CN102141193A - Moistureproof steel bottle platform scale - Google Patents

Moistureproof steel bottle platform scale Download PDF

Info

Publication number
CN102141193A
CN102141193A CN2010101024062A CN201010102406A CN102141193A CN 102141193 A CN102141193 A CN 102141193A CN 2010101024062 A CN2010101024062 A CN 2010101024062A CN 201010102406 A CN201010102406 A CN 201010102406A CN 102141193 A CN102141193 A CN 102141193A
Authority
CN
China
Prior art keywords
platform scale
steel cylinder
tide
protection against
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010101024062A
Other languages
Chinese (zh)
Inventor
张榕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN2010101024062A priority Critical patent/CN102141193A/en
Publication of CN102141193A publication Critical patent/CN102141193A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

The invention relates to a platform scale, in particular to a moistureproof steel bottle platform scale. An air blowing pipeline is arranged in the platform scale and connected with an air supply pipeline outside the platform scale, and a plurality of air blowing holes for blowing air into the platform scale are distributed on the air blowing pipeline. Nitrogen or dry compressed air purge can be realized in the moistureproof steel bottle platform scale so that the generation of condensed water in the platform scale is prevented, and on one hand, the moistureproof steel bottle platform scale can prevent the condensed water from burning or corroding circuits in the platform scale so that the serious consequence of air supply interruption caused by wrong bottle weight reading due to malfunction of the platform scale is prevented; and on the other hand, the internal environment of the platform scale can be kept dry so that the service life of the platform scale can be effectively prolonged, and maintenance cost is reduced.

Description

Moistureproof steel cylinder platform scale
Technical field
The present invention relates to a kind of steel cylinder platform scale of protection against the tide.
Background technique
In semiconductor production, need to use in a large number more than ten kind of liquefaction process gas cylinders such as chlorine, hydrogen cloride.At present, the method to production department's supply special gas is: two identical liquid gas steel cylinders are contained in the same gas cabinet, and one of them steel cylinder is in the air feed state, and another gas cylinder is in stand-by state.Bottom at two steel cylinders all is placed with the weight that special electronic weighbridge measures liquid gas in the steel cylinder, the structure of this platform scale 1 such as Fig. 1 a, Fig. 1 b and Fig. 1 c, described platform scale 1 is surrounded by base plate 11 and cover plate 12 and forms, and a side of described cover plate 12 is provided with the through hole that passes for datawire.When liquid gas in the steel cylinder that is in the air feed state used the automatic switchover value (being about to empty) of weight, platform scale can and send the steel cylinder switching signal by the weighing transducer perception.Can automatically stop air feed with the steel cylinder of sky this moment and opposite side is in the steel cylinder of stand-by state and can comes into operation automatically, thereby realized continuously, be reposefully the purpose of semiconductor production equipment supply gas.
Liquid gas in the air feed process in the steel cylinder need change gaseous state into by liquid state, and this physical state change procedure is an endothermic process.Therefore, the temperature of steel cylinder can significantly reduce in the process of this heat absorption.In humidity ratio bigger season, as summer, therefore the steel cylinder surface can produce a large amount of water of condensation.Platform scale inside a large amount of condensed waters that also can condense, as not removing for a long time, these condensed waters will be with the circuit burnout or the corrosion of platform scale inside.So, the economic loss that not only can cause platform scale to damage can cause also that the steel cylinder weight value of reading is wrong because platform scale is malfunctioning and causes air feed to interrupt even produce pause.
This shows that the electronic weighbridge of existing liquid gas steel cylinder does not have moisture-proof function.How to provide a kind of and can prevent that the inner moist steel cylinder platform scale of platform scale from being the technical problem that those skilled in the art need to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide a kind of steel cylinder platform scale of protection against the tide,, prevent the inner condensate water accumulation of platform scale and derivation platform scale internal circuit board burnout failure by to the inside of platform scale nitrogen blowing or pressurized air.
To achieve the above object, the present invention adopts following technological scheme:
A kind of steel cylinder platform scale of protection against the tide is provided with gassing pipe in platform scale inside, and described gassing pipe is connected with the steam line of platform scale outside, is distributed with some being used for to the inner gas hole of blowing of platform scale on the described gassing pipe.
Described steam line is provided with controller.
Described controller is a pneumatic valve.
Described controller comprises single-chip microcomputer, solenoid valve and pneumatic valve, and described pneumatic valve is connected on the steam line, and described single-chip microcomputer is electrically connected with described solenoid valve, and described solenoid valve is electrically connected with described pneumatic valve.
The steel cylinder platform scale of described protection against the tide also comprises environment temperature sensor and platform scale temperature transducer, described platform scale temperature transducer is arranged in the platform scale, described environment temperature sensor is arranged in the surrounding space of platform scale, and described environment temperature sensor and platform scale temperature transducer are electrically connected with described single-chip microcomputer respectively.
When the temperature from environment temperature sensor that receives when controller was higher than from the temperature one predefined temperature approach of platform scale temperature transducer, controller was opened pneumatic valve by solenoid valve.
Described controller is arranged at the top of described platform scale, and described platform scale temperature transducer is arranged at the bottom of controller.
Described pneumatic valve is a needle-valve.
Described gassing pipe is arranged on around the described platform scale inner top.
In the described steam line nitrogen or pressurized air.
Beneficial effect of the present invention is as follows:
The steel cylinder platform scale of protection against the tide of the present invention, be implemented in platform scale inside by steam line and gassing pipe and carry out nitrogen or dried compressed air purging, thereby the water of condensation that prevents platform scale inside produces, on the one hand, can prevent that water of condensation from making the circuit burnout or the corrosion of platform scale inside, thereby prevent the serious consequence that causes the steel cylinder weight value of reading mistake so that cause air feed to interrupt because of platform scale is malfunctioning; On the other hand, can be so that the internal environment of platform scale keep dry, thus can effectively prolong life-span of platform scale, reduced maintenance cost.
Description of drawings
The steel cylinder platform scale of protection against the tide of the present invention is provided by following embodiment and accompanying drawing.
Fig. 1 a is the existing plan view that is used to place the platform scale of steel cylinder;
Fig. 1 b is the existing plan view that is used to place the platform scale of steel cylinder;
Fig. 1 c is the existing side view that is used to place the platform scale of steel cylinder;
Fig. 2 is that the steel cylinder platform scale of protection against the tide of the present invention is placed on the structural representation in the gas cabinet;
Fig. 3 is the structural representation (top cover is not illustrated) of platform scale of the present invention;
Fig. 4 is the connection diagram of platform scale of the present invention and controller;
Fig. 5 is the structural representation of controller of the present invention inside;
Fig. 6 is the technology and the instrument flow chart of the steel cylinder platform scale of protection against the tide of the present invention;
Among the figure, 1-platform scale, 11-cover plate, 12-base plate, 2-weighing transducer, 21-weight data line, 3-gassing pipe, 31-gas hole, 4-steam line, 5-controller, 51-pneumatic valve, 52-solenoid valve, 53-single-chip microcomputer, 54-power switch, 6-platform scale temperature transducer, 61-platform scale temperature data line, 7-environment temperature sensor, 71-ambient temperature data line, 8-steel cylinder, 9-gas cabinet.
Embodiment
Below will the steel cylinder platform scale of protection against the tide of the present invention be described in further detail.
Below with reference to accompanying drawings the present invention is described in more detail, has wherein represented the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, because they can make the present invention because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
For purpose of the present invention, feature are become apparent, the specific embodiment of the present invention is further described below in conjunction with accompanying drawing.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of the aid illustration embodiment of the invention lucidly.
Fig. 2 shows the structural representation of gas cabinet, is provided with the steel cylinder platform scale of two protection against the tide in the described gas cabinet 9, and it is standby mutually to be placed with 8, two steel cylinders 8 of steel cylinder on two platform scales 1 respectively, realizes being the semiconductor production equipment supply gas continuously, reposefully.
See also Fig. 3, Fig. 3 shows the structural representation of the steel cylinder platform scale of protection against the tide of the present invention.The steel cylinder platform scale of this protection against the tide is provided with gassing pipe 3 in platform scale 1 inside.Described gassing pipe 3 is arranged on around described platform scale 1 inner top.Described gassing pipe 3 is connected with the steam line 4 of platform scale 1 outside, is distributed with some being used for to platform scale 1 inner gas hole 31 of blowing on the described gassing pipe 3.Described platform scale 1 is surrounded by base plate 11 and cover plate 12 and forms, in the inner space of described platform scale 1, be provided with the weighing transducer 2 of the weight that is used for perception steel cylinder 8, the weight data line 21 of weighing transducer 2 stretches out from the through hole of a side of described cover plate 12, please in conjunction with consulting Fig. 1 a, Fig. 1 b, Fig. 1 c and Fig. 3.
See also Fig. 3-Fig. 6, Fig. 3 is the structural representation (top cover is not illustrated) of platform scale 1 of the present invention; Fig. 4 is the connection diagram of platform scale 1 of the present invention and controller 5; Fig. 5 is the structural representation of controller of the present invention 5 inside; Fig. 6 is the P﹠amp of the steel cylinder platform scale of protection against the tide of the present invention; ID schemes (Process﹠amp; InstrumentDiagram established technology and instrument flow chart).
In order to limit airspeed and the flow in the gassing pipe 3, can be provided with controller 5 at described steam line 4.Described controller 5 can only be a pneumatic valve 51.Described pneumatic valve 51 is a needle-valve.The routine work state of described pneumatic valve 51 is the small flow opening state.Make gassing pipe 3 ceaselessly carry out small flow (trace) and blow, prevent the condensed water that condenses in the platform scale 1 platform scale 1 inside.
Preferably, in order to make the flow of gassing pipe 3 regulate according to actual needs, described controller 5 also can adopt following structure to realize more complicated control function.Described controller 5 comprises single-chip microcomputer 53, solenoid valve 52 and pneumatic valve 51, and described pneumatic valve 51 is connected on the steam line 4, and described single-chip microcomputer 53 is electrically connected with described solenoid valve 52, and described solenoid valve 52 is electrically connected with described pneumatic valve 51.The folding of described single-chip microcomputer 53 control electromagnetic valve 52, described solenoid valve 52 can be controlled pneumatic valve 51, makes pneumatic valve 51 switch in small flow unlatching and big flow unlatching two states.Described single-chip microcomputer 53 is electrically connected with power switch 54.
The control of 53 pairs of solenoid valves 52 of single-chip microcomputer can be provided with according to various required situations.Can artificially set such as described single-chip microcomputer 53 and whenever to open through a scheduled time (such as 1 hour) control electromagnetic valve 52, then, solenoid valve 52 switches to big flow opening state with pneumatic valve 51.At another set time of process, such as 10 minutes, single-chip microcomputer 53 cuts out solenoid valve 52, makes pneumatic valve 51 switch and gets back to the small flow opening state.
Certainly, described single-chip microcomputer 53 also can decide when control electromagnetic valve 52 work according to other factors.In the present embodiment, when described single-chip microcomputer 53 reaches certain difference according to the temperature difference of temperature in the platform scale 1 and platform scale 1 surrounding environment, 52 work of single-chip microcomputer 53 control electromagnetic valve.Therefore, this moistureproof steel cylinder platform scale also needs following structure: see also Fig. 4, Fig. 5 and Fig. 6, the steel cylinder platform scale of described protection against the tide also comprises environment temperature sensor 7 and platform scale temperature transducer 6.Described platform scale temperature transducer 6 is arranged in the platform scale 1.Described environment temperature sensor 7 is arranged in the surrounding space of platform scale 1.In the present embodiment, described controller 5 is arranged at the top of described platform scale 1, and described platform scale temperature transducer 6 is arranged at the bottom of controller 5.Described environment temperature sensor 7 and platform scale temperature transducer 6 are electrically connected with described single-chip microcomputer 53 respectively, and promptly described single-chip microcomputer receives the temperature data from environment temperature sensor 7 and platform scale temperature transducer 6.
When controller 5 receive from the temperature of platform scale temperature transducer 6 during recently from the high predefined temperature approach of the temperature of environment temperature sensor 7, such as the temperature of platform scale temperature transducer 6 during than high 6 degrees centigrade of 7 temperature of environment temperature sensor, single-chip microcomputer 53 is just opened solenoid valve 52, solenoid valve 52 acts on the pneumatic valve 51 then, makes pneumatic valve 51 switch to big flow opening state from the small flow opening state of routine.When the difference of the temperature of the temperature of platform scale temperature transducer 6 and environment temperature sensor 7 during less than 6 degrees centigrade, single-chip microcomputer 53 just cuts out solenoid valve 52, then, solenoid valve 52 affacts on the pneumatic valve 51, makes pneumatic valve 51 switch to the opening state of small flow from the opening state of big flow.
In the described steam line 4 can be nitrogen or the pressurized air with certain pressure.In the present embodiment, preferred nitrogen is as source of the gas.By gassing pipe 3 nitrogen is blown into platform scale 1 inside, make platform scale 1 inside locate to keep the nitrogen environment of a drying all the time, prevent that platform scale from burning because of water of condensation, guaranteed the reading certainty of platform scale, prolonged the working life of platform scale.
The steel cylinder platform scale of protection against the tide of the present invention, can be implemented in platform scale inside and carry out nitrogen or dried compressed air purging, thereby the water of condensation that prevents platform scale inside produces, on the one hand, can prevent that water of condensation from making the circuit burnout or the corrosion of platform scale inside, thereby prevent the serious consequence that causes the steel cylinder weight value of reading mistake so that cause air feed to interrupt because of platform scale is malfunctioning; On the other hand, can be so that the internal environment of platform scale keep dry, thus can effectively prolong life-span of platform scale, reduced maintenance cost.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.

Claims (10)

1. the steel cylinder platform scale of a protection against the tide is characterized in that, is provided with gassing pipe in platform scale inside, and described gassing pipe is connected with the steam line of platform scale outside, is distributed with some being used for to the inner gas hole of blowing of platform scale on the described gassing pipe.
2. the steel cylinder platform scale of protection against the tide as claimed in claim 1 is characterized in that, described steam line is provided with controller.
3. the steel cylinder platform scale of protection against the tide as claimed in claim 2 is characterized in that, described controller is a pneumatic valve.
4. the steel cylinder platform scale of protection against the tide as claimed in claim 2, it is characterized in that described controller comprises single-chip microcomputer, solenoid valve and pneumatic valve, described pneumatic valve is connected on the steam line, described single-chip microcomputer is electrically connected with described solenoid valve, and described solenoid valve is electrically connected with described pneumatic valve.
5. the steel cylinder platform scale of protection against the tide as claimed in claim 4, it is characterized in that, also comprise environment temperature sensor and platform scale temperature transducer, described platform scale temperature transducer is arranged in the platform scale, described environment temperature sensor is arranged in the surrounding space of platform scale, and described environment temperature sensor and platform scale temperature transducer are electrically connected with described single-chip microcomputer respectively.
6. the steel cylinder platform scale of protection against the tide as claimed in claim 5, it is characterized in that, when the temperature from environment temperature sensor that receives when controller was higher than from the temperature one predefined temperature approach of platform scale temperature transducer, controller was opened pneumatic valve by solenoid valve.
7. the steel cylinder platform scale of protection against the tide as claimed in claim 5 is characterized in that, described controller is arranged at the top of described platform scale, and described platform scale temperature transducer is arranged at the bottom of controller.
8. as the steel cylinder platform scale of claim 3 or 4 described protection against the tide, it is characterized in that described pneumatic valve is a needle-valve.
9. the steel cylinder platform scale of protection against the tide as claimed in claim 1 is characterized in that, described gassing pipe is arranged on around the described platform scale inner top.
10. the steel cylinder platform scale of protection against the tide as claimed in claim 1 is characterized in that, is nitrogen or pressurized air in the described steam line.
CN2010101024062A 2010-01-28 2010-01-28 Moistureproof steel bottle platform scale Pending CN102141193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010101024062A CN102141193A (en) 2010-01-28 2010-01-28 Moistureproof steel bottle platform scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010101024062A CN102141193A (en) 2010-01-28 2010-01-28 Moistureproof steel bottle platform scale

Publications (1)

Publication Number Publication Date
CN102141193A true CN102141193A (en) 2011-08-03

Family

ID=44408890

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010101024062A Pending CN102141193A (en) 2010-01-28 2010-01-28 Moistureproof steel bottle platform scale

Country Status (1)

Country Link
CN (1) CN102141193A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091991A (en) * 2015-05-08 2015-11-25 广州西唐机电科技有限公司 Moistureproof balance
EP3299775A1 (en) * 2016-09-26 2018-03-28 Tatsuno Corporation Calibration device
CN107957291A (en) * 2016-10-14 2018-04-24 株式会社龙野 Calibrating installation
US10295516B2 (en) 2015-09-28 2019-05-21 Tatsuno Corporation Calibration device
US10337905B2 (en) 2015-09-28 2019-07-02 Tatsuno Corporation Calibration device and calibration method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091991A (en) * 2015-05-08 2015-11-25 广州西唐机电科技有限公司 Moistureproof balance
WO2016180026A1 (en) * 2015-05-08 2016-11-17 广州西唐机电科技有限公司 Moisture-proof balance
US10295516B2 (en) 2015-09-28 2019-05-21 Tatsuno Corporation Calibration device
US10337905B2 (en) 2015-09-28 2019-07-02 Tatsuno Corporation Calibration device and calibration method
EP3299775A1 (en) * 2016-09-26 2018-03-28 Tatsuno Corporation Calibration device
CN107957291A (en) * 2016-10-14 2018-04-24 株式会社龙野 Calibrating installation

Similar Documents

Publication Publication Date Title
CN102141193A (en) Moistureproof steel bottle platform scale
CN102654241B (en) Gas decompression supplier, the gas cabinet with this gas decompression supplier, clack box and substrate board treatment
CN108549313A (en) The control method of static reactive water-cooling circulating system
ATE511102T1 (en) TESTING ELECTRONIC ARRANGEMENTS AT THE ENCAPSULAR LEVEL USING TEST CIRCUIT BOARDS WITHOUT SOCKETS
RU2615876C2 (en) Method for controlling fluid separation, fuel system, method for controlling valve state and gas turbine
KR102533439B1 (en) Method and apparatus for detecting damage in fuel cell stacks, and adjusting operational characteristics in fuel cell systems
CN212644263U (en) Switching control device for uninterrupted gas supply of gas cylinder
CN202898901U (en) Energy-saving emission-reducing corrugated board heating system
CN104964268B (en) The method that Boiler DCS System realizes automatic loading water using electric contact point fluviograph signal
CN204084999U (en) A kind of refrigerating plant of high-low temperature chamber
CN210776351U (en) Temperature and humidity control system and lubricating performance test system
Tsai et al. An Advanced Cold Plate Liquid Cooling Rack Design for Hyperscale Data Center
CN201765500U (en) Mining programmable controlling machine
CN100390560C (en) Breakage-proof transplanting suction cup for monomer solar cell on-line test
CN209731868U (en) A kind of high-power extra-high voltage liquid cooling apparatus
CN113125501A (en) Heat-proof performance testing system suitable for spacecraft heat-insulating material in low-pressure environment
KR20180096949A (en) A method for leveling of capacitive level sensor
CN102261562A (en) Electronic filling metering system for ultralow temperature energy sources and control method thereof
CN217093532U (en) Special water absorption toughening high-temperature high-humidity test box for nylon industry
CN212256128U (en) Wireless intelligent warm-pressing liquid integrated controller
CN201844878U (en) Waterproof tray for scale
CN213985579U (en) Anti-overflow device of vacuum press
CN206349301U (en) Gas pressure switch
CN212675419U (en) Instrument control system redundant execution loop fault discovery device and instrument control system
CN209164087U (en) A kind of air-cooled screw machine controller

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHA

Effective date: 20130620

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130620

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING

TA01 Transfer of patent application right

Effective date of registration: 20130620

Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone

Applicant after: Semiconductor Manufacturing International (Beijing) Corporation

Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation

Address before: 201203 No. 18 Zhangjiang Road, Shanghai

Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation

C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20110803