CN102460133A - 计算机断层成像工件测量设备 - Google Patents
计算机断层成像工件测量设备 Download PDFInfo
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- CN102460133A CN102460133A CN2010800280515A CN201080028051A CN102460133A CN 102460133 A CN102460133 A CN 102460133A CN 2010800280515 A CN2010800280515 A CN 2010800280515A CN 201080028051 A CN201080028051 A CN 201080028051A CN 102460133 A CN102460133 A CN 102460133A
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Abstract
本发明涉及计算机断层成像工件测量设备,包括构造为生成侵入性辐射的X光源(16),构造为检测侵入性辐射的检测器装置(28)和具有中心轴线和/或旋转轴线的工件载体单元(20,24,26),所述工件载体单元(20,24,26)构造为使其所支承和测量的工件(40)可布置在X光源和检测器装置之间的侵入性辐射的辐射路径(30)内并且可在辐射路径内移动,特别地可沿中心轴线或旋转轴线移动。根据本发明,使得X光源(16)的辐射出口和载体单元的在辐射路径内延伸的中心轴线或旋转轴线(42)之间的第一最小距离A与辐射出口和具有二维地布置在平面内的多个检测器像素的检测器装置之间的第二最小距离B的比例A/B大于0.5,优选地大于0.7,更优选地大于0.8,检测器装置的平面的边长和/或棱长的比例在1.5∶1至500∶1的范围内,优选地在2∶1至100∶1的范围内,并且检测器像素的最大像素尺寸小于100μm,优选地小于80μm,更优选地小于50μm。
Description
技术领域
本发明涉及一种根据主权利要求的前序部分的计算机断层成像工件测量设备。
背景技术
这种用于非医疗计算机断层成像的设备从现有技术中一般地已知,并且基于类似于人类医学或兽医计算机断层成像的测量原理,以高功率X射线作为侵入性辐射施加到工件并透视工件,其中工件作为测量对象典型地位于(高功率)X光源和电子X光检测器之间的作为工件载体的旋转台上。检测器借助于合适的检测器像素逐像素地记录穿透物体的X射线。通过以该旋转台使待测量或待检测的工件旋转,可得到来自不同的方向(透视)的多个X光图像,所述图像在后接的分析单元中被综合为作为体积信息的三维模型,并且以备接受另外的分析或准备,例如用于视觉图示在监视器等上,以可进行另外的视觉检查。
这种假定为已知的设备与所谓的接触测量方法(其中典型地借助于三维可运动的量规可测量工件的外轮廓)相比的优点是,也可以可靠地采集和描绘工件的机械上不可接近的内部区域和中空空间或侧凹,使得通过除使用领域已知的量规坐标测量设备外,计算机断层成像非医学工件测量(测定)特别地也有利于适合于安装和缺陷检测、多孔性分析、壁厚测量的目的或另外的复杂的测量技术评估,直至适用于逆向工程的任务,在所述逆向工程中从实体上存在的测量对象出发,可将所获得的外轮廓和内轮廓数据转化为合适的CAD数据。
此类计算机断层成像工件测量设备在此使用了通常的硬件,即,具有点形射线出口的X光源,和与X光源相关的行状或(近似)四边形的检测器阵列(特别地在此为带有二维布置的检测器的所谓的楔形射线断层成像仪的现有的区域)。也取决于源自医疗技术的检测器的几何关系,所述检测器的典型的像素大小在大约200μm至400μm之间的范围内,其中为实现足够的精度,将布置在X光源和检测器之间的工件载体单元放置在大致中间或在X光源的方向上,以便根据检测器几何形状及其分辨率来实现对于透视的X光图像的所希望的放大。
但这种常规的方式具有缺点,即,在该几何关系下以及总是存在的X光管的不稳定性下,在由X光源发出的射线中存在运动,所述运动在检测器侧则显示为图像不清晰。这点导致图像质量和分辨率受限。所涉及的组件、即X光源、检测器和载体单元的常规的几何形状也导致从现有技术中已知的设备典型地具有大的机械结构,与此相关的缺点是高的壳体、屏蔽和支持的费用:由原理所决定,X光断层成像设备要求相关通道的(铅)屏蔽,使得大的机械尺寸(特别地相对于待检测的工件)对于制造费用、重量和安装条件(例如对于地基要求另外的机械强化)具有不利影响。
发明内容
因此,本发明的任务是在测量特征和成像特征上改进此类计算机断层成像工件测量设备,同时可以将此设备构造为更紧凑并且以更低的机械成本实现。
该任务通过带有主权利要求的特征的设备以及根据权利要求16的使用来解决;本发明的有利的扩展在从属权利要求中描述。此外,在本发明的范围内主张了对于运行方法的保护,所述运行方法用于测定支承在工件载体单元上的工件,特别地用于自动测定多个单独的工件,所述工件沿中心轴线或旋转轴线重叠布置(必要时每个平面布置多个工件)并且通过根据本发明的运动可相继地经过辐射路径或离开辐射路径。
在根据本发明的有利方式中,该任务通过三个相互补充的或协同支持的措施解决:一方面,根据本发明建议将载体单元(连同设置在其上的待测定的工件)提供为相对靠近检测器装置,特别地提供为使载体单元以X光源和检测器之间的中心为参考更靠近检测器装置。该措施与根据本发明的使用小的检测器像素的措施联合使用,所述小的检测器像素即检测器像素的最大像素尺寸小于100μm。以此可以明显提高图像质量,因为使用与现有技术相比保持相同的或改进的分辨率,所产生的X光源的不希望的运动或不稳定性更弱。
此外,该几何形状实现了基本上更紧凑的布置,因为通过所述措施,X光源和检测器装置之间的距离实际上可降低。
根据本发明,该特征与工件载体单元的可运动性联合,特别是与其在垂直方向上(其中,“垂直”的意义理解为沿工件载体单元的中心轴线或旋转轴线并且因此平行于检测器装置的平面侧或窄侧)的可运动性联合。根据本发明,有利地通过可运动性实现了如下可能性,即将工件作为测量对象提供在工件载体单元上,所述工件载体单元沿垂直方向延伸超出检测器单元,使得通过沿垂直方向的(连续的或逐步的)运动可依次记录该工件的不同的段,换言之,设备适合于其尺寸(明显)超过辐射路径和有效检测器平面的几何关系的工件。与此相关的是第二优点:如果这种(典型地纵向延长的)对象以其纵向轴线垂直于工件载体单元定向(与其中对象横向地和平面地放置并且因此完全放置在辐射路径内的典型的已知方式相反),则工件的被X射线透射的质量或应被X射线透射的质量降低。这因此又因为对象内的更小的透射路径长度而实现了被检测器装置所采集的信号的更高的图像质量。此外,在根据本发明的方式中具有至少窄侧与长侧的矩形比例为1.5∶1的平面的(窄的)检测器因为该平面结构而导致了更小的重建误差。又与该发明方面相关联的是本发明的一种优选的扩展,对于该扩展作为使用但也在方法的范围内,与保护无关地要求:如果在根据本发明所要求的方式中实现垂直运动,则可不仅将(单独的)对象垂直放置,而且该方式提供了如下可能性,即将工件载体单元构造为(或提供以合适的载体装置)可将多个单独的工件重叠排布地(也在每个高度面上多个并列排布地)支承。这又实现了以垂直存储的方式优选地自动化地依次处理单独的工件,所述工件通过工件载体的垂直运动相继地运动到辐射路径内(或又从辐射路径中移出)。特别地,从24小时运行的观点上考虑,在最小化根据本发明的设备的手动操作时,这带来了根据本发明的非医疗计算机断层成像工件测量设备的更灵活的使用可能性。
作为另外的根据本发明的措施,将检测器装置实现为矩形平面阵列。由此,例如在水平方向上形成此矩形轮廓的平面侧时,可提高设备的紧凑性,这通过使载体单元除转盘功能性外根据本发明进一步另外地沿旋转轴线进行纵向或轴向运动来实现。相应地形成的X光(单独)图像又可适合于完整的平面和体积模型而根据待检测的工件被综合。根据本发明的矩形形状、即非正方形形状此外是有利的,因为可降低在重建这种几乎正方形的检测器图像时产生的误差。
在本发明的意义中,“平面”或“平面的”不必理解为平坦的(矩形)平面;而是也包括弯曲的平面或小面状沿弧线相继排列的(例如平坦的)单独检测器的布置。根据本发明的边长或棱长的比值相应地通过所述的弧线来测定。
为了同样保持灵活性和对于不同的可能的放大比例的适应性,进一步根据本发明建议,作为将X光源在辐射路径的方向上移动的补充或替代,将检测器装置也在辐射路径的方向上移动。但是在此,在本发明的范围内进一步根据本发明被认为有利和重要的是,为避免加法性(或乘法性)定位误差和公差误差,将X光源和检测器装置成对地在垂直方向上(即平行于工件载体单元的中心轴线或旋转轴线)形成为位置固定的并固定的,进一步优选地将检测器和光源一般地形成为固定的,因为因此将运动轴线限制于工件载体单元或与之相关的壳体的运动。替代地,使检测器和/或光源进一步根据本发明水平地、即垂直于中心轴线或旋转轴线可运动,而也带有有利的解耦的运动轴线。
根据本发明的优选的实施方式,将有利地集成在壳体内的载体单元构造为同时地或相继地执行转盘功能-包括围绕旋转轴线的可调节的旋转-以及转盘(支承平面)在轴向方向上的直线移动;有利地,载体单元在这个意义上是模块化的单元,它具有集成在壳体内的各驱动装置并且提供了合适的控制接口以执行运动。具体而言,因此例如载体单元的壳体一方面提供了用于工件支承平面(所述支承平面例如可以是壳体的上端面)的旋转驱动器(第一驱动装置),另外在壳体内布置了例如具有心轴驱动器形式的马达,所述马达向底侧从壳体伸出作为支承并且因此作为直线驱动器的心轴。
进一步有利地并且根据本发明的扩展,此外该载体单元(或所属的壳体)构造为使其另外可造成支承平面和/或转盘的支承(优选地空气支承)。
进一步有利地并且根据本发明,在优选的实施例的范围内,使得至少将作为部件的X光源、检测器装置和载体单元(在壳体内一起作为驱动总成)一起固定在保持机座或类似的连续地位于下方的支承设备上。由此,这些单元进一步优选地不通过弹性的或另外的装置相互缓冲,而一起相对于位于下方的底板、周围的壳体等以冲击衰减和/或振动衰减的方式支承,其中该方式以简单和简洁的方式降低了机械成本,提供了紧凑性并且同时造成了对于例如振动等的干扰环境影响的最佳解耦。
此外,构造有利地提供了如下可能性,即将隔热的盘等热绝缘单元布置在X光源和载体单元之间的辐射路径内,其中根据本发明的距离构造为此允许了充足的位置,并且同样实现了紧凑的总体布置。根据本发明的扩展,现在该隔热的盘允许在检测器单元或工件载体的区域内提供空调装置,即将X光源区域内对于测量精度以及对于被测定工件的不希望的热膨胀有害的发热从作为测量室或空调室的相邻区域热有效地分离。通过根据本发明的该扩展,可以为了进一步提高测量精度而作为一定的测量指南总是要求工件在预先确定的参考温度下被测定,并且否则例如在长的扫描或测定循环中不能排除由X光源对整个内部空间的加热。
根据本发明的另一个优选扩展,对于与前序部分一起也独立要求的保护,使得与检测器单元相关的或后接于检测器单元的分析装置进行对于在二维或三维数据组(Schaaren)内的像素数据的(从现有技术中原理上已知的)电子准备,使得以根据本发明的有利的方式,可直接为从现有技术中已知的如特别地与机械接触坐标系测量设备联合使用的数据准备和/或图像生成***提供数据并且就此而言可使之可直接继续使用,而不要求继续的数据准备费用:因此,特别地在本发明的扩展的范围内建议并且优选的是,根据已知的机械接触坐标系测量设备的(典型地标准化的)测量数据格式,生成并且准备多个三维的点数据和/或平面数据,以便通过该方式在下游实现图像生成、光栅或栅格模式的形成或CAD数据的形成。
作为结果,本发明允许以特别简单并且简洁的方式制造紧凑、功能强并且运行安全的计算机断层成像工件测量设备,所述设备确保了潜在的明显的尺寸节约以及与之相关联的成本节约,并且在另外的潜在地提高的成像和测定质量下,非医疗计算机断层成像工件测定的优点可用于新的应用领域。
附图说明
本发明的另外的优点、特征和细节从如下的优选实施例的描述以及附图中可见,各图为:
图1示出了根据本发明的第一优选实施方式(最佳形式)的计算机断层成像工件测定设备的示意性视图;
图2示出了用于解释X光源、载体单元和检测器装置之间的几何关系和它们之间的相对移动性的示意图;和
图3示出了用于解释在实现用于计算机断层成像工件测定的***中的基本功能部件及其相互作用以及用于接触坐标系设备的已知的显示和分析***设备的接口技术的方框图。
具体实施方式
图1在示意性侧视图中解释了在提供了辐射保护(例如通过铅覆层)的框架10内,如何在通过阻尼器单元14相对于框架10阻尼性地(冲击衰减和/或振动衰减)支撑的基板12(保持机座)上提供X光源16(例如,封闭的微观聚焦或宏观聚焦X光源)。X光源16示意性地通过如图2中的箭头46所示的调节单元18沿行驶路径可直线往复调节,以便可以因此与可设置在旋转台20上的测量对象(工件)相匹配。
旋转台20通过对于X射线可穿透的盘状热绝缘保护屏22与X光源16分离,所述旋转台20在通过支承单元24垂直可直线运动的并且在内部承载了提供为驱动该转台20的旋转总成(例如,步进马达)的壳体单元26上还以此外已知的方式具有用于在板12内(优选地空气支承的)垂直运动所需的装置。通过热绝缘保护屏22在该盘右侧的区域内形成了可进行空调的室,根据本发明的扩展(以未示出的方式)可为该室提供此外已知的空调装置,使得由此可以将检测器单元或工件载体单元的热敏感的区域保持在可预先确定的温度下,并且特别地保持为不受X光源16的不利的发热的影响。
此外,在基板12上安装了检测器单元28,所述检测器单元28相对于X光源并且相对于旋转台20定位在示意性示出的辐射路径30的端部处,使得透射了工件30的X射线到达检测器单元28处,并且在此处被多个有棱角的平面地布置的、对X光敏感的半导体光学元件逐像素地接收,并且提供给另外的处理。严格而言,在本实施例中提供了X光检测器,所述X光检测器的有效传感器平面为7.5cm(水平)×5cm(垂直),其分辨率为200像素/cm(因此,对应于大约1500000像素的总像素数量)。
其输出信号被提供到控制单元32并且用于计算机再处理、图像准备或另外的接口功能;在有利的构造-器械构造中,如在图1中示意性地示出的那样,框架状壳体10与写字台平面34直接相关联,使得进一步提高了布置的紧凑性。写字台平面34此外在下部结构36中提供了提供例如计算机阵列的另外的处理装置的可能性。写字台平面的集成也与前序部分无关地并且联合地作为发明要求保护。
作为结果,通过所示出的构造形成了非常紧凑的***,这也因为通过参与的总成之间的几何关系所决定,如在图2中详细解释:因此,在所示的实施例中,在典型的测量位置中(例如,对于水平延伸为6.5mm的测量对象40),X光源16距检测器单元28的距离为B=40cm。同时,在此构造中,X光源A距旋转台20或壳体单元26的距离(更严格而言,距在中心通过此单元的中心轴线42的距离)为A=36.5cm。相应地,对于此构造,所得到的比值A/B为0.915。
如在图2中所解释的那样,工件40可移动垂直行程,如通过双箭头44所解释的;最大行程的典型示例大约为20cm。在本发明的范围内,也允许X光源16可移动20cm的水平直线行程(箭头46),以及(或替代地)检测器单元28可移动10cm的水平直线行程48。
图3解释了功能单元与相关的准备和分析单元的示意性相互作用:更严格而言,X光源16、检测器单元28以及旋转控制器50或垂直运动控制器52(用于旋转台20或垂直行程驱动器26)与图1中示意性地示出的控制单元32相互作用,所述控制单元32一方面控制单元的所需的运动,另一方面控制X光源16的发射,并且导致通过检测器单元28检测辐射并采集所涉及的像素信号。该信号首先在后接的二维图像存储器54内作为多个(二维)单独图像存储,以便然后在进一步后接的三维处理单元56内将其综合或计算为三维(体积)图像。
以根据本发明的有利的方式,此外在该示出的实施例中,单元56的该三维数据以3D数据组、点和/或向量和相应的接触坐标系测量设备的典型的接口或数据格式的形式供接口单元58使用,以便如在图3中所示使用后接的标准化的分析单元60(如所述分析单元60典型地也能够与已知的接触坐标系测量设备相互作用的那样)将其连接,并且输出用于例如显示屏、打印机等的显示单元62的分析结果。
在图3中作为功能部件示出的单元可以作为分立地实现的硬件组件存在,补充地或替代地具有合适地编程的计算机或控制单元的形式,必要时作为并行计算机集群。
Claims (16)
1.一种计算机断层成像工件测量设备,包括:构造为生成侵入性辐射的X光源(16),构造为采集侵入性辐射的检测器装置(28)和具有中心轴线和/或旋转轴线的工件载体单元(20,24,26),所述工件载体单元(20,24,26)构造为使其所支承的待测定的工件(40)可布置在X光源和检测器装置之间的侵入性辐射的辐射路径(30)内,并且可在辐射路径内移动,特别地可沿中心轴线或旋转轴线移动,
其特征在于,所述X光源(16)的辐射出口和载体单元的在辐射路径内延伸的中心轴线或旋转轴线(42)之间的第一最小距离A与辐射出口和具有二维地布置在平面内的多个检测器像素的检测器装置之间的第二最小距离B的比例A/B大于0.5,优选地大于0.7,更优选地大于0.8,
所述检测器装置的平面的边长和/或棱长的比例在1.5∶1至500∶1的范围内,优选地在2∶1至100∶1的范围内,并且
检测器像素的最大像素尺寸小于100μm,优选地小于80μm,更优选地小于50μm。
2.根据权利要求1所述的设备,其特征在于,所述检测器装置和/或X射线源构造为使其在辐射路径的方向上可调节和/或可移动(46,48)。
3.根据权利要求1或2所述的设备,其特征在于,所述载体单元具有带有围绕旋转轴线(42)可旋转地可驱动的工件支承平面(20)的转盘功能性。
4.根据权利要求3所述的设备,其特征在于,所述承载单元构造为使得工件支承平面沿旋转轴线可行驶预先确定的纵向行程(44)。
5.根据权利要求4所述的设备,其特征在于,所述载体单元具有壳体,所述壳体具有第一驱动装置以使工件支承平面围绕旋转轴线旋转,并且具有第二驱动装置以使工件支承平面沿旋转轴线直线运动,其中,驱动装置中的至少一个,优选地两个驱动装置被集成在壳体内。
6.根据权利要求5所述的设备,其特征在于,第一和第二驱动装置构造为并且可控制为使得旋转和直线运动能够同时进行。
7.根据权利要求3至6中任一项所述的设备,其特征在于,所述载体单元具有用于特别地在该载体单元的可运动的壳体或滑板上或内支承、特别是空气支承工件支承平面的装置(24)。
8.根据权利要求1至7中任一项所述的设备,其特征在于,所述X光源、检测器装置以及具有驱动装置的载体单元被固定在共同的保持机座(12)上,所述保持机座优选地相对于地基和/或周围的壳体(10)通过机械缓冲装置(14)以冲击衰减或振动衰减的方式支承。
9.根据权利要求1至8中任一项所述的设备,其特征在于,在所述X光源(16)和载体单元(20,24,26)之间的辐射路径内的、X光辐射可穿透的盘状热绝缘单元(22)。
10.根据权利要求9所述的设备,其特征在于,所述热绝缘单元封闭了具有空调装置的用于工件载体单元的可控温室,在所述可控温室内提供了所述工件载体单元以及检测器装置。
11.根据权利要求1至10中任一项所述的设备,其特征在于,所述检测器单元后接有电子分析装置(58,60),所述电子分析装置(58,60)构造为使其根据机械接触坐标系测量设备的测量数据格式从所述检测器单元的多个X光检测器图像中生成被测定的工件的三维轮廓数据并且将其电子地输出。
12.根据权利要求11所述的设备,其特征在于,所述三维轮廓数据具有三维点数据和/或平面数据和/或体维度数据,并且所述三维轮廓数据被电子结构化和/或准备,使其通过接触坐标系测量设备的图像生成***(62)可转化为视觉图示。
13.根据权利要求1至12中任一项所述的设备,其特征在于,所述工件测量设备提供在壳体和/或包围的框架结构内,并且在所述壳体或框架结构(10)上构造写字台部分或写字台附件(34)。
14.根据权利要求1至13中任一项所述的设备,其特征在于,所述工件载体单元与用于在中心轴线或旋转轴线的方向上重叠地接收和/或保持多个被测定工件的装置相关联,使得通过工件载体单元沿中心轴线或旋转轴线的受控运动可相继地、优选自动化地测定多个工件。
15.根据权利要求14所述的设备,其特征在于,构造用于沿中心轴线或旋转轴线接收或保持多个平面的装置,所述多个平面中至少一个平面构造为用于在其内接收多个工件。
16.一种对根据权利要求1至15中任一项所述的设备的使用,以便用于自动化地测定多个沿中心轴线或旋转轴线的方向重叠地提供在工件载体单元上的工件,所述测定通过所述工件在辐射路径内的相继运动实现。
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- 2010-04-30 US US13/266,881 patent/US20120155606A1/en not_active Abandoned
- 2010-04-30 EP EP10722929A patent/EP2425233A2/de not_active Withdrawn
- 2010-04-30 CN CN201080028051.5A patent/CN102460133B/zh not_active Expired - Fee Related
- 2010-04-30 WO PCT/EP2010/002650 patent/WO2010124868A2/de active Application Filing
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CN102706909A (zh) * | 2012-06-17 | 2012-10-03 | 无锡市优耐特石化装备有限公司 | 一种薄壁容器环缝周向检测装置 |
CN104937370A (zh) * | 2012-09-10 | 2015-09-23 | 沃思测量技术股份有限公司 | 通过坐标测量仪修正计算机断层摄影测量的方法和装置 |
CN104854963A (zh) * | 2012-09-26 | 2015-08-19 | 株式会社尼康 | X线装置、及构造物的制造方法 |
CN112763521A (zh) * | 2015-06-30 | 2021-05-07 | 伊利诺斯工具制品有限公司 | 联机x射线测量设备和方法 |
Also Published As
Publication number | Publication date |
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DE102009019215A1 (de) | 2010-11-11 |
WO2010124868A2 (de) | 2010-11-04 |
CN102460133B (zh) | 2014-06-04 |
DE202009019014U1 (de) | 2015-08-31 |
EP2425233A2 (de) | 2012-03-07 |
US20120155606A1 (en) | 2012-06-21 |
WO2010124868A3 (de) | 2011-02-24 |
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