CN102212786B - Method for preparing thermal barrier coating - Google Patents
Method for preparing thermal barrier coating Download PDFInfo
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- CN102212786B CN102212786B CN2011101413239A CN201110141323A CN102212786B CN 102212786 B CN102212786 B CN 102212786B CN 2011101413239 A CN2011101413239 A CN 2011101413239A CN 201110141323 A CN201110141323 A CN 201110141323A CN 102212786 B CN102212786 B CN 102212786B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Abstract
The invention discloses a method for preparing a thermal barrier coating. According to the method disclosed by the invention, a deposition matrix is bombarded by ion beams while a deposition coating is evaporated by electron beams, the steam energy of the electron beams is about 0.1-1 electron volts, and the energy is not enough to well migrate atoms in the process of depositing the coating; and the energy of the ion beams can reach thousands of electron volts, and the energy is enough to interfere growth of columnar crystals to increase crystal boundaries and crystal sub-boundaries and enlarge or increase microscopic holes so as to reduce phonon and photon scattering mean free path and reduce the thermal conductivity of the thermal barrier coating. The energy of vaporous clouds can be increased through activation ionization effects of ions; and compared with the conventional EB-PVD (Electron Beam Physical Vapour Deposition), the method can ensure that same performances can be achieved at low deposition temperature; furthermore, forms, structures and stresses of the columnar crystals can be also adjusted and controlled through ion assisted deposition, and thus, the service life of the thermal barrier coating can be prolonged.
Description
Technical field
The present invention is a kind of preparation method of thermal barrier coating, belongs to the technical field of surface of metallic substance.Utilize the method can prepare the long-life thermal barrier coating of lower thermal conductivity, the present invention is applicable to coating preparation and surface modification field, comprises the preparation of metal and ceramic coating.
Background technology
Now widely used aircraft engine thermal barrier coating system mainly by the partially stabilized zirconium white of yttrium oxide (YSZ) ceramic coating and MCrAlY(wherein M represent Ni, Co or NiCo) metal bonding coating forms, what wherein play heat-blocking action is the YSZ ceramic coating.The structure of YSZ coating and performance and preparation method and processing parameter are closely related, and its preparation method mainly is plasma spraying and electro beam physics vapour deposition (EB-PVD), and two kinds of methods respectively have relative merits.The structure of the YSZ of plasma spraying preparation is laminate structure, and the structure of the YSZ of EB-PVD preparation is columnar crystal structure.Plasma spraying has that technique is simple, sedimentation rate and the series of advantages such as efficient is higher, cost is low.But the laminate structure of plasma spraying is parallel to matrix surface, makes to have many transverse interface in the ceramic layer, and the coating of this structure is not enough to resist the thermal stresses that thermal cycling produces in high-temperature work environment, can cause coating to be peeled off too early.And prepare coating with EB-PVD, can obtain to have the columnar crystal structure perpendicular to matrix surface, has higher stress tolerance limit, obviously improved the ability of coating thermal stress resistance, work-ing life is much larger than the thermal barrier coating of plasma spraying, but the Thermal Conductivity of Thermal Barrier Coatings of EB-PVD preparation is higher, and effect of heat insulation is not as the thermal barrier coating of plasma spraying.Although the composition of the YSZ of these two kinds of method preparations is identical, because structure is different, causes performance difference very large, so structure is most important to the performance of YSZ coating.
Summary of the invention
The present invention designs the preparation method that a kind of thermal barrier coating is provided for the shortcoming that exists in the above-mentioned prior art just, its objective is that the method that adopts the Assisted by Ion Beam electro beam physics vapour deposition can prepare the thermal barrier coating of layering columnar crystal structure, the long lifetime that had both kept thermal barrier coating, again decrease the thermal conductivity of thermal barrier coating.
The inventive method is with ionic fluid depositing base to be bombarded in the electron-beam evaporation coating.Usually the energy of electron beam steam is approximately 0.1～1 electron-volt, this energy in the deposited coatings process deficiency so that atom move well.The energy of ionic fluid can reach several kiloelectron volts, and this energy is enough to disturb the growth of column crystal, and Grain and sub-grain boundary is increased, and micro-hole increases or increases, thereby reduces phonon and photon scattering mean free path, reduces the thermal conductivity of thermal barrier coating.By the activation ionizing event of ion, can improve the energy of vaporous cloud, compare with conventional EB-PVD and can reach at the depositing temperature of lower temperature identical performance.Ion assisted deposition can also be regulated and control pattern, structure and the stress of column crystal in addition, thereby improves the work-ing life of thermal barrier coating.
Technical scheme of the present invention is:
The preparation method of this kind thermal barrier coating, thermal barrier coating is to be made of ceramic coating and metal bonding coating, it is characterized in that: the step of the method is:
⑴ prepare the vapour deposition material
Vapor deposited metal tack coat material therefor is NiCoCrAlY, and the Chemical Composition of this kind material and mass percent are: Co 20～23%, and Cr 22～24%, and Al 11～13%, and Y 0.05～1.5%, and surplus is Ni;
Vapour deposition ceramic coating material therefor is the partially stabilized zirconium white of yttrium oxide, and wherein to account for the percentage ratio of yttrium oxide and zirconium white total mass be 6～8% to yttrium oxide;
⑵ prepare metal bonding coating with the electron beam physical gas-phase deposite method, and the vacuum tightness of vacuum chamber is 10
-2Below the Pa, workpiece be placed on the evaporating materials rod directly over and with an electron beam gun workpiece is carried out preheating, another electron beam gun carries out heating evaporation to the evaporating materials rod, workpiece is connected on the horizontal rotating shaft, the rotating speed of horizontal rotating shaft is 10～20 rev/mins, and the depositing temperature of workpiece is 850～950 ℃;
⑶ after deposition is finished, metal bonding coating is carried out vacuum heat treatment, temperature is 1000～1100 ℃, is incubated 1～4 hour, furnace cooling;
⑷ prepare ceramic coating with the electron beam physical gas-phase deposite method, and the vacuum tightness of vacuum chamber is 10
-2Below the Pa, workpiece be placed on the heating evaporation material bar directly over and with an electron beam gun workpiece is carried out preheating, another electron beam gun carries out heating evaporation to the evaporating materials rod, workpiece is connected on the horizontal rotating shaft, the rotating speed of horizontal rotating shaft is 10～20 rev/mins, the depositing temperature of workpiece is 650～950 ℃, in addition, ion source take pure titanium as target is set in vacuum chamber, in the vapor deposition processes of workpiece, start ion source, bombard with the depositing base of ionic fluid to workpiece, the angle on the surface of ionic fluid and workpiece is 30～60 °, and the extraction voltage of ionic fluid is 2～8kV;
⑸ after deposition was finished, the thermal barrier coating that workpiece surface is formed carried out vacuum heat treatment, and temperature is 1000～1100 ℃, is incubated 2～8 hours, furnace cooling.
Technical solution of the present invention is compared with plasma spraying, has advantages of as follows:
(1) thermal shock resistance is good, and the life-span is high.
(2) with the matrix metallurgical binding, bonding force is strong.
(3) smooth surface, aeroperformance is good.
(4) the cooling hole obstruction is little, does not affect cooling performance.
Technical solution of the present invention is compared with conventional electrical bundle physical vapor deposition, has advantages of as follows:
(1) can regulate and control columnar crystal structure, produce the columnar crystal structure of layering, the thermal conductivity of decrease coating.
(2) can regulate and control size, pattern and the stressed condition of column crystal, improve thermal shock resistance.
(3) can under lower depositing temperature, obtain the coating of excellent property.
Description of drawings
Fig. 1 is the structural representation of technical solution of the present invention facilities and equipments
Fig. 2 is scanning electron microscope (SEM) photo in the heat-barrier coating ceramic layer cross section of employing the inventive method preparation
Fig. 3 is for adopting the thermal barrier coating sample photo of the inventive method preparation
Embodiment
Below with reference to drawings and Examples technical solution of the present invention is further described:
Shown in accompanying drawing 1, adopt technical solution of the present invention to prepare a kind of thermal barrier coating, its technological process is as follows:
(1) the NiCoCrAlY alloy bar 3 of diameter 70mm, long 110mm is put into the bar evaporation source crucible 2 of vacuum chamber 1, vacuum chamber 1 is evacuated to 1 * 10
-4Below the Pa;
The Chemical Composition of NiCoCrAlY alloy and mass percent are: Co 20～23%, and Cr 22～24%, and Al 11～13%, and Y 0.05～1.5%, and surplus is Ni;
(2) workpiece 8 is moved to directly over the alloy bar 3, baffle plate 7 is moved between alloy bar 3 and the workpiece 8;
(3) with electron beam gun 4 prevapourising alloy bars 3, regulate electronic beam current 1.6A;
(4) setting transverse axis 6 rotating speeds is 12rpm, carries out preheating with 4 pairs of workpiece of another electron beam gun 8, and it is 850～950 ℃ that adjusting electron beam line size makes the depositing temperature of workpiece 8;
(5) remove baffle plate 7, evaporated alloying bar 3, and regulate electronic beam current 1.6A;
(6) evaporation was turned off two electron beam gun 4 after 15 minutes, took out after workpiece 8 coolings;
(7) workpiece 8 is carried out vacuum heat treatment, vacuum 1 * 10
-3Pa, 1050 ℃ of temperature, 4 hours time, furnace cooling;
(8) zirconium white (6～8wt%Y that the yttrium oxide of diameter 70mm, long 110mm is partially stabilized
2O
3+ ZrO
2) ceramic bar 3 puts into the bar evaporation source crucible 2 of vacuum chamber 1, and vacuum chamber is evacuated to 1 * 10
-4Below the Pa;
(9) workpiece 8 is moved to directly over the ceramic bar 3, baffle plate 7 is moved between ceramic bar 3 and the workpiece 8;
(10) with electron beam gun 4 prevapourisings pottery bar 3, regulate electronic beam current 1.8A;
(11) setting transverse axis 6 rotating speeds is 12rpm, carries out preheating with 4 pairs of workpiece of another electron beam gun 8, and it is 700～750 ℃ that adjusting electron beam line size makes the depositing temperature of workpiece 8;
(12) remove baffle plate 7, evaporate ceramic bar 3, and regulate electronic beam current 1.8A;
(13) start ion source 5, set ionic fluid extraction voltage 6kV;
Ion source 5 bombards with the depositing base of ionic fluid to workpiece 8 take pure titanium as target, and the angle on the surface of ionic fluid and workpiece 8 is 30～60 °;
(14) evaporation was turned off two electron beam gun 4 and ion source 5 after 60 minutes, took out after workpiece 8 coolings;
(15) workpiece 8 is carried out vacuum heat treatment, vacuum 1 * 10
-3Pa, 1050 ℃ of temperature, 8 hours time, furnace cooling.
Utilize the ceramic layer of method preparation of the present invention to be the layering columnar crystal structure, as shown in Figure 2, dropped to 0.9W/mk 600 ℃ thermal conductivities, make the thermal conductivity decrease of columnar crystal structure thermal barrier coating.
The thermal barrier coating that utilizes method of the present invention to deposit at the IC10 nickel base superalloy, zirconium white (6～8wt%Y that NiCoCrAlY alloy+yttrium oxide is partially stabilized
2O
3+ ZrO
2) be 1100 ℃ of insulations 10 minutes in thermal cycle conditions, under the air-cooled 3 minutes condition, times of thermal cycle surpasses 3000 coatingsurfaces without the naked eyes visible damage, as shown in Figure 3.
Compared with prior art have advantages of as follows:
(1) the metal ion quality is large, and is active strong, good to the coating structure regulating effect.
(2) metal ion beam auxiliary electron bundle physical vapor deposition does not need that workpiece is applied bias voltage and can realize goal of regulation and control, is applicable to widely body material, and technique is simple simultaneously.
(3) metal ion beam can to the coating useful alloying element that mixes, can improve alloy element component.
Technical solution of the present invention can be carried out regulating microstructure to thermal barrier coating, and thermal conductivity that can the decrease thermal barrier coating can reduce the depositing temperature of thermal barrier coating, and suitability is wide, and the method can be applied to the preparation of other purposes coating.
Claims (1)
1. the preparation method of a thermal barrier coating, thermal barrier coating is to be made of ceramic coating and metal bonding coating, it is characterized in that: the step of the method is:
⑴ prepare the vapour deposition material
Vapor deposited metal tack coat material therefor is NiCoCrAlY, and the Chemical Composition of this kind material and mass percent are: Co 20～23%, and Cr 22～24%, and Al 11～13%, and Y 0.05～1.5%, and surplus is Ni;
Vapour deposition ceramic coating material therefor is the partially stabilized zirconium white of yttrium oxide, and wherein to account for the percentage ratio of yttrium oxide and zirconium white total mass be 6～8% to yttrium oxide;
⑵ prepare metal bonding coating with the electron beam physical gas-phase deposite method, and the vacuum tightness of vacuum chamber (1) is 10
-2Below the Pa, workpiece (8) be placed on evaporating materials rod (3) directly over and with an electron beam gun (4) workpiece (8) is carried out preheating, another electron beam gun (4) carries out heating evaporation to evaporating materials rod (3), workpiece (8) is connected on the horizontal rotating shaft (6), the rotating speed of horizontal rotating shaft (6) is 10～20 rev/mins, and the depositing temperature of workpiece (8) is 850～950 ℃;
⑶ after deposition is finished, metal bonding coating is carried out vacuum heat treatment, temperature is 1000～1100 ℃, is incubated 1～4 hour, furnace cooling;
⑷ prepare ceramic coating with the electron beam physical gas-phase deposite method, and the vacuum tightness of vacuum chamber (1) is 10
-2Below the Pa, workpiece (8) be placed on evaporating materials rod (3) directly over and with an electron beam gun (4) workpiece (8) is carried out preheating, another electron beam gun (4) carries out heating evaporation to evaporating materials rod (3), workpiece (8) is connected on the horizontal rotating shaft (6), the rotating speed of horizontal rotating shaft (6) is 10～20 rev/mins, the depositing temperature of workpiece (8) is 650～950 ℃, in addition, ion source (5) take pure titanium as target is set in vacuum chamber (1), in the vapor deposition processes of workpiece (8), start ion source (5), bombard with the depositing base of ionic fluid to workpiece (8), the angle on the surface of ionic fluid and workpiece (8) is 30～60 °, and the extraction voltage of ionic fluid is 2～8kV;
⑸ after deposition was finished, the thermal barrier coating that workpiece (8) surface is formed carried out vacuum heat treatment, and temperature is 1000～1100 ℃, is incubated 2～8 hours, furnace cooling.
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| CN102888538A (en) * | 2012-10-12 | 2013-01-23 | 华北电力大学 | Protective coating material for power plant steel and preparation method thereof |
| CN104141102A (en) * | 2013-05-08 | 2014-11-12 | 陈威 | Method for spraying metal coating on surface of steel plate by using ceramic stick spraying gun |
| CN103409723A (en) * | 2013-06-29 | 2013-11-27 | 电子科技大学 | Thin film deposition preparation method and preparation method of nano-fiber structure flexible buffer layer |
| CN104357799B (en) * | 2014-11-11 | 2016-12-07 | 大连理工大学 | The evaporation coating device of a kind of pair of e type electron gun and utilize this device to carry out evaporation coating method |
| CN106756811A (en) * | 2015-11-19 | 2017-05-31 | 中国航空工业集团公司北京航空制造工程研究所 | A kind of preparation method of alloy coating at high temperature |
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| CN108130515A (en) * | 2017-12-08 | 2018-06-08 | 中国航发动力股份有限公司 | A kind of preparation method of long-life thermal barrier coating |
| CN109536819A (en) * | 2018-12-22 | 2019-03-29 | 北京航空航天大学苏州创新研究院 | A kind of blade of aviation engine bonding coat MCrAlY target |
| CN110863179A (en) * | 2019-11-27 | 2020-03-06 | 中国航空制造技术研究院 | Electron beam physical vapor deposition method for uniformly depositing thermal barrier coating in large area |
| CN111235532A (en) * | 2020-01-15 | 2020-06-05 | 长钛工程技术研究院(北京)有限公司 | Coating device combining ion coating and electron beam evaporation coating and coating method thereof |
| CN111893452B (en) * | 2020-07-31 | 2022-11-11 | 中国航空制造技术研究院 | Blade preheating device and method for electron beam physical vapor deposition |
| CN112921278B (en) * | 2021-01-04 | 2022-05-17 | 北京航空航天大学 | Method for repairing high-temperature alloy single crystal blade tip based on EB-PVD |
| CN113373408B (en) * | 2021-05-14 | 2022-08-09 | 中国航发北京航空材料研究院 | Dysprosium-doped gadolinium zirconate thermal barrier coating material and preparation method of coating |
| CN113463040A (en) * | 2021-06-30 | 2021-10-01 | 中国航发动力股份有限公司 | Thermal barrier coating process of deposited TGO layer |
| CN114717519B (en) * | 2022-02-21 | 2023-01-31 | 北京金轮坤天特种机械有限公司 | Preparation method of super-thick electron beam physical vapor deposition thermal barrier coating |
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