CN102279057A - Pressure type fluid temperature sensor - Google Patents

Pressure type fluid temperature sensor Download PDF

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Publication number
CN102279057A
CN102279057A CN2011101995009A CN201110199500A CN102279057A CN 102279057 A CN102279057 A CN 102279057A CN 2011101995009 A CN2011101995009 A CN 2011101995009A CN 201110199500 A CN201110199500 A CN 201110199500A CN 102279057 A CN102279057 A CN 102279057A
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China
Prior art keywords
fluid
pressure
temperature sensor
type fluid
pressure type
Prior art date
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Pending
Application number
CN2011101995009A
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Chinese (zh)
Inventor
陈向东
林其斌
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Southwest Jiaotong University
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Southwest Jiaotong University
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Publication date
Application filed by Southwest Jiaotong University filed Critical Southwest Jiaotong University
Priority to CN2011101995009A priority Critical patent/CN102279057A/en
Publication of CN102279057A publication Critical patent/CN102279057A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a pressure type fluid temperature sensor which is composed of a rigid temperature bag (1), wherein a temperature-sensing fluid is sealed and filled in the rigid temperature bag (1), and the rigid temperature bag (1) is connected to a pressure-sensing cavity (5) of a fluid pressure sensor (3) capable of outputting an electric signal through a connecting pipe (11). The pressure type fluid temperature sensor has electromagnetic interference resisting property and is suitable for the measurement of inflammable and inflammable fluids. The pressure type fluid temperature sensor can be used for outputting the electric signal and can be connected to a computer or a network so as to realize remote control.

Description

A kind of pressure type fluid temperature sensor
Technical field
The present invention relates to a kind of pressure type fluid temperature sensor.
Background technology
The simplest method of measurement of fluid temperature (F.T.) is to use the mercury thermometer measure.But it can't export electric signal, can not automatic data collection, can not be connected with computing machine or network, and realize remote monitoring.Can export electric signal, automatic data collection though adopt thermopair and platinum resistance to measure fluid temperature (F.T.); But because probe itself is charged, there is potential safety hazard in inflammable and explosive fluid, probe also is subject to the environment electromagnetics interference simultaneously, influences the accuracy of measurement result..
Summary of the invention
The purpose of this invention is to provide a kind of pressure type fluid temperature sensor, the anti-electromagnetic interference (EMI) of this kind fluid temperature sensor is suitable for the measurement of inflammable and explosive fluid; And can export electric signal, can be connected, realize remote monitoring with computing machine or network.
The technical matters that the present invention solves, the technical scheme that is adopted is: a kind of pressure type fluid temperature sensor, its composition is: the rigidity thermometer bulb of the interior dress temperature-sensitive fluid of sealing, rigidity thermometer bulb are communicated with the pressure-sensitive chamber of the fluid pressure sensor that can export electric signal through connecting duct.
The course of work of the present invention and principle are:
The rigidity thermometer bulb is placed the fluid environment of dut temperature, temperature-sensitive fluid (gas or liquid) in the thermometer bulb senses bag outer fluid temperature and can expand with heat and contract with cold and produce corresponding positive and negative pressure, this pressure is passed to the pressure-sensitive chamber of fluid pressure sensor by connecting duct, fluid pressure sensor is measured the pressure in pressure-sensitive chamber and is exported electric signal, this output electric signal changes pro rata with the bag fluid pressure, the bag fluid pressure changes pro rata with the outer detected fluid environment temperature of bag again, realizes the detection of thermometer bulb outer fluid environment temperature thus.
Compared with prior art, the invention has the beneficial effects as follows:
One, this sensor can be exported electric signal, is convenient to be connected with computing machine or network, realizes remote monitoring.
Two, the fluid pressure sensor conduit that spatially is connected of thermometer bulb and employing electric quantity signal output is separated, the thermometer bulb that directly contacts with detected fluid during measurement is not charged, higher anti-flaming, explosion-proof performance and security are arranged, be suitable for the measurement of inflammable and explosive fluid.
Three, thermometer bulb is to the non-galvanomagnetic effect of the sensitlzing effect of temperature, and anti-electromagnetic interference capability is strong, is suitable for using in the big environment of electromagnetic interference (EMI).
The internal diameter of above-mentioned connecting duct is 0.5-2.0mm.
Like this, connecting duct is actually kapillary, can effectively the pressure in the thermometer bulb be passed to the pressure-sensitive chamber; Simultaneously, can reduce the influence of thermometer bulb again because of heat conduction fluid pressure sensor.
Above-mentioned fluid pressure sensor is the silicon piezoresistance type fluid pressure sensor.
Above-mentioned fluid pressure sensor is the silicon capacitance fluid pressure sensor.
These two kinds of fluid pressure sensors are that microelectronic technique is made, and volume is little, and it is highly sensitive.Like this, can reduce the volume of whole instrument, and improve its measuring accuracy.
The invention will be further described below in conjunction with the drawings and specific embodiments.
Description of drawings
Fig. 1 is the cross-sectional view of the pressure type fluid temperature sensor of the embodiment of the invention one.
Fig. 2 is the cross-sectional view of the pressure type fluid temperature sensor of the embodiment of the invention two.
Embodiment
Embodiment one
Fig. 1 illustrates, a kind of embodiment of the present invention is, a kind of pressure type fluid temperature sensor, its composition is a kind of pressure type fluid temperature sensor, and its composition is: the rigidity thermometer bulb 1 of the interior dress temperature-sensitive fluid of sealing, rigidity thermometer bulb 1 are communicated with through the pressure-sensitive chamber 5 of connecting duct 11 with the fluid pressure sensor 3 that can export electric signal.
The internal diameter of this routine connecting duct 11 is 0.5-2.0mm.
This routine fluid pressure sensor 3 is the silicon piezoresistance type fluid pressure sensor.
Embodiment two
Fig. 2 illustrates, and this routine pressure type fluid temperature sensor 3 is basic identical with embodiment one, and different only is: this routine fluid pressure sensor 3 is the silicon capacitance fluid pressure sensor.
Rigidity thermometer bulb 1 of the present invention can be got well with conducting heat and the strong material of rigidity is made, and as metals such as copper, stainless steel, aluminium, titanium, tungsten, or materials such as pottery, glass are made.The temperature-sensitive fluid can be gases such as air, nitrogen, argon gas, also can be liquid such as fluorine Lyons, ether, chloromethanes.Connecting duct 11 available copper, stainless steel, titanium or glass etc. are made.Fluid pressure sensor 3 of the present invention be except that being the above silicon piezoresistance type and silicon capacitance fluid pressure sensor, can also be variously can measure fluid (gas, liquid) pressure, and can export the pressure transducer of electric signal.

Claims (4)

1. pressure type fluid temperature sensor, its composition is: the rigidity thermometer bulb (1) of the interior dress temperature-sensitive fluid of sealing, rigidity thermometer bulb (1) are communicated with the pressure-sensitive chamber (5) of the fluid pressure sensor that can export electric signal (3) through connecting duct (11).
2. pressure type fluid temperature sensor according to claim 1 is characterized in that, the internal diameter of described connecting duct (11) is 0.5~2.0mm.
3. pressure type fluid temperature sensor according to claim 1 is characterized in that, described fluid pressure sensor (3) is the silicon piezoresistance type fluid pressure sensor.
4. pressure type fluid temperature sensor according to claim 1 is characterized in that, described fluid pressure sensor (3) is the silicon capacitance fluid pressure sensor.
CN2011101995009A 2011-07-16 2011-07-16 Pressure type fluid temperature sensor Pending CN102279057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011101995009A CN102279057A (en) 2011-07-16 2011-07-16 Pressure type fluid temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011101995009A CN102279057A (en) 2011-07-16 2011-07-16 Pressure type fluid temperature sensor

Publications (1)

Publication Number Publication Date
CN102279057A true CN102279057A (en) 2011-12-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011101995009A Pending CN102279057A (en) 2011-07-16 2011-07-16 Pressure type fluid temperature sensor

Country Status (1)

Country Link
CN (1) CN102279057A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215350A (en) * 2014-09-24 2014-12-17 昆山超强光电设备有限公司 Temperature sensor
CN104614086A (en) * 2015-03-06 2015-05-13 上海新微技术研发中心有限公司 Air pressure type temperature sensor and manufacturing method thereof
CN106768461A (en) * 2017-03-20 2017-05-31 武汉理工大学 Thermal stress thermo detector

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149686A (en) * 1978-05-16 1979-11-24 Mitsubishi Electric Corp Pressure type temperature sensor
JPH09311080A (en) * 1996-05-22 1997-12-02 Yokogawa Electric Corp Pressure-type thermometer
CN101542258A (en) * 2007-02-16 2009-09-23 株式会社电装 Pressure sensor and manufacturing method thereof
CN202182777U (en) * 2011-07-16 2012-04-04 西南交通大学 Pressure type fluid temperature sensing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149686A (en) * 1978-05-16 1979-11-24 Mitsubishi Electric Corp Pressure type temperature sensor
JPH09311080A (en) * 1996-05-22 1997-12-02 Yokogawa Electric Corp Pressure-type thermometer
CN101542258A (en) * 2007-02-16 2009-09-23 株式会社电装 Pressure sensor and manufacturing method thereof
CN202182777U (en) * 2011-07-16 2012-04-04 西南交通大学 Pressure type fluid temperature sensing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215350A (en) * 2014-09-24 2014-12-17 昆山超强光电设备有限公司 Temperature sensor
CN104614086A (en) * 2015-03-06 2015-05-13 上海新微技术研发中心有限公司 Air pressure type temperature sensor and manufacturing method thereof
CN106768461A (en) * 2017-03-20 2017-05-31 武汉理工大学 Thermal stress thermo detector

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Application publication date: 20111214