CN102108008B - Method for manufacturing rare earth element-doped optical fiber preform - Google Patents

Method for manufacturing rare earth element-doped optical fiber preform Download PDF

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CN102108008B
CN102108008B CN 201010606653 CN201010606653A CN102108008B CN 102108008 B CN102108008 B CN 102108008B CN 201010606653 CN201010606653 CN 201010606653 CN 201010606653 A CN201010606653 A CN 201010606653A CN 102108008 B CN102108008 B CN 102108008B
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rare earth
earth doped
sandwich layer
deposit
optical fiber
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CN102108008A (en
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姚爽
冯高锋
吴钧
张立永
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Hangzhou Futong Communication Technology Co Ltd
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Futong Group Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/01433Reactant delivery systems for delivering and depositing additional reactants as liquids or solutions, e.g. for solution doping of the porous glass preform
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers

Abstract

The invention discloses a method for manufacturing a rare earth element-doped optical fiber perform, which comprises the following steps of: depositing a powder deposited body core layer of the rare earth element-doped optical fiber perform by adopting a vapor axial deposition method; soaking the prepared core layer powder deposited body in co-doped mixed solution containing rare earth elements, and vitrifying the core layer powder deposited body in a high temperature furnace to prepare a core layer of the rare earth element-doped optical fiber perform; and obtaining a cladding of the optical fiber perform, which is formed by a cladding powder deposited body, is vitrified and coats the core layer, outside the core layer of the rare earth element-doped optical fiber perform, or sleeving a glass tube serving as the cladding of the rare earth element-doped optical fiber perform outside the core layer of the rare earth element-doped optical fiber perform. Through the method, the rare earth element-doped optical fiber perform with a large core/cladding ratio is quickly manufactured under the condition that a domestic technology for producing quartz sleeves cannot meet the requirement of manufacturing the rare earth element-doped optical fiber perform at present; moreover, the manufactured rare earth element-doped optical fiber perform meets the requirement for large-size low-cost production.

Description

A kind of method of making rare earth doped preform
Technical field
The present invention relates to a kind of method of making rare earth doped preform, more specifically relate to a kind of VAD of employing method and make the sandwich layer of large-sized rare earth doped preform and adopt the OVD method to make the method for rare earth doped optical fiber prefabricating stick cladding.
Background technology
The method of manufacture of rare earth doped preform mainly contains two types: the one, and method in the pipe mainly comprises modified chemical vapor deposition process (MCVD) (MCVD) and plasma chemical vapor deposition (PCVD); Another kind of is the outer method of pipe, mainly comprises outside vapour deposition process (OVD) and axial vapor deposition method (VAD).
Typical MCVD technology be with ultrapure oxygen as carrier with SiCl 4Deng raw material and GeCl 4Send in rotation and the heated silica tube Deng doping agent, redox reaction takes place in raw material in the pipe and doping agent at high temperature (1500 ℃), forms particulate in a certain definite radial position place, and is deposited on the deposited tube inwall through the thermophoresis locomotory movement.Its reaction formula is:
SiCl 4+O 2→SiO 2+2Cl 2
GeCl 4+O 2→GeO 2+2Cl 2
4POCl 3+3O 2→2P 2O 5+6Cl 2
After the covering deposition finishes, reduce temperature (1100 ℃) and deposit loose sandwich layer again.Take off reaction tubes then, rare earth ion is adsorbed on the loose sandwich layer equably.Take out reaction tubes and feed Cl 2, O 2, He dehydrates, and at high temperature sinters transparent prefabricated rods at last into.
PCVD technology is identical with the MCVD technological principle, the method that just no longer heats with the outer thermal source of pipe, but the plasma body that adopts microwave cavity to produce provides thermal source for reaction.
Adopt the interior sedimentation of pipe to make rare earth doped preform, see from technology, because pure SiO 2The viscosity of deposition material is big, and the temperature of requirement is high, so sintering difficulty extremely, in manufacturing processed, produces the reaction tubes phenomenon such as thin of softening, contract easily, and manufacturing can not be continued.In addition, the thermal conductivity of silica glass is lower, the increase that square is directly proportional of heat conduction required time and thickness of pipe; Along with the deposition number of plies increases, thickness of pipe increases, and heat passes to the time lengthening of reaction tube from the reaction tubes outer wall; If temperature, the translatory velocity of torch flame are constant, just possibly produce large quantities of bubbles because non-burn-through phenomenon takes place the thermal conduction deficiency; If the translatory velocity that makes torch flame though can increase heat conduction time, improves sintering temperature along with the deposition number of plies is successively decreased; But also make settled layer become thicker simultaneously; Loose sandwich layer exceeds after the certain thickness, and problem such as will produce loose sandwich layer cracking in the process of soaking solution and come off causes the failure of rare earth doped preform sandwich layer deposition.Simultaneously; Special purpose from rare earth doped optical fiber is considered; Require rare earth doped preform to have bigger core bag than (the core bag is than the ratio for sandwich layer diameter and cladding diameter), sedimentation in the pipe is difficult to do core bag ratio big because tube wall self thickness is big and the little cause of sandwich layer deposit thickness; Therefore, there is very big obstacle in sedimentation on than the method for rare earth doped preform making big core bag in the pipe.
The main chemical reactions principle of outside vapour deposition process (OVD) is exactly gaseous halide (SiCl 4Deng) and oxyhydrogen flame or methane flame hydrolytic reactions, generate oxide particle and (be mainly SiO 2); Particle deposits along with air-flow and thermophoresis effect are brought on the rare earth doped optical fiber prefabricated rod mandrel then; In the middle of the sedimentary process; Plug is made circumferential motion simultaneously and is moved back and forth, and makes particle in layer deposit to the outside surface of plug, forms rare earth doped optical fiber prefabricating stick cladding powder-deposit.After this pass through the process of dehydration, vitrifying and insulation again, finally form transparent rare earth doped preform.
Its basic technology principle of VAD method is identical with the OVD method, and difference is that it is not radially sedimentary at rare earth doped fiber core layer outside surface, but sedimentary vertically on the top of seed quartz pushrod.In the deposition process, the seed quartz pushrod constantly rotates and moves up, the final rare earth doped optical fiber preform core lamination powder with certain size that forms.In the face of the method for making rare earth doped preform compares, as shown in table 1 down:
Table 1
Figure 984960DEST_PATH_IMAGE001
Pipe external sediment method is used to produce rare earth doped preform; Promptly produce the sandwich layer of rare earth doped preform earlier with the VAD method; Make the covering of rare earth doped preform again with the OVD method, have that efficient height, cost are low, the core bag is than plurality of advantages such as big.Compare the interior sedimentation of pipe and directly carry out the manufacturing of prefabricated rods sandwich layer and covering through selected Technology; Sedimentation receives the restriction of technical equipment and Technology itself in the pipe; The preform core bag of producing has weakened the effect of rare earth doped optical fiber than little.Produce the required number of devices of the rare earth doped optical fiber of 1,000,000 km more equally, MCVD needs the 6-12 platform; PCVD needs the 4-8 platform; VAD needs the 2-4 platform; OVD needs the 1-2 platform.Obviously, on production capacity, the production capacity of pipe external sediment method has clear superiority.In addition, sedimentation is higher by 40% than pipe external sediment method on cost in the pipe, and the advantage of visible pipe external sediment method on production cost also is fairly obvious.
Summary of the invention
The technical problem that the present invention will solve and the technical assignment of proposition be overcome sedimentation is made in the existing pipe rare earth doped optical fiber preform core bag than little, sedimentation rate is low, cost is high; Be difficult to satisfy the defective of rare earth doped optical fiber application specific IC; Provide a kind of VAD of utilization method to make the sandwich layer of rare earth doped preform; The OVD method is made the covering of rare earth doped preform, thereby makes the method for the rare earth doped preform of big core bag ratio.
The present invention for realizing the technical scheme that above-mentioned purpose adopts is:
A kind of method of making rare earth doped preform is characterized in that:
Adopt the powder-deposit sandwich layer of VAD method deposition of rare-earth element doping preform; After deposition finishes; Prepared sandwich layer powder-deposit is immersed in the mixing solutions that contains REE and codopant; To soak the sandwich layer powder-deposit vitrifying in High Temperature Furnaces Heating Apparatus after finishing again, process the sandwich layer of rare earth doped preform;
Outside the sandwich layer of rare earth doped preform by the covering powder-deposit form be enclosed in outside the sandwich layer by the covering of vitrified preform, or with glass pipe box covering as rare earth doped preform outside rare earth doped preform sandwich layer.
As to further the improving and replenishing of technique scheme, the present invention also comprises following all section additional technical features, so as in the specific implementation according to demand with it independent or be bonded to each other after be applied in the technique scheme:
Described powder-deposit sandwich layer dewatered before soaking end back, vitrifying.
Described dehydration is to place dry atmosphere to heat the thin glass granules that contains OH radical ion and water molecules, makes the sandwich layer powder-deposit slough the water molecules of physical adsorption and the OH radical ion of chemisorption; The temperature that heats in the said dry atmosphere is at least 1000 ℃; At least contain Cl in the described dry atmosphere 2, Cl 2Feed rate be at least 0.1L/min.
Described codopant is that the simple substance of a kind of element or multiple element is or/and compound.
In the said mixing solutions that contains REE and codopant, the concentration of element that REE and codopant contained is 0.001-0.1M and 0-1.25M, and the time that said sandwich layer powder-deposit soaks was at least 1 hour.
The vitrifying of described sandwich layer powder-deposit in High Temperature Furnaces Heating Apparatus is through described sandwich layer powder-deposit sintering is realized; Described sintering is the stomata states from sedimentary many dummy status to sealing with low-density sandwich layer powder-deposit; Shrink disappearance fully to sealed porosity again, form fine and close glassy rare earth doped prefabricated rods sandwich layer.
Said agglomerating temperature is at least 1400 ℃.
Feed Cl when implementing described sintering 2, Cl 2Feed rate be at least 0.1L/min.
The sandwich layer of the rare earth doped preform after the vitrifying is implemented insulation so that the sandwich layer of the rare earth doped preform of densification is removed internal stress under hot conditions; The time of said insulation was at least 6 hours.
With the OVD method with the covering powder-deposit form be enclosed in sandwich layer outer by the covering of vitrified preform; Use tiretube process to be main casing pipe sleeve covering as rare earth doped preform outside rare earth doped preform sandwich layer in order to quartzy composition.
The rare earth doped preform of manufacturing of the present invention can easily obtain big core bag ratio, thereby satisfies the application specific IC requirement of rare earth doped optical fiber better, as makes powerful laser amplifier etc.And, utilize method of the present invention to make rare earth doped preform and also have advantages such as efficient height, speed is fast, cost is low.
Description of drawings
The deposition principle schematic of making rare earth doped preform sandwich layer for the VAD method shown in Figure 1; It has disclosed raw material by blowtorch 1 ejection and hydrolytic reactions; The oxide particle of generation helps to explain the forming process of rare earth doped optical fiber preform core lamination powder 3 to the deposition process of target rod 2 accumulations that constantly upwards promote.
Shown in Figure 2 is dehydration, sintering and the heat-insulation system synoptic diagram that existing VAD and OVD method are made rare earth doped preform; It has disclosed Supply Method and the state that powder-deposit 4 glass is changed into gas in the prefabricated rods process, helps the principle of explaining that rare earth doped preform forms.Need to prove that in the actual production, dehydration and sintering process are carried out continuously in same equipment, and insulating process carries out in another equipment.
The depositing system synoptic diagram of making rare earth doped optical fiber prefabricating stick cladding for the OVD method shown in Figure 3; It has disclosed raw material by blowtorch 11 ejection and hydrolytic reactions; The deposition process that the oxide particle that generates is piled up to the plug 9 of rotation helps the principle of explaining that rare earth doped optical fiber prefabricating stick cladding powder-deposit forms.
Label declaration among the figure: 1-is used to deposit the blowtorch of sandwich layer, 2-target rod, and 3-sandwich layer powder-deposit, 4-vitrifying stove, 5-anchor clamps, 6-are used to deposit the blowtorch of covering, 7-covering powder-deposit, 8-suspended hood, 9-waste discharge device, 10-sandwich layer.
Embodiment
The first step that method of the present invention is made rare earth doped preform is to adopt the sandwich layer of the rare earth doped preform of VAD method pipe external sediment.The sandwich layer deposition apparatus is shown in accompanying drawing 1.Gaseous feed in the deposition process mainly contains: Si, H 2, Ge, Ar, O 2, P (compound form), wherein H 2Flow is not change easily generally, H 2Flow will guarantee the density of head part sandwich layer powder-deposit, and density is too low, will become flexible, and causes deposition back sandwich layer powder-deposit 3 to come off easily.Blowtorch 1 is generally also motionless, mainly adjusts its flow.
After deposition finishes; The sandwich layer powder-deposit is immersed in the mixing solutions that contains REE and codopant; Wherein, codopant can be a kind of element or multiple element, and can be that the simple substance of state such as a kind of element or multiple element of the multiple material that contains said codopant is or/and compound.The method for preparing mixing solutions has two kinds; The method that comparatively conveniently saves trouble is that the rare-earth compound with more amount mixes with pure water with codopant concentration and proportionlity as required; Slowly stir and make its whole dissolvings become mixing solutions; Each mixing solutions that soaks the taking-up aequum is placed in one the sandwich layer powder-deposit and (notices that the sandwich layer powder-deposit can only be suspended in the mixing solutions; Can not be rebuffed or damage the shape on sandwich layer powder-deposit surface, cause the sandwich layer powder-deposit to reduce the yield rate of manufacturing owing to surface disturbance), use (each solution that soaks is reusable edible not) when soaking after remaining mixing solutions can be waited until; Another kind method is that each the immersion all uses accurate balance weighing to go out the rare-earth compound and the codopant of required weight, measures volume required pure water again, again they is stirred into mixing solutions, the only enough amounts of using of once soaking of mixing solutions.Owing to adopt size that pipe external sediment VAD method makes rare earth doped preform than big many of the interior sedimentation of pipe; Cause the amount of required mixing solutions also corresponding big many; Consider rare earth doped preform to the requirement of impurity than higher; Mixing solutions can increase the content of its impurity storage period for a long time, so present method is used the method that quantitatively prepares mixing solutions when soaking one by one.In addition, the instrument of preparation mixing solutions comprises that beaker, graduated cylinder, stirring rod, watch-glass, soaking compartment etc. all should adopt pure quartz ware, prevent that the contained foreign ion of instrument from getting in the sandwich layer of rare earth doped preform.
After soaking completion rare earth doped optical fiber preform core lamination powder 3 is accomplished dehydrating step, Cl in placing vitrifying stove 4 shown in Figure 2 2As the dewatering agent of this process, O 2Be used for reducing sandwich layer GeO 2The refractive index profile of rare earth doped preform sandwich layer extends influence.The dehydration back is sintered into sandwich layer 10 equally in vitrifying stove 4 shown in Figure 2; Sintering temperature is generally more than 1400 ℃ or 1400 ℃; Though dehydration has been removed most OH radical ions, also have moisture among the He that feeds, so sintering step need continue to feed Cl 2To reduce the water peak in the rare earth doped preform sandwich layer.At last, the rare earth doped optical fiber preform core lamination powder 3 that sintering is accomplished was placed in the holding furnace more than 6 hours, so that eliminate the plug internal stress, strengthened the mechanical property of rare earth doped optical fiber.Dehydration and sintering process and insulating process are as shown in Figure 2.
Second step that method of the present invention is made rare earth doped preform is the covering that adopts the rare earth doped preform of OVD method pipe external sediment.Concrete operation method is that rare earth doped preform sandwich layer 10 crosswise fixed that will make earlier are on the anchor clamps 5 of OVD depositing device, shown in accompanying drawing 3, just can move the deposition program after blowtorch 6 igniting.In the deposition process, the SiCl of certain flow 4, H 2, O 2, Ar feeds in the blowtorch 6 of repeated moving raw material SiCl 4At oxygen O 2Carrying under, through H 2(or CH 4)/O 2Flame sprays to the prefabricated rods sandwich layer 10 of rotation together, and under the heat energy effect, the raw material hydrolytic reactions generates SiO 2, SiO 2The powder dust particle that the particle hydrolysis produces passes through on the flame prefabricated rods sandwich layer 10 that is adsorbed on rotation from level to level, forms rare earth doped optical fiber prefabricating stick cladding powder-deposit 7.Suspended hood 8 constantly carries out air draught and discharges the sediment chamber through the unnecessary dust that waste discharge device 9 will absorb in the deposition process.
Rare earth doped preform powder-deposit after deposition is accomplished places intact dehydrations and sintering in the vitrifying stove shown in Figure 24, feeds siccative (Cl for example down from 1100 ℃ to 1500 ℃ through TR 2) dewater and remove water and metallic impurity, to reduce the loss of drawing optical fiber, under 1500 ℃ of conditions, form glass preform then through sintering.Should feed He in the sintering process, mainly play conductive force, make vitrifying more complete.Generally more than 6 hours, temperature is between 800-1400 ℃ for insulating process subsequently.The synoptic diagram of dehydration and sintering process and insulating process is as shown in Figure 2.
Embodiment 1
The core bag ratio of the rare earth doped preform of target is 0.5, and the sandwich layer powder-deposit 3 of manufacturing is of a size of φ 30*800mm.About 10 hours of sandwich layer powder-deposit deposition process was wherein started stably depositing 8.5 hours about 1.5 hours.During blowtorch 1 igniting back 4min, set and upwards promote 2mm, time spent 1min; During 5min, the control blowtorch provides reaction raw materials; During 20min, set operation 5min downwards, speed is 2mm/min; During 25min, set pulling speed 140mm/h.The sandwich layer powder-deposit volume that makes is about 0.565L; Soaking compartment is a rectangular parallelepiped, and size is greater than sandwich layer powder-deposit size, and the soaking compartment volume is 1L; Need the about 0.45L of configuration to contain the solution of REE and codopant; Wherein the concentration of REE and codopant all is 1.5mol/L, then uses the REE and the codopant of the required quality of accurate balance weighing, and stirring with the 0.45L pure water is configured to mixing solutions and the sandwich layer powder-deposit together placed soaking compartment 1.5 hours again.Sandwich layer powder-deposit after soaking is put into the vitrifying stove dewater, set Cl 2Flow 200ml/min, He flow 50l/min, O 2Flow 10l/min, plug 4 lowering speed 5mm/min, and set 1300 ℃ of dehydration temperaturres.The setting gas flow is constant, and speed changes 5mm/min into, carries out the vitrifying sintering at 1500 ℃.The taking-up to be cooled of plug behind the sintering placed in the holding furnace, with 1200 ℃ of insulations 8 hours.
The plug that makes is fixed in the OVD depositing device after the horizontal expansion of fire lathe becomes desired size, adopts OVD deposition, dehydration, sintering and heat preserving method described in " practical implementation method " to make the covering of rare earth doped preform.Its result is: make the rare earth doped optical fiber prefabricated rod mandrel of target and be of a size of φ 30*800mm, the core bag ratio of rare earth doped preform is 0.5, and doping content is 1.5mol/L, and the lasing efficiency that wire drawing makes optical fiber is more than 77.67%.
What need particularly point out is; The mode of the foregoing description only limits to describe embodiment; But the present invention is not confined to aforesaid way; And those skilled in the art can modify in not departing from the scope of the present invention in view of the above easily, and therefore scope of the present invention should comprise the disclosed principle and the maximum range of new feature.

Claims (10)

1. method of making rare earth doped preform is characterized in that:
Adopt the powder-deposit sandwich layer of VAD method deposition of rare-earth element doping preform; After deposition finishes; Prepared sandwich layer powder-deposit is immersed in the mixing solutions that contains REE and codopant; To soak the sandwich layer powder-deposit vitrifying in High Temperature Furnaces Heating Apparatus after finishing again, process the sandwich layer of rare earth doped preform;
Outside the sandwich layer of rare earth doped preform by the covering powder-deposit form be enclosed in outside the sandwich layer by the covering of vitrified preform, or with glass pipe box covering as rare earth doped preform outside rare earth doped preform sandwich layer.
2. a kind of method of making rare earth doped preform according to claim 1 is characterized in that: described powder-deposit sandwich layer dewatered before soaking end back, vitrifying.
3. a kind of method of making rare earth doped preform according to claim 2; It is characterized in that: described dehydration is to place dry atmosphere to heat the thin glass granules that contains OH radical ion and water molecules, makes the sandwich layer powder-deposit slough the water molecules of physical adsorption and the OH radical ion of chemisorption; The temperature that heats in the said dry atmosphere is at least 1000 ℃; At least contain Cl in the described dry atmosphere 2, Cl 2Feed rate be at least 0.1L/min.
4. a kind of method of making rare earth doped preform according to claim 1 is characterized in that: described codopant is that the simple substance of a kind of element or multiple element is or/and compound.
5. a kind of method of making rare earth doped preform according to claim 1; It is characterized in that: in the said mixing solutions that contains REE and codopant; The concentration of element that REE contained is 0.001-0.1M; The concentration of element that codopant contained for>0 and≤1.25M, the time that said sandwich layer powder-deposit soaks was at least 1 hour.
6. a kind of method of making rare earth doped preform according to claim 1; It is characterized in that: the vitrifying of described sandwich layer powder-deposit in High Temperature Furnaces Heating Apparatus is through described sandwich layer powder-deposit sintering is realized; Described sintering is the stomata states from sedimentary many dummy status to sealing with low-density sandwich layer powder-deposit; Shrink disappearance fully to sealed porosity again, form fine and close glassy rare earth doped prefabricated rods sandwich layer.
7. a kind of method of making rare earth doped preform according to claim 6 is characterized in that: said agglomerating temperature is at least 1400 ℃.
8. a kind of method of making rare earth doped preform according to claim 6 is characterized in that: feed Cl when implementing described sintering 2, Cl 2Feed rate be at least 0.1L/min.
9. a kind of method of making rare earth doped preform according to claim 1 is characterized in that: the sandwich layer of the rare earth doped preform after the vitrifying is implemented insulation so that the sandwich layer of the rare earth doped preform of densification is removed internal stress under hot conditions; The time of said insulation was at least 6 hours.
10. a kind of method of making rare earth doped preform according to claim 1 is characterized in that: with the OVD method with the covering powder-deposit form be enclosed in sandwich layer outer by the covering of vitrified preform; Use tiretube process to be main casing pipe sleeve covering as rare earth doped preform outside rare earth doped preform sandwich layer in order to quartzy composition.
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CN112094049B (en) * 2020-08-18 2022-09-13 江苏永鼎光纤科技有限公司 Method and device for preparing rare earth ion doped optical fiber preform and product
CN115246706A (en) * 2022-08-31 2022-10-28 长飞光纤光缆股份有限公司 Active optical fiber preform and preparation method thereof
CN115304265A (en) * 2022-08-31 2022-11-08 长飞光纤光缆股份有限公司 VAD active optical fiber preform and preparation method thereof

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CN1490267A (en) * 2003-07-14 2004-04-21 烽火通信科技股份有限公司 Method for manufacturing rare earth extended fibre-optical prefabricated bar
CN1558873A (en) * 2001-10-18 2004-12-29 科学和工业研究委员会 Process of making rare earth doped optical fibre

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CN1558873A (en) * 2001-10-18 2004-12-29 科学和工业研究委员会 Process of making rare earth doped optical fibre
CN1490267A (en) * 2003-07-14 2004-04-21 烽火通信科技股份有限公司 Method for manufacturing rare earth extended fibre-optical prefabricated bar

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Patentee after: Hangzhou Futong Communication Technology Co., Ltd.

Address before: 311400, No. 1-8, Fortis Science Park, Golden Autumn Road, Hangzhou, Zhejiang, Fuyang

Patentee before: Futong Group Co., Ltd.