CN102476238A - Novel photonic crystal optical fiber laser processing machine - Google Patents
Novel photonic crystal optical fiber laser processing machine Download PDFInfo
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- CN102476238A CN102476238A CN 201010554328 CN201010554328A CN102476238A CN 102476238 A CN102476238 A CN 102476238A CN 201010554328 CN201010554328 CN 201010554328 CN 201010554328 A CN201010554328 A CN 201010554328A CN 102476238 A CN102476238 A CN 102476238A
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Abstract
The invention discloses a novel photonic crystal optical fiber laser processing machine, which belongs to the technical field of laser. The processing machine consists of a femtosecond laser oscillator stage of a photonic crystal optical fiber or a solid, a high-power large-mode-area photonic crystal optical fiber laser amplifier, a laser frequency multiplying device, a collimating and focusing system, a precision three-dimensional micro displacement platform with nano-scale accuracy and a computer control system. The processing machine has the advantages of high repeating frequency, simple structure, high stability, low running cost, high light beam quality, narrow pulse width and high power.
Description
Technical field
The invention belongs to laser technology field, relate to a kind of high-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine.
Background technology
Laser Micro-Machining has become the main tool in the MEMS manufacturing.But the fuel factor of these Long Pulse LASER processing has had a strong impact on its machining accuracy in microfabrication.And the little processing of ultra-short pulse laser has the accumulation of less fuel factor, and therefore than continuous or the micro-machined precision of Long Pulse LASER is higher, size is littler.The photon energy of ultra-short pulse laser that has ultraviolet wavelength simultaneously is high, can reach the chemical bond energy of material, can directly peel off processing and does not have heat exchange to take place, and this processing for biochip is very favourable; In addition, the short more diffraction limit of wavelength is just more little, therefore has more retrofit aspect advantage.So the ultraviolet ultrashort-pulse laser instrument is to carry out the micro-machined ideal tools of high accuracy.Yet; Make three types of laser instruments that field medium ultraviolet laser micro-machining technology adopts at MEMS at present: the solid state laser (DPSS) and the ti sapphire laser of excimer laser, LD pumping; Their drawback are bulky; Cost an arm and a leg repetition rate lower (l-50KHz); The pulsewidth broad of excimer laser (only in the ns magnitude), the solid state laser pulsewidth of transferring Q is in ns or ps magnitude; Also have, the finite lifetime of high-purity gas working media is brought defectives such as high follow-up running expense and gas working dielectric are poisonous in the excimer laser.These have all limited such laser instrument and in little processing, have obtained higher machining accuracy and application space.
Photonic crystal fiber (PCF) was succeeded in developing by Bath university in 1996; Because it possesses the unexistent characteristic of many general single mode fibers; So the research to PCF becomes focus, and obtained application at aspects such as optic communication, quantum information, sensor and laser instruments.2005, German Limpert group reported and has utilized the PCF that mixes mirror to realize that as gain media the laser of 13lw, 220fs amplifies running.In the same year, the M.Moenster group of Germany has reported that the PCF that utilizes neodymium-doped has realized the laser generation level of 40Ofs for gain media and exported, and has from then on begun new trend, the new trend of PCF femto-second laser research.
Summary of the invention
The deficiency that the present invention is directed to above-mentioned prior art existence is intended to propose a kind of high-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine, and this processing machine has the repetition rate height, and is simple in structure; Good stability; Operating cost is low, and beam quality is high, pulse width and high-power advantage.
The present invention realizes through following technical scheme; A kind of high-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine; It is characterized in that; This processing machine comprises that femtosecond laser oscillator stage photonic crystal fiber or solid 1, high power large mould field photon crystal optical laser amplifier 2, laser multiple frequence device 3, collimation and focusing system 4, precision are that the accurate three-dimensional micro-displacement platform 5 and the computer control system 6 of nanometer scale constitutes; The annexation of each parts does in the device; The femtosecond laser oscillator produces femtosecond orphan or similarity pulse, as the seed pulse of large mould field photon crystal optical laser amplifier, through forming high-repetition-rate, high-power femtosecond pulse train after amplification and the pulse compression; Carry out multiple frequence then, obtain the Ultra-Violet Laser of the high repetition frequency of femtosecond one picosecond magnitude; Ultra-Violet Laser imports to workpiece through collimation and focusing system; Workpiece is placed on the accurate three-dimensional micro-displacement platform, and its stroke is by computer system control, and computer also provides the Synchronization Control of light source for processing and workpiece.
Above-mentioned photonic crystal fiber femtosecond laser oscillator is to cover photonic crystal gain fibre, semiconductor saturable absorbing mirror and polarization rotation (NPE) by the double-contracting of mixing mirror ion or bait ion of big mould field to mix mode locker, grating pair or big negative dispersion optical fiber dispersion compensator formation.Wherein the core diameter of photonic crystal gain fibre is 10-50 microns; Numerical aperture NA is 0.02 – 0.06, and 200-400 microns of surrounding layer diameters, numerical aperture NA are 0.4 – 0.8; Length is 1-1Om, and cladding pumping is the high-power laser diode of 5-30W.Through regulating chamber internal dispersion compensator, this oscillator operates in orphan's type, breathing pattern and self similarity type operating condition respectively.
The amplifying stage of above-mentioned high power large mould field photon crystal optical laser amplifier is 1-3 grade of amplification; Every grade of amplification; Photonic crystal gain fibre, grating pair or big negative dispersion optical fiber dispersion compensator formation are covered in the double-contracting of mixing mirror ion or bait ion that comprises big mould field; Wherein the core diameter of photonic crystal gain fibre is 20-100 microns, and numerical aperture NA is 0.02 – 0.06,200-400 microns of surrounding layer diameters; Numerical aperture NA is 0.4 – 0.8; Length is 1-1Om, and cladding pumping is 20-100W high-power laser diode, amplifier between oscillator stage and the amplifier and amplifying stage the polarization faraday isolator all is set between at different levels.
Above-mentioned laser multiple frequence device is that barium metaborate (BBO) and three lithium borates (LBO) crystal or period polarized nonlinear crystal carry out the multiple frequence conversion.
Above-mentioned collimation and focusing system adopt quartzy aspherical mirror Focused Optical system, realize the collimation and the focusing of Ultra-Violet Laser.
The invention has the advantages that:
(l) be used for micro-machined high power ultraviolet fs-laser system and be based on large mode area pcf mode-locked laser amplification system; Specific volume is little mutually with the excimer laser that adopts at present and titanium sapphire laser system for it; Simple in structure, good stability, operating cost is low; Compare with the DPSS frequency double laser, have beam quality height, pulse width and high-power advantage.
(2) having high repetition frequency is another main advantage of the present invention.Say qualitatively that from micro-machined the repetition rate of laser pulse is high more, the pattern of processing is just level and smooth more, and promptly the quality of processing is high.The repetition rate of existing pulse laser processing machine is the highest at tens KHzs, and the repetition rate of laser-processing system of the present invention is in 1 one 100 order of megahertz, and this is a significantly innovation.
(3) using polarization-maintaining photonic crystal fiber, to keep the polarization characteristic of laser beam, is that the anti-environmental interference ability of this laser system improves greatly and is convenient to Polarization Control.
Description of drawings
Fig. 1 is the structured flowchart of high-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine of the present invention, and among the figure: 1 is femtosecond laser oscillator stage photonic crystal fiber or solid; 2 is high power large mould field photon crystal optical laser amplifier; 3 is laser multiple frequence device; 4 is laser alignment and focusing system; 5 is accurate three-dimensional micro-displacement platform; 6 is computer control system;
Fig. 2 is the structural representation of photonic crystal fiber femtosecond laser oscillator stage 1 among Fig. 1, and among the figure: 1-1 is the oscillator stage pumping source; 1-2 is oscillator stage large mould field photon crystal gain fibre; 1-3 is that semiconductor saturable absorbing mirror and polarization rotation (NPE) mix mode locker; 1-4 is grating pair or big negative dispersion optical fiber dispersion compensator;
Fig. 3 is the structural representation of high power large mould field photon crystal optical laser amplifier 2 among Fig. 1, among the figure: 2-1 polarization faraday isolators; 2-2 is amplifying stage large mould field photon crystal gain fibre; 2-3 is grating pair or big negative dispersion optical fiber dispersion compensator; 2-4 is the amplifying stage pumping source.
The specific embodiment
High-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine of the present invention is shown in accompanying drawing 1, and specific embodiment is following:
The laser generation level is the photon crystal optical laser device shown in Fig. 2, and gain media adopts the big mould field double-contracting of mixing Yb to cover polarization-maintaining photonic crystal fiber 1-2,25 microns of core diameters; NA is 0.03, and 250 microns of surrounding layer diameters, NA are 0.5; Length is 3.5m; Cladding pumping is directly carried out through subsiding and polishing the oblique angle in two ends, or welds the SMF that goes up suitable length, by the pumping of WDM mode; Oscillator stage adopts the LD1-1 of 10W to carry out single or double cladding pumping form; One end of resonator is taked semiconductor saturable absorbing mirror and polarization impeller locked mode 1-3 and as output port, adopts grating pair or big negative dispersion optical fiber dispersion compensator 1-4 to carry out dispersion compensation and pulse compression at the other end of resonator.Oscillator stage can page or leaf be the solid mode-locked laser also, and bulk crystals is each crystalloid, glass and a pottery of mixing Yb or Nd; The locked mode mode is taked traditional orphan, breathes orphan and similarity pulse mode-locking technique or is adopted the auxiliary locked mode mode that half SESA is first and NPE combines.The laser amplifying stage is that the large mould field photon crystal optical laser shown in Fig. 3 amplifies the single-stage device; Gain media adopts the big mould field double-contracting of mixing hole or Er to cover polarization-maintaining photonic crystal fiber 2-2, and 40 microns of core diameters, NA are 0.03; 270 microns of surrounding layer diameters; NA is 0.6, and length is 1.5m, and cladding pumping is directly carried out through subsiding and polishing the oblique angle in two ends; Or weld the SMF that goes up suitable length, by the pumping of WDM mode; Adopt the LD2-4 of high power 30W to carry out single or double cladding pumping form, adopt grating pair or big negative dispersion optical fiber dispersion compensator 2-3 to carry out dispersion compensation and pulse compression at the output of resonator; The mode that whole amplification system adopts 1-3 grade of above-mentioned single-stage to amplify; The mirror photonic crystal fiber is mixed in the big mould field of gain media; Each level length is respectively: 3-5 m, 2-3m and 1-2m; Core diameter is respectively: 20-40 microns, 40-60 microns and 60-100 microns, the power of pumping LD at different levels is 30W, 50W and 100W; Between oscillator stage and amplifying stage 2 one 1 and amplification at different levels, place the polarization faraday isolator, return oscillator stage to prevent laser.Laser multiple frequence device adopts the BBO crystal of thickness 1-4mm that laser is carried out frequency multiplication; Double-frequency laser and basic frequency laser carry out frequency tripling at LBO, BBO or the period polarized nonlinear crystal of thickness 2-5 mm then, can obtain the multiple frequence conversion by that analogy.Laser alignment and focusing system by focal length be the non-spherical lens of 10-20mm to laser alignment, focus on through the burnt non-spherical lens of the weak point of 5-20mm then.Accurate three-dimensional micro-displacement platform adopts the three-dimensional micro-displacement platform of nano-precision.Computer control system is through computer control panel to be connected with micro-displacement platform with light source, realizes the two synchronous and machining control.
Claims (3)
1. New-type photon crystal optical-fiber laser processing machine is characterized in that: this processing machine comprises that femtosecond laser oscillator stage, high power large mould field photon crystal optical laser amplifier, laser multiple frequence device, collimation and focusing system, the precision of photonic crystal fiber or solid are that the accurate three-dimensional micro-displacement platform and the computer control system of nanometer scale constitutes;
(1) photonic crystal fiber femtosecond laser oscillator covers photonic crystal gain fibre, semiconductor saturable absorbing mirror and polarization rotation by the double-contracting of mixing mirror ion or bait ion of big mould field and mixes mode locker, grating pair or big negative dispersion optical fiber dispersion compensator and constitute; Through regulating chamber internal dispersion compensator, this oscillator operates in orphan's type, breathing pattern and self similarity type operating condition respectively;
(2) amplifying stage of high power large mould field photon crystal optical laser amplifier amplifies for the 1-3 level; Every grade of amplification; The double-contracting of mixing mirror ion or bait ion that comprises big mould field is covered photonic crystal gain fibre, grating pair or big negative dispersion optical fiber dispersion compensator and is constituted, amplifier between oscillator stage and the amplifier and amplifying stage the polarization faraday isolator all is set between at different levels;
(3) laser multiple frequence device is that barium metaborate and lithium triborate crystal or period polarized nonlinear crystal carry out the multiple frequence conversion.
2. a kind of New-type photon crystal optical-fiber laser processing machine according to claim 1; It is characterized in that wherein the core diameter of photonic crystal gain fibre is 10-50 microns; Numerical aperture NA is 0.02 – 0.06, and surrounding layer diameter 200-400 micron, numerical aperture NA are 0.4 – 0.8; Length is 1-10m, and cladding pumping is the high-power laser diode of 5-30W.
3. according to the described a kind of New-type photon crystal optical-fiber laser processing machine of claim 1, it is characterized in that collimation and focusing system adopt quartzy aspherical mirror Focused Optical system.
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| CN 201010554328 CN102476238A (en) | 2010-11-23 | 2010-11-23 | Novel photonic crystal optical fiber laser processing machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102801090A (en) * | 2012-08-13 | 2012-11-28 | 温州泛波激光有限公司 | Long-pulse fiber laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102801090A (en) * | 2012-08-13 | 2012-11-28 | 温州泛波激光有限公司 | Long-pulse fiber laser |
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Application publication date: 20120530 |