CN102173345B - Pneumatic linear driven chip picking and turning device - Google Patents
Pneumatic linear driven chip picking and turning device Download PDFInfo
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- CN102173345B CN102173345B CN 201110045760 CN201110045760A CN102173345B CN 102173345 B CN102173345 B CN 102173345B CN 201110045760 CN201110045760 CN 201110045760 CN 201110045760 A CN201110045760 A CN 201110045760A CN 102173345 B CN102173345 B CN 102173345B
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Abstract
The invention provides a pneumatic linear driven chip picking and turning device which mainly comprises a rotary driving assembly, a turning arm assembly, a linear driving assembly, a chip adsorbing assembly and a sensor assembly. Under the drive of the rotary driving assembly, the chip absorbing assembly is driven to turn by the turning arm assembly, thus a chip can be turned, the adsorbing nozzle of the adsorbing assembly is driven by the linear driving assembly to get close to or far away from the chip, the chip can be adsorbed and picked safely, and the sensor assembly is used for detecting the turning angle of the adsorbing assembly and providing the turning angle to an external control system. The rotary driving assembly adopts the manner of matching a servo motor with a speed reducer, thereby ensuring higher turning precision; and the linear driving assembly adopts the pneumatic driving manner to adjust the distance between the adsorbing nozzle and the chip, thereby ensuring the safe clearance between the adsorbing nozzle and the chip.
Description
Technical field
The present invention relates to the semiconductor packages field, particularly relate to a kind of chip pickup and turning device.
Background technology
Along with the widespread demand of semiconductor packaging device and progressively upgrading, flip-chip (flip-chip) technology obtains applying more fast, so that the Flip-Chip Using technical products can be applied to the RFID field of the less pin of chip and the IC memory device packages field of thousands of pins simultaneously.The major advantage of flip chip technology is: (1) self device volume is little, does not need the peripheral space of Bonding; (2) after its operation is finished, can realize the signal path of lacking having more excellent electric property; (3) for the operating procedure of many pins, efficient is high than Bonding.The extensive use of flip chip technology, make have pick up, chip pick-up and the turning device of chip turning function, as indispensable vitals in the flip chip encapsulation, obtained continuous R and D.Particularly along with microminiaturization, the ultrathin of semiconductor chip, cause easily in the chip pick-up process and break, damage, all there has been stricter requirement the contact force of pick-up chip, flip angle, absorption location etc.
In existing chip pickup and the turning device, many pick-up heads of rotary type tower turning device that patent CN 1613146A provides, have high efficiency a bit, but himself structure is complicated, and machining and control etc. is had relatively high expectations.The described device of patent CN200920229522.3 is because the use Timing Belt drives, and running accuracy during difficult assurance upset particularly need to than the real off-position of long delay ability, can't satisfy efficient requirement when fast rotational; This device is not owing to there is rectilinear motion to drive the degree of freedom in addition, adjust draw height, when guaranteeing suction nozzle with the chip wafer safety clearance, comparatively difficult.The version that adopts a simple electric rotating machine to add a motion arm is also arranged in the existing equipment, motion arm rotates under driven by motor finishes the chip upset, but its scheme is rigidity contact or do not contact in the chip pick-up process, causes easily the chip damage or picks up the problem such as Efficiency Decreasing.
Summary of the invention
The object of the present invention is to provide a kind of chip pickup and turning device of pneumatic linear drives, have higher upset precision, the distance of suction nozzle and chip chamber is adjustable to guarantee safety clearance between the two.
A kind of chip pickup of pneumatic linear drives and turning device, comprise supporting component, rotary drive assembly, invert arm assembly, the linear drives assembly, chip pick-up component and sensor cluster, supporting component is used for the support of other assembly, the output shaft of rotary drive assembly connects invert arm assembly, invert arm assembly connects the linear drives assembly, the linear drives assembly connects chip pick-up component, invert arm assembly drives chip pick-up component upset realization to the upset of chip under the driving of rotary drive assembly, the suction nozzle that the linear drives assembly orders about pick-up component near or realize the safety of chip is drawn away from chip, sensor cluster detects the flip angle of pick-up component for external control system; It is characterized in that,
Described rotary drive assembly comprises servomotor and the decelerator that joins, and the output shaft of decelerator connects the described invert arm assembly that connects;
Described straight line driving mechanism comprises line slideway, slide block, kinematic nest, cylinder, flexible block and adjusting rod, line slideway is fixed on the described rotating arm component, slide block is made up and down rectilinear motion along line slideway under the effect of cylinder, slide block connects kinematic nest, kinematic nest connects described chip pick-up component, be provided with flexible block between kinematic nest and the cylinder, other has adjusting rod to be used for the stroke that stretches out of adjusting cylinders.
Described chip pick-up component comprises the bearing that is connected, suction nozzle seat, hollow sliding bar, tracheae seat, tracheae, spring and linear guide, hollow sliding bar one end is communicated with suction nozzle by the suction nozzle seat, the other end is by tracheae seat connectivity trachea, the mid portion of hollow sliding bar is fixed with the bearing that is connected, the bearing inside that is connected is provided with linear guide for sliding bar, on the hollow sliding bar between linear guide and suction nozzle seat cover spring is arranged.
Described linear guide is linear bearing.
Technique effect of the present invention is embodied in: rotary drive assembly adopts the fit system of servomotor and decelerator, and directly and be rotated parts machinery and be connected, with the higher upset precision of assurance; The distance that the linear drives assembly adopts the air cylinder driven mode to regulate suction nozzle and chip chamber, and has an effect of rectilinear path being carried out fine adjustment and guiding, guarantee suction nozzle and chip safety clearance between the two, to avoid chip before picked, may to be scratched or to crash, realize the safety of chip is picked up.By changing the vacuum degree of the vacuum that passes into, capable of regulating is to the pickup force of chip, to adapt to the operating mode of picking up of different size chip.The present invention takes into account picking up of chip and turn over function, for efficient, safe chip pickup, decide angle upset and provide safeguard.
Description of drawings
Fig. 1 is the stereochemical structure constitutional diagram of preferred embodiments of the present invention;
Fig. 2 is the stereochemical structure exploded view of Fig. 1;
Fig. 3 is the stereochemical structure exploded view of rotary drive assembly, supporting component, sensor cluster and invert arm assembly among Fig. 1;
Fig. 4 is the three-dimensional exploded view of the line slideway assembly of the pneumatic linear drives among Fig. 1;
Fig. 5 is the textural association figure of the line slideway assembly of the pneumatic linear drives among Fig. 1;
Fig. 6 is the stereochemical structure exploded view of the vacsorb assembly among Fig. 1;
Fig. 7 is the combining structure cutaway view of the vacsorb assembly among Fig. 1.
Embodiment
Now by reference to the accompanying drawings better embodiment explanation the present invention.
See also Fig. 1 and Fig. 2, preferred embodiments of the present invention mainly comprises a rotary drive assembly 10, one supporting components 20, one sensor clusters 30, one invert arm assemblies 40, one straight line driven units 50, one chip pick-up components 60.Supporting component 20 can be mounted on whole device in the flip-chip abutted equipment, and rotary components 10 drives invert arm assembly 40, linear drives assembly 50 and chip pick-up component 60 rotations, for turning-over of chip provides power.Linear drives assembly 50 promotes chip pick-up components 60 and realizes rectilinear motions, and can finish gap between suction nozzle and the chip wafer by the fine setting stroke, thereby guarantees effectively picking up of chip.Chip pick-up component 60 comprises a flexible member, has adjusting, buffering suction nozzle and the function for the treatment of the pick-up chip contact force.
See also Fig. 1 and Fig. 3, the rotary drive assembly 10 among the present invention is the servomotor of an outfit decelerator, is fixed in by screw on the riser 23 of supporting component 20.
Supporting component 20 comprises base plate 21, paired gusset 22 and riser 23.Base plate 21 can be connected mutually with configuration upside-down mounting equipment of the present invention.Riser 23 provides support for the photoelectric sensor 31 of rotary drive assembly 10, sensor cluster 30.
The anglec of rotation that sensor cluster 30 is used for the measurement flip-arm offers the external motor control system.Sensor cluster is comprised of three cover photoelectric sensors 31, a rotation catch 32 and two little holding screws 33.Rotation catch 32 is fixed in by little holding screw 33 on the Step Shaft 411 of flip-arm 41 of invert arm assembly 40.When rotary drive assembly 10 drove flip-arm 41 rotation, driven rotary catch 32 rotated simultaneously, thereby order blocks three cover photoelectric sensors 31, provides starting and stopping spacing and zero signal for rotatablely moving.
Flip-arm 41 is inserted in the reducer shaft of rotary drive assembly by hole 412 in the invert arm assembly 30, and finishes cooperation by flat key 43, again lock by large holding screw 42 in groups in addition, with becoming flexible of preventing that fit clearance from may cause in the fast reciprocating rotation.
See also Fig. 1, Fig. 4 and Fig. 5, linear drives assembly 50 of the present invention is comprised of cylinder 55, kinematic nest 54, slide block 53, line slideway 52, block 51, adjustment screw rod 56 and hold-down nut 57.
See also Fig. 1,6 and 7, chip pick-up component 60 of the present invention mainly comprises the bearing 61 that is connected, suction nozzle 62, suction nozzle seat 64, spring 66, hollow sliding bar 67, linear guide 68, tracheae seat 610 etc.The bearing 61 that is connected is connected by screw and realizes being connected of kinematic nest 54 in chip pick-up component 60 and the linear drives assembly 50.Suction nozzle seat 64 gentle bases 610 connect respectively preceding thread 671 and the rear thread 672 at hollow sliding bar 67 two ends, and realize loosening by suction nozzle seat holding screw 65 gentle base holding screws 69.Tracheae 611 is by being threaded into tracheae seat 610, and suction nozzle 62 directly and the unthreaded hole air-tight fit on the suction nozzle seat 64 and prevents from coming off by suction nozzle holding screw 63.Extraneous chip can pass through tracheae 611, tracheae seat 610, hollow sliding bar 67 and suction nozzle seat 64, is delivered to suction nozzle 62, thereby can draws and suction nozzle 62 contacted micro chips.
The cylinder that suction nozzle seat 64 large ends scabble for both sides can be slidingly matched with a medial surface of the bearing 61 that is connected, and occurs the rotation than wide-angle when being used for restriction suction nozzle rectilinear motion.Linear guide 68 is connected with the bearing 61 that is connected by screw, hollow sliding bar 67 and linear guide 68 precision-fit, and guarantee smooth and easy being free to slide.In the practical application, linear guide 68 can be selected flanged (FLGD) linear bearing.
By selecting length and the rigidity of spring 66, can change suction nozzle 62 and the contact force for the treatment of pick-up chip.Simultaneously, can also finely tune the screw-in depth of preceding thread 671 and rear thread 672, reach the purpose of adjusting spring 66 pre compressed magnitudes.Can effectively reduce chip and be scratched or hit the probability that splits when picking up overturning to contact by changing suction nozzle 62 and the size of chip contact force.
Claims (3)
1. the chip pickup of a pneumatic linear drives and turning device, comprise supporting component, rotary drive assembly, invert arm assembly, the linear drives assembly, chip pick-up component and sensor cluster, supporting component is used for the support of other assembly, the output shaft of rotary drive assembly connects invert arm assembly, invert arm assembly connects the linear drives assembly, the linear drives assembly connects chip pick-up component, invert arm assembly drives chip pick-up component upset realization to the upset of chip under the driving of rotary drive assembly, the suction nozzle that the linear drives assembly orders about pick-up component near or realize the safety of chip is drawn away from chip, sensor cluster detects the flip angle of pick-up component for external control system; It is characterized in that,
Described rotary drive assembly comprises servomotor and the decelerator that joins, and the output shaft of decelerator connects described invert arm assembly;
Described linear drives assembly comprises line slideway, slide block, kinematic nest, cylinder, flexible block and adjusting rod, line slideway is fixed on the described invert arm assembly, slide block is made up and down rectilinear motion along line slideway under the effect of cylinder, slide block is bolted kinematic nest, kinematic nest connects described chip pick-up component, be provided with flexible block between kinematic nest and the cylinder, other has adjusting rod to be used for the stroke that stretches out of adjusting cylinders.
2. the chip pickup of pneumatic linear drives according to claim 1 and turning device, it is characterized in that, described chip pick-up component comprises the bearing that is connected, suction nozzle seat, hollow sliding bar, tracheae seat, tracheae, spring and linear guide, hollow sliding bar one end is communicated with suction nozzle by the suction nozzle seat, the other end is by tracheae seat connectivity trachea, the mid portion of hollow sliding bar is fixed with the bearing that is connected, the bearing inside that is connected is provided with linear guide for sliding bar, on the hollow sliding bar between linear guide and suction nozzle seat cover spring is arranged.
3. the chip pickup of pneumatic linear drives according to claim 2 and turning device is characterized in that, described linear guide is linear bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110045760 CN102173345B (en) | 2011-02-25 | 2011-02-25 | Pneumatic linear driven chip picking and turning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110045760 CN102173345B (en) | 2011-02-25 | 2011-02-25 | Pneumatic linear driven chip picking and turning device |
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| CN102173345A CN102173345A (en) | 2011-09-07 |
| CN102173345B true CN102173345B (en) | 2013-03-27 |
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| CN 201110045760 Active CN102173345B (en) | 2011-02-25 | 2011-02-25 | Pneumatic linear driven chip picking and turning device |
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| CN102424270A (en) * | 2011-09-30 | 2012-04-25 | 陈宁宁 | Manipulator for carrying highway guardrail plates |
| CN102548237B (en) * | 2011-12-31 | 2014-07-16 | 广东工业大学 | Follow-up surface mounting head of direct-drive high-speed and high-efficiency feeder |
| CN103803294B (en) * | 2012-11-08 | 2016-01-20 | 沈阳新松机器人自动化股份有限公司 | For carrying the laterally turning-over device of plate workpiece |
| CN103579031A (en) * | 2013-10-25 | 2014-02-12 | 深圳市恒睿智达科技有限公司 | Multi-welding-arm device for die bonder |
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| CN104021950B (en) * | 2014-05-27 | 2016-08-31 | 秦皇岛视听机械研究所 | Single-layer capacitor naked core grain sorting test machine fine setting suction piece device |
| KR101605961B1 (en) * | 2014-08-27 | 2016-03-23 | 주식회사 페코텍 | Collet for pick up semiconductor die |
| CN104723345B (en) * | 2015-03-19 | 2016-08-24 | 北京工业大学 | A kind of turning connector assembly being applied to wafer transfer robot |
| CN105173712A (en) * | 2015-06-06 | 2015-12-23 | 范红梅 | Automatic LCD overturning device |
| CN108155124A (en) * | 2017-12-25 | 2018-06-12 | 北京中电科电子装备有限公司 | A kind of chip attachment device and method |
| CN108285046A (en) * | 2017-12-29 | 2018-07-17 | 杭州高品自动化设备有限公司 | A kind of spring feeding mechanism |
| CN109174701A (en) * | 2018-10-12 | 2019-01-11 | 江苏信息职业技术学院 | A kind of IC chip test sorting unit and its working method |
| CN110482145B (en) * | 2019-08-12 | 2024-06-11 | 惠州市创荣发实业有限公司 | Separation arrangement device with pin springs |
| CN111613565B (en) * | 2020-05-18 | 2023-03-31 | 武汉国创科光电装备有限公司 | Double-turnover-head chip transfer device suitable for flexible electronic manufacturing |
| CN111799212B (en) * | 2020-07-17 | 2022-09-20 | 河南辰芯科技有限公司 | Chip picking device |
| CN114121771B (en) * | 2021-11-18 | 2023-07-14 | 深圳新益昌科技股份有限公司 | Ejector pin mechanism and crystal ejection equipment |
| CN114408565A (en) * | 2022-01-24 | 2022-04-29 | 广州诺顶智能科技有限公司 | Suction nozzle device and suction nozzle fixing structure |
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