CN102322436A - Radial vibration control method for magnetic suspension molecular pump - Google Patents
Radial vibration control method for magnetic suspension molecular pump Download PDFInfo
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Abstract
The invention provides a radial vibration control method for a magnetic suspension molecular pump. According to the control method, favorable control over radial vibration of the magnetic suspension molecular pump can be realized, and stable operation of the magnetic suspension molecular pump is ensured. The vibration frequency of a blade peak of the rotor for the magnetic suspension molecular pump and the vibration frequency of a flexural peak of the rotor are acquired by using a hammer test and a sine frequency sweep test, thus a blade peak trap filter and a rotor flexural peak trap filter are designed. In the control method, the rotating speed of the rotor is detected by using a rotating speed detection device; and the vibration condition of the rotor is detected by using a rotor displacement measuring device, thus the radial vibration of the rotor is inhibited by using the blade peak trap filter and the rotor flexural peak trap filter. According to the radial vibration control method for the magnetic suspension molecular pump, which is provided by the invention, the frequency of the rotor flexural peak trap filter and the frequency of an impeller blade peak in the magnetic suspension molecular pump can be automatically distinguished, thus parameters of the trap filter are adjusted to inhibit the radial vibration of the rotor. The radial vibration control method has the characteristics of strong self adaptability and favorable robustness.
Description
Technical field
The present invention relates to a kind of controlling method, particularly a kind of magnetic suspension molecular pump radial vibration controlling method.
Background technique
The magnetic suspension molecular pump is to utilize magnetic bearing to produce electromagnetic force rotor is suspended in the air, but a kind of novel high-performance molecular pump of no mechanical contact and rotor-position ACTIVE CONTROL between realization rotor and the stator.Because the magnetic suspension molecular pump has does not has friction, need not to lubricate, pollution-free, high-speed, advantage such as the life-span is long, so the vacuum that the magnetic suspension molecular pump is widely used in condition of high vacuum degree, high-cleanness, high obtains the field.
In magnetic suspension molecular pump working procedure, its impeller blade vibration can cause the axial vibration of magnetic suspension molecular pump rotor.In order to suppress the rotor axial vibration, can axial magnetic bearing be designed to a narrow bandwidth system.The axial magnetic bearing closed loop gain at impeller blade vibration frequency place is very little, can't cause the axial magnetic bearing response, and axial vibration can be suppressed.The magnetic suspension molecular pump is in boosting velocity procedure, and rotor flexible peak vibration and impeller blade vibration can cause rotor radially producing vibration.The impeller of magnetic suspension molecular pump generally has several impeller blade resonance peaks (hereinafter referred impeller blade peak), and the number at impeller blade peak is relevant with blade wheel structure with blade peak frequency.The gyroscopic effect of rotor can cause that the flexible peak of rotor vibration frequency changes, and rotor centrifugal force can cause that impeller blade peak frequency changes.If the control system vibration of flexible peak and impeller blade vibration to the magnetic suspension molecular pump rotor in the rotor boosting velocity procedure do not suppress; Then flexible peak vibration of magnetic suspension molecular pump rotor and impeller blade vibration may cause the rotor unstability, cause rotor can't arrive working speed.
For making rotor arrive working speed and stable operation rapidly, must flexible peak vibration of magnetic suspension molecular pump rotor and impeller blade vibration be taken into account, thereby the control system that design obtains just can effectively suppress the radial vibration of magnetic suspension molecular pump.And in the controlling method that disclosed inhibition magnetic suspension molecular pump vibrates in the existing technology; Do not propose how to suppress simultaneously vibration of magnetic suspension molecular pump rotor radial flexibility peak and the vibration of impeller blade peak; Also propose how the flexible peak of rotor vibration frequency to be changed and impeller blade peak change of frequency realization self adaptive control, therefore, can't suppress the radial vibration of magnetic suspension molecular pump rotor effectively; Cause the unstability of magnetic suspension molecular pump rotor possibly, cause rotor can't arrive working speed.
Summary of the invention
For this reason, the technical problem that the present invention will solve is to propose to suppress the radial vibration of magnetic suspension molecular pump rotor effectively, makes rotor can cross the magnetic suspension molecular pump radial vibration controlling method that arrives working speed.
A kind of magnetic suspension molecular pump radial vibration controlling method that the present invention proposes may further comprise the steps:
A. obtain blade peak vibration frequency and the flexible peak of rotor vibration frequency through the hammering experiment, and obtain blade peak notch filter and the flexible peak of rotor notch filter according to said blade peak vibration frequency and the design of the flexible peak of said rotor vibration frequency;
B. utilize said blade peak notch filter, said rotor flexible peak notch filter and PID controller to form magnetic suspension molecular pump radial vibration controller control magnetic suspension molecular pump static suspension;
C. through magnetic suspension molecular pump sine sweep is obtained the rotor radial displacement information;
D. design obtains new flexible peak notch filter according to said rotor radial displacement information, and with step b in new magnetic suspension molecular pump radial vibration controller behind the resulting magnetic suspension molecular pump radial vibration controller compositional optimization;
E. carry out the raising speed test through resulting magnetic suspension molecular pump radial vibration controller control magnetic suspension molecular pump motor in the steps d; And according to the adjustment of the vibration situation under each rotating speed of rotor notch filter parameter; Obtain the notch filter that is applicable to specific rotation speeds, these notch filters and PID controller are formed the final magnetic suspension molecular pump radial vibration controller of specific rotation speeds scope jointly; Control Parameter is carried out record, and Control Parameter comprises the speed range that trapper CF center frequency, notch depth and trapper are suitable for.Utilize revised controller to continue raising speed, and continue to carry out necessary correction according to the rotor oscillation situation, up to magnetic suspension molecular pump stable operation the most at last to working speed; With the final Control Parameter complete documentation that is applicable to each speed range that obtains in pump stored medium;
F. during magnetic suspension molecular pump proper functioning, utilize speed detector to detect current rotor speed information;
G. through resulting said final magnetic suspension molecular pump radial vibration controller among the step e,, realize magnetic suspension molecular pump proper functioning thereby carry out radial vibration control according to the different trapper of detected said rotor speed Information Selection among the step f.
Above-mentioned magnetic suspension molecular pump radial vibration controlling method; Among the step a said blade peak notch filter and the flexible peak of said rotor notch filter design are specially: carry out the hammering experiment through rotor and obtain impeller blade peak vibration frequency and the flexible peak of rotor vibration frequency said magnetic suspension molecular pump band impeller; As the preset CF center frequency design of blade peak notch filter blade peak notch filter, preset CF center frequency design obtains flexible peak notch filter as flexible peak notch filter with said flexible peak vibration frequency with said impeller blade peak vibration frequency.
Above-mentioned magnetic suspension molecular pump radial vibration controlling method; Be specially through the process that magnetic suspension molecular pump sine sweep is obtained the rotor radial displacement information among the step c: the sinusoidal signal driven magnetic bearing power amplifier that uses different frequency is to said magnetic suspension molecular pump each degrees of freedom frequency sweep radially, current rotor radial displacement information when utilizing the said rotor oscillation of rotor displacement sensor.
Above-mentioned magnetic suspension molecular pump radial vibration controlling method; The notch filter implement body design of the new flexible peak of rotor described in the steps d is: carry out Fourier transform through the said rotor radial displacement information that step c is obtained and obtain the rotor oscillation signal spectrum; Thereby obtain the flexible peak of rotor vibration frequency; New flexible peak notch filter after then said flexible peak vibration frequency being optimized as new flexible peak notch filter CF center frequency design, and with step b in new magnetic suspension molecular pump radial vibration controller behind the resulting magnetic suspension molecular pump radial vibration controller compositional optimization;
Above-mentioned magnetic suspension molecular pump radial vibration controlling method; The design of final magnetic suspension molecular pump radial vibration controller is described in the step e: carry out the raising speed test through the resulting magnetic suspension molecular pump of steps d radial vibration controller control magnetic suspension molecular pump motor; Utilize said speed detector detection rotor rotating speed, control according to the notch filter that said current rotor speed information is switched different frequency; Utilize rotor displacement detection device detection rotor vibration, and rotor displacement information is carried out Fourier transformation obtain new rotor oscillation signal spectrum, said rotor oscillation signal spectrum is analyzed; If rotor oscillation does not exceed standard, the magnetic suspension molecular pump radial vibration controller of this moment final magnetic suspension molecular pump radial vibration controller in the speed range for this reason then is used to realize the stable suspersion when molecular pump moves in this speed range; And, comprise the speed range that trapper CF center frequency, notch depth and trapper are suitable for controller parameter this moment, record in the inner storage medium of magnetic suspension molecular pump; If rotor oscillation exceeds standard, then vibration peak is judged:
I. if this rotor oscillation peak is caused by rotor bow mode, as the preset center-frequency parameters of the flexible peak of rotor notch filter, design obtains the flexible peak of new rotor notch filter again with this rotor oscillation peak frequency;
If ii. the rotor oscillation peak is caused by the impeller blade vibration, as the preset center-frequency parameters of impeller blade peak notch filter, design obtains new impeller blade peak notch filter again with this rotor oscillation peak frequency;
Iii. obtain new magnetic suspension molecular pump radial vibration controller according to resulting impeller blade peak notch filter among step I or the ii or rotor flexible peak notch filter and the combination of magnetic suspension molecular pump radial vibration controller; Raising speed work among the repeating step e; According to above-mentioned design; Mode through iteration designs blade peak notch filter and the flexible peak of said rotor notch filter again; Up in magnetic suspension molecular pump rotor boosting velocity procedure, no longer occurring the rotor oscillation peak all the time, so far magnetic suspension molecular pump radial vibration design of Controller is accomplished, and with the magnetic suspension molecular pump radial vibration controller parameter that obtains; Comprise the speed range that notch filter CF center frequency, notch depth and trapper are suitable for, record in the magnetic suspension molecular pump stored medium.
Above-mentioned magnetic suspension molecular pump radial vibration controlling method; The concrete mode of realization magnetic suspension molecular pump proper functioning in the step g is: after the start of magnetic suspension molecular pump; Control system is called the controller parameter in the magnetic suspension molecular pump stored medium automatically; According to detected said current rotor speed information, from existing notch filter, select to control with the corresponding notch filter of said rotary speed information, can realize magnetic suspension molecular pump proper functioning.
Technique scheme has the following advantages:
1. said magnetic suspension molecular pump radial vibration control system can detect magnetic suspension molecular pump rotor flexible peak vibration frequency and impeller blade peak vibration frequency automatically, and designs suitable magnetic suspension molecular pump radial vibration controller in view of the above.This controller has been realized good inhibition to the radial vibration of rotor; Avoid causing the unstability of magnetic suspension molecular pump rotor; Thereby cause rotor can't arrive working speed; Can make rotor under whole velocity range, realize self adaptive control, need not manual operation, have the advantages that adaptivity is strong, robustness is good;
2. owing to factors such as part processing and assemblings, the flexible peak vibration frequency of different magnetic suspension molecular pump rotors is different with impeller blade peak vibration frequency.The present invention is stored in the magnetic suspension molecular pump radial vibration controller parameter that obtains in the pump stored medium; When changing magnetic suspension molecular pump controller; New controller calls the controller parameter in the pump stored medium automatically; Can realize magnetic suspension molecular pump proper functioning, thereby realize the interchangeability of magnetic suspension molecular pump controller and magnetic suspension molecular pump.
3. can proofread and correct repeatedly the suitable frequency range of CF center frequency, notch depth and the trapper of notch filter through the process of iteration, thereby the trapper that obtains to optimize suppresses the radial vibration of magnetic suspension molecular pump.
4. in magnetic suspension molecular pump rotor boosting velocity procedure; The gyroscopic effect of rotor can cause that the flexible peak vibration frequency of rotor changes; Rotor centrifugal force can cause that impeller blade peak vibration frequency changes, and therefore need revise magnetic suspension molecular pump radial vibration controller according to rotor flexible peak vibration frequency after changing and impeller blade peak vibration frequency.Can know that according to test in magnetic suspension molecular pump rotor boosting velocity procedure, rotor flexible peak vibration frequency and impeller blade peak vibration frequency can change near the original frequency separately.In the rotor boosting velocity procedure, can judge that this vibration is caused by rotor bow mode according to the rotor oscillation situation, still cause by the impeller blade vibration.Work through step c, steps d and step e can obtain to have comparatively the blade peak notch filter and the flexible peak of the rotor notch filter of ideal parameters, thereby suppresses the radial vibration of magnetic suspension molecular pump effectively.
Description of drawings
For content of the present invention is more clearly understood, below according to a particular embodiment of the invention and combine accompanying drawing, the present invention is done further detailed explanation, wherein
Fig. 1 is the flow chart of magnetic suspension molecular pump radial vibration controlling method;
Fig. 2 is the flow chart of the correction step of magnetic suspension molecular pump radial vibration controller;
Embodiment
Embodiment 1
Magnetic suspension molecular pump radial vibration controlling method in the present embodiment comprises two stages, and first stage is the magnetic suspension molecular pump radial vibration design of Controller stage, and second stage is the rotor radial vibration suppression stage.
Magnetic suspension molecular pump radial vibration controller has notch filter, and said notch filter comprises blade peak notch filter and the flexible peak of rotor notch filter.
Be illustrated in figure 1 as magnetic suspension molecular pump radial vibration controlling method, wherein the magnetic suspension molecular pump radial vibration design of Controller stage may further comprise the steps:
A. the flexible peak of blade peak notch filter and rotor notch filter design procedure
Obtain blade peak vibration frequency and the flexible peak of rotor vibration frequency through the hammering experiment, and according to said blade peak vibration frequency and the flexible peak of said rotor vibration frequency design blade peak notch filter and flexible peak notch filter;
B. magnetic suspension molecular pump static suspension step
Utilize said blade peak notch filter, said rotor flexible peak notch filter and PID controller to form magnetic suspension molecular pump radial vibration controller control magnetic suspension molecular pump static suspension.
C. sine sweep obtains rotor radial displacement information step
The sinusoidal signal driven magnetic bearing power amplifier that uses different frequency is to said magnetic suspension molecular pump each degrees of freedom frequency sweep radially, current rotor radial displacement information when utilizing the said rotor oscillation of rotor displacement sensor; Said displacement transducer is the radial displacement transducer of being located in the radial position of magnetic suspension molecular pump rotor.
D. the flexible peak of rotor notch filter correction step
Carry out Fourier transform through the said rotor radial displacement information that step c is obtained and obtain the rotor oscillation signal spectrum; Thereby obtain the flexible peak of said new rotor vibration frequency, the flexible peak of the new rotor notch filter after preset CF center frequency design is optimized as the flexible peak of rotor notch filter with the flexible peak of said new rotor vibration frequency then; Utilize said magnetic suspension molecular pump radial vibration controller and the new flexible peak of rotor notch filter to form new magnetic suspension molecular pump radial vibration controller.
E. the correction step of magnetic suspension molecular pump radial vibration controller
As shown in Figure 2, carry out the raising speed test through the resulting magnetic suspension molecular pump of steps d radial vibration controller control magnetic suspension molecular pump motor, utilize said speed detector detection rotor rotating speed.Notch filter according to said current rotor speed information is switched different frequency is controlled; Utilize rotor displacement detection device detection rotor vibration, and the rotor displacement signal is carried out Fourier transformation obtain the rotor oscillation signal spectrum.Said rotor oscillation signal spectrum is analyzed; If rotor oscillation does not exceed standard; Then the magnetic suspension molecular pump radial vibration controller of this moment is the final radial vibration controller of magnetic suspension molecular pump in this speed range; When molecular pump moves, be used to realize its stable suspersion in this speed range.With this controller parameter, comprise the speed range that trapper CF center frequency, notch depth, parameter are suitable for, record in the inner storage medium of magnetic suspension molecular pump; If rotor oscillation exceeds standard, then vibration peak is judged:
I. if this rotor oscillation peak is caused by rotor bow mode, as the preset center-frequency parameters of the flexible peak of rotor notch filter, design obtains the flexible peak of new rotor notch filter again with this rotor oscillation peak frequency;
If ii. the rotor oscillation peak is caused by the impeller blade vibration, as the preset center-frequency parameters of impeller blade peak notch filter, design obtains new impeller blade peak notch filter again with this rotor oscillation peak frequency.
Iii. as shown in Figure 2, obtain new magnetic suspension molecular pump radial vibration controller according to resulting impeller blade peak notch filter among the step e or rotor flexible peak notch filter and the combination of magnetic suspension molecular pump radial vibration controller.Repeating step e work; Mode through iteration designs blade peak notch filter and the flexible peak of said rotor notch filter again; Up in magnetic suspension molecular pump rotor boosting velocity procedure, no longer occurring the rotor oscillation peak all the time, so far magnetic suspension molecular pump radial vibration design of Controller is accomplished.With the magnetic suspension molecular pump radial vibration controller parameter that obtains, comprise the speed range that notch filter CF center frequency, notch depth and trapper are suitable for, record in the magnetic suspension molecular pump stored medium.
The radial vibration inhibition stage may further comprise the steps:
F. rotor speed information detects step
Detect the current rotor speed information that obtains the magnetic suspension molecular pump through speed probe;
G. the magnetic suspension molecular pump moves control step
After the start of magnetic suspension molecular pump, magnetic suspension molecular pump controller calls the controller parameter in the magnetic suspension molecular pump stored medium automatically.According to detected said current rotor speed information, under different current rotor speed situation, from several notch filters, select to control, thereby realized magnetic suspension molecular pump proper functioning with the corresponding notch filter of said rotary speed information.
Obviously, the foregoing description only be for explanation clearly done for example, and be not qualification to mode of execution.For the those of ordinary skill in affiliated field, on the basis of above-mentioned explanation, can also make other multi-form variation or change according to varying in size of equipment.Here need not also can't give exhaustive to all mode of executions.And conspicuous variation of being extended out thus or change still are among the protection domain of the invention.
Claims (6)
1. magnetic suspension molecular pump radial vibration controlling method is characterized in that may further comprise the steps:
A. obtain blade peak vibration frequency and the flexible peak of rotor vibration frequency through the hammering experiment, and obtain blade peak notch filter and the flexible peak of rotor notch filter according to said blade peak vibration frequency and the design of the flexible peak of said rotor vibration frequency;
B. utilize said blade peak notch filter, said rotor flexible peak notch filter and PID controller to form magnetic suspension molecular pump radial vibration controller control magnetic suspension molecular pump static suspension;
C. rotor is carried out sine sweep and obtain the rotor radial displacement information;
D. the new flexible peak notch filter after design is optimized according to said rotor radial displacement information, and with step b in resulting magnetic suspension molecular pump radial vibration controller form new magnetic suspension molecular pump radial vibration controller;
E. carry out the raising speed test through resulting magnetic suspension molecular pump radial vibration controller control magnetic suspension molecular pump motor in the steps d; And according to the adjustment of the vibration situation under each rotating speed of rotor notch filter parameter; Obtain the notch filter that is applicable to specific rotation speeds, these notch filters and PID controller are formed the final magnetic suspension molecular pump radial vibration controller of specific rotation speeds scope jointly; Control Parameter is carried out record, and Control Parameter comprises the speed range that trapper CF center frequency, notch depth and trapper are suitable for.Utilize revised controller to continue raising speed, and continue to carry out necessary correction according to the rotor oscillation situation, up to magnetic suspension molecular pump stable operation the most at last to working speed; With the final Control Parameter complete documentation that is applicable to each speed range that obtains in pump stored medium;
F. during magnetic suspension molecular pump proper functioning, utilize speed detector to detect current rotor speed information;
G. through resulting said final magnetic suspension molecular pump radial vibration controller among the step e; According to the different trapper of detected said rotor speed Information Selection among the step f, realize magnetic suspension molecular pump proper functioning thereby carry out the rotor radial vibration control.
2. magnetic suspension molecular pump radial vibration controlling method according to claim 1 is characterized in that:
Among the step a said blade peak notch filter and the flexible peak of said rotor notch filter design are specially: carry out the hammering experiment through rotor and obtain impeller blade peak vibration frequency and the flexible peak of rotor vibration frequency said magnetic suspension molecular pump band impeller; As the preset CF center frequency design of blade peak notch filter blade peak notch filter, preset CF center frequency design obtains flexible peak notch filter as flexible peak notch filter with said flexible peak vibration frequency with said impeller blade peak vibration frequency.
3. magnetic suspension molecular pump radial vibration controlling method according to claim 1 and 2 is characterized in that:
The process that among the step c rotor sine sweep is obtained the rotor radial displacement information is specially: the sinusoidal signal driven magnetic bearing power amplifier that uses different frequency is to said magnetic suspension molecular pump each degrees of freedom frequency sweep radially, current rotor radial displacement information when utilizing the said rotor oscillation of rotor displacement sensor.
4. magnetic suspension molecular pump radial vibration controlling method according to claim 3 is characterized in that:
The notch filter implement body design of the new flexible peak of rotor described in the steps d is: carry out Fourier transform through the said rotor radial displacement information that step c is obtained and obtain the rotor oscillation signal spectrum; Thereby obtain the flexible peak of rotor vibration frequency; New flexible peak notch filter after then said flexible peak vibration frequency being optimized as new flexible peak notch filter CF center frequency design, and with step b in new magnetic suspension molecular pump radial vibration controller behind the resulting magnetic suspension molecular pump radial vibration controller compositional optimization.
5. magnetic suspension molecular pump radial vibration controlling method according to claim 4 is characterized in that:
The design of final magnetic suspension molecular pump radial vibration controller is described in the step e: carry out the raising speed test through the resulting magnetic suspension molecular pump of steps d radial vibration controller control magnetic suspension molecular pump motor; Utilize said speed detector detection rotor rotating speed, control according to the notch filter that said current rotor speed information is switched different frequency; Utilize rotor displacement detection device detection rotor vibration, and rotor displacement information is carried out Fourier transformation obtain new rotor oscillation signal spectrum, said rotor oscillation signal spectrum is analyzed; If rotor oscillation does not exceed standard, the magnetic suspension molecular pump radial vibration controller of this moment final magnetic suspension molecular pump radial vibration controller in the speed range for this reason then is used to realize the stable suspersion when molecular pump moves in this speed range; And, comprise the speed range that trapper CF center frequency, notch depth and trapper are suitable for controller parameter this moment, record in the inner storage medium of magnetic suspension molecular pump; If rotor oscillation exceeds standard, then vibration peak is judged:
I. if this rotor oscillation peak is caused by rotor bow mode, as the preset center-frequency parameters of the flexible peak of rotor notch filter, design obtains the flexible peak of new rotor notch filter again with this rotor oscillation peak frequency;
If ii. the rotor oscillation peak is caused by the impeller blade vibration, as the preset center-frequency parameters of impeller blade peak notch filter, design obtains new impeller blade peak notch filter again with this rotor oscillation peak frequency;
Iii. obtain new magnetic suspension molecular pump radial vibration controller according to resulting impeller blade peak notch filter among step I or the ii or rotor flexible peak notch filter and the combination of magnetic suspension molecular pump radial vibration controller; Raising speed work among the repeating step e; According to above-mentioned design; Mode through iteration designs blade peak notch filter and the flexible peak of said rotor notch filter again; Up in magnetic suspension molecular pump rotor boosting velocity procedure, no longer occurring the rotor oscillation peak all the time, so far magnetic suspension molecular pump radial vibration design of Controller is accomplished, and with the magnetic suspension molecular pump radial vibration controller parameter that obtains; Comprise the speed range that notch filter CF center frequency, notch depth and trapper are suitable for, record in the magnetic suspension molecular pump stored medium.
6. magnetic suspension molecular pump radial vibration controlling method according to claim 5 is characterized in that:
The concrete mode of realization magnetic suspension molecular pump proper functioning in the step g is: after the start of magnetic suspension molecular pump; Control system is called the controller parameter in the magnetic suspension molecular pump stored medium automatically; According to detected said current rotor speed information; From existing notch filter, select to control, thereby realize magnetic suspension molecular pump proper functioning with the corresponding notch filter of said rotary speed information.
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Cited By (6)
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| CN104503238A (en) * | 2014-12-15 | 2015-04-08 | 北京航空航天大学 | Current harmonic suppression method for magnetic suspension rotor system based on self-adaptive repetitive controller |
| CN109687799A (en) * | 2018-11-16 | 2019-04-26 | 河海大学 | Based on the magnetic bearing rotor layered vibration compensation method for assuming rotational coordinates |
| CN110045607A (en) * | 2019-03-29 | 2019-07-23 | 南京航空航天大学 | A kind of once per revolution vibration control method of cross-coupling antisymmetry magnetic suspension rotor system |
| CN114123921A (en) * | 2021-11-26 | 2022-03-01 | 广东美的暖通设备有限公司 | Vibration frequency determination method, device, compressor system and readable storage medium |
| CN114992241A (en) * | 2022-07-31 | 2022-09-02 | 常州明磁卓控智能科技有限公司 | Magnetic suspension motor instability pre-diagnosis method based on dynamic stiffness real-time detection |
| CN115628224A (en) * | 2022-10-14 | 2023-01-20 | 北方工业大学 | Magnetic suspension molecular pump blade peak on-line monitoring system and method |
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| CN115628224B (en) * | 2022-10-14 | 2024-05-21 | 北方工业大学 | Magnetic suspension molecular pump blade peak online monitoring system and method |
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