CN102193009A - Vertical probe card - Google Patents

Vertical probe card Download PDF

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Publication number
CN102193009A
CN102193009A CN2010101345256A CN201010134525A CN102193009A CN 102193009 A CN102193009 A CN 102193009A CN 2010101345256 A CN2010101345256 A CN 2010101345256A CN 201010134525 A CN201010134525 A CN 201010134525A CN 102193009 A CN102193009 A CN 102193009A
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CN
China
Prior art keywords
probe
those
auxiliary stator
holes
bracing
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Granted
Application number
CN2010101345256A
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Chinese (zh)
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CN102193009B (en
Inventor
林德坤
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Priority to CN 201010134525 priority Critical patent/CN102193009B/en
Publication of CN102193009A publication Critical patent/CN102193009A/en
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Publication of CN102193009B publication Critical patent/CN102193009B/en
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Abstract

The invention provides a vertical probe card comprising multiple probes and a probe holding body used for supporting the probes. The probe holding body comprises a lower guide plate, an upper guide plate, an auxiliary fixing piece and a supporting device. The lower guide plate is provided with a first sunken part which is provided with multiple first through holes. The upper guide plate is provided with a second sunken part which is provided with multiple second through holes. The upper guide plate is arranged on the lower guide plate so that the first sunken part and the second sunken part form an accommodating space. The auxiliary fixing piece is arranged in the accommodating space and provided with multiple fixing holes and locating holes. The supporting device is arranged on the lower guide plate to support the auxiliary fixing piece. Each probe is penetrated into one of the first through holes, one of the second through holes and one of the fixing holes so as to be supported by the probe holding body.

Description

Vertical probe carb
Technical field
The invention relates to a kind of vertical probe carb, particularly a kind of vertical probe carb of using vertical probe.
Background technology
Integrated circuit (IC) needs to verify its functional integrity through test before application.The test of integrated circuit mostly before wafer package, encapsulation back and after being welded on wiring board, carrying out.
Step at testing integrated circuits on the wafer comprises haply: utilize weld pad on probe (Probe Card) the contact integrated circuit, from the probe input electrical signal to integrated circuit, the electric signal of receiving integrate circuit output.The electric signal of integrated circuit output is the response to input signal, and the electric signal of input probe and integrated circuit generally by signal generator (for example: automatic test machine) produce.See through coding, whether whether the automatic test machine comparison meets preset condition from the signal of integrated circuit output, qualified to determine this integrated circuit, selects eligible to encapsulate then.
In the process of wafer sort, the probe of probe be directly with chip on weld pad or projection directly contact, draw chip signal, cooperate peripheral test instrument and software control afterwards again, reach the purpose of automatic measurement.Because probe is an important device indispensable in the wafer sort, therefore, in the manufacture process of integrated circuit, the quality of probe can directly have influence on the accuracy and the fluency of wafer sort step, and then has influence on the manufacturing cost of integrated circuit.
Summary of the invention
Therefore, a purpose of the present invention is that a kind of vertical probe carb is being provided, and can avoid lifting the generation of pin situation, and then promotes the fluency of wafer sort step.
According to one embodiment of the invention, this vertical probe carb comprises probe and holds body and probe.This probe is held body and is comprised bottom guide, upper guide plate, auxiliary stator and bracing or strutting arrangement.Bottom guide has first depressed part, and this first depressed part has a plurality of first through holes.Upper guide plate has second depressed part, and this second depressed part has a plurality of second through holes.Upper guide plate is arranged on the bottom guide, so can make first depressed part and second depressed part form accommodation space.Auxiliary stator is arranged in the accommodation space, and has a plurality of fixed orifices and a plurality of pilot hole.Bracing or strutting arrangement is arranged on the bottom guide, in order to support auxiliary stator.Probe is arranged in probe and holds in the body, and wherein each root probe is arranged among one of first through hole, one of second through hole and fixed orifice one, so that probe is held the body supporting probe.
In the present invention, each those probe has an arcuation extension and contacts the end with two, this arcuation extending part is between this two contacts end, this two one of contacting the end is arranged in those first through holes of this bottom guide, and another of this two contacts end is arranged in those second through holes of this upper guide plate.
In the present invention, this bracing or strutting arrangement comprises a plurality of bracing frames, in order to run through a plurality of pilot holes of this auxiliary stator, and should auxiliary stator to support.
In the present invention, each those bracing frame has two retainers and is positioned at a sliding part between this two retainer, and this sliding part is arranged in this pilot hole, so that should slide between this two retainer by auxiliary stator.
In the present invention, this pilot hole comprises a fitting portion, and the profile of this sliding part cooperates with this fitting portion.
In the present invention, described vertical probe carb also comprises a plurality of clasps, and wherein each those bracing frame has two annular ditch grooves that be arranged in parallel, uses for those clasps to be sticked on this bracing frame, so that should be located between those clasps by auxiliary stator.Preferable, those clasps are C type clasp.
In the present invention, this auxiliary stator is a mylar film.Those probes are vertical probe.
In the present invention, described vertical probe carb also comprises a pad, is arranged between this upper guide plate and this bottom guide, and wherein this pad has one the 3rd through hole, in order to form this accommodation space with this first depressed part and this second depressed part.
Vertical probe carb of the present invention can avoid lifting the generation of pin situation, and then promotes the fluency of wafer sort step.
Description of drawings
For above and other objects of the present invention, feature and advantage can be become apparent, above especially exemplified by a preferred embodiment, and cooperate appended accompanying drawing, be described in detail below:
Fig. 1 illustrates the cross-sectional view of probe 100 according to an embodiment of the invention;
Fig. 2 illustrates the section explosive view that probe is according to an embodiment of the invention held body;
Fig. 3 a illustrates the structural representation of auxiliary stator according to an embodiment of the invention;
Fig. 3 b is the synoptic diagram that combines that illustrates according to an embodiment of the invention auxiliary stator and bracing or strutting arrangement;
Fig. 4 illustrates the structural representation of probe according to an embodiment of the invention;
Fig. 5 illustrates the cross-sectional view of probe according to another embodiment of the present invention;
Fig. 6 illustrates the structural representation of auxiliary stator according to another embodiment of the present invention;
Fig. 7 illustrates the cross-sectional view of bracing frame according to another embodiment of the present invention;
Fig. 8 is the synoptic diagram that combines that illustrates according to another embodiment of the present invention auxiliary stator and bracing or strutting arrangement;
Fig. 9 is the cross-sectional view that illustrates according to the probe of further embodiment of this invention;
Figure 10 is the structural representation that illustrates according to the auxiliary stator of further embodiment of this invention;
Figure 11 is the cross-sectional view that illustrates according to the bracing or strutting arrangement of further embodiment of this invention;
Figure 12 illustrates according to the auxiliary stator of further embodiment of this invention and the synoptic diagram that combines of bracing or strutting arrangement.
[primary clustering symbol description]
100: probe 110: probe
110a: contact end 110b: arcuation extension
110c: contact end 120: probe is held body
122: bottom guide 122a: depressed part
122b: through hole 123: pad
123a: through hole 124: upper guide plate
124a: depressed part 124b: through hole
126: auxiliary stator 126a: fixed orifice
126b: pilot hole 128: bracing or strutting arrangement
128a: bracing frame 128b: bracing frame
129: clasp 131: groove
200: probe
226: auxiliary stator 226b: pilot hole
228: bracing or strutting arrangement 228a: bracing frame
228b: bracing frame 236: hole
246: hole 288a: retainer
288b: retainer 288c: sliding part
300: probe 326: auxiliary stator
326b: pilot hole 328: bracing or strutting arrangement
328a: bracing frame 328b: bracing frame
336: circular through hole 346: strip through hole
356: the strip through hole
388a: retainer 388b: retainer
388c: tabular sliding part
Embodiment
Please refer to Fig. 1, it is to illustrate the cross-sectional view of probe 100 according to an embodiment of the invention.Probe 100 comprises probe 110 and probe is held body 120.Probe is held body 120 and is used for supporting probe 110, makes probe 110 can correctly be electrically connected to the weld pad of wafer to be measured.In the following description, hold the structure of body 120 with introducing probe 110 and probe respectively.
Please be simultaneously with reference to Fig. 2, Fig. 3 a and Fig. 3 b.Fig. 2 illustrates the section explosive view that probe is held body 120; Fig. 3 a is the structural representation that illustrates auxiliary stator 126; Fig. 3 b is the synoptic diagram that combines that illustrates auxiliary stator 126 and bracing or strutting arrangement.Probe is held body 120 and is comprised bottom guide 122, pad 123, upper guide plate 124, auxiliary stator 126, bracing or strutting arrangement 128 and clasp 129.Bottom guide 122 has depressed part 122a, and this depressed part 122a has a plurality of through hole 122b.Upper guide plate 124 has depressed part 124a, and this depressed part 124a has a plurality of through hole 124b.Pad 123 have through hole 123a and be arranged at bottom guide 122 and upper guide plate 124 between.When bottom guide 122, upper guide plate 124 and pad 123 combinations, depressed part 122a, through hole 123a and depressed part 124a can form an accommodation space, to hold auxiliary stator 126 and bracing or strutting arrangement 128.
Auxiliary stator 126 and bracing or strutting arrangement 128 are arranged in depressed part 122a, through hole 123a and the formed accommodation space of depressed part 124a, and wherein auxiliary stator 126 is in order to stationary probe 110, and bracing or strutting arrangement 128 is in order to support auxiliary stator 126.Shown in Fig. 3 a, auxiliary stator 126 has fixed orifice 126a and pilot hole 126b, and wherein fixed orifice 126a is in order to stationary probe, and pilot hole 126b then uses for bracing or strutting arrangement 128 and supports auxiliary stator.
In the present embodiment, bracing or strutting arrangement 128 includes four bracing frames, is arranged in respectively among four the pilot hole 126b and clasp 129 of auxiliary stator 126, to support auxiliary stator 126.Shown in Fig. 3 b, bracing frame 128a and 128b have two annular ditch grooves 131 respectively, use for clasp 129 engagings.It should be noted that because Fig. 3 b is a diagrammatic cross-section, so Fig. 3 b has only illustrated bracing frame 128a and 128b in four bracing frames.The inside radius of the clasp 129 of present embodiment is less than the radius of the pilot hole 126b of auxiliary stator 126, and the external radius of clasp 129 is greater than the radius of pilot hole 126b.So, when auxiliary stator 126 was located between two clasps 129, auxiliary stator 126 just only can slide up and down between two clasps 129.
Please refer to Fig. 4, it is the structural representation that illustrates probe 110.Probe 110 comprises arcuation extension 110b and contacts end 110a, 110c.Contact end 110a is arranged among the through hole 124b of upper guide plate 124, and contact end 110c is arranged among the through hole 122b of bottom guide 122, and so, probe is held body 120 and just can be supported all and penetrate the probe 110 that probe is held body 120.It should be noted that the employed probe 110 of present embodiment is the cobra probe, but the present invention is not limited to this.
Hold in the cohesive process of body 120 at probe 110 and probe, after the contact end of probe 110c was inserted into bottom guide 122, the contact end 110a of this probe can be passed the fixed orifice 126a of auxiliary stator 126, to fix this probe.When all probes all are inserted into bottom guide 122, and by auxiliary stator 126 fixing after, upper guide plate 124 just can be arranged on pad 123 tops, to fix probe 110 by upper guide plate 124.
When the probe fault, need usually upper guide plate 124 is raised, with the probe of taking-up fault and with its displacement.Yet when upper guide plate 124 was raised, auxiliary stator 126 also can and then be raised usually, and then probe is partly detached from bottom guide.Therefore, present embodiment has installed bracing or strutting arrangement 128 additional and has supported auxiliary stator 126, and utilizes clasp 129 to limit the vertical moving of auxiliary stator 126.When upper guide plate 124 was raised, auxiliary stator 126 can be stuck on the bracing frame by clasp 129, so just can avoid probe to detach from bottom guide.
In addition, what deserves to be mentioned is that in an embodiment, auxiliary stator 126 draws (mylar) sheet for wheat, and clasp 129 is a C type clasp.
Please be simultaneously with reference to Fig. 5, Fig. 6 and Fig. 7.Fig. 5 illustrates the cross-sectional view of probe 200 according to another embodiment of the present invention; Fig. 6 is the structural representation that illustrates auxiliary stator 226; Fig. 7 is the cross-sectional view that illustrates bracing frame 228a.Probe 200 is similar to probe 100, uses auxiliary stator 226 to replace auxiliary stator 126 but difference is probe 200, and uses bracing or strutting arrangement 228 to replace bracing or strutting arrangement 128.
In the present embodiment, the pilot hole 226b of auxiliary stator 226 is the through hole of keyhole shape, it has comprised the bigger less hole 246 of hole 236 and aperture in aperture, and the bracing frame 228a of bracing or strutting arrangement 228 and 228b then respectively have two retainer 288a, 288b and a sliding part 288c.Retainer 288a, 288b and sliding part 288c are all cylindric, wherein the sectional area of the sectional area ratio hole 236 of retainer 288a, 288b is little, but the sectional area than hole 246 is big, and the sectional area of the sectional area ratio hole 246 of sliding part 288c is little, and with the fitting portion (hole 246) of pilot hole 226b coupling.Enter the fitting portion of pilot hole 226b as sliding part 288c after, because the aperture of fitting portion is less, the vertical moving distance of therefore auxiliary stator 226 just is subject to two retainer 288a and 288b, and the promptly auxiliary stator 226 of meaning only can slide between two retainer 288a and 288b.
Please refer to Fig. 8, it is the synoptic diagram that combines that illustrates auxiliary stator 226 and bracing or strutting arrangement 228.In conjunction with before assisting stator 226 and bracing or strutting arrangement 228, at first, will assist stator 226 bendings, the middle of auxiliary stator 226 partly swelled a little, so that pilot hole 226b is alignd with bracing frame 228a and 228b.Then, bracing frame 228a and 228b are passed the hole 236 of pilot hole 226b, the sliding position that makes bracing frame 228a and 228b is in pilot hole 226b.Then, unclamp auxiliary stator 226, make auxiliary stator 226 reinstatements, so can make the sliding part of bracing frame enter the fitting portion of pilot hole 226b.
By above explanation as can be known, in the probe 200 of present embodiment, when bumping against the retainer of bracing or strutting arrangement if the vertical moving of auxiliary stator 226 distance has surpassed default scope (length of sliding part), auxiliary stator 226 just can stop to move, and so can avoid probe to detach from bottom guide.
Please be simultaneously with reference to Fig. 9, Figure 10 and Figure 11.Fig. 9 is the cross-sectional view that illustrates according to the probe 300 of further embodiment of this invention; Figure 10 is the structural representation that illustrates auxiliary stator 326; Figure 11 is the cross-sectional view that illustrates bracing or strutting arrangement 328.Probe 300 is similar to probe 100, uses auxiliary stator 326 to replace auxiliary stator 126 but difference is probe 300, and uses bracing or strutting arrangement 328 to replace bracing or strutting arrangement 128.
In the present embodiment, the pilot hole 326b of auxiliary stator 326 is the combination of a circular through hole 336 and two strip through holes 346 and 356, and wherein strip through hole 346 is shorter than strip through hole 356.The bracing frame 328a of bracing or strutting arrangement 328 and 328b respectively have two retainer 388a, 388b and a tabular sliding part 388c, wherein retainer 388a and 388b are cylindric, the sectional area of its sectional area ratio pilot hole 326b is big, but littler than the sectional area of circular through hole 336.When tabular sliding part 388c enters the fitting portion (strip through hole 356) of pilot hole 326b, because the profile of fitting portion is not mated with retainer 388a, 388b, the vertical moving distance of therefore auxiliary stator 326 just is subject to two retainer 388a and 388b, and the promptly auxiliary stator 326 of meaning only can slide between two retainer 388a and 388b.
Please refer to Figure 12, it is the synoptic diagram that combines that illustrates auxiliary stator 326 and bracing or strutting arrangement 328.In conjunction with before assisting stator 326 and bracing or strutting arrangement 328, at first, will assist stator 326 bendings, the middle of auxiliary stator 326 partly swelled a little, so that pilot hole 326b is alignd with bracing frame 328a and 328b.Then, bracing frame 328a and 328b are passed pilot hole 326b, the sliding position that makes bracing frame 328a and 328b is in pilot hole 326b.Then, unclamp auxiliary stator 326, make auxiliary stator 326 reinstatements, the sliding part of bracing frame 328a and 328b is entered in the strip through hole 356 of pilot hole 326b.
By above explanation as can be known, in the probe 300 of present embodiment, when bumping against the retainer of bracing or strutting arrangement if auxiliary stator 326 vertical moving distance has surpassed default scope, auxiliary stator 326 just can stop to move, and is detached to avoid probe.
Though the present invention discloses as above with embodiment; right its is not in order to limiting the present invention, anyly is familiar with this skill person, without departing from the spirit and scope of the present invention; when can being used for a variety of modifications and variations, so protection scope of the present invention is as the criterion when looking the scope that claims define.

Claims (10)

1. a vertical probe carb is characterized in that, comprises:
One probe is held body, comprises:
One bottom guide has one first depressed part, and this first depressed part has a plurality of first through holes;
One upper guide plate has one second depressed part, and this second depressed part has a plurality of second through holes, and wherein this upper guide plate is arranged on this bottom guide, so that this first depressed part and this second depressed part form an accommodation space;
One auxiliary stator is arranged in this accommodation space, and has a plurality of fixed orifices and a plurality of pilot hole; And
One bracing or strutting arrangement is arranged on this bottom guide, should assist stator in order to support; And
Many probes are arranged in this probe and hold in the body, and wherein each those probe is arranged among one of those first through holes, one of those second through holes and those fixed orifices one, supports those probes so that this probe is held body.
2. vertical probe carb according to claim 1, it is characterized in that, each those probe has an arcuation extension and contacts the end with two, this arcuation extending part is between this two contacts end, this two one of contacting the end is arranged in those first through holes of this bottom guide, and another of this two contacts end is arranged in those second through holes of this upper guide plate.
3. vertical probe carb according to claim 1 is characterized in that this bracing or strutting arrangement comprises a plurality of bracing frames, in order to run through a plurality of pilot holes of this auxiliary stator, and should auxiliary stator to support.
4. vertical probe carb according to claim 3, it is characterized in that, each those bracing frame has two retainers and is positioned at a sliding part between this two retainer, and this sliding part is arranged in this pilot hole, so that should slide between this two retainer by auxiliary stator.
5. vertical probe carb according to claim 3 is characterized in that this pilot hole comprises a fitting portion, and the profile of this sliding part cooperates with this fitting portion.
6. vertical probe carb according to claim 3, it is characterized in that, also comprise a plurality of clasps, wherein each those bracing frame has two annular ditch grooves that be arranged in parallel, use for those clasps to be sticked on this bracing frame, so that should be located between those clasps by auxiliary stator.
7. vertical probe carb according to claim 6 is characterized in that, those clasps are C type clasp.
8. vertical probe carb according to claim 1 is characterized in that, this auxiliary stator is a mylar film.
9. vertical probe carb according to claim 1 is characterized in that, those probes are vertical probe.
10. vertical probe carb according to claim 1, it is characterized in that, also comprise a pad, be arranged between this upper guide plate and this bottom guide, wherein this pad has one the 3rd through hole, in order to form this accommodation space with this first depressed part and this second depressed part.
CN 201010134525 2010-03-16 2010-03-16 Vertical probe card Active CN102193009B (en)

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Application Number Priority Date Filing Date Title
CN 201010134525 CN102193009B (en) 2010-03-16 2010-03-16 Vertical probe card

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Application Number Priority Date Filing Date Title
CN 201010134525 CN102193009B (en) 2010-03-16 2010-03-16 Vertical probe card

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CN102193009A true CN102193009A (en) 2011-09-21
CN102193009B CN102193009B (en) 2013-08-28

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103063883A (en) * 2011-10-21 2013-04-24 东京毅力科创株式会社 Contact terminal for probe card, and probe card
CN103245807A (en) * 2012-02-06 2013-08-14 景美科技股份有限公司 Probe unit structure and manufacturing method thereof
CN103941049A (en) * 2013-01-21 2014-07-23 华邦电子股份有限公司 Probe card
TWI603090B (en) * 2016-09-06 2017-10-21 Mpi Corp A vertical probe, a method of manufacturing the same, and a probe head and a probe card using the same
CN113625019A (en) * 2020-05-08 2021-11-09 中华精测科技股份有限公司 Vertical testing device and sheet probe thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2799973B2 (en) * 1995-07-06 1998-09-21 日本電子材料株式会社 Vertically actuated probe card
CN1912634A (en) * 2005-08-10 2007-02-14 采钰科技股份有限公司 Vertical probe card
CN1985180A (en) * 2004-07-15 2007-06-20 Jsr株式会社 Device and method for inspection of circuit board

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2799973B2 (en) * 1995-07-06 1998-09-21 日本電子材料株式会社 Vertically actuated probe card
CN1985180A (en) * 2004-07-15 2007-06-20 Jsr株式会社 Device and method for inspection of circuit board
CN1912634A (en) * 2005-08-10 2007-02-14 采钰科技股份有限公司 Vertical probe card

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103063883A (en) * 2011-10-21 2013-04-24 东京毅力科创株式会社 Contact terminal for probe card, and probe card
CN103245807A (en) * 2012-02-06 2013-08-14 景美科技股份有限公司 Probe unit structure and manufacturing method thereof
CN103245807B (en) * 2012-02-06 2015-11-25 景美科技股份有限公司 Probe unit structure and preparation method thereof
CN103941049A (en) * 2013-01-21 2014-07-23 华邦电子股份有限公司 Probe card
TWI603090B (en) * 2016-09-06 2017-10-21 Mpi Corp A vertical probe, a method of manufacturing the same, and a probe head and a probe card using the same
CN113625019A (en) * 2020-05-08 2021-11-09 中华精测科技股份有限公司 Vertical testing device and sheet probe thereof
CN113625019B (en) * 2020-05-08 2023-12-05 台湾中华精测科技股份有限公司 Vertical testing device and sheet-shaped probe thereof

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