CN113295411B - Molecular pump magnetic bearing detection device and detection method - Google Patents
Molecular pump magnetic bearing detection device and detection method Download PDFInfo
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- CN113295411B CN113295411B CN202110574655.XA CN202110574655A CN113295411B CN 113295411 B CN113295411 B CN 113295411B CN 202110574655 A CN202110574655 A CN 202110574655A CN 113295411 B CN113295411 B CN 113295411B
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Abstract
The invention provides a molecular pump magnetic bearing detection device and a detection method, wherein the device comprises the following components: the device comprises a magnetic bearing driving unit, a driving and signal selecting channel and a comprehensive measuring unit, wherein the magnetic bearing driving unit is connected with a wire inlet end of a molecular pump magnetic bearing and is used for transmitting a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force; the driving and signal selecting channel is used for receiving an external control signal and switching the molecular pump magnetic bearing detecting channel according to the external control signal; the comprehensive measurement unit is connected with the outlet end of the molecular pump magnetic bearing and is used for measuring the inductance value of the molecular pump magnetic bearing so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value. By implementing the invention, a data evaluation basis and a data evaluation standard are provided for the quality of the magnetic suspension molecular pump product, and it is very important to ensure that the magnetic suspension molecular pump is in a safe, reliable and stable running state.
Description
Technical Field
The invention relates to the technical field of vacuum obtaining equipment, in particular to a molecular pump magnetic bearing detection device and a detection method.
Background
The molecular pump is a vacuum pump which uses a rotor rotating at a high speed to transfer momentum to gas molecules to obtain directional speed, so that the gas molecules are compressed and driven to an exhaust port to be pumped out for a front stage. The magnetic suspension molecular pump is used as a core device for obtaining a vacuum environment, has wide application in the fields of semiconductor and film industry, nuclear physics, surface science and the like, and is suitable for high-vacuum and ultrahigh-vacuum instrument equipment requiring cleaning.
However, for the magnetic suspension molecular pump, due to the part machining precision and part assembly errors, after the magnetic suspension molecular pump is assembled, coaxiality errors exist between the radial magnetic bearing stator and the radial protection bearing stator, and the middle point of the upper and lower axial limit positions is not overlapped with the middle point of the interval between the upper and lower magnetic bearings, so that when the rotor is radially suspended at the center of the inner circle of the radial protection bearing stator, and the rotor is axially suspended at the middle point of the upper and lower axial limit positions, the air gaps of the radial magnetic bearings and the axial magnetic bearings are uneven, electromagnetic force of the magnetic bearings in all directions is unbalanced, and the stability of the rotor during working is affected. Therefore, it is very important how to perform effective equilibrium detection on the magnetic suspension molecular pump and provide a basis and standard for data evaluation for the magnetic suspension molecular pump product quality so as to ensure that the magnetic suspension molecular pump is in a safe, reliable and stable running state.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defect that the balance of the magnetic suspension molecular pump is difficult to effectively monitor and control in the prior art, so as to provide a molecular pump magnetic bearing detection device and a detection method.
In a first aspect, an embodiment of the present invention provides a molecular pump magnetic bearing detection apparatus, including: the device comprises a magnetic bearing driving unit, a driving and signal selecting channel and a comprehensive measuring unit, wherein the magnetic bearing driving unit is connected with a wire inlet end of the molecular pump magnetic bearing and is used for conveying a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force; the driving and signal selecting channel is used for receiving an external control signal and switching the molecular pump magnetic bearing detecting channel according to the external control signal; the comprehensive measurement unit is connected with the outlet end of the molecular pump magnetic bearing and is used for measuring the inductance value of the molecular pump magnetic bearing so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value.
Optionally, the molecular pump magnetic bearing detection channel includes: XY magnetic bearing detection passageway, AB magnetic bearing detection passageway and ZZ magnetic bearing detection passageway, the magnetic bearing drive unit includes: the device comprises an XY magnetic bearing driving unit, an AB magnetic bearing driving unit and a ZZ magnetic bearing driving unit, wherein when the driving and signal selecting channel is switched to the XY magnetic bearing detecting channel, the XY magnetic bearing driving unit is connected with a first wire inlet end of the molecular pump magnetic bearing and used for conveying a first driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the XY direction; when the driving and signal selecting channel is switched to the AB magnetic bearing detecting channel, the AB magnetic bearing driving unit is connected with a second wire inlet end of the molecular pump magnetic bearing and used for conveying a second driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the AB direction; when the driving and signal selecting channel is switched to the ZZ magnetic bearing detecting channel, the ZZ magnetic bearing driving unit is connected with a third wire inlet end of the molecular pump magnetic bearing and used for conveying a second driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the ZZ direction.
Optionally, the molecular pump magnetic bearing detection device further comprises: the automatic testing and data analyzing unit is connected with the comprehensive measuring unit and is used for receiving the inductance value of the molecular pump magnetic bearing sent by the comprehensive measuring unit, analyzing the electromagnetic force balance of the molecular pump according to the inductance value and generating an analysis result; the man-machine interaction unit is respectively connected with an external computer and the automatic test and data analysis unit and is used for receiving an external control signal sent by the external computer, sending the external control signal to the driving and signal selection channel and sending the analysis result sent by the automatic test and data analysis unit to the external computer.
Optionally, the molecular pump magnetic bearing detection device further comprises: the magnetic bearing connecting terminal row, the magnetic bearing driving unit is connected with the inlet wire end of the molecular pump magnetic bearing through the magnetic bearing connecting terminal row.
In a second aspect, an embodiment of the present invention provides a method for detecting a molecular pump magnetic bearing, where the method for detecting a molecular pump magnetic bearing is applied to the device for detecting a molecular pump magnetic bearing according to the first aspect of the present invention, and the method includes: placing a molecular pump magnetic bearing to be detected or a molecular pump with the molecular pump magnetic bearing to be detected in the molecular pump magnetic bearing detection device; and connecting the inlet wire end of the magnetic bearing of the molecular pump to be tested with the magnetic bearing driving unit, and connecting the outlet wire end of the magnetic bearing of the molecular pump to be tested with the comprehensive measuring unit to obtain the inductance value of the magnetic bearing of the molecular pump to be tested so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value.
Optionally, when the molecular pump magnetic bearing to be detected is placed in the molecular pump magnetic bearing detection device, an XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part and/or an AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part are obtained, and electromagnetic force balance of the molecular pump magnetic bearing part is analyzed according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part and/or the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part; when a molecular pump with the molecular pump magnetic bearing to be detected is arranged in the molecular pump magnetic bearing detection device, an XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, an AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part and a ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part are obtained, and electromagnetic force balance of the molecular pump magnetic bearing system is analyzed according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part and the ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part.
Optionally, the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing portion includes: positive inductance value corresponding to the radial direction of the magnetic bearing part X, negative inductance value corresponding to the radial direction of the magnetic bearing part X, positive inductance value corresponding to the radial direction of the magnetic bearing part Y and negative inductance value corresponding to the radial direction of the magnetic bearing part Y; the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing portion includes: the magnetic bearing part A is provided with a positive inductance value corresponding to the radial direction, a negative inductance value corresponding to the radial direction, a positive inductance value corresponding to the radial direction and a negative inductance value corresponding to the radial direction; the magnetic bearing portion ZZ radial inductance value corresponding to the ZZ radial direction comprises: positive inductance value corresponding to the magnetic bearing part Z in the radial direction and negative inductance value corresponding to the magnetic bearing part Z in the radial direction.
Optionally, the analyzing the electromagnetic force balance of the magnetic bearing component of the molecular pump according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing component comprises: calculating the extreme value of the radial direction of the magnetic bearing part XY and the average value of the radial direction of the magnetic bearing part XY according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part X and the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part Y; obtaining a first inductance average value corresponding to the XY radial direction of the magnetic bearing part according to the XY radial extreme value of the magnetic bearing part and the XY radial average value of the magnetic bearing part; and analyzing electromagnetic force balance of the magnetic bearing component XY of the molecular pump in the radial direction according to the relation between the first inductance average value corresponding to the magnetic bearing component XY in the radial direction and a first preset threshold value.
Optionally, the analyzing the electromagnetic force balance of the magnetic bearing component of the molecular pump according to the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing component includes: calculating the radial extreme value of the magnetic bearing part AB and the radial average value of the magnetic bearing part AB according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part A and the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part B; obtaining a first inductance average value corresponding to the radial direction of the magnetic bearing part AB according to the radial extreme value of the magnetic bearing part AB and the radial average value of the magnetic bearing part AB; and analyzing the radial electromagnetic force balance of the molecular pump magnetic bearing component AB according to the relation between the first inductance average value corresponding to the radial direction of the magnetic bearing component AB and a second preset threshold value.
Optionally, the analyzing the electromagnetic force balance of the magnetic bearing system of the molecular pump according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part, and the ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part includes: calculating X-direction inductance ratio and Y-direction inductance ratio of the magnetic bearing system XY in the radial direction according to the positive inductance value and the negative inductance value corresponding to the magnetic bearing part X in the radial direction, the positive inductance value and the negative inductance value corresponding to the magnetic bearing part Y in the radial direction; calculating the radial A-direction inductance ratio and the radial B-direction inductance ratio of the magnetic bearing system AB according to the positive inductance value and the negative inductance value corresponding to the radial A of the magnetic bearing part, the positive inductance value and the negative inductance value corresponding to the radial B of the magnetic bearing part; calculating a third inductance value of the magnetic bearing system ZZ in the radial direction according to the positive inductance value and the negative inductance value corresponding to the magnetic bearing part Z in the radial direction; and analyzing the electromagnetic force balance of the molecular pump magnetic bearing system according to the relation between the X-direction inductance ratio and a third preset threshold value, the relation between the Y-direction inductance ratio and a fourth preset threshold value, the relation between the A-direction inductance ratio and a fifth preset threshold value, the relation between the B-direction inductance ratio and a sixth preset threshold value and the relation between the third inductance ratio and a seventh preset threshold value.
The technical scheme of the invention has the following advantages:
the invention provides a molecular pump magnetic bearing detection device, which comprises: the device comprises a magnetic bearing driving unit, a driving and signal selecting channel and a comprehensive measuring unit, wherein the magnetic bearing driving unit is connected with a wire inlet end of a molecular pump magnetic bearing and is used for transmitting a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force; the driving and signal selecting channel is used for receiving an external control signal and switching the molecular pump magnetic bearing detecting channel according to the external control signal; the comprehensive measurement unit is connected with the outlet end of the molecular pump magnetic bearing and is used for measuring the inductance value of the molecular pump magnetic bearing so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value. By detecting the balance of the magnetic bearing parts of the magnetic suspension molecular pump after processing and assembling, the balance of electromagnetic force is detected in the manufacturing process of the magnetic bearing parts and the manufacturing process of the magnetic suspension molecular pump bearing system, a data evaluation basis and standard are provided for the quality of the magnetic suspension molecular pump product, and it is very important to ensure that the magnetic suspension molecular pump is in a safe, reliable and stable running state.
The invention provides a molecular pump magnetic bearing detection method, which comprises the following steps: placing a molecular pump magnetic bearing to be detected or a molecular pump with the molecular pump magnetic bearing to be detected in a molecular pump magnetic bearing detection device; and connecting the inlet wire end of the magnetic bearing of the molecular pump to be tested with the magnetic bearing driving unit, and connecting the outlet wire end of the magnetic bearing of the molecular pump to be tested with the comprehensive measuring unit to obtain the inductance value of the magnetic bearing of the molecular pump to be tested so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value. The magnetic bearing device of the magnetic pump is used for detecting the equilibrium of the magnetic bearing parts of the magnetic pump after processing and assembling, electromagnetic force equilibrium is detected in the manufacturing process of the magnetic bearing parts and the manufacturing process of the magnetic bearing system of the magnetic pump, a basis and a standard for data evaluation are provided for the quality of the magnetic pump product, and it is very important to ensure that the magnetic pump is in a safe, reliable and stable running state.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a magnetic bearing system of a magnetic molecular pump in an embodiment of the invention;
FIG. 2 is a schematic block diagram of a specific example of a molecular pump magnetic bearing detection device in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of a radial magnetic bearing of a magnetic levitation molecular pump according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a magnetic bearing detection device of a molecular pump according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a magnetic bearing component electromagnetic force balance measurement tool in an embodiment of the invention;
fig. 6 is a flowchart of a specific example of a method for detecting a magnetic bearing of a molecular pump according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Fig. 1 shows a schematic structure of a magnetic bearing system of a magnetic suspension molecular pump. The magnetic bearing system 13 includes: rotor 8, upper safety bearing 9, lower safety bearing 15, axial thrust disk 17, lower radial magnetic bearing rotor lamination 18, electronic rotor 19, upper radial magnetic bearing rotor lamination 20, rotor spacer ring 21, upper radial displacement sensor 22, xy magnetic bearing 23, stator spacer ring 24, high-speed motor 25, ab magnetic bearing 26, magnetic bearing support 27, lower radial displacement sensor 28, z magnetic bearing 29, axial magnetic bearing spacer ring 30, lower axial magnetic bearing stator 31, axial displacement sensor 32, etc. The electrical outlets of the magnetic bearing system 13 refer to magnetic bearing coil outlets, including X1, X2 coils, X3X4 coils, Y1, Y2 coils, Y3, Y4 coils, A1, A2 coils, A3A4 coils, B1, B2 coils, B3, B4 coils, Z1, Z2 coils, Z3Z4 coils.
For the magnetic suspension molecular pump, due to the existence of part machining precision and part assembly errors and coaxiality errors of the radial magnetic bearing stator and the radial protection bearing stator after the magnetic suspension molecular pump is assembled, the middle point of the upper and lower axial limit positions is not overlapped with the middle point of the interval between the upper and lower magnetic bearings, so that when the rotor is radially suspended at the center of the inner circle of the radial protection bearing stator and the rotor is axially suspended at the middle point of the upper and lower axial limit positions, the air gaps of the radial magnetic bearing and the axial magnetic bearing are uneven, the electromagnetic force of the magnetic bearing is unbalanced in all directions, and the stability of the rotor during working is affected. Therefore, in order to perform effective equilibrium detection on the magnetic suspension molecular pump, it is very important to ensure that the magnetic suspension molecular pump is in a safe, reliable and stable running state. The embodiment of the invention provides a molecular pump magnetic bearing detection device.
As shown in fig. 2, the molecular pump magnetic bearing detection device includes: the device comprises a magnetic bearing driving unit 1, a driving and signal selecting channel 2 and a comprehensive measuring unit 3, wherein the magnetic bearing driving unit 1 is connected with a wire inlet end of a molecular pump magnetic bearing and is used for transmitting a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force; the driving and signal selecting channel 2 is used for receiving an external control signal and switching the molecular pump magnetic bearing detecting channel according to the external control signal; the comprehensive measurement unit 3 is connected with the outlet end of the molecular pump magnetic bearing and is used for measuring the inductance value of the molecular pump magnetic bearing so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value.
In a specific embodiment, in a closed magnetic circuit composed of a coil and an iron core, as shown in fig. 3, the XY magnetic bearing 23 is composed of a radial stator iron core 55, a magnetic bearing coil 52, and a rotor 8. From the principle of virtual displacement, it is known that the magnitude of the electromagnetic force f, which is built up on the rotor 8 by the coil 52 of a certain current i, is proportional to the square of the current and inversely proportional to the square of the air gap s. In the magnetic suspension molecular pump, the electromagnetic force is unbalanced due to the errors of part processing and assembly, and the errors of part processing and assembly are uniformly reflected as the errors of the air gap s, so that the measurement and evaluation of the air gap s are an important part of the evaluation of the electromagnetic force and are the basis of the contribution of the mechanical parts of the magnetic bearing system to the electromagnetic force. Because the air gap s has a special structure in the magnetic bearing molecular pump, the purely mechanical measurement modes such as the inner diameter of the radial stator core 55 and the outer circle of the rotor 8, which are measured by three coordinates, can only reflect the size of the part s, and the air gap s is also related to the clearance, assembly and the like of the safety bearing after the magnetic bearing system is assembled. From the flux formula of a closed magnetic circuit, it can be deduced that the closed magnetic circuit inductance is approximately: l= (μ0N2Aa)/(2 s), where μ0 is vacuum permeability, N is the number of turns of the coil, aa is the air gap equivalent cross-sectional area, and s is the air gap. It can be known that in practice, the evaluation of the air gap s can be converted into the evaluation of the closed inductance L, the unbalance of the electromagnetic force can be converted into the ratio of the corresponding inductances, and the absolute value of the inductance L can represent the absolute value of the air gap s, thereby providing a comprehensive mechanical dimension basis for the electromagnetic force f.
Further, the molecular pump magnetic bearing detection channel includes: XY magnetic bearing detection channel, AB magnetic bearing detection channel and ZZ magnetic bearing detection channel. As shown in fig. 4, the magnetic bearing driving unit 1 includes: the driving and signal selecting channel 2 is switched to an XY magnetic bearing detecting channel, the XY magnetic bearing driving unit 11 is connected with a first wire inlet end of a molecular pump magnetic bearing and used for conveying a first driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the XY direction; when the driving and signal selecting channel 2 is switched to the AB magnetic bearing detecting channel, the AB magnetic bearing driving unit 12 is connected with a second wire inlet end of the molecular pump magnetic bearing for conveying a second driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the AB direction; when the driving and signal selecting channel 2 is switched to the ZZ magnetic bearing detecting channel, the ZZ magnetic bearing driving unit 13 is connected with a third wire inlet end of the molecular pump magnetic bearing for conveying a second driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the ZZ direction.
In the embodiment of the invention, the electromagnetic force balance of the magnetic suspension molecular pump can be decomposed into the electromagnetic force balance of the magnetic bearing component and the electromagnetic force balance of the magnetic bearing system. And the magnetic bearing component comprises an XY radial magnetic bearing component, an AB radial magnetic bearing component and a ZZ axial magnetic bearing component. Wherein electromagnetic force balance of the XY radial magnetic bearing component and the AB radial magnetic bearing component is measured by adopting the following scheme: taking an XY radial magnetic bearing component electromagnetic force balance measuring method as an example for explanation, firstly, a measured XY magnetic bearing 23 is installed into a magnetic bearing component electromagnetic force balance measuring tool 60 shown in fig. 5, lead-out terminals of the radial magnetic bearing are connected to a magnetic bearing line terminal row 6, a tool rotor 65 is installed into the measured XY magnetic bearing 23, an XY magnetic bearing driving unit 11 is controlled to be communicated with X1 and X2 coils of the measured XY magnetic bearing 23, electromagnetic force is constructed in the coordinate X+ direction at this time, the tool rotor 65 is tightly contacted with the inner wall of the measured XY magnetic bearing 23 in the coordinate X+ direction, a comprehensive measuring unit 3 is controlled to be communicated with X3 and X4 coils of the measured XY magnetic bearing 23 in sequence, and corresponding inductance values Lx3X4 are measured and recorded. The XY magnetic bearing driving unit 11 is controlled to be communicated with the Y1 and Y2 coils of the XY magnetic bearing 23 to be measured, electromagnetic force is built in the coordinate Y+ direction at the moment, the tool rotor 65 is closely contacted with the inner wall of the XY magnetic bearing 23 to be measured in the coordinate Y+ direction, the comprehensive measuring unit 3 is controlled to be communicated with the Y3 and Y4 coils of the XY magnetic bearing 23 to be measured in sequence, and the corresponding inductance value Ly3Y4 is measured and recorded. Similarly, electromagnetic force is respectively constructed in the X-direction and the Y-direction, corresponding coil inductance values are recorded, and finally, the inductance values of the X1 coil, the X2 coil, the X3X4 coil, the Y1 coil, the Y2 coil, the Y3 coil and the Y4 coil can be respectively obtained, and the inductance values Lx1X2, lx3X4, ly1Y2 and Ly3Y4 of the X1 coil, the X2 coil, the X3X4 coil, the Y1 coil, the Y2 coil and the Y3 coil can be obtained by calculating the average value of the four inductance values, so that the driving and measuring process is completed. Selecting Lx1x2, lx3x4, ly1y2, ly3y4, obtaining Ldelta by taking the difference between the maximum value and the minimum value, calculating Lx1x2, lx3x4, ly1y2, ly3y4 mean Lavg, and calculating Ldelta/Lavg to obtain an electromagnetic force balance judgment factor of the radial magnetic bearing component to be measured, and obtaining an electromagnetic force balance evaluation result of the radial magnetic bearing component to be measured by setting a threshold value. On the premise that the resistance values of the X1, X2, X3X4, Y1, Y2, Y3 and Y4 coils are controlled within a certain range, the corresponding relation between Lavg and an air gap can be obtained through a calibration process, so that Lavg can be used for evaluating the aperture data of the inner circle of the stator core 55, and the mechanical measurement requirement of the stator core 55 is reduced. Electromagnetic force balance of the AB radial magnetic bearing component was measured in the same manner.
In the embodiment of the invention, as shown in fig. 5, a tool mounting base 61 of the magnetic bearing component electromagnetic force balance measurement tool 60 comprises four mounting holes 64, and can be mounted on a measurement plane to realize the function of a fixed tool, a limiting groove 62 and two limiting columns 63 are used for mounting an XY radial magnetic bearing or an AB radial magnetic bearing of a measured object, and a tool rotor 65 is formed by pressing magnetic conductive materials and can move in the plane of the limiting groove.
The electromagnetic force balance measurement and evaluation of the magnetic bearing system 13 adopts the following scheme: firstly, a measured magnetic bearing system 13 is fixed on a measuring platform by adopting a vertical main shaft posture, a magnetic bearing outgoing line of the magnetic bearing system 13 is connected to a magnetic bearing line terminal row 6, firstly, an X1 and X2 coil of a radial XY magnetic bearing 23 of the XY magnetic bearing system 13 is controlled to be communicated, electromagnetic force is built in a coordinate X+ direction, meanwhile, an A1 and A2 coil of a radial AB magnetic bearing 26 of the AB magnetic bearing system 13 is controlled to be communicated, electromagnetic force is built in a coordinate A+ direction, at the moment, a rotor 8 of the magnetic bearing system 13 is tightly contacted with inner walls of an upper safety bearing 9 and a lower safety bearing 15 in a coordinate X+ direction and a coordinate A+ direction, a comprehensive measuring unit 3 is controlled to be communicated with an X3X4 coil of a radial XY magnetic bearing 23 of the magnetic bearing system 13 and an A3A4 coil of the radial AB magnetic bearing 26 in sequence, corresponding inductance values are measured, and Lx3X4 and La3A4 are recorded. Then the X3 and X4 coils of the XY magnetic bearing driving unit 11 and the radial XY magnetic bearing 23 of the tested magnetic bearing system 13 are controlled to be connected, electromagnetic force is built in the X-direction of coordinates, meanwhile, the AB magnetic bearing driving unit 12 and the A3 and A4 coils of the radial AB magnetic bearing 26 of the tested magnetic bearing system 13 are controlled to be connected, electromagnetic force is built in the A-direction of coordinates, at the moment, the rotor 8 of the magnetic bearing system 13 is tightly contacted with the inner walls of the upper safety bearing 9 and the lower safety bearing 15 in the X-direction of coordinates and the A-direction of coordinates, the comprehensive measuring unit 3 is controlled to be sequentially communicated with the X1X2 coil of the radial XY magnetic bearing 23 and the A1A2 coil of the radial AB magnetic bearing 26 of the magnetic bearing system 13, corresponding inductance values are measured, and Lx1X2 and La1A2 are recorded.
The inductance values Ly1y2, ly3y4, lb1b2, lb3b4 can be obtained by analogy, the ratios Lx1x2/Lx3x4, ly1y2/Ly3y4, la1a2/La3a4, lb1b2/Lb3b4 can be calculated, respectively, and these ratios can be used as the radial electromagnetic force balance evaluation factors of the magnetic bearing system 13, and the radial electromagnetic force balance evaluation of the magnetic bearing system 13 can be obtained by setting the threshold values. Absolute values of Lx1x2, lx3x4, ly1y2, ly3y4, la1a2, la3a4, lb1b2, lb3b4 can be used as an evaluation factor for air gaps.
Further, the measured magnetic bearing system 13 is fixed on the measuring platform by adopting the horizontal posture of the main shaft, the magnetic bearing outgoing line of the magnetic bearing system 13 is connected to the magnetic bearing line terminal row 6, the Z1 and Z2 coils of the axial Z magnetic bearing 29 of the measured magnetic bearing system 13 and the ZZ magnetic bearing driving unit 13 are controlled to be communicated, electromagnetic force is built in the coordinate Z+ direction, at the moment, the axial thrust disc 17 is positioned at the upper limit position defined by the upper safety bearing 9 and the lower safety bearing 15, the comprehensive measuring unit 3 is controlled to be communicated with the Z3Z4 coil of the axial Z magnetic bearing of the magnetic bearing system 13, and the corresponding inductance value is measured and Lz3Z4 is recorded. The ZZ magnetic bearing driving unit 13 is controlled to be communicated with the Z3 and Z4 coils of the axial Z magnetic bearing of the magnetic bearing system 13 to be tested, electromagnetic force is built in the coordinate Z-direction, at the moment, the axial thrust disc 17 is positioned at the lower limit position defined by the upper safety bearing 9 and the lower safety bearing 15, the comprehensive measuring unit 3 is controlled to be communicated with the Z1Z2 coil of the axial Z magnetic bearing 29 of the magnetic bearing system 13, and corresponding inductance values are measured and Lz1Z2 is recorded. The ratio Lz1z2/Lz3z4 is calculated and can be used as an evaluation factor for the axial electromagnetic force balance of the magnetic bearing system 13, and the axial electromagnetic force balance evaluation of the magnetic bearing system 13 can be obtained by setting a threshold value. The axial electromagnetic force balance evaluation factor can be optimized through assembly adjustment because the axial assembly is adjustable. The absolute value of Lz1z2, lz3z4 may be used as an evaluation factor for the axial air gap. In the embodiment of the invention, the XY magnetic bearing driving unit 11, the AB magnetic bearing driving unit 12 and the ZZ magnetic bearing driving unit 13 are all connected with the inlet and outlet ends of the molecular pump magnetic bearing through the magnetic bearing wiring terminal bars.
In one embodiment, the molecular pump magnetic bearing detection device further comprises: the automatic test and data analysis unit 4 and the man-machine interaction unit 5 are connected with the comprehensive measurement unit 3, and are used for receiving the inductance value of the molecular pump magnetic bearing sent by the comprehensive measurement unit 3, analyzing the electromagnetic force balance of the molecular pump according to the inductance value and generating an analysis result; the man-machine interaction unit 5 is connected with the external computer and the automatic test and data analysis unit 4 respectively, and is used for receiving an external control signal sent by the external computer, sending the external control signal to the driving and signal selection channel 2, and sending an analysis result sent by the automatic test and data analysis unit 4 to the external computer.
In a specific embodiment, the automated test and data analysis unit 4 and the man-machine interaction unit 5 may implement functions such as driving channel selection, measurement channel selection, automated test flow, data analysis and storage, man-machine interaction, and data query through computer programming.
The invention provides a molecular pump magnetic bearing detection device, which comprises: the device comprises a magnetic bearing driving unit, a driving and signal selecting channel and a comprehensive measuring unit, wherein the magnetic bearing driving unit is connected with a wire inlet end of a molecular pump magnetic bearing and is used for transmitting a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force; the driving and signal selecting channel is used for receiving an external control signal and switching the molecular pump magnetic bearing detecting channel according to the external control signal; the comprehensive measurement unit is connected with the outlet end of the molecular pump magnetic bearing and is used for measuring the inductance value of the molecular pump magnetic bearing so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value. By detecting the balance of the magnetic bearing parts of the magnetic suspension molecular pump after processing and assembling, the balance of electromagnetic force is detected in the manufacturing process of the magnetic bearing parts and the manufacturing process of the magnetic suspension molecular pump bearing system, a data evaluation basis and standard are provided for the quality of the magnetic suspension molecular pump product, and it is very important to ensure that the magnetic suspension molecular pump is in a safe, reliable and stable running state.
The embodiment of the invention also provides a molecular pump magnetic bearing detection method, which is applied to the molecular pump magnetic bearing detection device, as shown in fig. 6, and comprises the following steps:
step S1: and placing the molecular pump magnetic bearing to be detected or the molecular pump with the molecular pump magnetic bearing to be detected in a molecular pump magnetic bearing detection device.
Step S2: and connecting the inlet wire end of the magnetic bearing of the molecular pump to be tested with the magnetic bearing driving unit, and connecting the outlet wire end of the magnetic bearing of the molecular pump to be tested with the comprehensive measuring unit to obtain the inductance value of the magnetic bearing of the molecular pump to be tested so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value.
In a specific embodiment, when the molecular pump magnetic bearing to be detected is placed in the molecular pump magnetic bearing detection device, an XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part and/or an AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part are obtained, and electromagnetic force balance of a molecular pump magnetic bearing component is analyzed according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part and/or the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part; when a molecular pump with a molecular pump magnetic bearing to be detected is placed in a molecular pump magnetic bearing detection device, an XY radial inductance value corresponding to the XY radial direction of a magnetic bearing part, an AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part and a ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part are obtained, and electromagnetic force balance of the molecular pump magnetic bearing system is analyzed according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part and the ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part.
In an embodiment of the present invention, an XY radial inductance value corresponding to an XY radial direction of a magnetic bearing portion includes: positive inductance value corresponding to the radial direction of the magnetic bearing part X, negative inductance value corresponding to the radial direction of the magnetic bearing part X, positive inductance value corresponding to the radial direction of the magnetic bearing part Y and negative inductance value corresponding to the radial direction of the magnetic bearing part Y; AB radial inductance value of magnetic bearing portion AB radial correspondence, comprising: the magnetic bearing part A is provided with a positive inductance value corresponding to the radial direction, a negative inductance value corresponding to the radial direction, a positive inductance value corresponding to the radial direction and a negative inductance value corresponding to the radial direction; the ZZ radial inductance value that the magnetic bearing portion ZZ radially corresponds to includes: positive inductance value corresponding to the magnetic bearing part Z in the radial direction and negative inductance value corresponding to the magnetic bearing part Z in the radial direction.
Specifically, the electromagnetic force balance of the magnetic bearing component of the molecular pump is analyzed according to XY radial inductance value corresponding to XY radial direction of the magnetic bearing component, and the method comprises the following steps:
step S210: and calculating the extreme value of the radial direction of the magnetic bearing part XY and the average value of the radial direction of the magnetic bearing part XY according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part X, the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part Y.
Step S211: and obtaining a first inductance average value corresponding to the XY radial direction of the magnetic bearing part according to the XY radial extreme value of the magnetic bearing part and the XY radial average value of the magnetic bearing part.
Step S213: and analyzing electromagnetic force balance of the magnetic bearing component XY of the molecular pump in the radial direction according to the relation between the first inductance average value corresponding to the magnetic bearing component XY in the radial direction and a first preset threshold value.
Further, analyzing electromagnetic force balance of the magnetic bearing component of the molecular pump according to the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing component, comprising:
step S220: and calculating the radial extreme value of the magnetic bearing part AB and the radial average value of the magnetic bearing part AB according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part A and the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part B.
Step S221: and obtaining a first inductance average value corresponding to the radial direction of the magnetic bearing part AB according to the radial extreme value of the magnetic bearing part AB and the radial average value of the magnetic bearing part AB.
Step S222: and analyzing the radial electromagnetic force balance of the molecular pump magnetic bearing component AB according to the relation between the first inductance average value corresponding to the radial direction of the magnetic bearing component AB and the second preset threshold value.
In the embodiment of the invention, the electromagnetic force balance of the magnetic suspension molecular pump can be decomposed into the electromagnetic force balance of the magnetic bearing component and the electromagnetic force balance of the magnetic bearing system. And the magnetic bearing component comprises an XY radial magnetic bearing component, an AB radial magnetic bearing component and a ZZ axial magnetic bearing component. The electromagnetic force balance of the XY radial magnetic bearing component and the AB radial magnetic bearing component is measured by adopting the following scheme, and the electromagnetic force balance of the ZZ magnetic bearing component is required to be finished in the installation of a bearing system and is carried out in the electromagnetic force balance measurement of the magnetic bearing system. Since the electromagnetic force balance measurement modes of the XY radial magnetic bearing component and the AB radial magnetic bearing component are similar, the technical scheme is described below by taking the measurement of the electromagnetic force of the XY radial magnetic bearing component as an example. The radial XY magnetic bearing 23 includes a stator core 55, a magnetic bearing coil 52, XY radial magnetic bearing lead wires 54, XY radial magnetic bearing connection terminals 53.
Firstly, the measured XY magnetic bearing 23 is installed into a magnetic bearing component electromagnetic force balance measuring tool 60 shown in fig. 5, a lead-out terminal of the radial magnetic bearing is connected to a magnetic bearing terminal row 6, a tool rotor 65 is installed inside the measured XY magnetic bearing 23, the XY magnetic bearing driving unit 11 is controlled to be communicated with X1 and X2 coils of the measured XY magnetic bearing 23, electromagnetic force is built in the coordinate X+ direction, the tool rotor 65 is tightly contacted with the inner wall of the measured XY magnetic bearing 23 in the coordinate X+ direction, the comprehensive measuring unit 3 is controlled to be communicated with X3 and X4 coils of the measured XY magnetic bearing 23 in sequence, and corresponding inductance values Lx3X4 are measured and recorded. The XY magnetic bearing driving unit 11 is controlled to be communicated with the Y1 and Y2 coils of the XY magnetic bearing 23 to be measured, electromagnetic force is built in the coordinate Y+ direction at the moment, the tool rotor 65 is closely contacted with the inner wall of the XY magnetic bearing 23 to be measured in the coordinate Y+ direction, the comprehensive measuring unit 3 is controlled to be communicated with the Y3 and Y4 coils of the XY magnetic bearing 23 to be measured in sequence, and the corresponding inductance value Ly3Y4 is measured and recorded. Similarly, electromagnetic force is respectively constructed in the X-direction and the Y-direction, corresponding coil inductance values are recorded, and finally, the inductance values of the X1 coil, the X2 coil, the X3X4 coil, the Y1 coil, the Y2 coil, the Y3 coil and the Y4 coil can be respectively obtained, and the inductance values Lx1X2, lx3X4, ly1Y2 and Ly3Y4 of the X1 coil, the X2 coil, the X3X4 coil, the Y1 coil, the Y2 coil and the Y3 coil can be obtained by calculating the average value of the four inductance values, so that the driving and measuring process is completed. Selecting Lx1x2, lx3x4, ly1y2, ly3y4, obtaining Ldelta by taking the difference between the maximum value and the minimum value, calculating Lx1x2, lx3x4, ly1y2, ly3y4 mean Lavg, calculating Ldelta/Lavg to obtain the electromagnetic force balance judging factor of the measured radial magnetic bearing component, and obtaining the electromagnetic force balance evaluation result of the measured radial magnetic bearing component through a first preset threshold value. On the premise that the resistance values of the X1, X2, X3X4, Y1, Y2, Y3 and Y4 coils are controlled within a certain range, the corresponding relation between Lavg and an air gap can be obtained through a calibration process, so that Lavg can be used for evaluating the aperture data of the inner circle of the stator core 55, and the mechanical measurement requirement of the stator core 55 is reduced.
The electromagnetic force balance measurement of the AB radial magnetic bearing component also adopts the mode to calculate the first inductance average value corresponding to the AB radial direction of the magnetic bearing part to obtain the electromagnetic force balance judgment factor of the measured radial magnetic bearing component, and the electromagnetic force balance evaluation result of the measured radial magnetic bearing component can be obtained through the second preset threshold value. In the embodiment of the invention, the first preset threshold and the second preset threshold are set according to actual needs.
Further, analyzing electromagnetic force balance of the molecular pump magnetic bearing system according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part, and the ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part, comprising:
step S230: and calculating the X-direction inductance ratio and the Y-direction inductance ratio of the magnetic bearing system XY in the radial direction according to the positive inductance value and the negative inductance value corresponding to the magnetic bearing part X in the radial direction, the positive inductance value and the negative inductance value corresponding to the magnetic bearing part Y in the radial direction.
Step S231: and calculating the radial A-direction inductance ratio and the radial B-direction inductance ratio of the magnetic bearing system AB according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part A and the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part B.
Step S232: and calculating a third inductance value of the magnetic bearing system ZZ in the radial direction according to the positive inductance value and the negative inductance value corresponding to the magnetic bearing part Z in the radial direction.
Step S233: and analyzing the electromagnetic force balance of the molecular pump magnetic bearing system according to the relation between the X-direction inductance ratio and a third preset threshold value, the relation between the Y-direction inductance ratio and a fourth preset threshold value, the relation between the A-direction inductance ratio and a fifth preset threshold value, the relation between the B-direction inductance ratio and a sixth preset threshold value and the relation between the third inductance ratio and a seventh preset threshold value.
In the embodiment of the present invention, the electromagnetic force balance measurement and evaluation of the magnetic bearing system 13 adopts the following scheme: firstly, a measured magnetic bearing system 13 is fixed on a measuring platform by adopting a vertical main shaft posture, a magnetic bearing outgoing line of the magnetic bearing system 13 is connected to a magnetic bearing line terminal row 6, firstly, an X1 and X2 coil of a radial XY magnetic bearing 23 of the XY magnetic bearing system 13 is controlled to be communicated, electromagnetic force is built in a coordinate X+ direction, meanwhile, an A1 and A2 coil of a radial AB magnetic bearing 26 of the AB magnetic bearing system 13 is controlled to be communicated, electromagnetic force is built in a coordinate A+ direction, at the moment, a rotor 8 of the magnetic bearing system 13 is tightly contacted with inner walls of an upper safety bearing 9 and a lower safety bearing 15 in a coordinate X+ direction and a coordinate A+ direction, a comprehensive measuring unit 3 is controlled to be communicated with an X3X4 coil of a radial XY magnetic bearing 23 of the magnetic bearing system 13 and an A3A4 coil of the radial AB magnetic bearing 26 in sequence, corresponding inductance values are measured, and Lx3X4 and La3A4 are recorded. Then the X3 and X4 coils of the XY magnetic bearing driving unit 11 and the radial XY magnetic bearing 23 of the tested magnetic bearing system 13 are controlled to be connected, electromagnetic force is built in the X-direction of coordinates, meanwhile, the AB magnetic bearing driving unit 12 and the A3 and A4 coils of the radial AB magnetic bearing 26 of the tested magnetic bearing system 13 are controlled to be connected, electromagnetic force is built in the A-direction of coordinates, at the moment, the rotor 8 of the magnetic bearing system 13 is tightly contacted with the inner walls of the upper safety bearing 9 and the lower safety bearing 15 in the X-direction of coordinates and the A-direction of coordinates, the comprehensive measuring unit 3 is controlled to be sequentially communicated with the X1X2 coil of the radial XY magnetic bearing 23 and the A1A2 coil of the radial AB magnetic bearing 26 of the magnetic bearing system 13, corresponding inductance values are measured, and Lx1X2 and La1A2 are recorded.
By analogy, inductance values Ly1Y2, ly3Y4, lb1B2 and Lb3B4 can be obtained respectively, ratios Lx1X2/Lx3X4, ly1Y2/Ly3Y4, la1a2/La3a4 and Lb1B2/Lb3B4 can be calculated respectively, these ratios can be used as radial electromagnetic force balance evaluation factors of the magnetic bearing system 13, and radial electromagnetic force balance evaluation of the magnetic bearing system 13 can be obtained through the relation between the X-direction inductance ratio Lx1X2/Lx3X4 and a third preset threshold value, the relation between the Y-direction inductance ratio Ly1Y2/Ly3Y4 and a fourth preset threshold value, the relation between the a-direction inductance ratio La1a2/La3a4 and a fifth preset threshold value and the relation between the B-direction inductance ratio Lb1B2/Lb3B4 and a sixth preset threshold value. Absolute values of Lx1x2, lx3x4, ly1y2, ly3y4, la1a2, la3a4, lb1b2, lb3b4 can be used as an evaluation factor for air gaps. In the embodiment of the invention, the third preset threshold, the fourth preset threshold, the fifth preset threshold and the sixth preset threshold are set according to actual needs.
Further, the measured magnetic bearing system 13 is fixed on the measuring platform by adopting the horizontal posture of the main shaft, the magnetic bearing outgoing line of the magnetic bearing system 13 is connected to the magnetic bearing line terminal row 6, the Z1 and Z2 coils of the axial Z magnetic bearing 29 of the measured magnetic bearing system 13 and the ZZ magnetic bearing driving unit 13 are controlled to be communicated, electromagnetic force is built in the coordinate Z+ direction, at the moment, the axial thrust disc 17 is positioned at the upper limit position defined by the upper safety bearing 9 and the lower safety bearing 15, the comprehensive measuring unit 3 is controlled to be communicated with the Z3Z4 coil of the axial Z magnetic bearing of the magnetic bearing system 13, and the corresponding inductance value is measured and Lz3Z4 is recorded. The ZZ magnetic bearing driving unit 13 is controlled to be communicated with the Z3 and Z4 coils of the axial Z magnetic bearing of the magnetic bearing system 13 to be tested, electromagnetic force is built in the coordinate Z-direction, at the moment, the axial thrust disc 17 is positioned at the lower limit position defined by the upper safety bearing 9 and the lower safety bearing 15, the comprehensive measuring unit 3 is controlled to be communicated with the Z1Z2 coil of the axial Z magnetic bearing 29 of the magnetic bearing system 13, and corresponding inductance values are measured and Lz1Z2 is recorded. The third inductance value Lz1z2/Lz3z4 in the ZZ radial direction is calculated and can be used as an axial electromagnetic force balance evaluation factor of the magnetic bearing system 13, and the axial electromagnetic force balance evaluation of the magnetic bearing system 13 can be obtained through a seventh preset threshold value. The axial electromagnetic force balance evaluation factor can be optimized through assembly adjustment because the axial assembly is adjustable. The absolute value of Lz1z2, lz3z4 may be used as an evaluation factor for the axial air gap. In the embodiment of the invention, the seventh preset threshold is set according to actual needs.
The invention provides a molecular pump magnetic bearing detection method, which comprises the following steps: placing a molecular pump magnetic bearing to be detected or a molecular pump with the molecular pump magnetic bearing to be detected in a molecular pump magnetic bearing detection device; and connecting the inlet wire end of the magnetic bearing of the molecular pump to be tested with the magnetic bearing driving unit, and connecting the outlet wire end of the magnetic bearing of the molecular pump to be tested with the comprehensive measuring unit to obtain the inductance value of the magnetic bearing of the molecular pump to be tested so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value. The magnetic bearing device of the magnetic pump is used for detecting the equilibrium of the magnetic bearing parts of the magnetic pump after processing and assembling, electromagnetic force equilibrium is detected in the manufacturing process of the magnetic bearing parts and the manufacturing process of the magnetic bearing system of the magnetic pump, a basis and a standard for data evaluation are provided for the quality of the magnetic pump product, and it is very important to ensure that the magnetic pump is in a safe, reliable and stable running state.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (9)
1. A molecular pump magnetic bearing detection device, comprising: a magnetic bearing driving unit, a driving and signal selecting channel and a comprehensive measuring unit, wherein,
the magnetic bearing driving unit is connected with the wire inlet end of the molecular pump magnetic bearing and is used for conveying a driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force;
the driving and signal selecting channel is used for receiving an external control signal and switching the molecular pump magnetic bearing detecting channel according to the external control signal;
the comprehensive measurement unit is connected with the outlet end of the molecular pump magnetic bearing and is used for measuring the inductance value of the molecular pump magnetic bearing so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value;
the molecular pump magnetic bearing detection channel comprises: XY magnetic bearing detection passageway, AB magnetic bearing detection passageway and ZZ magnetic bearing detection passageway, the magnetic bearing drive unit includes: an XY magnetic bearing driving unit, an AB magnetic bearing driving unit and a ZZ magnetic bearing driving unit, wherein,
when the driving and signal selecting channel is switched to the XY magnetic bearing detecting channel, the XY magnetic bearing driving unit is connected with a first wire inlet end of the molecular pump magnetic bearing and used for conveying a first driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the XY direction;
When the driving and signal selecting channel is switched to the AB magnetic bearing detecting channel, the AB magnetic bearing driving unit is connected with a second wire inlet end of the molecular pump magnetic bearing and used for conveying a second driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the AB direction;
when the driving and signal selecting channel is switched to the ZZ magnetic bearing detecting channel, the ZZ magnetic bearing driving unit is connected with a third wire inlet end of the molecular pump magnetic bearing and used for conveying a second driving signal to the molecular pump magnetic bearing so as to establish electromagnetic force in the ZZ direction.
2. The molecular pump magnetic bearing detection device of claim 1, further comprising: an automatic test and data analysis unit and a man-machine interaction unit, wherein,
the automatic testing and data analyzing unit is connected with the comprehensive measuring unit and is used for receiving the inductance value of the molecular pump magnetic bearing sent by the comprehensive measuring unit, analyzing the electromagnetic force balance of the molecular pump according to the inductance value and generating an analysis result;
the man-machine interaction unit is respectively connected with an external computer and the automatic test and data analysis unit and is used for receiving an external control signal sent by the external computer, sending the external control signal to the driving and signal selection channel and sending the analysis result sent by the automatic test and data analysis unit to the external computer.
3. The molecular pump magnetic bearing detection device of claim 1, further comprising: the magnetic bearing connecting terminal row, the magnetic bearing driving unit is connected with the inlet wire end of the molecular pump magnetic bearing through the magnetic bearing connecting terminal row.
4. A molecular pump magnetic bearing detection method, wherein the molecular pump magnetic bearing detection method is applied to the molecular pump magnetic bearing detection device according to any one of claims 1 to 3, comprising:
placing a molecular pump magnetic bearing to be detected or a molecular pump with the molecular pump magnetic bearing to be detected in the molecular pump magnetic bearing detection device;
and connecting the inlet wire end of the magnetic bearing of the molecular pump to be tested with the magnetic bearing driving unit, and connecting the outlet wire end of the magnetic bearing of the molecular pump to be tested with the comprehensive measuring unit to obtain the inductance value of the magnetic bearing of the molecular pump to be tested so as to analyze the electromagnetic force balance of the molecular pump by utilizing the inductance value.
5. The molecular pump magnetic bearing detection method according to claim 4, wherein when a molecular pump magnetic bearing to be detected is placed in the molecular pump magnetic bearing detection device, an XY radial inductance value corresponding to a magnetic bearing part XY radial direction and/or an AB radial inductance value corresponding to a magnetic bearing part AB radial direction are obtained, and electromagnetic force balance of the molecular pump magnetic bearing component is analyzed according to the XY radial inductance value corresponding to the magnetic bearing part XY radial direction and/or the AB radial inductance value corresponding to the magnetic bearing part AB radial direction;
When a molecular pump with the molecular pump magnetic bearing to be detected is arranged in the molecular pump magnetic bearing detection device, an XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, an AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part and a ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part are obtained, and electromagnetic force balance of the molecular pump magnetic bearing system is analyzed according to the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part, the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing part and the ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing part.
6. The method for detecting a magnetic bearing of a molecular pump according to claim 5, wherein,
the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing part comprises: positive inductance value corresponding to the radial direction of the magnetic bearing part X, negative inductance value corresponding to the radial direction of the magnetic bearing part X, positive inductance value corresponding to the radial direction of the magnetic bearing part Y and negative inductance value corresponding to the radial direction of the magnetic bearing part Y;
the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing portion includes: the magnetic bearing part A is provided with a positive inductance value corresponding to the radial direction, a negative inductance value corresponding to the radial direction, a positive inductance value corresponding to the radial direction and a negative inductance value corresponding to the radial direction;
The magnetic bearing portion ZZ radial inductance value corresponding to the ZZ radial direction comprises: positive inductance value corresponding to the magnetic bearing part Z in the radial direction and negative inductance value corresponding to the magnetic bearing part Z in the radial direction.
7. The method according to claim 6, wherein analyzing the electromagnetic force balance of the molecular pump magnetic bearing member based on XY radial inductance values corresponding to XY radial directions of the magnetic bearing portion comprises:
calculating the extreme value of the radial direction of the magnetic bearing part XY and the average value of the radial direction of the magnetic bearing part XY according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part X and the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part Y;
obtaining a first inductance average value corresponding to the XY radial direction of the magnetic bearing part according to the XY radial extreme value of the magnetic bearing part and the XY radial average value of the magnetic bearing part;
and analyzing electromagnetic force balance of the magnetic bearing component XY of the molecular pump in the radial direction according to the relation between the first inductance average value corresponding to the magnetic bearing component XY in the radial direction and a first preset threshold value.
8. The method according to claim 6, wherein analyzing the electromagnetic force balance of the molecular pump magnetic bearing member based on the AB radial inductance value corresponding to the magnetic bearing portion AB radial direction comprises:
Calculating the radial extreme value of the magnetic bearing part AB and the radial average value of the magnetic bearing part AB according to the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part A and the positive inductance value and the negative inductance value corresponding to the radial direction of the magnetic bearing part B;
obtaining a first inductance average value corresponding to the radial direction of the magnetic bearing part AB according to the radial extreme value of the magnetic bearing part AB and the radial average value of the magnetic bearing part AB;
and analyzing the radial electromagnetic force balance of the molecular pump magnetic bearing component AB according to the relation between the first inductance average value corresponding to the radial direction of the magnetic bearing component AB and a second preset threshold value.
9. The method according to claim 6, wherein analyzing the electromagnetic force balance of the molecular pump magnetic bearing system based on the XY radial inductance value corresponding to the XY radial direction of the magnetic bearing portion, the AB radial inductance value corresponding to the AB radial direction of the magnetic bearing portion, and the ZZ radial inductance value corresponding to the ZZ radial direction of the magnetic bearing portion comprises:
calculating X-direction inductance ratio and Y-direction inductance ratio of the magnetic bearing system XY in the radial direction according to the positive inductance value and the negative inductance value corresponding to the magnetic bearing part X in the radial direction, the positive inductance value and the negative inductance value corresponding to the magnetic bearing part Y in the radial direction;
Calculating the radial A-direction inductance ratio and the radial B-direction inductance ratio of the magnetic bearing system AB according to the positive inductance value and the negative inductance value corresponding to the radial A of the magnetic bearing part, the positive inductance value and the negative inductance value corresponding to the radial B of the magnetic bearing part;
calculating a third inductance value of the magnetic bearing system ZZ in the radial direction according to the positive inductance value and the negative inductance value corresponding to the magnetic bearing part Z in the radial direction;
and analyzing the electromagnetic force balance of the molecular pump magnetic bearing system according to the relation between the X-direction inductance ratio and a third preset threshold value, the relation between the Y-direction inductance ratio and a fourth preset threshold value, the relation between the A-direction inductance ratio and a fifth preset threshold value, the relation between the B-direction inductance ratio and a sixth preset threshold value and the relation between the third inductance ratio and a seventh preset threshold value.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1318310A1 (en) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Magnetic bearing control device |
| CN102425557A (en) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Control method for acquiring rotor suspension center of magnetic suspension molecular pump |
| CN102425555A (en) * | 2011-11-11 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Method for obtaining radial suspension centers of rotor of magnetic molecular pump |
| CN102425556A (en) * | 2011-11-11 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Method for obtaining radial suspension centers of rotor of magnetic molecular pump |
| CN102435135A (en) * | 2011-09-09 | 2012-05-02 | 北京中科科仪技术发展有限责任公司 | Rotor levitation centre determination method for permanent magnet motor-driven maglev molecular pump |
| CN103967829A (en) * | 2013-02-06 | 2014-08-06 | 株式会社岛津制作所 | Magnetic bearing device and vacuum pump |
| CN104373372A (en) * | 2013-08-14 | 2015-02-25 | 株式会社岛津制作所 | Magnetic bearing device and vacuum pump |
-
2021
- 2021-05-26 CN CN202110574655.XA patent/CN113295411B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1318310A1 (en) * | 2001-12-04 | 2003-06-11 | BOC Edwards Technologies, Limited | Magnetic bearing control device |
| CN102435135A (en) * | 2011-09-09 | 2012-05-02 | 北京中科科仪技术发展有限责任公司 | Rotor levitation centre determination method for permanent magnet motor-driven maglev molecular pump |
| CN102425555A (en) * | 2011-11-11 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Method for obtaining radial suspension centers of rotor of magnetic molecular pump |
| CN102425556A (en) * | 2011-11-11 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Method for obtaining radial suspension centers of rotor of magnetic molecular pump |
| CN102425557A (en) * | 2011-12-08 | 2012-04-25 | 北京中科科仪技术发展有限责任公司 | Control method for acquiring rotor suspension center of magnetic suspension molecular pump |
| CN103967829A (en) * | 2013-02-06 | 2014-08-06 | 株式会社岛津制作所 | Magnetic bearing device and vacuum pump |
| CN104373372A (en) * | 2013-08-14 | 2015-02-25 | 株式会社岛津制作所 | Magnetic bearing device and vacuum pump |
Non-Patent Citations (2)
| Title |
|---|
| 周红海.分子泵磁悬浮轴承结构及功率放大器设计.中国优秀硕士学位论文全文数据库工程科技Ⅱ辑.2006,(第12期),全文. * |
| 楼英邦.径向磁力轴承电磁力的多因素影响研究.中国优秀硕士学位论文全文数据库工程科技Ⅱ辑.2019,(第07期),全文. * |
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