CN102185541A - Non-contact permanent magnetic supporting structure - Google Patents
Non-contact permanent magnetic supporting structure Download PDFInfo
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- CN102185541A CN102185541A CN2011101301680A CN201110130168A CN102185541A CN 102185541 A CN102185541 A CN 102185541A CN 2011101301680 A CN2011101301680 A CN 2011101301680A CN 201110130168 A CN201110130168 A CN 201110130168A CN 102185541 A CN102185541 A CN 102185541A
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Abstract
The invention discloses a non-contact permanent magnetic supporting structure. The non-contact permanent magnetic supporting structure comprises a stator and an active cell, wherein the stator comprises an inner supporting part and an outer supporting part; the active cell comprises an inner ring permanent magnet and an outer ring permanent magnet; the active cell is embedded between the inner supporting part and the outer supporting part of the stator; the inner ring permanent magnet and the outer ring permanent magnet are arranged coaxially and magnetized along a back direction from the radius to the circle center; the inner supporting part is formed by coaxially stacking three hollow cylindrical permanent magnets; the upper part of the inner supporting part is a first permanent magnet of which the top surface is an S pole, the middle part of the inner supporting part is a second permanent magnet of which the top surface is an N pole, and the lower part of the inner supporting part is a third permanent magnet of which the top surface is an S pole; the outer supporting part is formed by coaxially stacking three hollow cylindrical permanent magnets; and the upper part of the outer supporting part is a fourth permanent magnet of which the top surface is an N pole, the middle part of the outer supporting part is a fifth permanent magnet of which the top surface is an S pole, and the lower part of the outer supporting part is a sixth permanent magnet of which the top surface is an N pole. By the supporting structure, the rigidity along the axial direction within a route range can be reduced and the axial bearing capacity is enhanced.
Description
Technical field
The present invention relates to a kind of supporting structure, particularly a kind of contactless permanent magnetism supporting structure is mainly used in the manufacturing equipment technical field.
Background technology
In a lot of industrial equipments, we need drive workpiece or work stage is carried out multifreedom motion, and it is accurately located, for example equipment such as the silicon chip platform in the mask aligner, mask platform.For realizing multifreedom motion and accurately locating, need to use supporting structure.Traditional supporting structure can be realized multifreedom motion by a plurality of supporting structure stacks, but kinematic accuracy is lower, as line slideway, ball-screw drive mechanism etc.In a lot of ultra precise workbenchs, air-bearing is widely used with realization multifreedom motion and kinematic accuracy, but is unsuitable for using in vacuum environment.Adopt the contactless supporting structure of permanent magnetism have simple in structure, component surface need not Precision Machining, be applicable to and advantage such as use in the vacuum environment.For contactless permanent magnetism supporting structure, need to have less rigidity and bigger bearing capacity along axis direction between mover and the stator.
Sven Antoin Johan Hol is at patent " Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby " (US 6831285 B2 Dec.2004) proposed permanent magnetism preload gravity compensation structure as shown in Figure 1, this structure is made up of standing part and supporting part, standing part comprises a hollow cylinder permanent magnet that upwards magnetizes vertically and a hollow cylinder permanent magnet that magnetizes vertically downwards, supporting part by two coaxial placements and along radius dorsad the hollow cylinder permanent magnet that magnetizes of the center of circle form, radially the interaction force with tangential is very little between standing part and the supporting part, only there is interaction force along axis direction, simultaneously standing part and supporting part are when relative displacement takes place in axis direction within the specific limits, interaction force along axis direction changes less, therefore have less rigidity and certain bearing capacity along axis direction between standing part and the supporting part, be a kind of comparatively ideal non-contact permanent magnetism supporting structure, the magnetic line of force of this permanent magnetism preload gravity compensation structure distributes as shown in Figure 2.For satisfying the higher kinematic accuracy of high-accuracy industrial equipment, also need further to reduce between standing part and the supporting part rigidity along axis direction; For satisfying the higher load request of equipment, also need further to improve bearing capacity.
Summary of the invention
The purpose of this invention is to provide a kind of contactless permanent magnetism supporting structure, further improve bearing capacity, reduce between mover and the stator rigidity, to satisfy higher kinematic accuracy of equipment and load request along axis direction.
Technical scheme of the present invention is as follows:
First kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, stator comprises internal support part and external support part, ring permanent magnet and outer shroud permanent magnet in mover comprises, mover is nested between stator internal support part and the stator external support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, along radius dorsad center of circle direction magnetize, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the N utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the S utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet of the N utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet of the N utmost point.
Second kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, stator comprises internal support part and external support part, ring permanent magnet and outer shroud permanent magnet in mover comprises, mover is nested between stator internal support part and the stator external support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the S utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the N utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet of the S utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet of the S utmost point.
The third contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, mover comprises internal support part and external support part, ring permanent magnet and outer shroud permanent magnet in stator comprises, stator is nested between mover internal support part and the mover external support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, along radius dorsad center of circle direction magnetize, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the N utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the S utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet of the N utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet of the N utmost point.
The 4th kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, mover comprises internal support part and external support part, ring permanent magnet and outer shroud permanent magnet in stator comprises, stator is nested between mover internal support part and the mover external support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the S utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the N utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet of the S utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet of the S utmost point.
The 5th kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, ring permanent magnet and outer shroud permanent magnet in mover comprises, stator comprises the internal support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, and along radius dorsad center of circle direction magnetize, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the S utmost point.
The 6th kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, ring permanent magnet and outer shroud permanent magnet in mover comprises, stator comprises the internal support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the N utmost point.
The 7th kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, ring permanent magnet and outer shroud permanent magnet in stator comprises, mover comprises the internal support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, and along radius dorsad center of circle direction magnetize, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the S utmost point.
The 8th kind of contactless permanent magnetism supporting structure provided by the invention, comprise stator and mover, ring permanent magnet and outer shroud permanent magnet in stator comprises, mover comprises the internal support part, ring permanent magnet and the coaxial placement of outer shroud permanent magnet in described, and pointing to center of circle direction along radius magnetizes, its technical characterictic also is: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet of the N utmost point.
Contactless permanent magnetism supporting structure of the present invention has the following advantages and the high-lighting effect: internal support part and external support part are made up of three hollow cylinder permanent magnets respectively, guarantee between mover and the stator radially with the tangential direction interaction force very little in, improved interaction force along axis direction, thereby improved the bearing capacity and the load quality of this supporting structure, reduced between mover and the stator rigidity simultaneously along axis direction.
Description of drawings
Fig. 1 is the two-dimensional section schematic diagram of the permanent magnetism preload structure in the publication.
Fig. 2 is the magnetic line of force distribution map of the permanent magnetism preload structure in the publication.
Fig. 3 is the 3-D view of contactless permanent magnetism supporting structure of the present invention.
Fig. 4 is the three-dimensional cross section view of contactless permanent magnetism supporting structure of the present invention.
Fig. 5 is the two-dimensional cross-sectional view of first kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Fig. 6 is the magnetic line of force distribution map of first kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Fig. 7 is the two-dimensional cross-sectional view of second kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Fig. 8 is the two-dimensional cross-sectional view of contactless the third configuration of permanent magnetism supporting structure of the present invention.
Fig. 9 is the two-dimensional cross-sectional view of the 4th kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Figure 10 is the two-dimensional cross-sectional view of the 5th kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Figure 11 is the two-dimensional cross-sectional view of the 6th kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Figure 12 is the two-dimensional cross-sectional view of the 7th kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Figure 13 is the two-dimensional cross-sectional view of the 8th kind of configuration of contactless permanent magnetism supporting structure of the present invention.
Among the figure: 1-first permanent magnet; 2-second permanent magnet; 3-the 3rd permanent magnet; Ring permanent magnet in the 4-; 5-outer shroud permanent magnet; 6-the 4th permanent magnet; 7-the 5th permanent magnet; 8-the 6th permanent magnet; N, S represent that respectively permanent magnet pole distributes.
Embodiment
Below in conjunction with accompanying drawing concrete structure of the present invention, mechanism and the course of work are further described.
Fig. 3 is the 3-D view of contactless permanent magnetism supporting structure of the present invention, and Fig. 4 is the three-dimensional cross section view of contactless permanent magnetism supporting structure of the present invention.
Fig. 5 is the two-dimensional cross-sectional view of first kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 5 comprises stator and mover, stator comprises internal support part and external support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in mover comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the mover pedestal, mover is nested between stator internal support part and the stator external support part, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, along radius dorsad center of circle direction magnetize, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the stator base successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the N utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the S utmost point, three hollow cylinder permanent magnets of described external support part are also coaxial to be fixed on the stator base successively, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet 6 of the N utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet 7 of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet 8 of the N utmost point.
Fig. 6 is the magnetic line of force distribution map of first kind of configuration of contactless permanent magnetism supporting structure of the present invention, first permanent magnet 1 opposite and the 3rd permanent magnet 3 extruding magnetic lines of force with second permanent magnet, 2 magnetizing directions, four permanent magnet 6 opposite and the 6th permanent magnet 8 extruding magnetic lines of force with the 5th permanent magnet 7 magnetizing directions, make the permanent magnet 1 of winning, second permanent magnet 2, the 3rd permanent magnet 3, the 4th permanent magnet 6, the 5th permanent magnet 7 and the 6th permanent magnet 8 strengthen in the magnetic field of interior ring permanent magnet 4 and the 5 spaces of living in generations of outer shroud permanent magnet, thereby improved the axial interaction force between mover and the stator, the Distribution of Magnetic Field of encircling lower edge on permanent magnet 4 and outer shroud permanent magnet 5 spaces of living in also making simultaneously is more even, thereby along the intensity of variation of axis direction interaction force, therefore has littler axial rigidity when having reduced mover and stator generation relative displacement.
Fig. 7 is the two-dimensional cross-sectional view of second kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 7 comprises stator and mover, stator comprises internal support part and external support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in mover comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the mover pedestal, mover is nested between stator internal support part and the stator external support part, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the stator base successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the S utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the N utmost point, three hollow cylinder permanent magnets of described external support part are also coaxial to be fixed on the stator base successively, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet 6 of the S utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet 7 of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet 8 of the S utmost point.
Fig. 8 is the two-dimensional cross-sectional view of contactless the third configuration of permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 8 comprises stator and mover, mover comprises internal support part and external support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in stator comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the stator base, stator is nested between mover internal support part and the mover external support part, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, along radius dorsad center of circle direction magnetize, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the mover pedestal successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the N utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the S utmost point, three hollow cylinder permanent magnets of described external support part are also coaxial to be fixed on the mover pedestal successively, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet 6 of the N utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet 7 of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet 8 of the N utmost point.
Fig. 9 is the two-dimensional cross-sectional view of the 4th kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 9 comprises stator and mover, mover comprises internal support part and external support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in stator comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the stator base, stator is nested between mover internal support part and the mover external support part, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the mover pedestal successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the S utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the N utmost point, three hollow cylinder permanent magnets of described external support part are also coaxial to be fixed on the mover pedestal successively, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet 6 of the S utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet 7 of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet 8 of the S utmost point.
Figure 10 is the two-dimensional cross-sectional view of the 5th kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 10 comprises stator and mover, stator comprises the internal support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in mover comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the mover pedestal, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, along radius dorsad center of circle direction magnetize, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the stator base successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the S utmost point.
Figure 11 is the two-dimensional cross-sectional view of the 6th kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 11 comprises stator and mover, stator comprises the internal support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in mover comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the mover pedestal, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the stator base successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the N utmost point.
Figure 12 is the two-dimensional cross-sectional view of the 7th kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 12 comprises stator and mover, mover comprises the internal support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in stator comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the stator base, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, along radius dorsad center of circle direction magnetize, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the mover pedestal successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the S utmost point.
Figure 13 is the two-dimensional cross-sectional view of the 8th kind of configuration of contactless permanent magnetism supporting structure of the present invention.Contactless permanent magnetism supporting structure of the present invention as shown in Figure 13 comprises stator and mover, mover comprises the internal support part, ring permanent magnet 4 and outer shroud permanent magnet 5 in stator comprises, interior ring permanent magnet 4 and outer shroud permanent magnet 5 are separately fixed on the stator base, ring permanent magnet 4 and the 5 coaxial placements of outer shroud permanent magnet in described, pointing to center of circle direction along radius magnetizes, three hollow cylinder permanent magnets of described internal support part are coaxial to be fixed on the mover pedestal successively, top hollow cylinder permanent magnet is that end face is first permanent magnet 1 of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet 2 of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet 3 of the N utmost point.
Claims (8)
1. contactless permanent magnetism supporting structure, comprise stator and mover, stator comprises internal support part and external support part, ring permanent magnet (4) and outer shroud permanent magnet (5) in mover comprises, mover is nested between stator internal support part and the stator external support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, along radius dorsad center of circle direction magnetize, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the N utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the S utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet (6) of the N utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet (7) of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet (8) of the N utmost point.
2. contactless permanent magnetism supporting structure, comprise stator and mover, stator comprises internal support part and external support part, ring permanent magnet (4) and outer shroud permanent magnet (5) in mover comprises, mover is nested between stator internal support part and the stator external support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, pointing to center of circle direction along radius magnetizes, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the S utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the N utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet (6) of the S utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet (7) of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet (8) of the S utmost point.
3. contactless permanent magnetism supporting structure, comprise stator and mover, mover comprises internal support part and external support part, ring permanent magnet (4) and outer shroud permanent magnet (5) in stator comprises, stator is nested between mover internal support part and the mover external support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, along radius dorsad center of circle direction magnetize, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the N utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the S utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet (6) of the N utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet (7) of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet (8) of the N utmost point.
4. contactless permanent magnetism supporting structure, comprise stator and mover, mover comprises internal support part and external support part, ring permanent magnet (4) and outer shroud permanent magnet (5) in stator comprises, stator is nested between mover internal support part and the mover external support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, pointing to center of circle direction along radius magnetizes, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the S utmost point, following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the N utmost point, described external support part is also by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is the 4th permanent magnet (6) of the S utmost point, middle hollow cylinder permanent magnet is that end face is the 5th permanent magnet (7) of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 6th permanent magnet (8) of the S utmost point.
5. contactless permanent magnetism supporting structure, comprise stator and mover, ring permanent magnet (4) and outer shroud permanent magnet (5) in mover comprises, stator comprises the internal support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, and along radius dorsad center of circle direction magnetize, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the S utmost point.
6. contactless permanent magnetism supporting structure, comprise stator and mover, ring permanent magnet (4) and outer shroud permanent magnet (5) in mover comprises, stator comprises the internal support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, pointing to center of circle direction along radius magnetizes, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the N utmost point.
7. contactless permanent magnetism supporting structure, comprise stator and mover, ring permanent magnet (4) and outer shroud permanent magnet (5) in stator comprises, mover comprises the internal support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, and along radius dorsad center of circle direction magnetize, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the S utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the N utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the S utmost point.
8. contactless permanent magnetism supporting structure, comprise stator and mover, ring permanent magnet (4) and outer shroud permanent magnet (5) in stator comprises, mover comprises the internal support part, ring permanent magnet (4) and the coaxial placement of outer shroud permanent magnet (5) in described, and pointing to center of circle direction along radius magnetizes, it is characterized in that: described internal support part is by three coaxial being formed by stacking of hollow cylinder permanent magnet, top hollow cylinder permanent magnet is that end face is first permanent magnet (1) of the N utmost point, middle hollow cylinder permanent magnet is that end face is second permanent magnet (2) of the S utmost point, and following hollow cylinder permanent magnet is that end face is the 3rd permanent magnet (3) of the N utmost point.
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| CN2011101301680A CN102185541A (en) | 2011-05-19 | 2011-05-19 | Non-contact permanent magnetic supporting structure |
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| CN102944980A (en) * | 2012-11-02 | 2013-02-27 | 清华大学 | Microchecker having permanent magnet gravity support structure |
| CN103034065A (en) * | 2011-09-29 | 2013-04-10 | 上海微电子装备有限公司 | Magnetic suspension gravity compensator and lithographic device |
| CN111313763A (en) * | 2020-03-30 | 2020-06-19 | 重庆大学 | Gravity compensator with low rigidity and large suspension force |
| CN112994526A (en) * | 2021-04-23 | 2021-06-18 | 上海隐冠半导体技术有限公司 | Magnetic suspension gravity compensator |
| CN113211460A (en) * | 2021-05-01 | 2021-08-06 | 吉林大学 | Device for improving machining rigidity of two single-arm industrial robots in non-contact mode |
| CN113991967A (en) * | 2021-09-30 | 2022-01-28 | 清华大学 | Non-contact permanent magnet supporting device |
| EP3965285A4 (en) * | 2019-04-30 | 2023-05-31 | Yinguan Semiconductor Technology Co., Ltd. | Magnetic levitation gravity compensation device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103034065A (en) * | 2011-09-29 | 2013-04-10 | 上海微电子装备有限公司 | Magnetic suspension gravity compensator and lithographic device |
| CN103034065B (en) * | 2011-09-29 | 2014-12-17 | 上海微电子装备有限公司 | Magnetic suspension gravity compensator and lithographic device |
| CN102944980A (en) * | 2012-11-02 | 2013-02-27 | 清华大学 | Microchecker having permanent magnet gravity support structure |
| EP3965285A4 (en) * | 2019-04-30 | 2023-05-31 | Yinguan Semiconductor Technology Co., Ltd. | Magnetic levitation gravity compensation device |
| CN111313763A (en) * | 2020-03-30 | 2020-06-19 | 重庆大学 | Gravity compensator with low rigidity and large suspension force |
| CN112994526A (en) * | 2021-04-23 | 2021-06-18 | 上海隐冠半导体技术有限公司 | Magnetic suspension gravity compensator |
| CN113211460A (en) * | 2021-05-01 | 2021-08-06 | 吉林大学 | Device for improving machining rigidity of two single-arm industrial robots in non-contact mode |
| CN113211460B (en) * | 2021-05-01 | 2022-03-15 | 吉林大学 | Device for improving machining rigidity of two single-arm industrial robots in non-contact mode |
| CN113991967A (en) * | 2021-09-30 | 2022-01-28 | 清华大学 | Non-contact permanent magnet supporting device |
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Application publication date: 20110914 |