CN102425556B - Method for obtaining radial suspension centers of rotor of magnetic molecular pump - Google Patents
Method for obtaining radial suspension centers of rotor of magnetic molecular pump Download PDFInfo
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- CN102425556B CN102425556B CN201110358311.1A CN201110358311A CN102425556B CN 102425556 B CN102425556 B CN 102425556B CN 201110358311 A CN201110358311 A CN 201110358311A CN 102425556 B CN102425556 B CN 102425556B
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Abstract
The invention discloses a method for obtaining radial suspension centers of a rotor of a magnetic molecular pump. The method is characterized by establishing a radial magnetic bearing coordinate system and a radial displacement sensor coordinate system with the radial magnetic bearing stator inner circle center and the radial displacement sensor stator inner circle center as the origins; obtaining deviations between the radial magnetic bearing stator inner circle center and the radial protection bearing stator inner circle center in the X and Y directions by obtaining a radial protection bearing stator inner circle center coordinate in the radial magnetic bearing coordinate system; obtaining the radial magnetic bearing stator inner circle center in the radial displacement sensor coordinate system according to the deviations; and adjusting the first and second radial suspension centers of the rotor to be in the first and second radial magnetic bearing stator inner circle centers through the above processes. The method has the effect of ensuring stable operation of the magnetic molecular pump system.
Description
Technical field
The present invention relates to pumping equipment technical field, be specifically related to a kind of method of obtaining radial suspension centers of rotor of magnetic molecular pump.
Background technique
Maglev molecular pump is a kind of molecular pump of magnetic bearing as molecular pump rotor supporting that adopt, it utilize magnetic bearing by rotor stability be suspended in aerial, make rotor there is no Mechanical Contact in high speed operation process and between stator, have machinery-free wearing and tearing, energy consumption low, allow that rotating speed is high, noise is low, the life-span is long, without the advantage such as lubricated, current maglev molecular pump is widely used in the fields such as the acquisition of condition of high vacuum degree, high-cleanness, high vacuum environment.
As shown in Figure 1, the rotor of described maglev molecular pump comprises rotor shaft 7 and the impeller 1 being fixedly connected with described rotor shaft 7 to the general internal structure of maglev molecular pump.Described impeller 1 is fixedly mounted on the top of described rotor shaft 7; The middle part of described rotor shaft 7 successively compartment of terrain is arranged with first and radially protects bearing 4, the first radial displacement transducer 5, the first radial direction magnetic bearing 6, motor 8, the second radial direction magnetic bearing 9, the second radial displacement transducer 10 and second radially to protect bearing 11 etc.Wherein, radially protect the internal diameter of bearing (described first radially protects bearing 4 and described second radially to protect bearing 11) to be less than the internal diameter of radial direction magnetic bearing (described the first radial direction magnetic bearing 6 and described the second radial direction magnetic bearing 9).In theory; described the first radial direction magnetic bearing 6 and described the second radial direction magnetic bearing coaxial 9; described first radially protects bearing 4 and described second radially to protect coaxial bearing 11; and described radially protect bearing and described radial direction magnetic bearing coaxial, radially protect bearing stator inner circle center and described radial direction magnetic bearing stator inner circle center superposition described in.
Described maglev molecular pump also disposes the controller 2 of controlling its running, described controller 2 draws the radial displacement of rotor according to the output signal operational analysis of radial displacement transducer (described the first radial displacement transducer 5 and described the second radial displacement transducer 10), and then drives corresponding described radial direction magnetic bearing output electromagnetic force to control the radial motion of rotor.Wherein, described in arranging, radially protect the object of bearing to be: in the time that described controller 2 breaks down or cause that due to external disturbance rotor unstability is fallen; due to the described internal diameter of radially protecting the internal diameter of bearing to be less than described radial direction magnetic bearing stator; the rotor of unstability can directly fall described radially to be protected on bearing; and can not touch described radial direction magnetic bearing, thus described radial direction magnetic bearing is played a protective role.
Radial direction magnetic bearing in existing maglev molecular pump comprises radial direction magnetic bearing stator, and the inwall of radial direction magnetic bearing stator is provided with 2 equably
nindividual magnetic pole, N is integer and 2≤N≤5.By 2
nindividual magnetic pole is divided into X to pole pair group and Y-direction pole pair group, and X respectively comprises two pole pairs that are oppositely arranged to pole pair group and Y-direction pole pair group, be respectively X positive magnetic pole to X negative sense pole pair, Y positive magnetic pole to Y negative sense pole pair.In each pole pair, comprise 2
n-2individual magnetic pole, and on each pole pair, be wound with respectively coil.Wherein, X positive magnetic pole to X negative sense pole pair on be wound with respectively X positive magnetic pole to coil and X negative sense pole pair coil, X positive magnetic pole after energising produces suction to coil and X negative sense pole pair coil, respectively rotor is applied to X forward electromagnetic force and X negative sense electromagnetic force; Similarly, Y positive magnetic pole is to being wound with respectively Y positive magnetic pole to coil and Y negative sense pole pair coil on coil and Y negative sense pole pair coil, Y positive magnetic pole after energising produces suction to coil and Y negative sense pole pair coil, respectively rotor is applied to Y forward electromagnetic force and Y negative sense electromagnetic force.
As shown in Figure 2, take N=3 as example, 8 magnetic poles are arranged on the inwall of radial direction magnetic bearing stator equably, 8 magnetic poles form 4 pole pair I-IV, pole pair I and pole pair III form X to pole pair group, pole pair II and pole pair IV form Y-direction pole pair group, are all wound with coil on pole pair I-IV.Wherein, pole pair I coil and pole pair III coil apply X forward electromagnetic force and X negative sense electromagnetic force to rotor respectively; And pole pair II coil and pole pair IV coil apply Y forward electromagnetic force and Y negative sense electromagnetic force to rotor respectively.
In theory; controller can be by controlling the electric current in each pole pair coil of radial direction magnetic bearing; described in making rotor stability and being suspended in, radially protect any point in bearing stator inner circle; and in maglev molecular pump working procedure; in the time that rotor is subject to the effect of external disturbance power and moves; controller also can be by adjusting the size of electric current in each pole pair coil of radial direction magnetic bearing; rotor is correspondingly applied to directions X electromagnetic force or Y-direction electromagnetic force; thereby overcome the impact of external disturbance power on rotor, rotor is resetted.
According to Ampere circuit law, the electromagnetic force size that each pole pair coil of radial direction magnetic bearing produces and rotor are to the inverse ratio that square is of the distance of pole pair coil.Therefore electromagnetic force and rotor that, each pole pair coil produces are non-linear relation to the distance of pole pair coil.According to existing maglev molecular pump control theory, known when rotor suspension is in radial direction magnetic bearing stator inner circle center, and the off-centered displacement of rotor hour, electromagnetic force and the rotor that each pole pair of radial direction magnetic bearing can be produced are approximately linear relationship to the relation of the distance of pole pair, thereby simplify control procedure.And, when rotor suspension is during in radial direction magnetic bearing stator inner circle center, the distance of each pole pair coil of rotor and radial direction magnetic bearing equates, the size of current that the each pole pair coil of radial direction magnetic bearing passes into equates, rotor is stressed more balanced, and now magnetic suspension molecular pump system stability is better.
In addition, prior art is the displacement amount that obtains rotor Off-Radial suspension center by the measurement result of radial displacement transducer, field structure and the radial direction magnetic bearing of radial displacement transducer are similar, as shown in Figure 3, if radial displacement transducer comprises 8 magnetic poles, be illustrated in figure 4 the schematic diagram of inductance type radial displacement transducer, the wherein fixing sine voltage signal (excitation pulse) of S ' expression frequency and amplitude, G represents ground.Its working principle is described below:
(1) in the time that stationary rotor is motionless, the induction reactance of four pole pairs does not change, and the X of radial displacement transducer is to output V
wxwith Y-direction output V
wyall remain unchanged.
(2) when rotor is during near the pole pair i coil of radial displacement transducer, the induction reactance of pole pair i coil increases, and the X of radial displacement transducer is to output V
wxdiminish; When rotor is during near pole pair iii coil, the induction reactance of pole pair iii coil increases, and the X of inductance type radial displacement transducer is to output V
wxincrease.
(3) when rotor is during near the pole pair ii coil of radial displacement transducer, the induction reactance of pole pair ii coil increases, the Y-direction of radial displacement transducer output V
wydiminish; When rotor is during near pole pair iv coil, the induction reactance of pole pair iv coil increases, the Y-direction of inductance type radial displacement transducer output V
wyincrease.
Above-mentioned V
wxand V
wybe the sine voltage signal that frequency is fixed and amplitude changes with the variation of rotor displacement.These two sine voltage signals become the linear d. c. voltage signal V of distance between rotor and pole pair coil after the demodulation process of demodulation circuit in controller
o=K × L (L represents the distance between rotor and pole pair coil, and K is constant).After demodulation process, the process chip in controller can direct-detection and is analyzed this d. c. voltage signal, thereby obtains rotor displacement amount.
The radial suspension center of rotor has two, is respectively radially to protect bearing, the first radial suspension center that the first radial direction magnetic bearing is corresponding with first, and radially protects bearing, the second radial suspension center that the second radial direction magnetic bearing is corresponding with second.Prior art obtains the method at rotor radial suspension center, describes as example to obtain rotor the first radial suspension center, and operating process is as follows:
(1) the first radial displacement transducer is demarcated, obtained the sine voltage signal V of the first radial displacement transducer X to output
wxthe d. c. voltage signal and the relation of rotor directions X displacement: the V that in via controller, after demodulation circuit demodulation, obtain
ox=f (x), and the sine voltage signal V of the first radial displacement transducer Y-direction output
wythe d. c. voltage signal and the relation of rotor Y-direction displacement: the V that in via controller, after demodulation circuit demodulation, obtain
oy=f (y);
(2) by the X positive magnetic pole of controller control the first radial direction magnetic bearing and the second radial direction magnetic bearing, coil is produced the electromagnetic force (X negative sense and Y-direction electromagnetic force are zero) of X forward, rotor is adsorbed on to the limit position of X forward.Now rotor contacts with radially protecting bearing, and the first radial displacement transducer X obtains DC voltage value V to the signal of output after the demodulation circuit of controller inside is processed
1, by V
1and V
ox=f (x) can obtain the limit position coordinate X at X forward at the first radial displacement transducer system of coordinates lower rotor part
max+;
Produced again the electromagnetic force (X forward and Y-direction electromagnetic force are zero) of X negative sense by the X negative sense pole pair coil of controller control the first radial direction magnetic bearing and the second radial direction magnetic bearing, rotor is adsorbed on to the limit position of X negative sense.Now rotor contacts with radially protecting bearing, and the first radial displacement transducer X obtains DC voltage value V to the signal of output after the demodulation circuit of controller inside is processed
2, by V
2and V
ox=f (x) can obtain the limit position coordinate X at X negative sense at the first radial displacement transducer system of coordinates lower rotor part
min-;
By the limit position coordinate X of X forward under the first radial displacement transducer system of coordinates
max+limit position coordinate X with X negative sense
min-can obtain at first radial displacement transducer system of coordinates lower rotor part the first radial suspension center directions X coordinate is X
z0=(X
max++ X
min-)/2;
(3) utilize the described method of step (2), obtain at the first radial displacement transducer system of coordinates lower rotor part the limit position coordinate Y at Y forward
max+with the limit position coordinate Y of rotor at Y negative sense
min-, and be Y at first radial displacement transducer system of coordinates lower rotor part the first radial suspension center Y-direction coordinate
z0=(Y
max++ Y
min-)/2;
Obtain thus rotor the first radial suspension center (X
z0, Y
z0), obtain rotor the second radial suspension center (X
z1, Y
z1) method the same, do not repeat them here.
The first radial suspension center (X of the rotor obviously, obtaining by said method
z0, Y
z0) and the second radial suspension center (X
z1, Y
z1) be respectively first radially to protect bearing stator inner circle centre coordinate (X under the first radial displacement transducer system of coordinates
b0, Y
b0) and the second radial displacement transducer system of coordinates under second radially protect bearing stator inner circle centre coordinate (X
b1, Y
b1).Although in theory; radial direction magnetic bearing stator inner circle center and radially protect the stator inner circle center of bearing to overlap; but due to the restriction of maglev molecular pump part processing precision and assembly precision, radial direction magnetic bearing stator inner circle center and radially protect the inner circle center of bearing stator can not accomplish to overlap completely.Therefore,, under the same coordinate system, the first radial direction magnetic bearing and first radially protects bearing to have coaxiality deviation (Δ X at directions X and Y-direction
0, Δ Y
0), wherein Δ X
0with Δ Y
0be respectively and deduct the first constant of radially protecting bearing stator inner circle centre coordinate to obtain with the first radial direction magnetic bearing stator inner circle centre coordinate, the second radial direction magnetic bearing and second radially protects bearing to have coaxiality deviation (Δ X at directions X and Y-direction
1, Δ Y
1), wherein Δ X
1with Δ Y
1be respectively and deduct the second constant of radially protecting bearing stator inner circle centre coordinate to obtain with the second radial direction magnetic bearing stator inner circle centre coordinate.
But; in the time that maglev molecular pump is started working; first rotor suspension to be set in advance at it in the heart (now in suspension; its the first radial suspension center is first under the first radial displacement transducer system of coordinates and radially protects bearing stator inner circle center; the second radial suspension center is second under the second radial displacement transducer system of coordinates and radially protects bearing stator inner circle center); due to the existence of coaxiality deviation, the distance that the first radial direction magnetic bearing stator inner circle center is departed from directions X in the first radial suspension center of rotor is Δ X
0, the distance that departs from the first radial direction magnetic bearing stator inner circle center in Y-direction is Δ Y
0, the distance that the second radial direction magnetic bearing stator inner circle center is departed from directions X in the second radial suspension center of rotor is Δ X
1, the distance that departs from the second radial direction magnetic bearing stator inner circle center in Y-direction is Δ Y
1.Owing to there is above-mentioned deviation in rotor radial suspension center and radial direction magnetic bearing stator inner circle center, can affect the stable operation of maglev molecular pump, be unfavorable for the follow-up stable control to rotor.
Summary of the invention
Technical problem to be solved by this invention is that rotor radial suspension center and the radial direction magnetic bearing stator inner circle center of maglev molecular pump in prior art exists deviation, affect the stable operation of maglev molecular pump, be unfavorable for the follow-up stable control to rotor, and a kind of stable operation that can guarantee maglev molecular pump is provided, be beneficial to the follow-up method of obtaining radial suspension centers of rotor of magnetic molecular pump to rotor stability control of control system.
For solving the problems of the technologies described above, the invention provides a kind of method of obtaining radial suspension centers of rotor of magnetic molecular pump, comprise the steps:
A. obtain rotor the first radial suspension center, comprise the steps
1. before the first radial direction magnetic bearing packs described maglev molecular pump into, the first radial direction magnetic bearing stator is fixed on and is demarcated on stand, and rotor is inserted in the first radial direction magnetic bearing stator inner circle, set up the first radial direction magnetic bearing system of coordinates take the first radial direction magnetic bearing stator inner circle center as true origin;
Utilize the pole pair coil of described the first radial direction magnetic bearing to obtain under the first radial direction magnetic bearing system of coordinates, the inductance value of the X positive magnetic pole of described the first radial direction magnetic bearing to coil and the data relationship L of rotor directions X displacement
x+=f
1and the inductance value of X negative sense pole pair coil and the data relationship L of rotor directions X displacement (x)
x-=f
2(x); And the inductance value of Y positive magnetic pole to coil and the data relationship L of rotor Y-direction displacement
y+=f
1and the inductance value of Y negative sense pole pair coil and the data relationship L of rotor Y-direction displacement (y)
y-=f
2(y);
2. pack described the first radial direction magnetic bearing into described maglev molecular pump, obtain rotor and be positioned at first while radially protecting bearing X direct limit position, the inductance value L ' of the described X negative sense pole pair coil of described the first radial direction magnetic bearing
xmin-, and rotor is positioned at described first while radially protecting bearing X negative sense limit position, the inductance value L ' of the described X positive magnetic pole of described the first radial direction magnetic bearing to coil
xmin+; And rotor is positioned at described first while radially protecting bearing Y direct limit position, the inductance value L ' of described Y negative sense pole pair coil
ymin-, and rotor is positioned at described first while radially protecting bearing Y negative sense limit position, the inductance value L ' of described Y positive magnetic pole to coil
ymin+;
By L '
xmin+substitution L
x+=f
1(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X negative sense limit position
min; Will be by L '
xmin-substitution L
x-=f
2(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X direct limit position
max; Obtain thus first and radially protect the directions X position coordinate X ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(X '
max+ X '
min)/2;
By L '
ymin+substitution L
y+=f
1(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y negative sense limit position
min; By L '
ymin-substitution L
y-=f
2(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y direct limit position
max; Obtain thus described first and radially protect the Y-direction position coordinate Y ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(Y '
max+ Y '
min)/2;
Obtaining thus described the first radial direction magnetic bearing stator inner circle center and described first, radially to protect bearing stator inner circle center be Δ X in the deviation of X, Y-direction
0=-X '
b0with Δ Y
0=-Y '
b0;
3. set up the first radial displacement transducer system of coordinates take the first radial displacement transducer stator inner circle center as true origin and obtain under the first radial displacement transducer system of coordinates, described first radially protects bearing stator inner circle centre coordinate (X
b0, Y
b0);
4. finally obtain under the first radial displacement transducer system of coordinates, described the first radial direction magnetic bearing stator inner circle centre coordinate is (X
b0-X '
b0, Y
b0-Y '
b0), this is the first radial suspension center of maglev molecular pump rotor;
B. use the method identical with obtaining rotor the first radial suspension center described in steps A to obtain rotor the second radial suspension center.
The above-mentioned method of obtaining radial suspension centers of rotor of magnetic molecular pump, 1. described step comprises the steps
I. before described the first radial direction magnetic bearing packs described maglev molecular pump into, the first radial direction magnetic bearing stator is fixed on and is demarcated on stand, measure described the first radial direction magnetic bearing stator inner circle center, and set up the first radial direction magnetic bearing system of coordinates take described the first radial direction magnetic bearing stator inner circle center as true origin;
Ii. control the distance that rotor is S from the first radial direction magnetic bearing coordinate origin along X forward movable length, the inductance value L of the described X positive magnetic pole of measuring the first radial direction magnetic bearing described in this process to coil
x+, the distance that control rotor is S from the first radial direction magnetic bearing coordinate origin along X negative sense movable length, measures the inductance value L of X positive magnetic pole described in this process to coil
x+, obtain the inductance value of described the first radial direction magnetic bearing X positive magnetic pole to coil and the data relationship L of rotor directions X displacement by said process
x+=f
1(x);
Distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along X forward movable length, measures the inductance value L of the described X negative sense pole pair coil of the first radial direction magnetic bearing described in this process
x-, distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along X negative sense movable length, measures the inductance value L of the pole pair of X negative sense described in this process coil
x-, obtain the inductance value of described X negative sense pole pair coil and the data relationship L of rotor directions X displacement of described the first radial direction magnetic bearing by said process
x-=f
2(x);
Iii. control the distance that rotor is S from the first radial direction magnetic bearing coordinate origin along Y forward movable length, the inductance value L of the described Y positive magnetic pole of measuring the first radial direction magnetic bearing described in this process to coil
y+, the distance that control rotor is S from the first radial direction magnetic bearing coordinate origin along Y negative sense movable length, measures the inductance value L of Y positive magnetic pole described in this process to coil
y+, obtain the inductance value of described the first radial direction magnetic bearing Y positive magnetic pole to coil and the data relationship L of rotor Y-direction displacement by said process
y+=f
1(y);
Distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along Y forward movable length, measures the inductance value L of the described Y negative sense pole pair coil of the first radial direction magnetic bearing described in this process
y-, distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along Y negative sense movable length, measures the inductance value L of the pole pair of Y negative sense described in this process coil
y-, obtain the inductance value of described the first radial direction magnetic bearing Y negative sense pole pair coil and the data relationship L of rotor Y-direction displacement by said process
y-=f
2(y).
The above-mentioned method of obtaining radial suspension centers of rotor of magnetic molecular pump; S is greater than described first and radially protects bearing stator inner circle radius r and be less than described the first radial direction magnetic bearing stator inner circle radius R, i.e. R > S > r.
The above-mentioned method of obtaining radial suspension centers of rotor of magnetic molecular pump, S is 2/3rds of described the first radial direction magnetic bearing stator inner circle radius R, i.e. S=2R/3.
The above-mentioned method of obtaining radial suspension centers of rotor of magnetic molecular pump, 2. described step comprises the steps
A. maglev molecular pump is vertically placed, described in rotor leans against, radially protected the inwall of bearing stator;
B. the X positive magnetic pole of controlling described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2 is to coil generation X forward electromagnetic force; rotor is radially protected behind bearing X direct limit position described in being positioned at, measured the now inductance value L ' of described the first radial direction magnetic bearing X negative sense pole pair coil
xmin-; Controlled again the X negative sense pole pair coil generation X negative sense electromagnetic force of described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2; rotor is radially protected after bearing X negative sense limit position described in being positioned at, measured now described the first inductance value L ' of radial direction magnetic bearing X positive magnetic pole to coil
xmin+;
By L '
xmin+substitution L
x+=f
1(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X negative sense limit position
min; By L '
xmin-substitution L
x-=f
2(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X direct limit position
max; Obtain thus described first and radially protect the directions X position coordinate X ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(X '
max+ X '
min)/2;
C. the Y positive magnetic pole of controlling described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2 is to the positive electromagnetic force of coil generation Y; rotor is radially protected behind bearing Y direct limit position described in being positioned at, measured the now inductance value L ' of described the first radial direction magnetic bearing Y negative sense pole pair coil
ymin-; Controlled again the Y negative sense pole pair coil generation Y negative electricity magnetic force of described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2; rotor is radially protected after bearing Y negative sense limit position described in being positioned at, measured now described the first inductance value L ' of radial direction magnetic bearing Y positive magnetic pole to coil
ymin+;
By L '
ymin+substitution L
y+=f
1(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y negative sense limit position
min; By L '
ymin-substitution L
y-=f
2(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y direct limit position
max; Obtain thus described first and radially protect the Y-direction position coordinate Y ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(Y '
max+ Y '
min)/2;
D. thus, obtain described the first radial direction magnetic bearing stator inner circle center and described first and radially protect the deviation delta X of bearing stator inner circle center in X, Y-direction
0=-X '
b0with Δ Y
0=-Y '
b0.
Compared with prior art there is following beneficial effect in technique scheme of the present invention:
(1) the present invention by under the first radial direction magnetic bearing system of coordinates, obtain first radially protect bearing stator inner circle centre coordinate (X '
b0, Y '
b0); and the first radial direction magnetic bearing stator inner circle center i.e. the initial point (0 of the first radial direction magnetic bearing system of coordinates; 0), obtaining thus the first radial direction magnetic bearing stator inner circle center and first, radially to protect bearing stator inner circle center deviate be diametrically Δ X
0=-X '
b0with Δ Y=-Y '
b0.Due in maglev molecular pump working procedure; while not considering that bearing stator inner circle center coaxiality deviation is radially protected at the first radial direction magnetic bearing stator inner circle center and first, the coordinate of rotor suspension central position under the first radial displacement transducer system of coordinates is (X
b0, Y
b0), therefore final the first radial suspension center that obtains the first radial displacement transducer system of coordinates lower rotor part of the present invention is (X
b0-X '
b0, Y
b0-Y '
b0) be radial direction magnetic bearing stator inner circle centre coordinate under radial displacement transducer system of coordinates, eliminate the deviation at rotor the first radial suspension center and the first radial direction magnetic bearing stator inner circle center, adopting uses the same method eliminates the deviation between rotor the second radial suspension center and the second radial direction magnetic bearing stator inner circle center, can guarantee the stable operation of maglev molecular pump, be beneficial to control system follow-up to rotor stability control.
(2) the present invention, obtaining in the process at rotor radial suspension center, has obtained the first radial direction magnetic bearing stator inner circle center and first and has radially protected bearing stator inner circle center radially to protect the deviation of bearing stator inner circle center in X, Y-direction at deviation and the second radial direction magnetic bearing stator inner circle center and second of X, Y-direction; Because maglev molecular pump part is processed and assembled in batches and carry out; therefore after certain a collection of maglev molecular pump processing and assembling completes; if described radial direction magnetic bearing stator inner circle center and describedly radially protect the larger deviation of existence between bearing stator inner circle center, wishes that next group maglev molecular pump can improve to some extent in part processing and assembly process.Therefore; the radial direction magnetic bearing stator inner circle center that the present invention obtains with radially protect the deviation of bearing stator inner circle center in X, Y-direction; can be used as the guiding technical order of the processing of next group maglev molecular pump part and assembling; carry out improved foundation as the processing of next group maglev molecular pump part and assembling; dwindle radial direction magnetic bearing stator inner circle center and radially protect the deviation of bearing stator inner circle center in X, Y-direction, guaranteeing the stator inner circle center of radial direction magnetic bearing as far as possible and radially protect the stator inner circle center superposition of bearing.
Accompanying drawing explanation
For content of the present invention is more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation, wherein:
Fig. 1 is maglev molecular pump structural representation;
Fig. 2 is the radial direction magnetic bearing stator structure schematic diagram that eight magnetic poles are set;
Fig. 3 is the radial displacement transducer stator structure schematic diagram that eight magnetic poles are set;
Fig. 4 is inductance type radial displacement transducer measuring circuit schematic diagram;
Fig. 5 is the flow chart at acquisition rotor of the present invention the first radial suspension center;
In figure, reference character is expressed as: 1-impeller, 2-controller, the 3-pump housing, 4-first radially protects bearing, 5-the first radial displacement transducer, 6-the first radial direction magnetic bearing, 7-rotor shaft, 8-motor, 9-the second radial direction magnetic bearing, 10-the second radial displacement transducer, 11-second radially protects bearing, 12-axially protects bearing, 13-the first axial magnetic bearing, 14-thrust disc, 15-the second axial magnetic bearing, 16-shaft position sensor, 17-tenminal block, 18-displacement detector, 19-speed detector, 20-radial direction magnetic bearing stator, 21-radial displacement transducer stator, 22-magnetic pole.
Embodiment
For content of the present invention is more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation.
Embodiment 1
Fig. 5 has provided described in the present embodiment and has obtained radial suspension centers of rotor of magnetic molecular pump method flow diagram, comprises the steps:
A. obtain rotor the first radial suspension center, comprise the steps
1. before the first radial direction magnetic bearing packs described maglev molecular pump into, the first radial direction magnetic bearing stator is fixed on and is demarcated on stand, and rotor is inserted in the first radial direction magnetic bearing stator inner circle, set up the first radial direction magnetic bearing system of coordinates take the first radial direction magnetic bearing stator inner circle center as true origin;
Utilize the pole pair coil of described the first radial direction magnetic bearing to obtain under the first radial direction magnetic bearing system of coordinates, the inductance value of the X positive magnetic pole of described the first radial direction magnetic bearing to coil and the data relationship L of rotor directions X displacement
x+=f
1and the inductance value of X negative sense pole pair coil and the data relationship L of rotor directions X displacement (x)
x-=f
2(x); And the inductance value of Y positive magnetic pole to coil and the data relationship L of rotor Y-direction displacement
y+=f
1and the inductance value of Y negative sense pole pair coil and the data relationship L of rotor Y-direction displacement (y)
y-=f
2(y);
2. pack described the first radial direction magnetic bearing into described maglev molecular pump, obtain rotor and be positioned at first while radially protecting bearing X direct limit position, the inductance value L ' of the described X negative sense pole pair coil of described the first radial direction magnetic bearing
xmin-, and rotor is positioned at described first while radially protecting bearing X negative sense limit position, the inductance value L ' of the described X positive magnetic pole of described the first radial direction magnetic bearing to coil
xmin+; And rotor is positioned at described first while radially protecting bearing Y direct limit position, the inductance value L ' of described Y negative sense pole pair coil
ymin-, and rotor is positioned at described first while radially protecting bearing Y negative sense limit position, the inductance value L ' of described Y positive magnetic pole to coil
ymin+;
By L '
xmin+substitution L
x+=f
1(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X negative sense limit position
min; Will be by L '
xmin-substitution L
x-=f
2(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X direct limit position
max; Obtain thus first and radially protect the directions X position coordinate X ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(X '
max+ X '
min)/2;
By L '
ymin+substitution L
y+=f
1(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y negative sense limit position
min; By L '
ymin-substitution L
y-=f
2(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y direct limit position
max; Obtain thus described first and radially protect the Y-direction position coordinate Y ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(Y '
max+ Y '
min)/2;
Obtaining thus described the first radial direction magnetic bearing stator inner circle center and described first, radially to protect bearing stator inner circle center be Δ X in the deviation of X, Y-direction
0=-X ' b
0with Δ Y
0=-Y '
b0;
3. set up the first radial displacement transducer system of coordinates take the first radial displacement transducer stator inner circle center as true origin and obtain under the first radial displacement transducer system of coordinates, described first radially protects bearing stator inner circle centre coordinate (X
b0, Y
b0);
4. finally obtain under the first radial displacement transducer system of coordinates, described the first radial direction magnetic bearing stator inner circle centre coordinate is (X
b0-X '
b0, Y
b0-Y '
b0), this is the first radial suspension center of maglev molecular pump rotor;
B. use the method identical with obtaining rotor the first radial suspension center described in steps A to obtain rotor the second radial suspension center.
Obviously, (X under the first radial displacement transducer system of coordinates
b0-X '
b0, Y
b0-Y '
b0) be the first radial direction magnetic bearing stator inner circle centre coordinate, in like manner can obtain the second radial suspension center of rotor at the stator inner circle center of the second radial direction magnetic bearing.Thus, rotor suspension is in the time of above-mentioned radial suspension center, and rotor radial suspension center and radial direction magnetic bearing stator inner circle center superposition, can guarantee the stable operation of maglev molecular pump, is beneficial to control system follow-up to rotor stability control.
Embodiment 2
The present embodiment is on embodiment 1 basis, and 1. described step comprises the steps
1. described step comprises the steps
I. before described the first radial direction magnetic bearing packs described maglev molecular pump into, the first radial direction magnetic bearing stator is fixed on and is demarcated on stand, measure described the first radial direction magnetic bearing stator inner circle center, and set up the first radial direction magnetic bearing system of coordinates take described the first radial direction magnetic bearing stator inner circle center as true origin;
Ii. control the distance that rotor is S from the first radial direction magnetic bearing coordinate origin along X forward movable length, the inductance value L of the described X positive magnetic pole of measuring the first radial direction magnetic bearing described in this process to coil
x+, the distance that control rotor is S from the first radial direction magnetic bearing coordinate origin along X negative sense movable length, measures the inductance value L of X positive magnetic pole described in this process to coil
x+, obtain the inductance value of described the first radial direction magnetic bearing X positive magnetic pole to coil and the data relationship L of rotor directions X displacement by said process
x+=f
1(x);
Distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along X forward movable length, measures the inductance value L of the described X negative sense pole pair coil of the first radial direction magnetic bearing described in this process
x-, distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along X negative sense movable length, measures the inductance value L of the pole pair of X negative sense described in this process coil
x-, obtain the inductance value of described X negative sense pole pair coil and the data relationship L of rotor directions X displacement of described the first radial direction magnetic bearing by said process
x-=f
2(x);
Iii. control the distance that rotor is S from the first radial direction magnetic bearing coordinate origin along Y forward movable length, the inductance value L of the described Y positive magnetic pole of measuring the first radial direction magnetic bearing described in this process to coil
y+, the distance that control rotor is S from the first radial direction magnetic bearing coordinate origin along Y negative sense movable length, measures the inductance value L of Y positive magnetic pole described in this process to coil
y+, obtain the inductance value of described the first radial direction magnetic bearing Y positive magnetic pole to coil and the data relationship L of rotor Y-direction displacement by said process
y+=f
1(y);
Distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along Y forward movable length, measures the inductance value L of the described Y negative sense pole pair coil of the first radial direction magnetic bearing described in this process
y-, distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along Y negative sense movable length, measures the inductance value L of the pole pair of Y negative sense described in this process coil
y-, obtain the inductance value of described the first radial direction magnetic bearing Y negative sense pole pair coil and the data relationship L of rotor Y-direction displacement by said process
y-=f
2(y).
The same above-mentioned steps that adopts can obtain the inductance value of the second radial direction magnetic bearing X positive magnetic pole to coil and the data relationship of rotor directions X displacement; The inductance value of described X negative sense pole pair coil of the second radial direction magnetic bearing and the data relationship of rotor directions X displacement; The inductance value of described the second radial direction magnetic bearing Y positive magnetic pole to coil and the data relationship of rotor Y-direction displacement; The inductance value of described the second radial direction magnetic bearing Y negative sense pole pair coil and the data relationship of rotor Y-direction displacement.
In ii step and iii step, to consider in maglev molecular pump practical work process, rotor is move radially can not be too near apart from radial direction magnetic bearing magnetic pole in process, because rotor is crossed when near apart from radial direction magnetic bearing, the electromagnetic force of radial direction magnetic bearing is non-linear seriously.Therefore,, as preferred embodiment, make S be greater than described first and radially protect bearing stator inner circle radius r and be less than described the first radial direction magnetic bearing stator inner circle radius R, i.e. R > S > r.More preferably, S is 2/3rds of described the first radial direction magnetic bearing stator inner circle radius R, i.e. S=2R/3.The distance that is S from the first radial direction magnetic bearing coordinate origin along X forward movable length when rotor thus, the distance that X negative sense movable length is S, the distance that is S along Y forward movable length, can contain movably scope of maglev molecular pump working procedure rotor substantially after the distance that Y negative sense movable length is S.
In said process, obtain the inductance value of X positive magnetic pole to coil or the inductance value of described X negative sense pole pair coil, and can directly adopt LRC bridge measurement when the inductance value of the inductance value of described Y positive magnetic pole to coil or described Y negative sense pole pair coil.
Embodiment 3
2. the present embodiment comprises the steps in the above step of embodiment 1 or embodiment's 2 basis
A. maglev molecular pump is vertically placed, described in rotor leans against, radially protected the inwall of bearing stator;
B. the X positive magnetic pole of controlling described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2 is to coil generation X forward electromagnetic force; rotor is radially protected behind bearing X direct limit position described in being positioned at, measured the now inductance value L ' of described the first radial direction magnetic bearing X negative sense pole pair coil
xmin-; Controlled again the X negative sense pole pair coil generation X negative sense electromagnetic force of described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2; rotor is radially protected after bearing X negative sense limit position described in being positioned at, measured now described the first inductance value L ' of radial direction magnetic bearing X positive magnetic pole to coil
xmin+;
By L '
xmin+substitution L
x+=f
1(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X negative sense limit position
min; By L '
xmin-substitution L
x-=f
2(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X direct limit position
max; Obtain thus described first and radially protect the directions X position coordinate X ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(X '
max+ X '
min)/2;
C. the Y positive magnetic pole of controlling described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2 is to the positive electromagnetic force of coil generation Y; rotor is radially protected behind bearing Y direct limit position described in being positioned at, measured the now inductance value L ' of described the first radial direction magnetic bearing Y negative sense pole pair coil
ymin-; Controlled again the Y negative sense pole pair coil generation Y negative electricity magnetic force of described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller 2; rotor is radially protected after bearing Y negative sense limit position described in being positioned at, measured now described the first inductance value L ' of radial direction magnetic bearing Y positive magnetic pole to coil
ymin+;
By L '
ymin+substitution L
y+=f
1(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y negative sense limit position
min; By L '
ymin-substitution L
y-=f
2(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y ' that radially protects bearing stator inner circle Y direct limit position
max; Obtain thus described first and radially protect the Y-direction position coordinate Y ' of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b0=(Y '
max+ Y '
min)/2;
D. thus, obtain described the first radial direction magnetic bearing stator inner circle center and described first and radially protect the deviation delta X of bearing stator inner circle center in X, Y-direction
0=-X '
b0with Δ Y
0=-Y '
b0.
Same employing above-mentioned steps can obtain described the second radial direction magnetic bearing stator inner circle center and described second and radially protect the deviation of bearing stator inner circle center in X, Y-direction.
Obviously, above-described embodiment is only for example is clearly described, and the not restriction to mode of execution.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here without also giving exhaustive to all mode of executions.And the apparent variation of being extended out thus or variation are still among the protection domain in the invention.
Claims (5)
1. a method of obtaining radial suspension centers of rotor of magnetic molecular pump, is characterized in that, comprises the steps:
A. obtain rotor the first radial suspension center, comprise the steps
1. before the first radial direction magnetic bearing packs described maglev molecular pump into, the first radial direction magnetic bearing stator is fixed on and is demarcated on stand, and rotor is inserted in the first radial direction magnetic bearing stator inner circle, set up the first radial direction magnetic bearing system of coordinates take the first radial direction magnetic bearing stator inner circle center as true origin;
Utilize the pole pair coil of described the first radial direction magnetic bearing to obtain under the first radial direction magnetic bearing system of coordinates, the inductance value of the X positive magnetic pole of described the first radial direction magnetic bearing to coil and the data relationship L of rotor directions X displacement
x+=f
1and the inductance value of X negative sense pole pair coil and the data relationship L of rotor directions X displacement (x)
x-=f
2(x); And the inductance value of Y positive magnetic pole to coil and the data relationship L of rotor Y-direction displacement
y+=f
1and the inductance value of Y negative sense pole pair coil and the data relationship L of rotor Y-direction displacement (y)
y-=f
2(y);
2. pack described the first radial direction magnetic bearing into described maglev molecular pump, obtain rotor and be positioned at first while radially protecting bearing X direct limit position, the inductance value L of the described X negative sense pole pair coil of described the first radial direction magnetic bearing
x'
min-, and rotor is positioned at described first while radially protecting bearing X negative sense limit position, the inductance value L of the described X positive magnetic pole of described the first radial direction magnetic bearing to coil
x'
min+; And rotor is positioned at described first while radially protecting bearing Y direct limit position, the inductance value L of described Y negative sense pole pair coil
y'
min-, and rotor is positioned at described first while radially protecting bearing Y negative sense limit position, the inductance value L of described Y positive magnetic pole to coil
y'
min+;
By L
x'
min+substitution L
x+=f
1(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X negative sense limit position
min; By L
x'
min-substitution L
x-=f
2(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X direct limit position
max; Obtain thus first and radially protect the directions X position coordinate X of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b'
0=(X '
max+ X '
min)/2;
By L
y'
min+substitution L
y+=f
1(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y that radially protects bearing stator inner circle Y negative sense limit position
m'
in; By L
y'
min-substitution L
y-=f
2(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y that radially protects bearing stator inner circle Y direct limit position
m'
ax; Obtain thus described first and radially protect the Y-direction position coordinate Y of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b'
0=(Y
m'
ax+ Y
m'
in)/2;
Obtaining thus described the first radial direction magnetic bearing stator inner circle center and described first, radially to protect bearing stator inner circle center be Δ X in the deviation of X, Y-direction
0=-X
b'
0with Δ Y
0=-Y
b'
0;
3. set up the first radial displacement transducer system of coordinates take the first radial displacement transducer stator inner circle center as true origin and obtain under the first radial displacement transducer system of coordinates, described first radially protects bearing stator inner circle centre coordinate (X
b0, Y
b0);
4. finally obtain under the first radial displacement transducer system of coordinates, described the first radial direction magnetic bearing stator inner circle centre coordinate is (X
b0-X
b'
0, Y
b0-Y
b'
0), this is the first radial suspension center of maglev molecular pump rotor;
B. use the method identical with obtaining rotor the first radial suspension center described in steps A to obtain rotor the second radial suspension center.
2. the method for obtaining radial suspension centers of rotor of magnetic molecular pump according to claim 1, is characterized in that: 1. described step comprises the steps
I. before described the first radial direction magnetic bearing packs described maglev molecular pump into, the first radial direction magnetic bearing stator is fixed on and is demarcated on stand, measure described the first radial direction magnetic bearing stator inner circle center, and set up the first radial direction magnetic bearing system of coordinates take described the first radial direction magnetic bearing stator inner circle center as true origin;
Ii. control the distance that rotor is S from the first radial direction magnetic bearing coordinate origin along X forward movable length, the inductance value L of the described X positive magnetic pole of measuring the first radial direction magnetic bearing described in this process to coil
x+, the distance that control rotor is S from the first radial direction magnetic bearing coordinate origin along X negative sense movable length, measures the inductance value L of X positive magnetic pole described in this process to coil
x+, obtain the inductance value of described the first radial direction magnetic bearing X positive magnetic pole to coil and the data relationship L of rotor directions X displacement by said process
x+=f
1(x);
Distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along X forward movable length, measures the inductance value L of the described X negative sense pole pair coil of the first radial direction magnetic bearing described in this process
x-, distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along X negative sense movable length, measures the inductance value L of the pole pair of X negative sense described in this process coil
x-, obtain the inductance value of described X negative sense pole pair coil and the data relationship L of rotor directions X displacement of described the first radial direction magnetic bearing by said process
x-=f
2(x);
Iii. control the distance that rotor is S from the first radial direction magnetic bearing coordinate origin along Y forward movable length, the inductance value L of the described Y positive magnetic pole of measuring the first radial direction magnetic bearing described in this process to coil
y+, the distance that control rotor is S from the first radial direction magnetic bearing coordinate origin along Y negative sense movable length, measures the inductance value L of Y positive magnetic pole described in this process to coil
y+, obtain the inductance value of described the first radial direction magnetic bearing Y positive magnetic pole to coil and the data relationship L of rotor Y-direction displacement by said process
y+=f
1(y);
Distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along Y forward movable length, measures the inductance value L of the described Y negative sense pole pair coil of the first radial direction magnetic bearing described in this process
y-, distance that to control rotor be S from the first radial direction magnetic bearing coordinate origin along Y negative sense movable length, measures the inductance value L of the pole pair of Y negative sense described in this process coil
y-, obtain the inductance value of described the first radial direction magnetic bearing Y negative sense pole pair coil and the data relationship L of rotor Y-direction displacement by said process
y-=f
2(y).
3. the method for obtaining radial suspension centers of rotor of magnetic molecular pump according to claim 2; it is characterized in that: S is greater than described first and radially protects bearing stator inner circle radius r and be less than described the first radial direction magnetic bearing stator inner circle radius R, i.e. R>S>r.
4. according to the method for obtaining radial suspension centers of rotor of magnetic molecular pump described in claim 2 or 3, it is characterized in that: S is 2/3rds of described the first radial direction magnetic bearing stator inner circle radius R, i.e. S=2R/3.
5. the method for obtaining radial suspension centers of rotor of magnetic molecular pump according to claim 4, is characterized in that: 2. described step comprises the steps
A. maglev molecular pump is vertically placed, described in rotor leans against, radially protected the inwall of bearing stator;
B. the X positive magnetic pole of controlling described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by controller (2) is to coil generation X forward electromagnetic force; rotor is radially protected behind bearing X direct limit position described in being positioned at, measured the now inductance value L of described the first radial direction magnetic bearing X negative sense pole pair coil
x'
min-; Controlled again the X negative sense pole pair coil generation X negative sense electromagnetic force of described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller (2); rotor is radially protected after bearing X negative sense limit position described in being positioned at, measured now described the first inductance value L of radial direction magnetic bearing X positive magnetic pole to coil
x'
min+;
By L
x'
min+substitution L
x+=f
1(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X negative sense limit position
min; By L
x'
min-substitution L
x-=f
2(x) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate X ' that radially protects bearing stator inner circle X direct limit position
max; Obtain thus described first and radially protect the directions X position coordinate X of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b'
0=(X '
max+ X '
min)/2;
C. the Y positive magnetic pole of controlling described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller (2) is to the positive electromagnetic force of coil generation Y; rotor is radially protected behind bearing Y direct limit position described in being positioned at, measured the now inductance value L of described the first radial direction magnetic bearing Y negative sense pole pair coil
y'
min-; Controlled again the Y negative sense pole pair coil generation Y negative electricity magnetic force of described the first radial direction magnetic bearing and described the second radial direction magnetic bearing by described controller (2); rotor is radially protected after bearing Y negative sense limit position described in being positioned at, measured now described the first inductance value L of radial direction magnetic bearing Y positive magnetic pole to coil
y'
min+;
By L
y'
min+substitution L
y+=f
1(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y that radially protects bearing stator inner circle Y negative sense limit position
m'
in; By L
y'
min-substitution L
y-=f
2(y) calculate under the first radial direction magnetic bearing system of coordinates the described first coordinate Y that radially protects bearing stator inner circle Y direct limit position
m'
ax; Obtain thus described first and radially protect the Y-direction position coordinate Y of bearing stator inner circle center under the first radial direction magnetic bearing system of coordinates
b'
0=(Y
m'
ax+ Y
m'
in)/2;
D. thus, obtain described the first radial direction magnetic bearing stator inner circle center and described first and radially protect the deviation delta X of bearing stator inner circle center in X, Y-direction
0=-X
b'
0with Δ Y
0=-Y
b'
0.
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| CN102788038B (en) * | 2012-08-24 | 2014-09-03 | 北京中科科仪股份有限公司 | Method for suppressing nonlinear force of magnetic suspension molecular pump |
| CN105588507B (en) * | 2016-03-03 | 2018-06-22 | 武汉理工大学 | Magnetic suspension bearing errors in position measurement computational methods under a kind of coordinate transform |
| CN107435621B (en) * | 2017-08-17 | 2023-05-02 | 珠海格力节能环保制冷技术研究中心有限公司 | Magnetic suspension compressor and gap adjusting method thereof |
| CN107842552B (en) * | 2017-09-05 | 2019-08-27 | 珠海格力电器股份有限公司 | The method of adjustment of magnetic levitation system concentricity |
| CN113295411B (en) * | 2021-05-26 | 2023-05-23 | 苏州中科科仪技术发展有限公司 | Molecular pump magnetic bearing detection device and detection method |
| CN113374790B (en) * | 2021-06-10 | 2022-12-13 | 珠海格力电器股份有限公司 | Magnetic suspension rotating shaft reference position detection method and device, medium and bearing controller |
| CN114135581B (en) * | 2021-11-15 | 2023-10-20 | 西安航天精密机电研究所 | Magnetic suspension bearing system and control method thereof |
| CN114136616B (en) * | 2021-11-26 | 2024-06-14 | 广东美的暖通设备有限公司 | Magnetic suspension compressor and bearing detection method and device thereof |
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