Moistureproof steel cylinder platform scale
Technical field
The present invention relates to a kind of steel cylinder platform scale of protection against the tide.
Background technique
In semiconductor production, need to use in a large number more than ten kind of liquefaction process gas cylinders such as chlorine, hydrogen cloride.At present, the method to production department's supply special gas is: two identical liquid gas steel cylinders are contained in the same gas cabinet, and one of them steel cylinder is in the air feed state, and another gas cylinder is in stand-by state.Bottom at two steel cylinders all is placed with the weight that special electronic weighbridge measures liquid gas in the steel cylinder, the structure of this platform scale 1 such as Fig. 1 a, Fig. 1 b and Fig. 1 c, described platform scale 1 is surrounded by base plate 11 and cover plate 12 and forms, and a side of described cover plate 12 is provided with the through hole that passes for datawire.When liquid gas in the steel cylinder that is in the air feed state used the automatic switchover value (being about to empty) of weight, platform scale can and send the steel cylinder switching signal by the weighing transducer perception.Can automatically stop air feed with the steel cylinder of sky this moment and opposite side is in the steel cylinder of stand-by state and can comes into operation automatically, thereby realized continuously, be reposefully the purpose of semiconductor production equipment supply gas.
Liquid gas in the air feed process in the steel cylinder need change gaseous state into by liquid state, and this physical state change procedure is an endothermic process.Therefore, the temperature of steel cylinder can significantly reduce in the process of this heat absorption.In humidity ratio bigger season, as summer, therefore the steel cylinder surface can produce a large amount of water of condensation.Platform scale inside a large amount of condensed waters that also can condense, as not removing for a long time, these condensed waters will be with the circuit burnout or the corrosion of platform scale inside.So, the economic loss that not only can cause platform scale to damage can cause also that the steel cylinder weight value of reading is wrong because platform scale is malfunctioning and causes air feed to interrupt even produce pause.
This shows that the electronic weighbridge of existing liquid gas steel cylinder does not have moisture-proof function.How to provide a kind of and can prevent that the inner moist steel cylinder platform scale of platform scale from being the technical problem that those skilled in the art need to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide a kind of steel cylinder platform scale of protection against the tide,, prevent the inner condensate water accumulation of platform scale and derivation platform scale internal circuit board burnout failure by to the inside of platform scale nitrogen blowing or pressurized air.
To achieve the above object, the present invention adopts following technological scheme:
A kind of steel cylinder platform scale of protection against the tide is provided with gassing pipe in platform scale inside, and described gassing pipe is connected with the steam line of platform scale outside, is distributed with some being used for to the inner gas hole of blowing of platform scale on the described gassing pipe.
Described steam line is provided with controller.
Described controller is a pneumatic valve.
Described controller comprises single-chip microcomputer, solenoid valve and pneumatic valve, and described pneumatic valve is connected on the steam line, and described single-chip microcomputer is electrically connected with described solenoid valve, and described solenoid valve is electrically connected with described pneumatic valve.
The steel cylinder platform scale of described protection against the tide also comprises environment temperature sensor and platform scale temperature transducer, described platform scale temperature transducer is arranged in the platform scale, described environment temperature sensor is arranged in the surrounding space of platform scale, and described environment temperature sensor and platform scale temperature transducer are electrically connected with described single-chip microcomputer respectively.
When the temperature from environment temperature sensor that receives when controller was higher than from the temperature one predefined temperature approach of platform scale temperature transducer, controller was opened pneumatic valve by solenoid valve.
Described controller is arranged at the top of described platform scale, and described platform scale temperature transducer is arranged at the bottom of controller.
Described pneumatic valve is a needle-valve.
Described gassing pipe is arranged on around the described platform scale inner top.
In the described steam line nitrogen or pressurized air.
Beneficial effect of the present invention is as follows:
The steel cylinder platform scale of protection against the tide of the present invention, be implemented in platform scale inside by steam line and gassing pipe and carry out nitrogen or dried compressed air purging, thereby the water of condensation that prevents platform scale inside produces, on the one hand, can prevent that water of condensation from making the circuit burnout or the corrosion of platform scale inside, thereby prevent the serious consequence that causes the steel cylinder weight value of reading mistake so that cause air feed to interrupt because of platform scale is malfunctioning; On the other hand, can be so that the internal environment of platform scale keep dry, thus can effectively prolong life-span of platform scale, reduced maintenance cost.
Description of drawings
The steel cylinder platform scale of protection against the tide of the present invention is provided by following embodiment and accompanying drawing.
Fig. 1 a is the existing plan view that is used to place the platform scale of steel cylinder;
Fig. 1 b is the existing plan view that is used to place the platform scale of steel cylinder;
Fig. 1 c is the existing side view that is used to place the platform scale of steel cylinder;
Fig. 2 is that the steel cylinder platform scale of protection against the tide of the present invention is placed on the structural representation in the gas cabinet;
Fig. 3 is the structural representation (top cover is not illustrated) of platform scale of the present invention;
Fig. 4 is the connection diagram of platform scale of the present invention and controller;
Fig. 5 is the structural representation of controller of the present invention inside;
Fig. 6 is the technology and the instrument flow chart of the steel cylinder platform scale of protection against the tide of the present invention;
Among the figure, 1-platform scale, 11-cover plate, 12-base plate, 2-weighing transducer, 21-weight data line, 3-gassing pipe, 31-gas hole, 4-steam line, 5-controller, 51-pneumatic valve, 52-solenoid valve, 53-single-chip microcomputer, 54-power switch, 6-platform scale temperature transducer, 61-platform scale temperature data line, 7-environment temperature sensor, 71-ambient temperature data line, 8-steel cylinder, 9-gas cabinet.
Embodiment
Below will the steel cylinder platform scale of protection against the tide of the present invention be described in further detail.
Below with reference to accompanying drawings the present invention is described in more detail, has wherein represented the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, because they can make the present invention because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
For purpose of the present invention, feature are become apparent, the specific embodiment of the present invention is further described below in conjunction with accompanying drawing.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of the aid illustration embodiment of the invention lucidly.
Fig. 2 shows the structural representation of gas cabinet, is provided with the steel cylinder platform scale of two protection against the tide in the described gas cabinet 9, and it is standby mutually to be placed with 8, two steel cylinders 8 of steel cylinder on two platform scales 1 respectively, realizes being the semiconductor production equipment supply gas continuously, reposefully.
See also Fig. 3, Fig. 3 shows the structural representation of the steel cylinder platform scale of protection against the tide of the present invention.The steel cylinder platform scale of this protection against the tide is provided with gassing pipe 3 in platform scale 1 inside.Described gassing pipe 3 is arranged on around described platform scale 1 inner top.Described gassing pipe 3 is connected with the steam line 4 of platform scale 1 outside, is distributed with some being used for to platform scale 1 inner gas hole 31 of blowing on the described gassing pipe 3.Described platform scale 1 is surrounded by base plate 11 and cover plate 12 and forms, in the inner space of described platform scale 1, be provided with the weighing transducer 2 of the weight that is used for perception steel cylinder 8, the weight data line 21 of weighing transducer 2 stretches out from the through hole of a side of described cover plate 12, please in conjunction with consulting Fig. 1 a, Fig. 1 b, Fig. 1 c and Fig. 3.
See also Fig. 3-Fig. 6, Fig. 3 is the structural representation (top cover is not illustrated) of platform scale 1 of the present invention; Fig. 4 is the connection diagram of platform scale 1 of the present invention and controller 5; Fig. 5 is the structural representation of controller of the present invention 5 inside; Fig. 6 is the P﹠amp of the steel cylinder platform scale of protection against the tide of the present invention; ID schemes (Process﹠amp; InstrumentDiagram established technology and instrument flow chart).
In order to limit airspeed and the flow in the gassing pipe 3, can be provided with controller 5 at described steam line 4.Described controller 5 can only be a pneumatic valve 51.Described pneumatic valve 51 is a needle-valve.The routine work state of described pneumatic valve 51 is the small flow opening state.Make gassing pipe 3 ceaselessly carry out small flow (trace) and blow, prevent the condensed water that condenses in the platform scale 1 platform scale 1 inside.
Preferably, in order to make the flow of gassing pipe 3 regulate according to actual needs, described controller 5 also can adopt following structure to realize more complicated control function.Described controller 5 comprises single-chip microcomputer 53, solenoid valve 52 and pneumatic valve 51, and described pneumatic valve 51 is connected on the steam line 4, and described single-chip microcomputer 53 is electrically connected with described solenoid valve 52, and described solenoid valve 52 is electrically connected with described pneumatic valve 51.The folding of described single-chip microcomputer 53 control electromagnetic valve 52, described solenoid valve 52 can be controlled pneumatic valve 51, makes pneumatic valve 51 switch in small flow unlatching and big flow unlatching two states.Described single-chip microcomputer 53 is electrically connected with power switch 54.
The control of 53 pairs of solenoid valves 52 of single-chip microcomputer can be provided with according to various required situations.Can artificially set such as described single-chip microcomputer 53 and whenever to open through a scheduled time (such as 1 hour) control electromagnetic valve 52, then, solenoid valve 52 switches to big flow opening state with pneumatic valve 51.At another set time of process, such as 10 minutes, single-chip microcomputer 53 cuts out solenoid valve 52, makes pneumatic valve 51 switch and gets back to the small flow opening state.
Certainly, described single-chip microcomputer 53 also can decide when control electromagnetic valve 52 work according to other factors.In the present embodiment, when described single-chip microcomputer 53 reaches certain difference according to the temperature difference of temperature in the platform scale 1 and platform scale 1 surrounding environment, 52 work of single-chip microcomputer 53 control electromagnetic valve.Therefore, this moistureproof steel cylinder platform scale also needs following structure: see also Fig. 4, Fig. 5 and Fig. 6, the steel cylinder platform scale of described protection against the tide also comprises environment temperature sensor 7 and platform scale temperature transducer 6.Described platform scale temperature transducer 6 is arranged in the platform scale 1.Described environment temperature sensor 7 is arranged in the surrounding space of platform scale 1.In the present embodiment, described controller 5 is arranged at the top of described platform scale 1, and described platform scale temperature transducer 6 is arranged at the bottom of controller 5.Described environment temperature sensor 7 and platform scale temperature transducer 6 are electrically connected with described single-chip microcomputer 53 respectively, and promptly described single-chip microcomputer receives the temperature data from environment temperature sensor 7 and platform scale temperature transducer 6.
When controller 5 receive from the temperature of platform scale temperature transducer 6 during recently from the high predefined temperature approach of the temperature of environment temperature sensor 7, such as the temperature of platform scale temperature transducer 6 during than high 6 degrees centigrade of 7 temperature of environment temperature sensor, single-chip microcomputer 53 is just opened solenoid valve 52, solenoid valve 52 acts on the pneumatic valve 51 then, makes pneumatic valve 51 switch to big flow opening state from the small flow opening state of routine.When the difference of the temperature of the temperature of platform scale temperature transducer 6 and environment temperature sensor 7 during less than 6 degrees centigrade, single-chip microcomputer 53 just cuts out solenoid valve 52, then, solenoid valve 52 affacts on the pneumatic valve 51, makes pneumatic valve 51 switch to the opening state of small flow from the opening state of big flow.
In the described steam line 4 can be nitrogen or the pressurized air with certain pressure.In the present embodiment, preferred nitrogen is as source of the gas.By gassing pipe 3 nitrogen is blown into platform scale 1 inside, make platform scale 1 inside locate to keep the nitrogen environment of a drying all the time, prevent that platform scale from burning because of water of condensation, guaranteed the reading certainty of platform scale, prolonged the working life of platform scale.
The steel cylinder platform scale of protection against the tide of the present invention, can be implemented in platform scale inside and carry out nitrogen or dried compressed air purging, thereby the water of condensation that prevents platform scale inside produces, on the one hand, can prevent that water of condensation from making the circuit burnout or the corrosion of platform scale inside, thereby prevent the serious consequence that causes the steel cylinder weight value of reading mistake so that cause air feed to interrupt because of platform scale is malfunctioning; On the other hand, can be so that the internal environment of platform scale keep dry, thus can effectively prolong life-span of platform scale, reduced maintenance cost.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.