CN102267008A - Precise control mechanism of welding pressure - Google Patents
Precise control mechanism of welding pressure Download PDFInfo
- Publication number
- CN102267008A CN102267008A CN2011101677311A CN201110167731A CN102267008A CN 102267008 A CN102267008 A CN 102267008A CN 2011101677311 A CN2011101677311 A CN 2011101677311A CN 201110167731 A CN201110167731 A CN 201110167731A CN 102267008 A CN102267008 A CN 102267008A
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- spring
- nut
- air bearing
- lead screw
- welding pressure
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- 238000003466 welding Methods 0.000 title claims abstract description 20
- 230000008878 coupling Effects 0.000 claims abstract description 4
- 238000010168 coupling process Methods 0.000 claims abstract description 4
- 238000005859 coupling reaction Methods 0.000 claims abstract description 4
- 230000008520 organization Effects 0.000 claims description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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Abstract
The invention discloses a precise control mechanism of welding pressure, which solves problems of high precision requirement on a lead screw and instability in controlling the lead screw in a traditional precise control mechanism of the welding pressure. The precise control mechanism of the welding pressure comprises a base, an air bearing outer cylinder (5) and an air bearing inner cylinder (6), wherein a servo motor (9) is fixedly arranged in the middle of the base; an output shaft of the servo motor is connected with the lead screw (8) by a shaft coupling (11); a lead screw nut (7) is arranged on the lead screw (8); a spring base sleeve (15) is fixedly arranged at the upper end surface of the lead screw nut (7); a spring (4) is sleeved on the top section of the lead screw (8) and above the spring base sleeve (15); a pressure sensor (1) is arranged between a spring top cover (3) and a top plate (2); and a sliding block and a nut guiding linear guide rail (13) are fixedly arranged at one side surface of the lead screw nut (7). According to the invention, the precise control of the welding pressure is mainly realized so that the pressure control precision can be ensured on the mechanical structure.
Description
Technical field
The present invention relates to the accurate controlling organization of a kind of welding pressure, particularly a kind of mechanism that carries out accurate control at the welding pressure between chip and the substrate that is applied on the flip-chip bonding machine.
Background technology
The accurate controlling organization of welding pressure is the critical component that is applied on the flip-chip bonding machine, is used to realize that the precision of the welding pressure of chip and substrate is controlled.The upside-down mounting welding machine is by finishing the absorption location of chip and substrate, the accurate contraposition of chip bump and substrate pads, adopt heating, ultrasonic, the three kinds of modes of colding pressing to realize that the generation attraction reaches " bonding " between chip bump and substrate pads atom, two metal interfaces are inlayed mutually, thereby the purpose that reaches welding is electrically connected function.
Present pressure control mechanism does not have spring bumper, can not well realize precision pressure control, and the precision feeding by leading screw ensures welding pressure control fully, and the defective of bringing is too high to the required precision of leading screw, and the control performance instability.
Summary of the invention
The invention provides the accurate controlling organization of a kind of welding pressure and solved the required precision height of the accurate controlling organization of existing welding pressure leading screw, and the control performance problem of unstable.
The present invention overcomes the above problems by following scheme:
The accurate controlling organization of a kind of welding pressure, comprise base, on base, be set with the air bearing urceolus, in the air bearing urceolus, be movably set with the air bearing inner core, top at the air bearing inner core is set with top board, be set with servomotor at the base middle part, the output shaft of servomotor links together by shaft coupling and leading screw, leading screw is provided with feed screw nut, be set with the spring pedestal sleeve on the upper surface of feed screw nut, above the top of leading screw section and spring pedestal sleeve, be socketed with spring, top at spring is set with spring top cover, between spring top cover and top board, be provided with pressure sensor, on a side of feed screw nut, be set with slide block, nut guiding line slideway fixed head is vertically fixed on the motor flange fixed disk, and nut guiding line slideway fixed head is provided with the nut guiding line slideway of vertical direction up and down, and the slide block that fixedly installs on the side of feed screw nut is movably arranged on the nut guiding line slideway.
Be set with leading screw fixed support round platform in the bottom of air bearing inner core, the activity from this support round platform of described leading screw is passed.
The present invention has mainly solved the precision control of welding pressure, on frame for movement, can guarantee pressure controlled accuracy, compression by spring, stability, continuity that the energy realizable force transmits, utilize the strain of spring, under identical ergometry situation, the propelling stroke of feed screw nut is increased greatly.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Specific embodiment
The accurate controlling organization of a kind of welding pressure, comprise base, on base, be set with air bearing urceolus 5, in air bearing urceolus 5, be movably set with air bearing inner core 6, be set with top board 2 on the top of air bearing inner core 6, be set with servomotor 9 at the base middle part, the output shaft of servomotor 9 links together by shaft coupling 11 and leading screw 8, leading screw 8 is provided with feed screw nut 7, be set with spring pedestal sleeve 15 on the upper surface of feed screw nut 7, above the top of leading screw 8 section and spring pedestal sleeve 15, be socketed with spring 4, be set with spring top cover 3 on the top of spring 4, between spring top cover 3 and top board 2, be provided with pressure sensor 1, on a side of feed screw nut 7, be set with slide block, nut guiding line slideway fixed head 14 is vertically fixed on the motor flange fixed disk 10, nut guiding line slideway fixed head 14 is provided with the nut guiding line slideway 13 of vertical direction up and down, and the slide block that fixedly installs on the side of feed screw nut 7 is movably arranged on the nut guiding line slideway 13.
Be set with leading screw fixed support round platform 12 in the bottom of air bearing inner core 6, the activity from this support round platform 12 of described leading screw 8 is passed.
Pressure sensor 1, top board 2 and air bearing inner core 6 are connected as a whole by screw, air bearing urceolus 5 is fixed on base, air bearing inner core 6 is a movable part, fills the compression air between air bearing urceolus 5 and the air bearing inner core 6, can realize zero friction rectilinear motion relatively up and down; Air bearing inner core 6 is a hollow structure, and core institution of the present invention all is placed in the air bearing inner core 6.
By the rotation of servomotor 9, drive the rotation of leading screw 8, thereby promote the rectilinear motion up and down of feed screw nut 7.When no-load running, feed screw nut 7 moves upward, and moves upward by spring 4 promotion top boards 2 and air bearing inner core 6.When PROPEL began, top board 2 ran into obstacle and can not move upward again and be fixed, and feed screw nut 7 moved upward spring 3 was produced compressions this moment.When unloading power, feed screw nut 7 moves downward spring 3 produced and loosens effect, and pressure sensor 1, top board 2 and air bearing inner core 6 are done and as a wholely moved downward naturally by gravity.Wherein, the coefficient of elasticity of spring 3 is K, and leading screw 7 is S to helical pitch, and the encoder pulse number of servomotor 9 is M, and then servomotor 9 is the unit force of KS/M at the pressure that 1 pulse command can impose on pressure sensor 1.According to the force value F that sets, the decrement that feed screw nut 7 moves upward to spring 3 is F/K.
Claims (2)
1. the accurate controlling organization of a welding pressure, comprise base, on base, be set with air bearing urceolus (5), in air bearing urceolus (5), be movably set with air bearing inner core (6), be set with top board (2) on the top of air bearing inner core (6), it is characterized in that, be set with servomotor (9) at the base middle part, the output shaft of servomotor (9) links together by shaft coupling (11) and leading screw (8), leading screw (8) is provided with feed screw nut (7), be set with spring pedestal sleeve (15) on the upper surface of feed screw nut (7), top section and spring pedestal sleeve (15) top at leading screw (8) are socketed with spring (4), be set with spring top cover (3) on the top of spring (4), between spring top cover (3) and top board (2), be provided with pressure sensor (1), on a side of feed screw nut (7), be set with slide block, nut guiding line slideway fixed head (14) is vertically fixed on the motor flange fixed disk (10), nut guiding line slideway fixed head (14) is provided with the nut guiding line slideway (13) of vertical direction up and down, and the slide block that fixedly installs on the side of feed screw nut (7) is movably arranged on the nut guiding line slideway (13).
2. the accurate controlling organization of a kind of welding pressure according to claim 1, it is characterized in that, be set with leading screw fixed support round platform (12) in the bottom of air bearing inner core (6), described leading screw (8) activity from this support round platform (12) is passed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110167731 CN102267008B (en) | 2011-06-21 | 2011-06-21 | Precise control mechanism of welding pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110167731 CN102267008B (en) | 2011-06-21 | 2011-06-21 | Precise control mechanism of welding pressure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102267008A true CN102267008A (en) | 2011-12-07 |
| CN102267008B CN102267008B (en) | 2013-06-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110167731 Expired - Fee Related CN102267008B (en) | 2011-06-21 | 2011-06-21 | Precise control mechanism of welding pressure |
Country Status (1)
| Country | Link |
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| CN (1) | CN102267008B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103737172A (en) * | 2014-01-09 | 2014-04-23 | 威海联桥精密机械有限公司 | Dynamic detection mechanism for feed pressure |
| CN105458487A (en) * | 2016-01-13 | 2016-04-06 | 东莞市富佳机械设备有限公司 | Equipment for intelligent welding and fusion welding of wearable membrane |
| CN105643084A (en) * | 2016-01-13 | 2016-06-08 | 东莞市富佳机械设备有限公司 | Intelligent wearable net membrane welding and splicing technique |
| CN110993520A (en) * | 2019-12-19 | 2020-04-10 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Chip substrate high-pressure flip-chip bonding flexible pressurizing mechanism |
| CN111009481A (en) * | 2019-12-19 | 2020-04-14 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Chip substrate high-pressure flip-chip bonding flexible pressurization method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5536056A (en) * | 1978-09-08 | 1980-03-13 | Hitachi Ltd | Detector for weld line tracing device |
| WO2003058708A1 (en) * | 2002-01-07 | 2003-07-17 | Advanced Systems Automation Limited | Flip chip bonder and method therefor |
| CN2765706Y (en) * | 2004-12-27 | 2006-03-22 | 浙江卧龙科技股份有限公司 | Copper hook welding deformation control device for spot welding machine |
| KR100760798B1 (en) * | 2007-03-29 | 2007-09-20 | 김병억 | Spot welder head |
| CN100368135C (en) * | 2005-03-23 | 2008-02-13 | 西北工业大学 | Pressurizing device and method for vacuum diffusion welding machine |
| CN101632164A (en) * | 2006-10-31 | 2010-01-20 | 库里克和索法模压焊接有限责任公司 | Be used for respect to the device of substrate location and/or compacting flat components and be used for method with respect to substrate location pick tool |
| CN101670480A (en) * | 2008-09-09 | 2010-03-17 | 珠海精易焊接设备有限公司 | Spot welding pressure control device, spot welder and method for precisely controlling spot welding pressure |
-
2011
- 2011-06-21 CN CN 201110167731 patent/CN102267008B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5536056A (en) * | 1978-09-08 | 1980-03-13 | Hitachi Ltd | Detector for weld line tracing device |
| WO2003058708A1 (en) * | 2002-01-07 | 2003-07-17 | Advanced Systems Automation Limited | Flip chip bonder and method therefor |
| CN2765706Y (en) * | 2004-12-27 | 2006-03-22 | 浙江卧龙科技股份有限公司 | Copper hook welding deformation control device for spot welding machine |
| CN100368135C (en) * | 2005-03-23 | 2008-02-13 | 西北工业大学 | Pressurizing device and method for vacuum diffusion welding machine |
| CN101632164A (en) * | 2006-10-31 | 2010-01-20 | 库里克和索法模压焊接有限责任公司 | Be used for respect to the device of substrate location and/or compacting flat components and be used for method with respect to substrate location pick tool |
| KR100760798B1 (en) * | 2007-03-29 | 2007-09-20 | 김병억 | Spot welder head |
| CN101670480A (en) * | 2008-09-09 | 2010-03-17 | 珠海精易焊接设备有限公司 | Spot welding pressure control device, spot welder and method for precisely controlling spot welding pressure |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103737172A (en) * | 2014-01-09 | 2014-04-23 | 威海联桥精密机械有限公司 | Dynamic detection mechanism for feed pressure |
| CN103737172B (en) * | 2014-01-09 | 2016-01-27 | 威海联桥精密机械有限公司 | Feed pressure detection of dynamic mechanism |
| CN105458487A (en) * | 2016-01-13 | 2016-04-06 | 东莞市富佳机械设备有限公司 | Equipment for intelligent welding and fusion welding of wearable membrane |
| CN105643084A (en) * | 2016-01-13 | 2016-06-08 | 东莞市富佳机械设备有限公司 | Intelligent wearable net membrane welding and splicing technique |
| CN110993520A (en) * | 2019-12-19 | 2020-04-10 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Chip substrate high-pressure flip-chip bonding flexible pressurizing mechanism |
| CN111009481A (en) * | 2019-12-19 | 2020-04-14 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Chip substrate high-pressure flip-chip bonding flexible pressurization method |
| CN111009481B (en) * | 2019-12-19 | 2023-04-18 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Chip substrate high-pressure flip-chip bonding flexible pressurization method |
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| Publication number | Publication date |
|---|---|
| CN102267008B (en) | 2013-06-05 |
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Granted publication date: 20130605 |