CN102404937B - 湿处理装置及湿处理方法 - Google Patents
湿处理装置及湿处理方法 Download PDFInfo
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- CN102404937B CN102404937B CN201010278398.7A CN201010278398A CN102404937B CN 102404937 B CN102404937 B CN 102404937B CN 201010278398 A CN201010278398 A CN 201010278398A CN 102404937 B CN102404937 B CN 102404937B
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201010278398.7A CN102404937B (zh) | 2010-09-10 | 2010-09-10 | 湿处理装置及湿处理方法 |
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CN201010278398.7A CN102404937B (zh) | 2010-09-10 | 2010-09-10 | 湿处理装置及湿处理方法 |
Publications (2)
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CN102404937A CN102404937A (zh) | 2012-04-04 |
CN102404937B true CN102404937B (zh) | 2014-06-25 |
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CN201010278398.7A Active CN102404937B (zh) | 2010-09-10 | 2010-09-10 | 湿处理装置及湿处理方法 |
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1818787A (zh) * | 2005-02-08 | 2006-08-16 | 东京毅力科创株式会社 | 涂布、显像装置和涂布、显像方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3586552B2 (ja) * | 1998-01-29 | 2004-11-10 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP2002001245A (ja) * | 2000-06-23 | 2002-01-08 | Hitachi Electronics Eng Co Ltd | 基板の液処理装置及び液処理方法 |
JP3863086B2 (ja) * | 2002-10-22 | 2006-12-27 | 大日本スクリーン製造株式会社 | 基板処理装置 |
WO2010025125A1 (en) * | 2008-08-29 | 2010-03-04 | Evergreen Solar, Inc. | Single-sided textured sheet wafer and manufactoring method therefore |
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2010
- 2010-09-10 CN CN201010278398.7A patent/CN102404937B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1818787A (zh) * | 2005-02-08 | 2006-08-16 | 东京毅力科创株式会社 | 涂布、显像装置和涂布、显像方法 |
Non-Patent Citations (3)
Title |
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JP特开2002-1245A 2002.01.08 |
JP特开2004-146414A 2004.05.20 |
JP特开平11-216433A 1999.08.10 |
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CN102404937A (zh) | 2012-04-04 |
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C06 | Publication | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20170307 Address after: Guangdong city of Shenzhen province Baoan District Songgang streets Yan Chuanyan Luzhen Luo Ding Technology Park plant A1 building to building A3 Patentee after: Fuku Precision Components (Shenzhen) Co., Ltd. Patentee after: Peng Ding Polytron Technologies Inc Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Patentee before: Fuku Precision Components (Shenzhen) Co., Ltd. Patentee before: Zhending Technology Co., Ltd. |
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TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: Guangdong city of Shenzhen province Baoan District Songgang street Chuanyan Luo Lu Yan Co-patentee after: Peng Ding Polytron Technologies Inc Patentee after: Peng Ding Holdings (Shenzhen) Limited by Share Ltd Address before: 518000 Guangdong city of Shenzhen province Baoan District Songgang streets Yan Chuanyan Luzhen Luo Ding Technology Park plant A1 building to building A3 Co-patentee before: Peng Ding Polytron Technologies Inc Patentee before: Fuku Precision Components (Shenzhen) Co., Ltd. |
|
CP03 | Change of name, title or address |