CN102507981A - Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure - Google Patents
Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure Download PDFInfo
- Publication number
- CN102507981A CN102507981A CN201110341472XA CN201110341472A CN102507981A CN 102507981 A CN102507981 A CN 102507981A CN 201110341472X A CN201110341472X A CN 201110341472XA CN 201110341472 A CN201110341472 A CN 201110341472A CN 102507981 A CN102507981 A CN 102507981A
- Authority
- CN
- China
- Prior art keywords
- inertial mass
- fixed
- movable
- pivot
- movable tooth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with a coupled beam structure. The single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer comprises a base, a fixed supporter, an inertial mass block and comb capacitor structures, wherein the inertial mass block is of a rectangle structure and is suspended above the middle part of the base; the comb capacitor structures are respectively arranged at four sides of the inertial mass block; the four comb capacitor structures are symmetrically distributed relative to the inertial mass block; movable comb teeth on the left side and the right side of the inertial mass block and the fixed comb teeth at the corresponding sides form capacitors Cx1 and Cx2; and the movable comb teeth at the rear side and the front side of the inertial mass block and the fixed comb teeth at the corresponding sides form capacitors Cy1 and Cy2. The transducer is of a symmetric micro-structure, ensures the consistent sensitivity in two detection directions and is connected with the inertial mass block and tooth axles of the comb capacitor structures through the coupled beam. Crosstalk interference can be effectively restrained when the single sensitive mass element is sensitive to accelerations in two directions X and Y and differential capacitance detection is finished.
Description
Technical field
The invention belongs to the MEMS sensor technical field, relate in particular to the little two dimension acceleration sensor of the responsive quality unit's silicon of a kind of list with the coupled beams structure.
Background technology
At present, the technological comparative maturity of single shaft miniature acceleration sensor.But,, often need detect the acceleration of both direction like attitude of flight vehicle control, missile guidance, battlefield robot etc. in some special application scenarios.Iff adopts early stage array mode, is about to two mutually orthogonal being assembled together of single shaft miniature acceleration sensor, and it is very big that not only sensor performance receives the influence of assembly precision, and has problems such as integrated level is low, volume big, consistance difference.Therefore, two-dimentional integrated miniature acceleration transducer becomes the research focus.
No matter existing two-dimensional integrated miniature acceleration transducer is on same substrate, to make two independently acceleration transducers, still adopts the first detection that realizes the both direction acceleration of single responsive quality, all has the serious problem of cross interference.Therefore, suppressing cross interference is the problem that needs emphasis to solve in the two-dimentional integrated miniature acceleration transducer development.
Summary of the invention
To the key technical problem of two-dimentional integrated miniature acceleration transducer development, the invention provides a kind of little two dimension acceleration sensor of the responsive quality unit's silicon of list that can effectively suppress the band coupled beams structure of cross interference.
The present invention has adopted following technical scheme: the little two dimension acceleration sensor of the responsive quality unit's silicon of a kind of list with the coupled beams structure comprises substrate, fixed support, inertial mass and broach capacitance structure; Said substrate is a rectangular configuration, is provided with two fixed supports straight up respectively at the Qi Sijiao place; Said inertial mass is a rectangular configuration, and directly over the unsettled middle part that is arranged on substrate, four angles of inertial mass are corresponding one by one with four angles of substrate, and two fixed supports at each angle of substrate are positioned at the both sides of the corresponding angles of inertial mass; About substrate to do
XDirection of principal axis, front and back do
YDirection of principal axis;
The middle part of four sides of said inertial mass be respectively equipped with perpendicular to the groove of the side of this inertial mass; Four sides of said inertial mass and between two fixed supports of corresponding side, be respectively equipped with the broach capacitance structure, four broach capacitance structures are symmetrically distributed with respect to inertial mass;
Said broach capacitance structure comprises the folded beam of the coupled beams and the U-shaped structure of movable tooth pivot, fixed teeth pivot, movable comb, fixed fingers, U-shaped structure; Coupled beams in each broach capacitance structure is two, and respectively inserting in two grooves of this inertial mass side with the perpendicular mode of inertial mass respective side, and the opening of coupled beams is outside; One end of the coupled beams of U-shaped structure is connected on the inertial mass, and the other end is connected on the outer movable tooth pivot that is provided with of inertial mass respective side; The two ends of said movable tooth pivot are connected on the fixed support of corresponding side through folded beam respectively; The folded beam opening at said movable tooth pivot two ends is relative, and an end of folded beam is connected the end of movable tooth pivot, and the other end is connected on the fixed support of respective side; Said movable tooth pivot is provided with at least one movable tooth pivot extension plate perpendicular to the respective side of inertial mass, is laid with the movable comb that several are parallel to the inertial mass respective side on the said movable tooth pivot extension plate; Said fixed teeth is hubbed on the outside of movable tooth pivot; The bottom of fixed teeth pivot is fixed in the substrate; Said fixed teeth pivot is provided with at least one fixed teeth pivot extension plate perpendicular to the inertial mass respective side, is laid with the fixed fingers that several are parallel to the respective side of inertial mass on the said fixed teeth pivot extension plate; Movable comb on the said movable tooth pivot extension plate constitutes capacitor with the fixed fingers cross-distribution of respective side respectively;
The movable comb and the fixed fingers in said inertial mass left side constitute capacitor C
x1
The movable comb on right side and fixed fingers constitute capacitor C
x2
The movable comb of inertial mass rear side and fixed fingers constitute capacitor C
y1
The movable comb of front side and fixed fingers constitute capacitor C
y2
Capacitor C
x1
With capacitor C
x2
Constitute
XThe differential capacitance of direction is to detect
XThe acceleration of direction, capacitor C
y1
With capacitor C
y2
Constitute
YThe differential capacitance of direction is to detect
YThe acceleration of direction.
As a kind of preferred version of the present invention, the fixed fingers of said movable comb and respective side forms the fixed tooth offset structure.
As another preferred version of the present invention, said broach capacitance structure also comprises limit stops, and said limit stops is the rectangle frame structure; The outer end of said movable tooth pivot extension plate is stretched in the limit stops of rectangle frame structure, and the outer end of movable tooth pivot extension plate is provided with the limiting plate that can in the limit stops of rectangle frame structure, move; Said limiting plate on the sensitive direction of correspondence and the distance between the inboard of the limit stops of rectangle frame structure less than the minor increment between movable comb and the adjacent fixed fingers.
The little two dimension acceleration sensor of the responsive quality unit's silicon of a kind of list with the coupled beams structure provided by the invention compared with prior art, has following advantage:
1, integral body is Symmetry Microstructure, guarantee this sensor two detection sides to sensitivity consistent; Through the tooth pivot of coupled beams connection inertial mass and broach capacitance structure, realizing that inertial mass is responsive
X,
YBoth direction acceleration and when accomplishing differential capacitance and detect can effectively suppress cross interference.
2, realize overload protection through limit stops, avoid causing sensor failure because of movable comb and fixed fingers come in contact.
3, form differential capacitance with the fixed tooth offset comb structure, can realize high detection sensitivity, and have good manufacturability.
Description of drawings
Fig. 1 is the structural representation of the xsect of the little two dimension acceleration sensor of the responsive quality unit's silicon of the list of band coupled beams structure;
Fig. 2 is an equivalent electrical illustraton of model of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is done explanation in further detail.
Fig. 1 is for the structural representation of the xsect of the little two dimension acceleration sensor of the responsive quality unit's silicon of the list of band coupled beams structure, and is as shown in the figure.The little two dimension acceleration sensor of the responsive quality unit's silicon of the list of band coupled beams structure comprises substrate 1, fixed support 2, inertial mass 3 and broach capacitance structure.Substrate 1 is a rectangular configuration, is provided with two fixed supports 2 straight up respectively at the Qi Sijiao place.Inertial mass 3 is a rectangular configuration, and directly over the unsettled middle part that is arranged on substrate 1, four angles of inertial mass 3 are corresponding one by one with four angles of substrate 1, and two fixed supports 2 at substrate 1 each angle are positioned at the both sides of the corresponding angles of inertial mass 3.About substrate 1 to do
XDirection of principal axis, front and back do
YDirection of principal axis.The middle part of four sides of inertial mass 3 be respectively equipped with perpendicular to the groove 4 of the side of this inertial mass 3; Four sides of inertial mass 3 and between two fixed supports 2 of corresponding side, be respectively equipped with the broach capacitance structure, four broach capacitance structures these inertial mass 3 relatively are symmetrically distributed.
Wherein, the broach capacitance structure comprises movable tooth pivot 5, fixed teeth pivot 6, movable comb 7, fixed fingers 8, the coupled beams 9 of U-shaped structure, the folded beam 10 and the limit stops 11 of U-shaped structure.Coupled beams 9 in each broach capacitance structure is two; Respectively to insert in two grooves 4 of these inertial mass 3 respective side with the perpendicular mode of inertial mass 3 respective side; And outwards (left and right sides with inertial mass 3 is an example to the opening of coupled beams 9, coupled beams 9 edges
XDirection is provided with; Both sides, front and back with inertial mass 3 are example, coupled beams 9 edges
YDirection is provided with).One end of the coupled beams 9 of U-shaped structure is connected on the inertial mass 3, and the other end is connected on the outer movable tooth pivot 5 that is provided with of inertial mass 3 respective side.The two ends of movable tooth pivot 5 are connected on the fixed support 2 of corresponding side through folded beam 10 respectively; The opening of the folded beam 10 at movable tooth pivot 5 two ends is relative; One end of folded beam 10 is connected the end of movable tooth pivot 5, and the other end is connected on the fixed support 2 of respective side.Right side with inertial mass 3 is an example, and then the two ends of movable tooth pivot 5 are meant the rear and front end of movable tooth pivot 5, and the opening of the folded beam 10 at movable tooth pivot 5 two ends is meant two folded beam 10 edges relatively
YDirection is provided with, and the opening of two folded beams 10 exists
YDirection is corresponding.Movable tooth pivot 5 is provided with at least one perpendicular to the movable tooth pivot extension plate 12 of the respective side of inertial mass 3 (in the present embodiment; Two movable tooth pivot extension plates draw in each broach capacitance structure); Be laid with several movable comb 7 that are parallel to inertial mass 3 respective side (in the present embodiment, being laid with 12 movable comb 7 on each movable tooth pivot extension plate 12) on the movable tooth pivot extension plate 12.Fixed teeth pivot 6 is located at the outside of movable tooth pivot 5; The bottom of fixed teeth pivot 6 is fixed in the substrate 1; Fixed teeth pivot 6 is provided with at least one fixed teeth pivot extension plate 13 perpendicular to the respective side of inertial mass 3; (in the present embodiment, the middle part of fixed teeth pivot 6 is provided with a fixed teeth pivot extension plate, and the both sides of fixed teeth pivot are respectively equipped with a fixed teeth pivot extension plate to be laid with the fixed fingers 8 of several sides that are parallel to inertial mass 3 on the fixed teeth pivot extension plate 13; Be uniformly distributed with 12 fixed fingers on the fixed teeth pivot extension plate that the middle part is provided with, the inboard of the fixed teeth pivot extension plate of both sides is laid with six fixed fingers respectively).Movable comb 7 on the movable tooth pivot extension plate 12 is inserted in the fixed fingers 8 on the fixed teeth pivot extension plate 13 from a side respectively, and constitutes capacitor with fixed fingers 8 cross-distribution of respective side.
Limit stops 11 is the rectangle frame structure, and the outer end of movable tooth pivot extension plate 12 is stretched in the limit stops 11 of rectangle frame structure, and the outer end of movable tooth pivot extension plate 12 is provided with the limiting plate 14 that can in the limit stops 11 of rectangle frame structure, move.Limiting plate 14 on the sensitive direction of correspondence and the distance between the inboard of the limit stops 11 of rectangle frame structure less than the minor increment between movable comb 7 and the adjacent fixed fingers 8.Right side with inertial mass 3 is an example, and limiting plate 14 exists
XIn the moving process and left side of the inboard of the limit stops 11 of rectangle frame structure or the distance between the right side are less than the minor increment between movable comb 7 and the adjacent fixed fingers 8 on the direction.The limiting plate 14 and the limit stops 11 of the left and right sides of inertial mass 3 have constituted
XThe stop configurations of direction has realized inertial mass 3 (that is movable comb 7) is existed
XThe sports limiting of direction can prevent
XDirection is than 10 fractures of the folded beam of the left and right sides of inertial mass under the thump 3, and avoids movable comb 7 because of the left and right sides to come in contact with fixed fingers 8 causing sensor failure.The limiting plate 14 and the limit stops 11 of the both sides, front and back of inertial mass 3 have constituted
YThe stop configurations of direction has realized inertial mass 3 (that is movable comb 7) is existed
YThe sports limiting of direction can prevent
YDirection is than 10 fractures of the folded beam of both sides, 3 front and back of inertial mass under the thump, and avoids movable comb 7 because of the both sides, front and back to come in contact with fixed fingers 8 causing sensor failure.
The movable comb 7 in inertial mass 3 left sides constitutes capacitor C with fixed fingers 8
x1
The movable comb 7 on right side constitutes capacitor C with fixed fingers 8
x2
The movable comb 7 of inertial mass 3 rear sides constitutes capacitor C with fixed fingers 8
y1
The movable comb 7 of front side constitutes capacitor C with fixed fingers 8
y2
Capacitor C
x1
With capacitor C
x2
Constitute
XThe differential capacitance of direction is to detect
XThe acceleration of direction, capacitor C
y1
With capacitor C
y2
Constitute
YThe differential capacitance of direction is to detect
YThe acceleration of direction, its equivalent electrical model is as shown in Figure 2.
In the present embodiment, movable comb 7 forms the fixed tooth offset structure with the fixed fingers 8 of respective side.Form differential capacitance with the fixed tooth offset comb structure, can realize high detection sensitivity, and have good manufacturability.
When inertial mass 3 receives
XThe acceleration of direction is done the time spent, and the coupled beams 9 of inertial mass 3 front and back exists
XYBend in the plane, inertial mass 3 is with respect to substrate 1 edge
XThe direction motion, the coupled beams 9 of inertial mass about 3 is coupled to this motion
XDirection detects the movable comb 7 of capacitor.Because the folded beam 10 of the left and right sides exists
XDirection rigidity little and
YDirection rigidity is relatively large, so the movable comb 7 of the left and right sides exists
XThe motion of direction be allowed to and
YThe displacement of direction is restricted, and causes
XThe capacitor C of direction
x1
, capacitor C
x2
Increase of capacitance, one reduces.On the fixed teeth pivot 6 of the left and right sides, be respectively equipped with fixed electorde lead-in wire point 15, through detecting capacitor C
x1
, capacitor C
x2
Differential capacitance change and can detect
XThe acceleration of direction.The limit stops 11 of the left and right sides can prevent
XDirection is than 10 fractures of the folded beam of the left and right sides under the thump, and avoids movable comb 7 because of the left and right sides to come in contact with fixed fingers 8 causing sensor failure.
In like manner, receive when inertial mass 3
YThe acceleration of direction is done the time spent, and the coupled beams 9 of inertial mass 3 left and right sides exists
XYBend in the plane, inertial mass 3 is with respect to substrate 1 edge
YThe direction motion, the coupled beams 9 of inertial mass 3 front and back is coupled to this motion
YDirection detects the movable comb 7 of capacitor.Because the folded beam 10 of both sides, front and back exists
YDirection rigidity little and
XDirection rigidity is relatively large, so the movable comb 7 of both sides, front and back exists
YThe motion of direction be allowed to and
XThe displacement of direction is restricted, and causes
YThe capacitor C of direction
y1
, capacitor C
y2
Increase of capacitance, one reduces.On the fixed teeth pivot 6 of both sides, front and back, be respectively equipped with fixed electorde lead-in wire point 15, through detecting capacitor C
y1
, capacitor C
y2
Differential capacitance change and can detect
YThe acceleration of direction.The limit stops 11 of both sides, front and back can prevent
YDirection than thump following before and after folded beam 10 fracture of both sides, and avoid movable comb 7 because of the both sides, front and back to come in contact causing sensor failure with fixed fingers 8.
This acceleration transducer is produced on the chip through micromachining technology, the manufacture craft of sensor chip:
With N type (100) twin polishing silicon chip as backing material, based on the little two dimension acceleration sensor chip of the responsive quality of the list of bulk silicon technological processing belt coupled beams structure unit's silicon.The main technique step comprises:
(1) two-sided thermal oxide silicon chip;
(2) the HF corrosive liquid is adopted in photoetching, removes the SiO in sensor movable structure zone
2, form corrosion window;
(3) wet etching Si forms the bonding fixed support, and adopts the HF corrosive liquid to remove thermal oxide SiO
2Layer;
(4) employing is peeled off method at making Ti/Pt/Au contact conductor on glass;
(5) silicon-glass electrostatic bonding;
(6) wet method attenuate Si is to the desired structure layer thickness;
(7) evaporation Al, photoetching, corrosion form deep erosion mask;
(8) ICP loses releasing structure deeply.
Explanation is at last; Above embodiment is only unrestricted in order to technical scheme of the present invention to be described; Although with reference to preferred embodiment the present invention is specified, those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement technical scheme of the present invention; And not breaking away from the aim and the scope of technical scheme of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (3)
1. the little two dimension acceleration sensor of the responsive quality unit's silicon of the list with the coupled beams structure is characterized in that: comprise substrate (1), fixed support (2), inertial mass (3) and broach capacitance structure; Said substrate (1) is a rectangular configuration, is provided with two fixed supports (2) straight up respectively at the Qi Sijiao place; Said inertial mass (3) is a rectangular configuration; Directly over the unsettled middle part that is arranged on substrate (1); Four angles of inertial mass (3) are corresponding one by one with four angles of substrate (1), and two fixed supports (2) at each angle of substrate (1) are positioned at the both sides of the corresponding angles of inertial mass (3); About substrate (1) to do
XDirection of principal axis, front and back do
YDirection of principal axis;
The middle part of four sides of said inertial mass (3) be respectively equipped with perpendicular to the groove (4) of the side of this inertial mass (3); Four sides of said inertial mass (3) and between two fixed supports (2) of corresponding side, be respectively equipped with the broach capacitance structure, four broach capacitance structures are symmetrically distributed with respect to inertial mass (3);
Said broach capacitance structure comprises the folded beam (10) of the coupled beams (9) and the U-shaped structure of movable tooth pivot (5), fixed teeth pivot (6), movable comb (7), fixed fingers (8), U-shaped structure; Coupled beams (9) in each broach capacitance structure is two, lay respectively in the groove (4) of inertial mass (3) respective side, and opening is outside; One end of the coupled beams of U-shaped structure (9) is connected on the inertial mass (3), and the other end is connected on the outer movable tooth pivot (5) that is provided with of inertial mass (3) respective side; The two ends of said movable tooth pivot (5) are connected on the fixed support (2) of corresponding side through folded beam (10) respectively; Folded beam (10) opening at said movable tooth pivot (5) two ends is relative, and an end of folded beam (10) is connected the end of movable tooth pivot (5), and the other end is connected on the fixed support (2) of respective side; Said movable tooth pivot (5) is provided with at least one movable tooth pivot extension plate (12) perpendicular to inertial mass (3) respective side, is laid with the movable comb (7) that several are parallel to inertial mass (3) respective side on the said movable tooth pivot extension plate (12); Said fixed teeth pivot (6) is located at the outside of movable tooth pivot (5); The bottom of fixed teeth pivot (6) is fixed in the substrate (1); Said fixed teeth pivot (6) is provided with at least one fixed teeth pivot extension plate (13) perpendicular to inertial mass (3) respective side, is laid with the fixed fingers (8) that several are parallel to inertial mass (3) respective side on the said fixed teeth pivot extension plate (13); Movable comb (7) on the said movable tooth pivot extension plate (12) constitutes capacitor with fixed fingers (8) cross-distribution of respective side respectively;
The movable comb (7) and the fixed fingers (8) in said inertial mass (3) left side constitute capacitor C
x1
Movable comb on right side (7) and fixed fingers (8) constitute capacitor C
x2
The movable comb (7) of inertial mass (3) rear side and fixed fingers (8) constitute capacitor C
y1
Movable comb of front side (7) and fixed fingers (8) constitute capacitor C
y2
2. the little two dimension acceleration sensor of the responsive quality unit's silicon of the list of band coupled beams structure according to claim 1, it is characterized in that: said movable comb (7) forms the fixed tooth offset structure with the fixed fingers (8) of respective side.
3. the little two dimension acceleration sensor of the responsive quality unit's silicon of the list of band coupled beams structure according to claim 1 and 2, it is characterized in that: said broach capacitance structure also comprises limit stops (11), said limit stops (11) is the rectangle frame structure; The outer end of said movable tooth pivot extension plate (12) is stretched in the limit stops (11) of rectangle frame structure, and the outer end of movable tooth pivot extension plate (12) is provided with the limiting plate (14) that can in the limit stops (11) of rectangle frame structure, move; Said limiting plate (14) on the sensitive direction of correspondence and the distance between the inboard of the limit stops of rectangle frame structure (11) less than the minor increment between movable comb (7) and the adjacent fixed fingers (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110341472 CN102507981B (en) | 2011-11-02 | 2011-11-02 | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110341472 CN102507981B (en) | 2011-11-02 | 2011-11-02 | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102507981A true CN102507981A (en) | 2012-06-20 |
| CN102507981B CN102507981B (en) | 2013-06-05 |
Family
ID=46220087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110341472 Expired - Fee Related CN102507981B (en) | 2011-11-02 | 2011-11-02 | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102507981B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879607A (en) * | 2012-09-20 | 2013-01-16 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN103760382A (en) * | 2014-01-16 | 2014-04-30 | 中国工程物理研究院电子工程研究所 | Static stiffness type silicon micro resonance acceleration sensor chip |
| CN104482930A (en) * | 2014-12-04 | 2015-04-01 | 中国科学院半导体研究所 | Weak-coupling elastic beam structure applied to MEMS device |
| CN113514666A (en) * | 2021-04-29 | 2021-10-19 | 东南大学 | Micromechanical accelerometer based on PT symmetrical resonator and detection method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6073484A (en) * | 1995-07-20 | 2000-06-13 | Cornell Research Foundation, Inc. | Microfabricated torsional cantilevers for sensitive force detection |
| US6223598B1 (en) * | 1997-06-18 | 2001-05-01 | Analog Devices, Inc. | Suspension arrangement for semiconductor accelerometer |
| CN1457319A (en) * | 2001-02-12 | 2003-11-19 | （株）英特利智微 | Gyroscope and fabrication method thereof |
| US20060037396A1 (en) * | 2002-11-05 | 2006-02-23 | Liviu Nicu | Micro-machined gyro sensor with detection in the machined plate plane |
| CN101284642A (en) * | 2007-04-02 | 2008-10-15 | 弗劳恩霍夫应用研究促进协会 | Micromechanical device with tilted electrodes |
-
2011
- 2011-11-02 CN CN 201110341472 patent/CN102507981B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6073484A (en) * | 1995-07-20 | 2000-06-13 | Cornell Research Foundation, Inc. | Microfabricated torsional cantilevers for sensitive force detection |
| US6223598B1 (en) * | 1997-06-18 | 2001-05-01 | Analog Devices, Inc. | Suspension arrangement for semiconductor accelerometer |
| CN1457319A (en) * | 2001-02-12 | 2003-11-19 | （株）英特利智微 | Gyroscope and fabrication method thereof |
| US20060037396A1 (en) * | 2002-11-05 | 2006-02-23 | Liviu Nicu | Micro-machined gyro sensor with detection in the machined plate plane |
| CN101284642A (en) * | 2007-04-02 | 2008-10-15 | 弗劳恩霍夫应用研究促进协会 | Micromechanical device with tilted electrodes |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879607A (en) * | 2012-09-20 | 2013-01-16 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN102879607B (en) * | 2012-09-20 | 2014-08-06 | 北京金禾天晟高新技术有限责任公司 | Micro-electro-mechanical accelerometer and manufacturing method thereof |
| CN103760382A (en) * | 2014-01-16 | 2014-04-30 | 中国工程物理研究院电子工程研究所 | Static stiffness type silicon micro resonance acceleration sensor chip |
| CN103760382B (en) * | 2014-01-16 | 2016-04-27 | 中国工程物理研究院电子工程研究所 | The micro-resonant acceleration sensor chip of a kind of electrostatic stiffness formula silicon |
| CN104482930A (en) * | 2014-12-04 | 2015-04-01 | 中国科学院半导体研究所 | Weak-coupling elastic beam structure applied to MEMS device |
| CN104482930B (en) * | 2014-12-04 | 2017-09-29 | 中国科学院半导体研究所 | Apply the weak coupling elastic beam structure in MEMS |
| CN113514666A (en) * | 2021-04-29 | 2021-10-19 | 东南大学 | Micromechanical accelerometer based on PT symmetrical resonator and detection method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102507981B (en) | 2013-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11105829B2 (en) | MEMS accelerometer | |
| CN102435777B (en) | Silicon microcapacitor type two-dimensional integrated acceleration sensor | |
| KR101286028B1 (en) | Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor | |
| US9791472B2 (en) | Acceleration sensor | |
| TWI391663B (en) | Accelerometer | |
| US20120160029A1 (en) | Acceleration sensor | |
| CN102507981B (en) | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure | |
| CN102721829B (en) | Capacitive micro acceleration sensor and uni-wafer manufacturing method thereof | |
| CN104133079B (en) | The preparation method of a kind of quartz comb capacitance type jerkmeter | |
| IT201600110354A1 (en) | MEMS TRIASSIAL ACCELEROMETER WITH PERFECT CONFIGURATION | |
| JP6020341B2 (en) | Capacitive physical quantity sensor and manufacturing method thereof | |
| CN102435779B (en) | Silicon micro-capacitive two-dimensional acceleration sensor | |
| CN115078767A (en) | Sensitive structure of MEMS accelerometer sensor with stress release | |
| CN109579811B (en) | Butterfly wing type micro gyroscope adopting polygonal vibrating beam and preparation method thereof | |
| JP5817841B2 (en) | Acceleration sensor | |
| CN107782913B (en) | Triaxial capacitive accelerometer | |
| JP2011247714A (en) | Semiconductor physical quantity sensor | |
| JP2011106822A (en) | Acceleration sensor | |
| JP2013024765A (en) | Capacitance type sensor | |
| CN114966111A (en) | Vane type Z-axis MEMS accelerometer | |
| JP5783201B2 (en) | Capacitive physical quantity sensor | |
| US9964561B2 (en) | Acceleration sensor | |
| CN103910323A (en) | Micro-electromechanical device | |
| CN115078769B (en) | MEMS accelerometer | |
| JP2005098891A (en) | Electrostatic capacity type sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Termination date: 20131102 |