CN101804568A - Linear motor driven air suspension motion platform - Google Patents
Linear motor driven air suspension motion platform Download PDFInfo
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- CN101804568A CN101804568A CN 201010127505 CN201010127505A CN101804568A CN 101804568 A CN101804568 A CN 101804568A CN 201010127505 CN201010127505 CN 201010127505 CN 201010127505 A CN201010127505 A CN 201010127505A CN 101804568 A CN101804568 A CN 101804568A
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- 230000033001 locomotion Effects 0.000 title claims abstract description 121
- 239000000725 suspension Substances 0.000 title claims abstract description 15
- 239000010438 granite Substances 0.000 claims abstract description 13
- 241000397426 Centroberyx lineatus Species 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009351 contact transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
The invention discloses a linear motor driven air suspension motion platform which solves the problems of low structural rigidity and low dynamic response of a traditional motion platform. The motion platform comprises a granite base (1) with a mountain-shaped longitudinal cross section, Y-axis motion platforms (5) are arranged above a left bearing platform, a middle bearing platform and a right bearing platform, Y-axis bearing cushions (8) are respectively fixed at the left, the middle and the right parts of the lower surface of each Y-axis motion platform (5), a first Y-axis linear motor (9) is fixed on the left side surface of a middle bearing platform (3), a mover of the first Y-axis linear motor (9) is fixedly connected with the Y-axis motion platform (5), a first Y-axis grating reading head (15) is also arranged, a second Y-axis linear motor (10) is fixed on the right side surface of the middle bearing platform (3), the mover of the second Y-axis linear motor (10) is fixedly connected with the Y-axis motion platform (5); and the linear motor driven air suspension motion platform is driven by the linear motor, adopts the air suspension platform structure, and has simple structure and high cost performance.
Description
Technical field
The air suspension motion platform that the present invention relates to a kind of linear electric motors driving is mounted on the green band puncher, realizes quick, the hi-Fix of X, Y both direction, also can be applied in the occasion of precision, High-speed machining simultaneously.
Background technology
Accurate and High-speed machining is had higher requirement higher dynamic characteristic and control accuracy, higher speed and acceleration, lower vibration noise and littler wearing and tearing to motion positions and control thereof.And adopting electric rotating machine to add ball-screw more, traditional motion platform drives, the torque of electric rotating machine output drives platform motion through a plurality of intermediate links such as decelerator, shaft coupling, ball-screw, this structure exists system inertia big, the rigidity of structure is low, the strain of ball-screw is big, a plurality of error sources such as the friction in the driving-chain, gap, return difference make the performance of controller be subjected to suppressing significantly simultaneously, are easy to generate mechanical resonant, make the dynamic response of system slack-off.
Summary of the invention
The invention provides the air suspension motion platform that a kind of linear electric motors drive, the system inertia that has solved existing motion platform existence is big, and the rigidity of structure is low, and the strain of ball-screw is big, the technical problem that the dynamic response of system is slow.
The present invention overcomes the above problems by following scheme:
The air suspension motion platform that linear electric motors drive, comprise that the longitudinal section is the granite base of mountain font, on three end faces of the granite base of mountain font, be set with the left bearing platform of Y-axis motion platform respectively, the middle bearing platform of Y-axis motion platform and the right bearing platform of Y-axis motion platform, on a left side, in, right three bearing platforms top is provided with the Y-axis motion platform, left side at the lower surface of described Y-axis motion platform, in, right position is set with Y-axis load-bearing air cushion respectively, the surface of Y-axis load-bearing air cushion is provided with the compressed gas ejiction opening, Compressed Gas in the Y-axis load-bearing air cushion sprays from these compressed gas ejiction openings the Y-axis motion platform is suspended in a left side, in, right three bearing platforms top, position at four angles of the lower surface of Y-axis motion platform is set with Y-axis guiding air cushion fixed block respectively, side at Y-axis guiding air cushion fixed block is set with Y-axis guiding air cushion, two Y-axis guiding air cushions in the left side of the lower surface of Y-axis motion platform suspend to lead with the Right Inboard face of left bearing platform and cooperate, two Y-axis guiding air cushions on the right side of the lower surface of Y-axis motion platform suspend to lead with the left medial surface of right bearing platform and cooperate, left surface at middle bearing platform is set with the first Y-axis linear electric motors, be set with the first Y-axis contiguous block above the mover of the first Y-axis linear electric motors, the lower surface of the first Y-axis contiguous block and Y-axis motion platform is fixed together, on the mover of the first Y-axis linear electric motors, also be provided with the first Y-axis grating reading head, granite base below the first Y-axis grating reading head is provided with the grating chi of the first Y-axis grating reading head, the first Y-axis grating reading head and the first Y-axis linear electric motors are electrically connected, right flank at middle bearing platform is set with the second Y-axis linear electric motors, be set with the second Y-axis contiguous block above the mover of the second Y-axis linear electric motors, the lower surface of the second Y-axis contiguous block and Y-axis motion platform is fixed together, on the mover of the second Y-axis linear electric motors, also be provided with the second Y-axis grating reading head, granite base below the second Y-axis grating reading head is provided with the grating chi of the second Y-axis grating reading head, and the second Y-axis grating reading head and the second Y-axis linear electric motors are electrically connected.
Secured in parallel is provided with the preceding bearing platform of X-axis motion platform and the back bearing platform of X-axis motion platform on described Y-axis motion platform, the medial surface of the back bearing platform of the medial surface of the preceding bearing platform of X-axis motion platform and X-axis motion platform is interior inclined-plane and forms swallow-tail form, above the back bearing platform of the preceding bearing platform of X-axis motion platform and X-axis motion platform, be provided with the X-axis motion platform, lower surface at the X-axis motion platform is set with X-axis load-bearing air cushion respectively, the Compressed Gas of the nozzle ejection of X-axis load-bearing air cushion makes the X-axis motion platform be suspended in the back bearing platform top of the preceding bearing platform and the X-axis motion platform of X-axis motion platform, be set with the X-axis guiding air cushion fixed block of swallow-tail form at the middle part of the lower surface of X-axis motion platform, on the dovetail lateral surface of X-axis guiding air cushion fixed block, be set with X-axis guiding air cushion respectively, the Compressed Gas of the nozzle ejection of two X-axis guiding air cushions cooperates with the interior inclined-plane of the back bearing platform of the interior inclined-plane of the preceding bearing platform of X-axis motion platform and the X-axis motion platform guiding that suspends respectively, on the lateral surface of the preceding bearing platform of X-axis motion platform, be set with the first X-axis linear electric motors, be set with the mover contiguous block of the first X-axis linear electric motors above the mover of the first X-axis linear electric motors, the mover contiguous block of the first X-axis linear electric motors is fixedlyed connected with the lower surface of X-axis motion platform, side at the mover of the first X-axis linear electric motors is set with the first X-axis grating reading head, be set with the first X-axis grating chi above the Y-axis motion platform below the first X-axis grating reading head, the first X-axis grating reading head and the first X-axis linear electric motors are electrically connected, on the lateral surface of the back bearing platform of X-axis motion platform, be set with the second X-axis linear electric motors, be set with the mover contiguous block of the second X-axis linear electric motors above the mover of the second X-axis linear electric motors, the mover contiguous block of the second X-axis linear electric motors is fixedlyed connected with the lower surface of X-axis motion platform, side at the mover of the second X-axis linear electric motors is set with the second X-axis grating reading head, be set with the second X-axis grating chi above the Y-axis motion platform below the second X-axis grating reading head, the second X-axis grating reading head and the second X-axis linear electric motors are electrically connected.
The present invention adopts linear electric motors to drive, and the gas suspension platform structure is simple in structure, easy to maintenance, the cost performance height.
Description of drawings:
Fig. 1 is a structural representation of the present invention
Fig. 2 is the structural representation of Y-axis motion platform of the present invention
Fig. 3 is the structural representation of X-axis motion platform of the present invention
The specific embodiment
The air suspension motion platform that linear electric motors drive, comprise that the longitudinal section is the granite base 1 of mountain font, on three end faces of the granite base 1 of mountain font, be set with the left bearing platform 2 of Y-axis motion platform respectively, the middle bearing platform 3 of Y-axis motion platform and the right bearing platform 4 of Y-axis motion platform, on a left side, in, right three bearing platforms top is provided with Y-axis motion platform 5, left side at the lower surface of described Y-axis motion platform 5, in, right position is set with Y-axis load-bearing air cushion 8 respectively, the surface of Y-axis load-bearing air cushion 8 is provided with the compressed gas ejiction opening, Compressed Gas in the Y-axis load-bearing air cushion 8 sprays from these compressed gas ejiction openings Y-axis motion platform 5 is suspended in a left side, in, right three bearing platforms top, position at four angles of the lower surface of Y-axis motion platform 5 is set with Y-axis guiding air cushion fixed block 6 respectively, side at Y-axis guiding air cushion fixed block 6 is set with Y-axis guiding air cushion 7, two Y-axis guiding air cushions 7 in the left side of the lower surface of Y-axis motion platform 5 suspend to lead with the Right Inboard face of left bearing platform 2 and cooperate, two Y-axis guiding air cushions 7 on the right side of the lower surface of Y-axis motion platform 5 suspend to lead with the left medial surface of right bearing platform 4 and cooperate, left surface at middle bearing platform 3 is set with the first Y-axis linear electric motors 9, be set with the first Y-axis contiguous block 13 above the mover 11 of the first Y-axis linear electric motors 9, the first Y-axis contiguous block 13 is fixed together with the lower surface of Y-axis motion platform 5, on the mover 11 of the first Y-axis linear electric motors 9, also be provided with the first Y-axis grating reading head 15, granite base 1 below the first Y-axis grating reading head 15 is provided with the grating chi of the first Y-axis grating reading head 15, the first Y-axis grating reading head 15 and the first Y-axis linear electric motors 9 are electrically connected, right flank at middle bearing platform 3 is set with the second Y-axis linear electric motors 10, be set with the second Y-axis contiguous block 14 above the mover 12 of the second Y-axis linear electric motors 10, the second Y-axis contiguous block 14 is fixed together with the lower surface of Y-axis motion platform 5, on the mover 12 of the second Y-axis linear electric motors 10, also be provided with the second Y-axis grating reading head 16, granite base 1 below the second Y-axis grating reading head 16 is provided with the grating chi of the second Y-axis grating reading head 16, and the second Y-axis grating reading head 16 and the second Y-axis linear electric motors 10 are electrically connected.
Secured in parallel is provided with the preceding bearing platform 17 of X-axis motion platform and the back bearing platform 18 of X-axis motion platform on described Y-axis motion platform 5, the medial surface of the medial surface of the preceding bearing platform 17 of X-axis motion platform and the back bearing platform 18 of X-axis motion platform is interior inclined-plane and forms swallow-tail form, above the back bearing platform 18 of the preceding bearing platform 17 of X-axis motion platform and X-axis motion platform, be provided with X-axis motion platform 19, lower surface at X-axis motion platform 19 is set with X-axis load-bearing air cushion 22 respectively, the Compressed Gas of the nozzle ejection of X-axis load-bearing air cushion 22 makes X-axis motion platform 19 be suspended in back bearing platform 18 tops of the preceding bearing platform 17 and the X-axis motion platform of X-axis motion platform, be set with the X-axis guiding air cushion fixed block 20 of swallow-tail form at the middle part of the lower surface of X-axis motion platform 19, on the dovetail lateral surface of X-axis guiding air cushion fixed block 20, be set with X-axis guiding air cushion 21 respectively, the Compressed Gas of the nozzle ejection of two X-axis guiding air cushions 21 cooperates with the interior inclined-plane of the back bearing platform 18 of the interior inclined-plane of the preceding bearing platform 17 of X-axis motion platform and the X-axis motion platform guiding that suspends respectively, on the lateral surface of the preceding bearing platform 17 of X-axis motion platform, be set with the first X-axis linear electric motors 23, be set with the mover contiguous block 27 of the first X-axis linear electric motors above the mover 25 of the first X-axis linear electric motors 23, the mover contiguous block 27 of the first X-axis linear electric motors is fixedlyed connected with the lower surface of X-axis motion platform 19, side at the mover 25 of the first X-axis linear electric motors 23 is set with the first X-axis grating reading head 29, be set with the first X-axis grating chi above the Y-axis motion platform 5 below the first X-axis grating reading head, the first X-axis grating reading head 29 and the first X-axis linear electric motors 23 are electrically connected, on the lateral surface of the back bearing platform 18 of X-axis motion platform, be set with the second X-axis linear electric motors 24, be set with the mover contiguous block 28 of the second X-axis linear electric motors above the mover 26 of the second X-axis linear electric motors 24, the mover contiguous block 28 of the second X-axis linear electric motors is fixedlyed connected with the lower surface of X-axis motion platform 19, side at the mover 26 of the second X-axis linear electric motors 24 is set with the second X-axis grating reading head 30, be set with the second X-axis grating chi above the Y-axis motion platform 5 below the second X-axis grating reading head, the second X-axis grating reading head 30 and the second X-axis linear electric motors 24 are electrically connected.
Adopt linear electric motors as follows as the mode major advantage of drive system and gas suspension guide supporting:
(1) simple in structure. Since linear electric motors do not need rotation motion be in line the motion attachment device, weight and volume descends widely, significantly reduces the movement inertia of system;
(2) positioning accuracy height. Linear electric motors can be realized direct-drive, thereby can eliminate the various position errors that intermediate link is brought, so the positioning accuracy height adopts high accuracy grating scale feedback, microcomputer control, have improved widely the positioning accuracy of whole system;
(3) reaction speed is fast, highly sensitive, and servo-actuated property is good. The employing gas suspension supports, thereby so that moving component remains certain the air gap with guide rail and do not contact that this has just eliminated calmly, moving contact frictional resistance partly, thereby improved widely sensitivity, rapidity and the servo-actuated property of system;
(4) safe and reliable, the life-span is long. Linear electric motors-gas suspension structure can realize non contact transmission power, and the mechanical friction loss is almost nil, so fault is few, freedom from repairs, thus safe and reliable, the life-span is long.
Claims (2)
1. the air suspension motion platform that drives of linear electric motors, comprise that the longitudinal section is the granite base (1) of mountain font, on three end faces of the granite base (1) of mountain font, be set with the left bearing platform (2) of Y-axis motion platform respectively, the middle bearing platform (3) of Y-axis motion platform and the right bearing platform (4) of Y-axis motion platform, on a left side, in, right three bearing platforms top is provided with Y-axis motion platform (5), it is characterized in that, left side at the lower surface of described Y-axis motion platform (5), in, right position is set with Y-axis load-bearing air cushion (8) respectively, the surface of Y-axis load-bearing air cushion (8) is provided with the compressed gas ejiction opening, Compressed Gas in the Y-axis load-bearing air cushion (8) sprays from these compressed gas ejiction openings Y-axis motion platform (5) is suspended in a left side, in, right three bearing platforms top, position at four angles of the lower surface of Y-axis motion platform (5) is set with Y-axis guiding air cushion fixed block (6) respectively, be set with Y-axis guiding air cushion (7) in the side of Y-axis guiding air cushion fixed block (6), two Y-axis guiding air cushions (7) in the left side of the lower surface of Y-axis motion platform (5) suspend to lead with the Right Inboard face of left bearing platform (2) and cooperate, two Y-axis guiding air cushions (7) on the right side of the lower surface of Y-axis motion platform (5) suspend to lead with the left medial surface of right bearing platform (4) and cooperate, left surface at middle bearing platform (3) is set with the first Y-axis linear electric motors (9), be set with the first Y-axis contiguous block (13) above the mover (11) of the first Y-axis linear electric motors (9), the first Y-axis contiguous block (13) is fixed together with the lower surface of Y-axis motion platform (5), on the mover (11) of the first Y-axis linear electric motors (9), also be provided with the first Y-axis grating reading head (15), the granite base (1) of the first Y-axis grating reading head (15) below is provided with the grating chi of the first Y-axis grating reading head (15), the first Y-axis grating reading head (15) is electrically connected with the first Y-axis linear electric motors (9), right flank at middle bearing platform (3) is set with the second Y-axis linear electric motors (10), be set with the second Y-axis contiguous block (14) above the mover (12) of the second Y-axis linear electric motors (10), the second Y-axis contiguous block (14) is fixed together with the lower surface of Y-axis motion platform (5), on the mover (12) of the second Y-axis linear electric motors (10), also be provided with the second Y-axis grating reading head (16), the granite base (1) of the second Y-axis grating reading head (16) below is provided with the grating chi of the second Y-axis grating reading head (16), and the second Y-axis grating reading head (16) is electrically connected with the second Y-axis linear electric motors (10).
2. the air suspension motion platform that linear electric motors according to claim 1 drive, it is characterized in that, go up secured in parallel at described Y-axis motion platform (5) and be provided with the preceding bearing platform (17) of X-axis motion platform and the back bearing platform (18) of X-axis motion platform, the medial surface of the medial surface of the preceding bearing platform (17) of X-axis motion platform and the back bearing platform (18) of X-axis motion platform is interior inclined-plane and forms swallow-tail form, be provided with X-axis motion platform (19) at the preceding bearing platform (17) of X-axis motion platform and back bearing platform (18) top of X-axis motion platform, lower surface at X-axis motion platform (19) is set with X-axis load-bearing air cushion (22) respectively, the Compressed Gas of the nozzle ejection of X-axis load-bearing air cushion (22) makes X-axis motion platform (19) be suspended in back bearing platform (18) top of the preceding bearing platform (17) and the X-axis motion platform of X-axis motion platform, be set with the X-axis guiding air cushion fixed block (20) of swallow-tail form at the middle part of the lower surface of X-axis motion platform (19), on the dovetail lateral surface of X-axis guiding air cushion fixed block (20), be set with X-axis guiding air cushion (21) respectively, the Compressed Gas of the nozzle ejection of two X-axis guiding air cushions (21) cooperates with the interior inclined-plane of the back bearing platform (18) of the interior inclined-plane of the preceding bearing platform (17) of X-axis motion platform and the X-axis motion platform guiding that suspends respectively, on the lateral surface of the preceding bearing platform (17) of X-axis motion platform, be set with the first X-axis linear electric motors (23), be set with the mover contiguous block (27) of the first X-axis linear electric motors above the mover (25) of the first X-axis linear electric motors (23), the mover contiguous block (27) of the first X-axis linear electric motors is fixedlyed connected with the lower surface of X-axis motion platform (19), side at the mover (25) of the first X-axis linear electric motors (23) is set with the first X-axis grating reading head (29), be set with the first X-axis grating chi above the Y-axis motion platform (5) below the first X-axis grating reading head, the first X-axis grating reading head (29) is electrically connected with the first X-axis linear electric motors (23), on the lateral surface of the back bearing platform (18) of X-axis motion platform, be set with the second X-axis linear electric motors (24), be set with the mover contiguous block (28) of the second X-axis linear electric motors above the mover (26) of the second X-axis linear electric motors (24), the mover contiguous block (28) of the second X-axis linear electric motors is fixedlyed connected with the lower surface of X-axis motion platform (19), side at the mover (26) of the second X-axis linear electric motors (24) is set with the second X-axis grating reading head (30), be set with the second X-axis grating chi above the Y-axis motion platform (5) below the second X-axis grating reading head, the second X-axis grating reading head (30) is electrically connected with the second X-axis linear electric motors (24).
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| CN 201010127505 CN101804568B (en) | 2010-03-19 | 2010-03-19 | Linear motor driven air suspension motion platform |
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| CN 201010127505 CN101804568B (en) | 2010-03-19 | 2010-03-19 | Linear motor driven air suspension motion platform |
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| CN102490020A (en) * | 2011-11-18 | 2012-06-13 | 江苏大学 | Simple precision displacement platform |
| CN102522356A (en) * | 2011-12-15 | 2012-06-27 | 东莞华中科技大学制造工程研究院 | Linear platform of double-shaft floating stator |
| CN104400534A (en) * | 2014-10-29 | 2015-03-11 | 北京工研精机股份有限公司 | Machine tool feeding mechanism and large-stroke nanometer resolution movement feed driving device thereof |
| CN104440344A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor |
| CN104898375A (en) * | 2015-06-12 | 2015-09-09 | 中国工程物理研究院激光聚变研究中心 | Photoresist blowing and coating device |
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| CN102490020B (en) * | 2011-11-18 | 2013-10-23 | 江苏大学 | Simple precision displacement platform |
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| CN104019749B (en) * | 2014-06-20 | 2016-08-24 | 哈尔滨工业大学 | A kind of cursor type measurement apparatus for the vertical servo control mechanism of high accuracy and measuring method |
| CN104400534A (en) * | 2014-10-29 | 2015-03-11 | 北京工研精机股份有限公司 | Machine tool feeding mechanism and large-stroke nanometer resolution movement feed driving device thereof |
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| CN104898375A (en) * | 2015-06-12 | 2015-09-09 | 中国工程物理研究院激光聚变研究中心 | Photoresist blowing and coating device |
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