CN102108317B - 硅片切割废砂浆分离提纯方法 - Google Patents
硅片切割废砂浆分离提纯方法 Download PDFInfo
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- CN102108317B CN102108317B CN 201110006158 CN201110006158A CN102108317B CN 102108317 B CN102108317 B CN 102108317B CN 201110006158 CN201110006158 CN 201110006158 CN 201110006158 A CN201110006158 A CN 201110006158A CN 102108317 B CN102108317 B CN 102108317B
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- 238000000034 method Methods 0.000 title claims abstract description 69
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 45
- 239000010703 silicon Substances 0.000 title claims abstract description 45
- 238000005520 cutting process Methods 0.000 title abstract description 24
- 238000000746 purification Methods 0.000 title abstract description 7
- 239000007788 liquid Substances 0.000 claims abstract description 186
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- 238000005406 washing Methods 0.000 claims description 27
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 23
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- 150000001875 compounds Chemical class 0.000 description 3
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
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- Water Treatment By Sorption (AREA)
Abstract
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CN 201110006158 CN102108317B (zh) | 2011-01-12 | 2011-01-12 | 硅片切割废砂浆分离提纯方法 |
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CN 201110006158 CN102108317B (zh) | 2011-01-12 | 2011-01-12 | 硅片切割废砂浆分离提纯方法 |
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CN102108317A CN102108317A (zh) | 2011-06-29 |
CN102108317B true CN102108317B (zh) | 2012-12-05 |
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Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102351183A (zh) * | 2011-07-11 | 2012-02-15 | 高德耀 | 从硅片切割加工副产物中回收多晶硅的方法 |
CN102352279A (zh) * | 2011-07-22 | 2012-02-15 | 浙江晶盛硅晶材料有限公司 | 一种砂浆回收中的固液分离方法 |
CN103030147A (zh) * | 2011-09-29 | 2013-04-10 | 汇隆科技有限公司 | 回收废液中的硅的方法 |
CN102391302B (zh) * | 2011-10-08 | 2014-07-23 | 江苏佳宇资源利用股份有限公司 | 一种利用废砂浆中回收的硅粉制备烷基卤代硅烷的方法 |
CN102432011A (zh) * | 2011-10-08 | 2012-05-02 | 江苏佳宇资源利用股份有限公司 | 一种同步去除碳化硅微粉中铁、硅杂质的方法 |
CN103288086B (zh) * | 2012-01-15 | 2015-06-03 | 佳明新材料科技有限公司 | 硅片切削液中的碳化硅、硅微粉和聚乙二醇的回收方法 |
CN102659113B (zh) * | 2012-05-23 | 2014-03-26 | 北京科技大学 | 微孔膜过滤法回收单晶和多晶硅线切割废料中硅粉的方法 |
CN102766522B (zh) * | 2012-08-09 | 2013-10-02 | 青岛海林电子材料科技有限公司 | 一种用于切割液脱水的工艺及装置 |
CN102911779A (zh) * | 2012-11-01 | 2013-02-06 | 浙江晶盛硅晶材料有限公司 | 一种切割液回收中的板框压滤固液分离工艺 |
CN103406344B (zh) * | 2013-08-28 | 2015-04-08 | 河北宁晋松宫半导体有限公司 | 一种线切碎硅片杂质的处理方法 |
CN104194910B (zh) * | 2014-08-13 | 2017-09-26 | 开封万盛新材料有限公司 | 晶硅片切割液的固液分离方法 |
CN105621414A (zh) * | 2015-03-11 | 2016-06-01 | 辽宁工业大学 | 一种从晶硅线切割废砂浆中回收碳化硅的方法 |
CN105152438B (zh) * | 2015-07-28 | 2017-10-24 | 江西申山能源科技有限公司 | 硅片切割污水处理方法 |
CN105482152B (zh) * | 2016-02-17 | 2018-09-21 | 苏州协鑫光伏科技有限公司 | 硅片切割废砂浆水洗回收***及方法 |
CN107384568A (zh) * | 2017-06-17 | 2017-11-24 | 常州福隆工控设备有限公司 | 一种硅片切割废砂浆的回收利用方法 |
CN113930280B (zh) * | 2021-11-02 | 2022-08-02 | 河北矽碳新材料科技有限公司 | 一种金刚线冷却液及其制备方法和应用 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101239246A (zh) * | 2008-02-20 | 2008-08-13 | 江南大学 | 从硅片切割加工副产物中回收切割液的方法 |
CN101691224A (zh) * | 2009-09-22 | 2010-04-07 | 王勇 | 从硅片切削砂浆中提取硅、碳化硅及聚乙二醇的方法 |
CN101792142A (zh) * | 2009-12-31 | 2010-08-04 | 唐康宁 | 从切割废砂浆中回收多晶硅锭、碳化硅粉和聚乙二醇的方法 |
CN101792691A (zh) * | 2010-02-22 | 2010-08-04 | 陈锡元 | 硅片切割废砂浆中液体的回收循环再生利用工艺 |
Family Cites Families (1)
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WO2010121606A2 (de) * | 2009-04-24 | 2010-10-28 | Chemische Werke Kluthe Gmbh | Verfahren, formulierungen und erzeugnis für die biozide behandlung eines kühlschmierstoffs |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101239246A (zh) * | 2008-02-20 | 2008-08-13 | 江南大学 | 从硅片切割加工副产物中回收切割液的方法 |
CN101691224A (zh) * | 2009-09-22 | 2010-04-07 | 王勇 | 从硅片切削砂浆中提取硅、碳化硅及聚乙二醇的方法 |
CN101792142A (zh) * | 2009-12-31 | 2010-08-04 | 唐康宁 | 从切割废砂浆中回收多晶硅锭、碳化硅粉和聚乙二醇的方法 |
CN101792691A (zh) * | 2010-02-22 | 2010-08-04 | 陈锡元 | 硅片切割废砂浆中液体的回收循环再生利用工艺 |
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