasticity modulus.
Microhardness and Young's modulus in the nano indentation test before and after table 1:DLC coating/YW2 hard alloy substrate compound system subzero treatment
| ? | Hardness (Gpa) | Young's modulus |
| Before the subzero treatment | 9.2 | 116 |
| After the subzero treatment | 9.6 | 125 |
| The raising rate | 4% | 8% |
Embodiment 7
Adopt magnetron sputtering technique on the YW2 hard alloy substrate, to deposit the thick TiC coating of 2 μ m; After 10 hours liquid nitrogen gas method-150 ℃ very low temperature is handled; And be aided with under 150 ℃ of conditions, after 2 hours the anneal, it is carried out scratch test; For the purpose of contrast, contrast piece has also carried out 150 ℃ of anneal that condition is following 2 hours.The scratch test detection by quantitative shows that the TiC coating adhesion that no very low temperature is handled is 48N, and very low temperature rises to 62N after handling, and sticking power has improved 29%.
Embodiment 8
Adopt the arc ion plating membrane technique on the YW2 hard alloy substrate, to deposit the thick TiN coating of 3 μ m; After-196 ℃ of very low temperature are handled in 30 hours liquid nitrogen; In order to investigate the anti-fracture toughness property of system, it has been carried out the Rockwell indentation test under the big load, the impression pattern is as shown in Figure 7: a), b) be respectively the Rockwell impression pattern gold of very low temperature before and after handling as microphotograph; Therefrom can find out; Under big load-up condition, the cracking of TiN coating has not only appearred in the coated carbides of handling without very low temperature, and hard alloy substrate also bulk has taken place bursts apart owing to bearing the effect that does not live big load.And several footpath radiotropism crackles have only appearred in the system after very low temperature is handled in the TiN coating, and system has still kept integrity.This explanation very low temperature is handled the raising of the fracture toughness property that helps whole system.
Can find out from the above embodiments; Low temperature or very low temperature are handled interface bond strength, hardness, the fracture toughness property effect of having clear improvement to the compound system of hard coat and matrix composition thereof; Here only the mechanical property of this three aspect is described; Improvement effect to otherwise mechanics and mechanical characteristics is not all given an example one by one, but its improvement effect exists.Simultaneously; Above-mentioned low temperature or very low temperature are handled the coating/substrate complex system that not only TiN, CrN, TiAlN, CrAlTiN, DLC, TiC coating and wimet, stainless steel base is formed has effect; And the compound system that other multiple hard coats and multiple matrix are formed all has effect, also do not give an example one by one at this.But, to produce improvement effect or optimized improvement effect to the interface bond strength of different coatings/substrate complex system, the low-temperature annealing operation of low temperature or very low temperature treatment process and its front and back is combined better effects if.
Claims (2)
1. a method that improves hard coat and basal body interface bond strength is characterized in that, hard coat/substrate complex is lain in-50 ℃～-273 ℃ and handles 5～48 hours down.
2. a kind of method that improves hard coat and basal body interface bond strength according to claim 1; It is characterized in that; Described hard coat is meant metallic coating, alloy coat or inorganic non-metallic coating, comprises nitride coatings, diamond coatings, amorphous C coating or carbide coating:
Nitride coatings is meant TiN, CrN, TiAlN, TiSiN, CrAlTiN or BN;
Amorphous C coating is meant quasi-diamond or amorphous diamond;
Carbide coating is meant TiC or WC.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483584A (en) * | 2014-09-15 | 2016-04-13 | 南昌大学 | Method for improving hardness of TiCrN multicomponent multilayer composite-coating cemented carbide |
| CN106756841A (en) * | 2016-12-09 | 2017-05-31 | 广东工业大学 | A kind of preparation method of cutter composite coating |
| CN109161860A (en) * | 2018-09-19 | 2019-01-08 | 炎陵欧科亿数控精密刀具有限公司 | A kind of PVD coated chip and preparation method thereof |
| CN110993796A (en) * | 2019-12-05 | 2020-04-10 | 徐州吴瑞信息科技有限公司 | Perovskite photovoltaic cell and preparation method thereof |
| CN111029471A (en) * | 2019-12-05 | 2020-04-17 | 徐州吴瑞信息科技有限公司 | Solar cell and preparation method thereof |
| CN111154959A (en) * | 2020-01-13 | 2020-05-15 | 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 | Preparation method and application of amorphous coating |
| CN113652638A (en) * | 2021-08-17 | 2021-11-16 | 科汇纳米技术（常州）有限公司 | Ultrahigh hard tool coating and preparation method thereof |
| CN115819118A (en) * | 2022-11-25 | 2023-03-21 | 湖南柯盛新材料有限公司 | Oxidation-resistant coating, graphite mold containing same and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1646259A (en) * | 2002-02-04 | 2005-07-27 | 气体产品与化学公司 | Apparatus and method for machining of hard metals with reduced detrimental white layer effect |
| CN101691654A (en) * | 2007-09-26 | 2010-04-07 | 山特维克知识产权股份有限公司 | Method of making a coated cutting tool |
-
2012
- 2012-01-09 CN CN2012100067464A patent/CN102517539A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1646259A (en) * | 2002-02-04 | 2005-07-27 | 气体产品与化学公司 | Apparatus and method for machining of hard metals with reduced detrimental white layer effect |
| CN101691654A (en) * | 2007-09-26 | 2010-04-07 | 山特维克知识产权股份有限公司 | Method of making a coated cutting tool |
Non-Patent Citations (2)
| Title |
|---|
| 《Materials Science and Engineering A》 20110131 Yong J et al. Effect of cryogenic treatment on WC-Co cemented carbides 第1735页右栏第2段和左栏第2段 1-2 第528卷, 第3期 * |
| YONG J ET AL.: "Effect of cryogenic treatment on WC–Co cemented carbides", 《MATERIALS SCIENCE AND ENGINEERING A》, vol. 528, no. 3, 31 January 2011 (2011-01-31) * |
Cited By (12)
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| CN105483584A (en) * | 2014-09-15 | 2016-04-13 | 南昌大学 | Method for improving hardness of TiCrN multicomponent multilayer composite-coating cemented carbide |
| CN106756841A (en) * | 2016-12-09 | 2017-05-31 | 广东工业大学 | A kind of preparation method of cutter composite coating |
| CN109161860A (en) * | 2018-09-19 | 2019-01-08 | 炎陵欧科亿数控精密刀具有限公司 | A kind of PVD coated chip and preparation method thereof |
| CN109161860B (en) * | 2018-09-19 | 2021-03-19 | 炎陵欧科亿数控精密刀具有限公司 | PVD (physical vapor deposition) coated blade and preparation method thereof |
| CN110993796A (en) * | 2019-12-05 | 2020-04-10 | 徐州吴瑞信息科技有限公司 | Perovskite photovoltaic cell and preparation method thereof |
| CN111029471A (en) * | 2019-12-05 | 2020-04-17 | 徐州吴瑞信息科技有限公司 | Solar cell and preparation method thereof |
| CN110993796B (en) * | 2019-12-05 | 2023-07-25 | 中茂绿能科技(西安)有限公司 | Perovskite photovoltaic cell and preparation method thereof |
| CN111029471B (en) * | 2019-12-05 | 2023-10-13 | 和光同程光伏科技(宜宾)有限公司 | Solar cell and preparation method thereof |
| CN111154959A (en) * | 2020-01-13 | 2020-05-15 | 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 | Preparation method and application of amorphous coating |
| CN113652638A (en) * | 2021-08-17 | 2021-11-16 | 科汇纳米技术（常州）有限公司 | Ultrahigh hard tool coating and preparation method thereof |
| CN115819118A (en) * | 2022-11-25 | 2023-03-21 | 湖南柯盛新材料有限公司 | Oxidation-resistant coating, graphite mold containing same and preparation method thereof |
| CN115819118B (en) * | 2022-11-25 | 2023-09-22 | 湖南柯盛新材料有限公司 | Antioxidant coating, graphite mold containing antioxidant coating and preparation method of graphite mold |
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Application publication date: 20120627 |